• Title/Summary/Keyword: Geometric error

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A New Approach to Reduce Geometric Error in FIB Fabrication of Micro Structures (집속이온빔을 이용한 미세구조물 가공의 형상정밀도 향상)

  • Kim K.S.;Jung J.W.;Min B.K.;Lee S.J.;Park C.W.;Lee J.H.
    • Proceedings of the Korean Society of Precision Engineering Conference
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    • 2005.06a
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    • pp.1186-1189
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    • 2005
  • Focused Ion Beam machining is an attractive approach to produce nano-scale 3D structures. However, like other beam-based manufacturing processes, the redeposition of the sputtered material during the machining deteriorates the geometric accuracy of ion beam machining. In this research a new approach to reduce the geometric error in FIB machining is introduced. The observed redeposition phenomena have been compared with existing theoretical model. Although the redeposition effect has good repeatability the prediction of exact amount of geometric error in ion beam machining is difficult. Therefore, proposed method utilizes process control approach. Developed algorithm measures the redeposition amount after every production cycle and modifies next process plan. The method has been implemented to a real FIB machine and the experimental results demonstrated considerable improvement of five micrometer-sized pocket machining.

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Analytical Sensitivity Analysis of Geometric Errors in a Three-Axis Machine Tool (해석적 방법을 통한 3 축 공작기계의 기하학적 오차 민감도 분석)

  • Park, Sung-Ryung;Yang, Seung-Han
    • Transactions of the Korean Society of Mechanical Engineers A
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    • v.36 no.2
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    • pp.165-171
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    • 2012
  • In this paper, an analytical method is used to perform a sensitivity analysis of geometric errors in a three-axis machine tool. First, an error synthesis model is constructed for evaluating the position volumetric error due to the geometric errors, and then an output variable is defined, such as the magnitude of the position volumetric error. Next, the global sensitivity analysis is executed using an analytical method. Finally, the sensitivity indices are calculated using the quantitative values of the geometric errors.

Algorithm of Thermal Error Compensation for the Line Center - System Interface - (CNC공작기계의 열변형 오차보정 (II) - 알고리즘 및 시스템 인터폐이스 중심 -)

  • 이재종;최대봉;박현구;류길상
    • Proceedings of the Korean Society of Machine Tool Engineers Conference
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    • 2002.10a
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    • pp.417-422
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    • 2002
  • One of the major limitations of productivity and quality in metal cutting is the machining accuracy of machine tools. The machining accuracy is affected by geometric errors, thermally-induced errors, and the deterioration of the machine tools. Geometric and thermal errors of machine tools should be measured and compensated to manufacture high quality products. In metal cutting, the machining accuracy is more affected by thermal errors than by geometric errors. In this study, the compensation device and temperature-based algorithm have been implemented on the machining center in order to compensate thermal error of machine tools under the real-time. The thermal errors are predicted using the neural network and multi-regression modeling methods. In order to compensate thermal characteristics under several operating conditions, experiments performed with five gap sensors and manufactured compensation device on the horizontal machining center.

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문형 5축 머시닝센터의 기하학적 오차해석 및 가상가공 시스템 개발

  • 윤태선;조재완;곽병만
    • Proceedings of the Korean Society of Precision Engineering Conference
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    • 1995.10a
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    • pp.830-835
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    • 1995
  • To quickly determine the effect of the substitute component on the machine's performance is very important in the defign and the manufacturing processes. And minimizing machine cost and maximizing machine quality mandata predictability of machine accuracy. In the study, in order to evaluate the effects of the component's geometric errors and dimensions on the machining accuracy of gantry-type 5-axis machining centers, a geometric error analysis and virtual manufacturing system is developed based on the mathematical model for the shape generation motion of machine tool considering the component's geometric errors and dimensions, the solid modeling techniques and so on.

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NC Technology for High-Precision Machining in Machining Centers (머시닝센터에서 고정밀 가공을 위한 NC 기술)

  • 정성종
    • Proceedings of the Korean Society of Precision Engineering Conference
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    • 1994.10a
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    • pp.748-754
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    • 1994
  • This paper deals with a geometric error simulator, measurement and inspection of workpiece errors on the machine tools, and identification and compensation methodology of thermal errors in machining centers. In order to raise the machining accuracy of workpieces a measurement and inspection system on the machine tool is developed. By using MPPGT module Manual and CNC type CMMs are realized on the machining centers. To compensate for geometric and thermal deformation errors of machining centers, a real time and an off line geometric adaptive control system were developed on the machining centers. A vertical and a horizontal machining center equipped with FANUC 0MC were used for experiments. Performance of the systems were confirmed with a large amount of experiment.

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Error Estimation for the Semi-Analytic Design Sensitivity Using the Geometric Series Expansion Method (기하급수 전개법을 이용한 준해석 민감도의 오차 분석)

  • Dan, Ho-Jin;Lee, Byung-Chai
    • Transactions of the Korean Society of Mechanical Engineers A
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    • v.27 no.2
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    • pp.262-267
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    • 2003
  • Error of the geometric series expansion method for the structural sensitivity analysis is estimated. Although the semi-analytic method has several advantages, accuracy of the method prevents it from practical application. One of the promising remedies is the use of geometric series formula for the matrix inversion. Its result of the sensitivity analysis converges that of the global difference method which is known as reliable one. To reduce computational efforts and to obtain reliable results, it is important to know how many terms need to expand. In this paper, the error formula is presented and Its usefulness is illustrated through numerical experiments.

New Design of Cylindrical Capacitive Sensor for On-line Precision Control of AMB Spindles (자기베어링의 실시간 정밀제어를 위한 원통형 정전용량 변위센서의 새로운 설계)

  • Jeon, Soo;Ahn, Hyeong-Joon;Han, Dong-Chul
    • Proceedings of the KSME Conference
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    • 2000.11a
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    • pp.548-553
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    • 2000
  • A new design of cylindrical capacitive sensor(CCS) for the displacement measurement of precision active magnetic bearing(AMB) spindle is presented in this paper. This research is motivated by the problem that existing 4-segment CCS is still sensitive to the $3^{rd}$ harmonic component of the geometric errors of a rotor. The procedure of designing new CCS starts from the modeling and error analysis of CCS. The angular size of CCS is set up as a design parameter, and new 8-segment CCS is introduced to possess an arbitrary angular size. The optimum geometry of CCS to minimize the effect of geometric errors is determined through minimum norm approach. Experimental results with test rotors have confirmed the improvement in geometric error suppression.

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A Study on the Geometric Error Prediction of Workpiece in Turning (선삭가공에서 공작물의 형상오차 예측에 관한 연구)

  • Lee, Mun-Jae;Kim, Dong-Hyeon;Lee, Choon-Man
    • Journal of the Korean Society of Manufacturing Process Engineers
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    • v.10 no.6
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    • pp.9-15
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    • 2011
  • Any relative deformation between the cutting tool and the workpiece at machining point results directly in geometric and dimensional errors. The sources of relative deformations between the cutting tool and the workpiece at the contact point may be due to vibration, thermal deformation and cutting forces. In this paper, geometric error prediction of workpiece in turning has been investigated. To reach this goal, turning experiments are carried out according to selected cutting conditions. The variable cutting conditions are cutting speed, depth of cut and feed rate. The results will be useful as a guidance to select cutting conditions to improve the geometrical accuracy.

A Study on the Analysis of Error Sources and Error Compensation in Machine Tools (공작기계 오차 요인의 분석 및 보정에 관한 연구)

  • Kim, Ki-Hwan;Youn, Jae-Woong
    • Journal of the Korea Convergence Society
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    • v.8 no.5
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    • pp.185-192
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    • 2017
  • Machine tool errors can be divided into geometric error, thermal deformation error, and machining error. In this study, the influence of each error on the total error and the relative size of each error are quantitatively analyzed in 2D machining. The thermal deformation error and the machining error caused a relatively large error compared to the geometric error, which is directly related to the machining accuracy. In order to eliminate the error factors, the possibility of error compensation was examined by analyzing the measured error profile shape. As a result, about 40 ~ 50% error compensation was achieved for each error factor. Through this study, it is possible to construct a basic data base on machining, and it is expected that it will be able to compensate the machining error from the viewpoint of users.

Estimation of Geometric Error Sources of Suspension Bridge using Survey Data (측량 데이터를 이용한 현수교의 형상오차 원인 추정)

  • Park, Yong Myung;Cho, Hyun Jun;Cheung, Jin Hwan;Kim, Nam Sik
    • Journal of Korean Society of Steel Construction
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    • v.19 no.3
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    • pp.313-321
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    • 2007
  • The study discussed in this paper presents a method of estimating sources of geometric errors in suspension bridges in use, based on geometric survey data. A geometric error is defined as the difference between the survey data and the design geometry of a main cable. It is assumed that the geometric error in a suspension bridge is caused by the variations in the weight of the stiffening girder and the deformation of the anchorage foundations due to the creep of soil. The variations in the girder weight and the deformation of the foundation were estimated by constructing a matrix of factors that affect suspension bridges due to the variations. To check the validity of the proposed method, it was applied to the Kwang-An Bridge, and the sources of geometric errors in the bridge were estimated using the survey data.