• Title/Summary/Keyword: Gas processing system

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Monitoring of the Carbon Emission and Energy Consumption of CVD and Etcher for Semiconductor Manufacturing (반도체 제조용 CVD 및 Etcher 장비의 탄소배출량과 에너지 소비량 모니터링)

  • Ko, Dong Guk;Bae, Sung Woo;Kim, Kwang Sun;Im, Ik-Tae
    • Journal of the Semiconductor & Display Technology
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    • v.12 no.3
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    • pp.19-22
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    • 2013
  • The purpose of this study is to develop a system that can monitor the amounts of energy consumption during CVD and etching process for semiconductor manufacturing. Specifically, this system is designed to measure the $CO_2$ emission amounts quantitatively by measuring the flow rate of gas used and amount of power consumed during the processes. The processes of CVD equipment can be classified generally into processing step and cleaning step and all the two steps were monitored. In CVD and etcher equipments, various gases including Ar and $O_2$ are used, but Ar, $O_2$ and He were monitored with the use of the LCI data of Korea Environmental Industry & Technology Institute and carbon emission coefficients of EcoInvent. As a result, it was found that the carbon emission amounts of CVD equipment for Ar, $O_2$ and He were $0.030kgCO_2/min$, $4.580{\times}10^{-3}kgCO_2/min$ and $6.817{\times}10^{-4}kgCO_2/min$, respectively and those of etcher equipment for Ar and $O_2$ are $5.111{\times}10^{-3}kgCO_2/min$ and $7.172kgCO_2/min$, respectively.

A Study on the Conservation of Library Materials (도서관자료(圖書館資料) 보존(保存)에 관한 연구(硏究))

  • Kweon, Kie-Won
    • Journal of the Korean BIBLIA Society for library and Information Science
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    • v.6 no.1
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    • pp.179-213
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    • 1984
  • The history of recording and conserving for maintenance the human's memory from ancient times to modern's has brought about a lot of changing process of the recorded information media with developing in culture, and each society has made important recorded materials in his library as essentially the social apparatus. But most of them that were damaged by factors of the natural disaster, humidity, temperature, light, fungi and insects in the library, and were resulted in deterioration and losing the numerous materials. For removing the inevitable phases repeated, there are studying for counterplan of the fundamental environment factors about preservation, restoration and chemical research of materials in advanced countries, but I get a few researches about protecting the cultural properties. Therefore I research the survey of the actual conditions on 72 university libraries centering around them, and then I have researched the collection rate 81 percent, 58 university libraries. (local : 35, in seoul : 23) As the result of this research, I propose the model of the environment factors of conserving the library materials. 1) To apply the equipment of processing the radiant energy to the new construction and buildings. 2) To remove factors that occur fungi and insects by facilities being controlled relative humility, temperature, and to equip the ventilation arrangement in the library. 3) To shelve all acquired and bound materials after proceeding the vacuum fumigator. 4) Those who want to enter into the library stack were surely taken in sterilzing their hands and shoes, and must put on the gown. 5) To use the vacuum dusting thing (machine) for removing the dust without spreading out the floor of the library at any time. 6) To set up the gas automatic fire extinguisher worked by smoke sensor. 7) To assist the research into the preservation, natures and environment of recorded materials, and to supply financial funds for librarian. 8) To hold regularly the workshop be able to educate the methods of preservation materials by the constant system. (Library Association) 9) To add to responsibilities on certification of preservation materials for librarian. 10) To hold the constant committee system in each library. 11) To keep up with the ideal environment (humidity, temperature, light, ventilation, etc.) of preservation materials in the arrangement room, and to put on the gown.

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Evaluation Using Dynamic Characteristic of Steel Structures under Periodical Impact Loads (주기적 충격하중을 받는 강 구조물의 구조건전성 평가)

  • Kim, Kang Seok;Nah, Hwan Seon;Lee, Hyeon Ju;Lee, Kang Min;Yoo, Kyung Seok
    • Journal of the Korea institute for structural maintenance and inspection
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    • v.15 no.1
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    • pp.120-128
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    • 2011
  • Recently, safety diagnosis of the existing structures has been emerged as important issue. In particular, systematical and precise safety diagnostics for steel structures for power substation, have been required. Steel structures for power substation are under the periodical impact loads from operations of gas insulated switchgear. These loading condition accelerates damage and aging of structure. The objective of this research is to evaluate damage of structure under periodical impact loads. To evaluate the integrity of structures as organizing mathematical models including the dynamic characteristics of structures, Frequency Domain Decomposition method was choiced and an algorism was proposed. For verifying this methods and algorism, a mathematical model is composed of the development of a variety of reverse analysis and a signal processing technology reflecting physical damage of structures. A series of analysis and test results indicatge that proposed method has a confidence for applying a filed test. Therefore, it is expected to be able to take advantage of system identification to detect damage for the maintenance and management of steel structures under periodical impact loads such as power substation.

Structure and Thermal Conductivity of Thermal Barrier Coatings in Lanthanum/Gadolinium Zirconate System Fabricated via Suspension Plasma Spray (서스펜션 플라즈마 용사로 제조된 란타눔/가돌리늄 지르코네이트 열차폐코팅의 구조와 열전도도 특성)

  • Kwon, Chang-Sup;Lee, Sung-Min;Oh, Yoon-Suk;Kim, Hyung-Tae;Jang, Byung-Koog;Kim, Seongwon
    • Journal of the Korean institute of surface engineering
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    • v.47 no.6
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    • pp.316-322
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    • 2014
  • With increase in demand for higher operating temperatures of gas turbines, extensive research efforts have been carried out to enhance the performance of thermal barrier coatings (TBCs) in the field of coating processing as well as materials. In this study, thermal barrier coatings in lanthanum/gadolinium zirconate system, which is one of the most promising candidates for replacing yttira-stabilized zirconia (YSZ) in thermal barrier coating applications, are fabricated via suspension plasma spray. Dense, $300{\sim}400{\mu}m$ thick coatings of fluoritephase zirconate with modest amount of segmented microstructures are obtained by using suspension plasma spray with suspensions of planetary-milled mixture between lanthanum and/or gadolinium oxide and nano zirconia. These coatings exhibit thermal conductivities of 1.6 ~ 1.7 W/mK at $1000^{\circ}C$, which is relatively lower than that of YSZ.

Preparation of Photocurable Slurry for DLP 3D Printing Process using Synthesized Yttrium Oxyfluoride Powder (합성 불산화 이트륨 분말을 이용한 DLP 3D 프린팅용 광경화성 슬러리 제조)

  • Kim, Eunsung;Han, Kyusung;Choi, Junghoon;Kim, Jinho;Kim, Ungsoo
    • Korean Journal of Materials Research
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    • v.31 no.9
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    • pp.532-538
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    • 2021
  • In this study, a spray dryer is used to make granules of Y2O3 and YF3, and then Y5O4F7 is synthesized following heat treatment of them under Ar gas atmosphere at 600 ℃. Single and binary monomer mixtures are compared and analyzed to optimize photocurable monomer system for DLP 3D printing. The mixture of HEA and TMPTA at 8:2 ratio exhibits the highest photocuring properties and low viscosity with shear thinning behavior. The optimized photocurable monomer and synthesized Y5O4F7 are therefore mixed and applied to printing process at variable solid contents (60, 70, 80, & 85 wt.%) and light exposure times. Under optimal light exposure conditions (initial exposure time: 1.2 s, basic exposure time: 5 s), YOF composites at 60, 70 & 80 wt.% solid contents are successfully printed. As a result of measuring the size of the printed samples compared to the dimensions of the designed bar type specimen, the deviation is found to increase as the YOF solid content increases. This shows that it is necessary to maximize the photocuring activity of the monomer system and to optimize the exposure time when printing using a high-solids ceramic slurry.

Implementation of Low Frequency Welding Pre-heating System Using Induction Heating (유도가열 기법을 이용한 저주파 용접예열 시스템 구현)

  • Yang, Juyeong;Kim, Soochan;Park, Junmo
    • Journal of the Institute of Convergence Signal Processing
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    • v.19 no.2
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    • pp.61-67
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    • 2018
  • Welding preheating means that the surface of the base material to which the metal is welded before the main welding is heated to a constant temperature. It prevents the cracks of the adjacent influences such as reduction of material hardening degree by controlling the cooling rate, suppression of segregation of impurities, prevention of thermal deformation, and moisture removal. For this reason, it is a necessary operation for high quality welding. Induction heating is an efficient heating method that converts electric energy into heat energy by applying electromagnetic induction phenomenon. Compared with combustion heat generated by gas and liquid, it is clean, stable, and economical as well as rapid heating. It can be heated regardless of the shape, depth and material of the heating body by modifying the shape of the frequency and the coil with a simple structure. In this paper, we implemented a low frequency welding preheating system using induction heating technique and observed the temperature changes of coil resistance, inductance and automotive transmission parts according to the height of each transmission in winding coil for three kinds of automotive transmission parts. We confirmed that the change of current is a very important factor in the low frequency heating.

Cu2ZnSn(S,Se)4 Thin Film Solar Cells Fabricated by Sulfurization of Stacked Precursors Prepared Using Sputtering Process

  • Gang, Myeng Gil;Shin, Seung Wook;Lee, Jeong Yong;Kim, Jin Hyeok
    • Proceedings of the Korean Vacuum Society Conference
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    • 2013.08a
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    • pp.97-97
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    • 2013
  • Recently, Cu2ZnSn(S,Se)4 (CZTSS), which is one of the In- and Ga- free absorber materials, has been attracted considerable attention as a new candidate for use as an absorber material in thin film solar cells. The CZTSS-based absorber material has outstanding characteristics such as band gap energy of 1.0 eV to 1.5 eV, high absorption coefficient on the order of 104 cm-1, and high theoretical conversion efficiency of 32.2% in thin film solar cells. Despite these promising characteristics, research into CZTSS based thin film solar cells is still incomprehensive and related reports are quite few compared to those for CIGS thin film solar cells, which show high efficiency of over 20%. I will briefly overview the recent technological development of CZTSS thin film solar cells and then introduce our research results mainly related to sputter based process. CZTSS thin film solar cells are prepared by sulfurization of stacked both metallic and sulfide precursors. Sulfurization process was performed in both furnace annealing system and rapid thermal processing system using S powder as well as 5% diluted H2S gas source at various annealing temperatures ranging from $520^{\circ}C$ to $580^{\circ}C$. Structural, optical, microstructural, and electrical properties of absorber layers were characterized using XRD, SEM, TEM, UV-Vis spectroscopy, Hall-measurement, TRPL, etc. The effects of processing parameters, such as composition ratio, sulfurization pressure, and sulfurization temperature on the properties of CZTSS absorber layers will be discussed in detail. CZTSS thin film solar cell fabricated using metallic precursors shows maximum cell efficiency of 6.9% with Jsc of 25.2 mA/cm2, Voc of 469 mV, and fill factor of 59.1% and CZTS thin film solar cell using sulfide precursors shows that of 4.5% with Jsc of 19.8 mA/cm2, Voc of 492 mV, and fill factor of 46.2%. In addition, other research activities in our lab related to the formation of CZTS absorber layers using solution based processes such as electro-deposition, chemical solution deposition, nano-particle formation will be introduced briefly.

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A Framework for Digitalizing Handwritten Document using Digital Pen and Handwriting Recognition Technology (디지털펜과 필기체인식 기술을 이용한 수기문서 전자화 프레임워크)

  • Son, Bong-Ki;Kim, Hak-Joon
    • Journal of the Korea Academia-Industrial cooperation Society
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    • v.12 no.3
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    • pp.1417-1426
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    • 2011
  • Business still relies heavily on pen and paper for legal reasons or convenience. The handwritten document is to be converted into digitalized document for IT system to manage and process in real time. Because the previous document digitalization systems convert the handwritten documents into digitalized documents by scanning and post-processing the documents, it is difficult to seamlessly proceed the work process. This paper proposes the LiveForm, a framework for digitalizing handwritten document using digital pen and handwriting recognition technology. To prove the applicability of the proposed LiveForm, we also implement a LiveForm based service in industrial gas distribution process and analyze effects of the system. The LiveForm generates the same digital image as the handwritten document by writing up the paper with absolute coordinates by digital pen and converts the handwriting data to digital text to insert the information into back-end system. The LiveForm based system eliminates scanning for document digitalization and data input with keyboard into back-end system in paper-based information gathering. Therefore, it is possible for the LiveForm to improve work process in various business areas.

Investigation and Processing of Seismic Reflection Data Collected from a Water-Land Area Using a Land Nodal Airgun System (수륙 경계지역에서 얻어진 육상 노달 에어건 탄성파탐사 자료의 고찰 및 자료처리)

  • Lee, Donghoon;Jang, Seonghyung;Kang, Nyeonkeon;Kim, Hyun-do;Kim, Kwansoo;Kim, Ji-Soo
    • The Journal of Engineering Geology
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    • v.31 no.4
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    • pp.603-620
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    • 2021
  • A land nodal seismic system was employed to acquire seismic reflection data using stand-alone cable-free receivers in a land-river area. Acquiring reliable data using this technology is very cost effective, as it avoids topographic problems in the deployment and collection of receivers. The land nodal airgun system deployed on the mouth of the Hyungsan River (in Pohang, Gyeongsangbuk Province) used airgun sources in the river and receivers on the riverbank, with subparallel source and receiver lines, approximately 120 m-spaced. Seismic data collected on the riverbank are characterized by a low signal-to-noise (S/N) and inconsistent reflection events. Most of the events are represented by hyperbola in the field records, including direct waves, guided waves, air waves, and Scholte surface waves, in contrast to the straight lines in the data collected conventionally where source and receiver lines are coincident. The processing strategy included enhancing the signal behind the low-frequency large-amplitude noise with a cascaded application of bandpass and f-k filters for the attenuation of air waves. Static time delays caused by the cross-offset distance between sources and receivers are corrected, with a focus on mapping the shallow reflections obscured by guided wave and air wave noise. A new time-distance equation and curve for direct and air waves are suggested for the correction of the static time delay caused by the cross-offset between source and receiver. Investigation of the minimum cross-offset gathers shows well-aligned shallow reflections around 200 ms after time-shift correction. This time-delay static correction based on the direct wave is found essential to improving the data from parallel source and receiver lines. Data acquisition and processing strategies developed in this study for land nodal airgun seismic systems will be readily applicable to seismic data from land-sea areas when high-resolution signal data becomes available in the future for investigation of shallow gas reservoirs, faults, and engineering designs for the development of coastal areas.

Risk Management for Ammonia Unloading and Storage Tank Facility (암모니아 입하 및 저장시설에서의 위험도 관리)

  • Jeong, Yun Seo;Woo, In Sung;Lim, Jong Woo
    • Journal of the Korean Institute of Gas
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    • v.21 no.5
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    • pp.95-103
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    • 2017
  • A lot of hazardous materials have been used for product processing and utility plant. Many accidents including toxic release, fire and explosions occur in the ammonia related facility and plant. Various safety and environment management program including PSM, SMS, ORA etc. are being implemented for risk management and accident prevention in the production industry. Also much study and research have been carried about risk assessment of accident scenario in the academic and research area. In this paper, firstly risk level was assessed by using a typically used KORA program and LOPA PFD method for the selected ammonia unloading and storage facility. And then risk reduction measures for the risk assessed facility were studied in 3 aspects and some measures were proposed. Those Risk Reduction measures are including a leak detection and emergency isolation, water spray, dilution tank, dike and trench, scattering protection in hardware impovement aspect, and a applicable risk criteria, conditional modifier for existing LOPA PFD, alternative supporting modeling program in risk estimation methodology aspect, and last RBPS(Risk Based Process Safety) program, re-doing of process hazard analysis, management system compliance audit in managerial activity aspect.