Monitoring of the Carbon Emission and Energy Consumption of CVD and Etcher for Semiconductor Manufacturing |
Ko, Dong Guk
(Department of Mechanical Engineering, Graduate School, Chonbuk National University)
Bae, Sung Woo (Department of Mechanical Design Engineering, Graduate School, Chonbuk National University) Kim, Kwang Sun (Department of Mechatronics Engineering, Korea University of Technology and Education) Im, Ik-Tae (Department of Mechanical Design Engineering, College of Engineering, Chonbuk National University) |
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