Browse > Article

Monitoring of the Carbon Emission and Energy Consumption of CVD and Etcher for Semiconductor Manufacturing  

Ko, Dong Guk (Department of Mechanical Engineering, Graduate School, Chonbuk National University)
Bae, Sung Woo (Department of Mechanical Design Engineering, Graduate School, Chonbuk National University)
Kim, Kwang Sun (Department of Mechatronics Engineering, Korea University of Technology and Education)
Im, Ik-Tae (Department of Mechanical Design Engineering, College of Engineering, Chonbuk National University)
Publication Information
Journal of the Semiconductor & Display Technology / v.12, no.3, 2013 , pp. 19-22 More about this Journal
Abstract
The purpose of this study is to develop a system that can monitor the amounts of energy consumption during CVD and etching process for semiconductor manufacturing. Specifically, this system is designed to measure the $CO_2$ emission amounts quantitatively by measuring the flow rate of gas used and amount of power consumed during the processes. The processes of CVD equipment can be classified generally into processing step and cleaning step and all the two steps were monitored. In CVD and etcher equipments, various gases including Ar and $O_2$ are used, but Ar, $O_2$ and He were monitored with the use of the LCI data of Korea Environmental Industry & Technology Institute and carbon emission coefficients of EcoInvent. As a result, it was found that the carbon emission amounts of CVD equipment for Ar, $O_2$ and He were $0.030kgCO_2/min$, $4.580{\times}10^{-3}kgCO_2/min$ and $6.817{\times}10^{-4}kgCO_2/min$, respectively and those of etcher equipment for Ar and $O_2$ are $5.111{\times}10^{-3}kgCO_2/min$ and $7.172kgCO_2/min$, respectively.
Keywords
Energy consumption monitoring; Carbon emission; CVD; Etcher; $CO_2$; Carbon emission factor;
Citations & Related Records
연도 인용수 순위
  • Reference
1 Ko, Seung Jong, KSIA Activities in WSC ESH TF, Global GHG Regulatory & Technology Trend Seminar, Feb. 7. 2012, Conference Center COEX, Seoul Korea, pp.5-16, 2012.
2 Lee, Min Young, The Greenhouse Gas Reduction Policy in Korea, Global GHG Regulatory & Technology Trend Seminar, Feb. 7. 2012, Conference Center COEX, Seoul Korea, pp. 17-32, 2012.
3 SEMI S23-0708, Guide for Conservation of Energy, Utilities and Materials used by Semiconductor Manufacturing Equipment, SEMI, 2008.
4 SEMI S23 Application Guide and Total Equivalent Energy (TEE) CalcII User's Guide, Technology Transfer #06094783D-ENG, Oct. 29. 2010, International SEMATECH Manufacturing Initiative, 2010.
5 LabView is a name of the product of National Instrument Corporation, 11500 N Mopac Expwy Austin, TX 78759-3504, 2010.
6 National LCI database network by Korea Environmental Industry & Technology Institute, http://edp.or.kr/lcidb/about/about_tinfo.asp.
7 Ecoinvent, Swiss Center for Life Cycle Inventories, ESU-services, ifu Hamburg GmbH, 2000.