• Applied Science and Convergence Technology
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• 제23권4호
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• pp.169-178
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• 2014

Fluid model based numerical analysis is done to simulate a low damage etch back system for 20 nm scale semiconductor fabrication. Etch back should be done conformally with very high material selectivity. One possible mechanism is three steps: reactive radical generation, adsorption and thermal desorption. In this study, plasma generation and transport steps are analyzed by a commercial plasma modeling software package, CFD-ACE+. Ar + $CF_4$ ICP was used as a model and the effect of reactive gas inlet position was investigated in 2D and 3D. At 200~300 mTorr of gas pressure, separated gas inlet scheme is analyzed to work well and generated higher density of F and $F_2$ radicals in the lower chamber region while suppressing ions reach to the wafer by a double layer conducting barrier.

• 천문학회보
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• 제36권2호
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• pp.56.1-56.1
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• 2011

We investigate the hydrodynamics of gas clouds in the central few hundred parsecs of the Galaxy. Non-axisymmetry (elongation) of the Galactic bulge can form a reservoir of dense molecular clouds at around two hundred parsecs from the center through the X1-X2 orbit transfer, and the star formation that has been sustained for the lifetime of the galaxy can build up a nuclear bulge there. If the nuclear bulge is elongated, this again can transport the gas there down to the central few parsecs region. We perform a series of 3-D hydrodynamic simulations that consider a potential for this "nested bar", cooling/heating, star formation and supernova feedback, and estimate the efficiency of the gas inflow down to the central parsec region.

• 한국입자에어로졸학회지
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• 제14권2호
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• pp.41-47
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• 2018

Numerical analysis was conducted to characterize particle deposition onto a heated horizontal semiconductor wafer in vacuum environment. In order to calculate the properties of gas surrounding the wafer, the gas was assumed to obey the ideal gas law. Particle transport mechanisms considered in the present study were convection, Brownian diffusion, gravitational settling and thermophoresis. Averaged particle deposition velocities on the upper surface of the wafer were calculated with respect to particle size, based on the numerical results from the particle concentration equation in the Eulerian frame of reference. The deposition velocities were obtained for system pressures of 1000 Pa~1 atm, wafer heating of 0~5 K and particle sizes of $2{\sim}10^4nm$. The present numerical results showed good agreement with the available experimental ones.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2001년도 추계학술대회 논문집
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• pp.613-616
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• 2001

This $SF_{6}$ gas is widely used in industrial of insulation field. In this paper, $N_2$ is mixed to improve pure $SF_{6}$ gas characteristics. Electron transport coefficients in $SF_{6}$-$N_2$ mixture gases are simulated in range of E/N values from 70 to 400 [Td] at 300K and 1 Torr by using Boltzmann equation method. The results of this method, which are like electron drift velocity, ionization coefficient, attachment coefficient, effective ionization coefficient, and critical E/N, can be important data to present characteristic of gas for insulation. Specially critical E/N is a data to evaluate insulation strength of a gas and is presented in this paper for various mixture ratios of $SF_{6}$-$N_2$ mixture gases.

• 천문학회지
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• 제9권1호
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• pp.1-6
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• 1976

The translational and reactive parts of thermal conductivity of a partially ionized solar magneto-plasma gas have been calculated based on Yun and Wyller's formulation (1972) along with Devoto's theory(1968). The computed results are presented as functions of temperature and pressure for given magnetic field strengths. The results of the calculations show that for most photospheric conditions the magnetic field does not play any important role in characterizing thermal properties of the ionized gas. However, when the gas pressure is low(e.g., P<10 dynes/$cm^2)$) the field becomes extremely effective even if its strength is quite small (e.g., B<0.1 gauss). The reactive part of the thermal transport is found to be very important when the gas is undertaking active ionization.

• 한국가스학회지
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• 제8권3호
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• pp.43-51
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• 2004

GMS(generalized Maxwell Stefan) 모형을 이용하여 나노기공성 TPABr (Tetrapropylammoniumbromide) templating 실리카/알루미나 복합막에서 $CO_2$와 $N_2$의 투과 및 분리 특성을 해석하였다. 담체로 쓰이는 메조포러스 알루미나 지지체에서의 기체 투과는 누슨 확산 (Knudsen diffusion) 및 점성 확산 (viscous diffusion 혹은 Poiseuille flow)에 의존하였으며, 이러한 투과메커니즘은 DGM (dusty gas model)을 통하여 규명할 수 있었다. 본 연구에 사용한 복합막의 분리 특성을 결정 짖는 TPABr templating silica layer의 경우 강한 흡착 특성으로 인하여, 기공 확산보다는 표면 확산(surface diffusion)을 나타내었다. 따라서 GMS 모형을 통해 다성분계의 표면 확산 투과/분리 메커니즘을 성공적으로 해석할 수 있었다. 본 연구에서 사용된 복합무기막에서는 흡착량과 표면 확산 현상이 복합적으로 일어나기 때문에, 강흡착질인 $CO_2$와 비교적 약흡착질인 $N_2$ 혼합물 분리에 있어, $CO_2$의 pore-blocking 현상으로 인해 $CO_2$가 투과 농축되었다.

• 한국신재생에너지학회:학술대회논문집
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• 한국신재생에너지학회 2006년도 춘계학술대회
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• pp.407-409
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• 2006

Geochemical analyses carried out on samples collected from cores on and near the southern smit of Hydrate Ridge have advanced understanding by providing a clear contrast of the two major modes of marine gas hydrate occurrence. High concentrations (15%-40% of pore space) of gas hydrate occurring at shallow depths (0-40 mbsf) on and near the southern summit are fed by gas migrating from depths of as much as 2km within the accretionary prism. This gas carries a characteristic minor component of C2-C5 thermogenic hydrocarbons that enable tracing of migration pathways and may stabilize the occurrence of some structure II gas hydrate. A structure II wet gas hydrate that is stable to greater depths and temperatures than structure I methane hydrate may account for the deeper, faint second bottom simulating reflection (BSR2) that occurs on the seaward side of the ridge. The wet gas is migrating In an ash/turbidite layer that intersects the base of gas hydrate stability on the seaward side of and directly beneath the southern summit of Hydrate Ridge. The high gas saturation (>65%) of the pore space within this layer could create a two-phase (gas + solid) system that would enable free gas to move vertically upward through the gas hydrate stability zone. Away from the summit of the ridge there is no apparent influx of the gas seeping from depth and sediments are characterized by the normal sequence of early diagenetic processes involving anaerobic oxidation of sedimentary organic matter, initially linked to the reduction of sulfate and later continued by means of carbonate reduction leading to the formation of microbial methane.

• 한국연소학회지
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• 제12권1호
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• pp.38-47
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• 2007

The diversification of import districts of natural gas is trying to prepare an increase in the demand and price. The interchangeability of natural gases should be examined prior to supply to gas appliances, although compositional differences among natural gases are not large. The object of this study is to investigate numerically the thermodynamic and transport properties as well as information on combustion of 6 natural gases. Comparing the properties of BOG1 with those of standard gas, the maximum differences of heating value, Wobbe index, air-fuel ratio, and specific heat are 10%, 4%, 10% and 5.54%, respectively. That is, the BOG1 is required careful application. However, all gases except for BOG1 show the similar properties with standard gas. Finally, the combustion information such as flame temperature and burning velocity are examined. These results will provide the useful information related to the interchangeability of various natural gases in practical combustion appliances.

• 한국신재생에너지학회:학술대회논문집
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• 한국신재생에너지학회 2009년도 추계학술대회 논문집
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• pp.549-552
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• 2009

Methane hydrate is crystalline ice-like compounds which formed methane gas enters within water molecules composed cavity at specially temperature and pressure condition, and water molecule and each other from physically-bond. $1m^3$ hydrate of pure methane can be decomposed to the maximum of $172m^3$ at standard condition. If these characteristics of hydrate are reversely utilized, natural gas is fixed into water in the form of hydrate solid. Therefore the hydrate is considered to be a great way to transport and store natural gas in large quantity. Especially the transportation cost is known to be 18~24% less than the liquefied transportation. However, when methane hydrate is formed artificially, the amount of consumed gas is relatively low due to a slow reaction rate between water and methane gas. In this study, for the better hydrate reaction rate, there is make nano fluid using ultrasonic dispersion of carbon nano tube. and then, Experiment with hydrate formation by nano fluid and methane gas reaction. The results show that when the carbon nano tubes of 0.004 wt% was added to pure water, the amount of consumed gas was about 300% higher than that in pure water and the hydrate formation time decreased.

• 폴리머
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• 제26권2호
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• pp.245-252
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• 2002

상용화제로 poly(styrene-b-methylmethacrylate) [U(S-b-MMA)] 블록 공중합체를 포함한 polymethylmethacrylate (PMMA)와 polyvinylmethylether (PVME) 블렌드의 열역학적 특성과 이들의 기체 투과특성을 조사하였다. 블렌드에 포함된 여러 고분자들 간의 상호작용 에너지를 상분리 온도와 상태방정식 이론으로부터 구하기 위해 다양한 조성의 poly(styrene-co-methylmetha-crylate) (SMMA) 랜덤 공중합체를 제조하고 이를 PVME와 블렌드하여 단상의 블렌드를 제조하였다. 공중합체 내의 스티렌 함량이 70 wt% 이상에서는 SMMA/PVME 블렌드는 단상을 형성할 뿐아니라 LCST 거동을 나타내었다. 여기서 구한 상호작용 에너지를 기초로 PMMA/PVME 블렌드의 상용성을 향상시키기 위해 P(S-b-MMA) 블록 공중합체를 상용화제로 첨가하였다. 분산상으로 존재하는 PVME 고무 입자들의 평균 크기는 상용화제 첨가량이 5 phr 이하에서는 점차 감소하지만 더 이상의 상용화제를 첨가해도 분산상의 크기 변화는 관찰되지 않았다. 일정 블렌드 조성에서 기체 투과도도 상용화제의 양이 5 phr 일때까지는 증가하지만 그 이상의 상용화제 함량에서는 기체 투과도 변화가 관찰되지 않았다.