• 한국재료학회지
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• 제22권11호
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• pp.609-614
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• 2012

We report on the NO gas sensing properties of non-directional ZnO nanofibers synthesized using a typical electrospinning technique. These non-directional ZnO nanofibers were electrospun on an $SiO_2$/Si substrate from a solution containing poly vinyl alcohol (PVA) and zinc nitrate hexahydrate dissolved in distilled water. Calcination processing of the ZnO/PVA composite nanofibers resulted in a random network of polycrystalline ZnO nanofibers of 50 nm to 100 nm in diameter. The diameter of the nanofibers was found to depend primarily on the solution viscosity; a proper viscosity was maintained by adding PVA to fabricate uniform ZnO nanofibers. Microstructural measurements using scanning electron microscopy revealed that our synthesized ZnO nanofibers after calcination had coarser surface morphology than those before calcination, indicating that the calcination processing was sufficient to remove organic contents. From the gas sensing response measurements for various NO gas concentrations in dry air at several working temperatures, it was found that gas sensors based on electrospun ZnO nanofibers showed quite good responses, exhibiting a maximum sensitivity to NO gas in dry air at an operating temperature of $200^{\circ}C$. In particular, the non-directional electrospun ZnO nanofiber gas sensors were found to have a good NO gas detection limit of sub-ppm levels in dry air. These results illustrate that non-directional electrospun ZnO nanofibers are promising for use in low-cost, high-performance practical NO gas sensors.

• 반도체디스플레이기술학회지
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• 제19권2호
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• pp.51-54
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• 2020

To develop gas-distinguishing sensor system, it is highly required to integrate multiple sensors for effective detection of a single targeted gas or mixture of gases. In addition, it is important to collect the reliable data from individual sensors into one integrated measuring device. Collecting the data of toxic gases on the spot should be done without inhalation. We suggest simple wirelessly running system for data collection that guarantees both reliability of data sources and safety. Here, we made a multi-gas measuring instrument(device) combined with Bluetooth module which provides a safe and precise big data accumulation system.

• KIEE International Transactions on Electrophysics and Applications
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• 제2C권6호
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• pp.297-303
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• 2002

We have developed an on-line ultrasonic detector to monitor partial discharge in an operating transformer. The ultrasonic sensor has 150[KHz] resonance frequency and contains a pre-amplifier with 60[㏈] gain. The on-line ultrasonic detector has 50~300[KHz] frequency band-pass filter to remove electrical and mechanical noises from the transformer. This detector has an ultrasonic signal discrimination algorithm which discriminates ultrasonic signals due to partial discharge in a transformer. A moving average method of ultrasonic signal number was employed to effectively monitor the increasing trend of the partial discharge. This paper describes an experience of partial discharge detection in a 154[㎸] operating transformer using an ultrasonic detector. With regards to gas analysis in oil, C2H2 gas was produced with a warning level in this transformer We detected ultrasonic signals on the transformer steel wall, and estimated the position of partial discharge. With further inspection, we found carbonized marks due to partial discharge on the supporting bolt which fastens the windings.

• 세라미스트
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• 제21권2호
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• pp.38-48
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• 2018

This paper reports a comprehensive review of the state-of-the-art in research on the enhancement of sensing properties for the detection of gases in exhaled breath. Daily health monitoring and early diagnosis of specific diseases via the analysis of exhaled breath is possible. Because biomarkers in exhaled breath are emitted in a very small amount, it is necessary to develop highly sensitive gas sensors. In recent years, a number of researches have been carried out using various strategies for the enhancement of sensing properties such as doping, catalyst, hollow sphere, heterojunction, size effect. We introduced each strategy and summarized recent progress on sensing properties for detection of biomarkers in exhaled breath.

• 대한기계학회논문집B
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• 제40권3호
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• pp.149-155
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• 2016

휘발성 유기화합물과 같은 환경유해물질의 조기 검지는 인체 및 환경보호를 위한 중요성을 가진다. 그러나 기존의 모니터링 기술은 많은 시간과 값비싼 장비를 필요로 하고 있다. 본 논문에서는, 무전원으로 작동가능하며, 휴대가 용이하고 빠른 응답속도를 가지는 광결정 기반의 VOC 검출용 박막센서를 제안하였다. 휘발성 유기 화합물은 Polydimethylsiloxane(PDMS)를 팽창시키는 능력을 가지고 있어, 제안된 센서에 휘발성 유기 화합물이 노출되면 PDMS 가 팽창함에 따라 광결정의 구조변화를 가져오므로 색이 변하게 된다. 이러한 원리에 기초하여 휘발성 유기 화합물에 노출되었을 때 가시광선 영역의 정량적 색변화를 통해 검출할 수 있는 환경센서를 구현하였다. 제안된 센서는 수 초 이내의 빠른 반응속도를 보이며, 기체 상태의 휘발성 유기 화합물에도 색 변화를 일으키는 것을 성공적으로 확인하였다.

• 센서학회지
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• 제20권1호
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• pp.1-7
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• 2011

Undoped and Sb-doped $SnO_2$ nanofibers were prepared by electrospinning and their responses to $H_2$, CO, $CH_4$, $C_3H_8$, and $C_2H_5OH$ were measured. In the undoped $SnO_2$ nanofibers, the gas response ($R_a/R_g$, $R_a$: resistance in air, $R_g$: resistance in gas) to 100 ppm $C_2H_5OH$ was very high(33.9), while that to the other gases ranged from 1.6 to 2.2. By doping with 2.65 wt% Sb, the response to 100 ppm $C_2H_5OH$ was decreased to 4.5, whereas the response to $H_2$ was increased to 3.0. This demonstrates the possibility of detecting a high $H_2$ concentration with minimum interference from $C_2H_5OH$ and the potential to control the gas selectivity by Sb doping.

• 센서학회지
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• 제14권5호
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• pp.357-361
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• 2005

Low-stress silicon nitride (LSN) thin films with embedded metal line have been developed as free standing structures to keep microspheres in proper locations and localized heat source for application to a chip-based sensor array for the simultaneous and near-real-time detection of multiple analytes in solution. The LSN film has been utilized as a structural material as well as a hard mask layer for wet anisotropic etching of silicon. The LSN was deposited by LPCVD (Low Pressure Chemical Vapor Deposition) process by varing the ratio of source gas flows. The residual stress of the LSN film was measured by laser curvature method. The residual stress of the LSN film is 6 times lower than that of the stoichiometric silicon nitride film. The test results showed that not only the LSN film but also the stack of LSN layers with embedded metal line could stand without notable deflection.

• 센서학회지
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• 제31권6호
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• pp.389-396
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• 2022

Quartz crystal microbalance (QCM) based sensors are used for various applications owing to advantages such as excellent accuracy and precision, rapid response, and tiny footprint. Traditional applications of QCM-based sensors include biological sensing and thin-film thickness monitoring. Recently, QCMs have been used as functional material for novel physical and chemical detections, and with improved device design. QCM-based sensors are garnering considerable attention in particulate matter sensing and electric nose application. This review covers the challenges and solutions in physical, chemical, and biological sensing applications. First, various physical sensing applications are introduced. Secondly, the toxic gas and chemical detection studies are outlined, focusing on introducing a coating method for uniform sensing film and sensing materials for a minimal damping effect. Lastly, the biological and medical sensing applications, which use the monomolecularly decorating method for biomolecule recognition and a brief description of the overall measuring system, are also discussed.

• 전기전자학회논문지
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• 제19권4호
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• pp.541-547
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• 2015

현재 반도체 제조 공정에서 집적회로의 소자 크기가 점점 작아짐에 따라 플라즈마 식각 공정에서의 식각 종료점 검출이 더 어려워지고 있다. 식각 종료점 검출은 위해서는 반도체 장비에 다양한 종류의 센서를 설치하고 이 센서를 통해 데이터를 얻고 분석해야 한다. 기존의 식각 종료점 검출 방식은 주로 By-product의 OES 데이터를 분석하여 진행되었는데 본 연구에서는 By-product 와 Etchant gas 의 OES 데이터를 함께 분석하여 식각 종료점 검출 결과에 신뢰성을 더 높이고자 하였다. 또한, 데이터 분석을 위해 OES-SNR, PCA, Polynomial Regression, eHMM 등의 기법들을 사용하여 진행하였다.

• 센서학회지
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• 제23권4호
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• pp.266-271
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• 2014

Chemical sensors are used in various industrial facilities such high-risk and prevent the leakage of substances, important in life and environmental protection and the safe use of industry, used for management. In particular, high-temperature environments such as power generation equipment of the rotating part due to leakage generated by the various oil, power plants Shut Down, fire, work environment (exposure to various chemical solution and gas leak) and various water, air and soil pollution causes. Thus, over the long term through various channels such as crops and groundwater contamination caused by the slow, serious adverse effect on the ecosystem. In this paper, synthetic lube oil and high pressure hydraulic fluid leakage and immediately detect a new Printed Electronic implementation of technology-based film-type sensors, and its performance test. Thus, industrial accidents and environmental pollution and for early detection of problems, large accidents can be prevented. Experimental results of the synthetic lube oil and high pressure hydraulic fluid solution after the contact time depending on the experiment and the oil solution of the sensor material of the conductive porous PE resistance value by a chemical reaction could be confirmed that rapid increase. Also implemented in the film-type oil sensor electrical resistance change over time of the reaction rate and the synthetic lube oil is about 2 minutes or less, the high pressure hydraulic fluid is less than about 1 minute was. Therefore, more high-pressure hydraulic fluid such as a low volatility synthetic lube oils are the resistance change and the reaction rate was confirmed to be the slowest.