• The Transactions of the Korean Institute of Electrical Engineers C
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• v.52 no.12
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• pp.579-585
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• 2003

Recently the utilization of the ozone dissolved de-ionized water(DI-O3 water) in semiconductor wet cleaning process to replace the conventional RCA methods has been studied. In this paper, we propose the water-electrode type ozone generator which has the ozone gas characteristics of the high concentration and high purity to produce the high concentration DI-O3 water for the silicon wafer surface cleaning process. The ozone generator has the dual dielectric tube structure of silent discharge type and the water is both used to electrode and cooling water. We investigate the performance of the proposed ozone generator which has the design goal of the concentration of 7[wt%] and ozone generation quantity of 6[g/hr] at flow rate of 1[$\ell$/min). The experiment results show that the water electrode type ozone generator has the characteristics of 8.48[wt%] of concentration, 8.08[g/hr] of generation quantity and 76.2[g/kWh] of yield and it's possible to use the proposed ozone generator for the DI-O3 water cleaning process of silicon wafer surface.

• Journal of the Korea Academia-Industrial cooperation Society
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• v.15 no.10
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• pp.5912-5918
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• 2014

Owing to highly developed industries and the use of fossil fuels, environmental problems becoming becoming pressing issues globally. Therefore, a study of automobile exhaust is urgently needed. Generally, air is sucked into the engine through the intake manifold. The aims of this study were to reduce the exhaust from used cars and increase the output by removing carbon deposits, which are considered a reason for the increasing exhaust and reduction of output, and the reduction of exhaust, variation of output and stability of idle speed were analyzed. The formation of carbon deposits within the suction manifold was investigated through a test device (KD147). In the intake manifold, the exhaust cleaning effect was confirmed.

• Journal of the Korean Society of Manufacturing Process Engineers
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• v.18 no.5
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• pp.1-8
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• 2019

Breath analysis using a portable device is better than the classical breath analysis system in terms of installation and operation. There is an increasing need to develop cost-effective equipment for testing gas sensors from the viewpoint of functionalities that can be applied applicable to portable devices. In the present study, an economical gas chamber for in-situ gas measurement is implemented with a single gas chamber without using expensive gas storage and control equipment; the gas response characteristics are analyzed using the above-described chamber. The main features of the implemented gas chamber are simple injection procedure, improved gas diffusion, easy measurement and cleaning, support for low-power mode measurement function for portable devices, and open source platform. Moreover, an analysis of gas response characteristics based on changes in sensor voltage show that the sensitivity and 90% response time are affected by the sensor voltage. Furthermore, the sensitivity graph has an inflection point in a specific range. The gas sensor applied in this study showed fast response speed and high sensitivity for sensor voltages of 3.0-3.5 V, regardless of the concentration of acetone gas, the target gas used in this study.

• Journal of the Korean Institute of Gas
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• v.15 no.3
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• pp.74-78
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• 2011

$BF_3$ gas has been used for semiconductor manufacturing process and applied in plasma etching, chemical vapor deposition, chamber cleaning processes etc,. $BF_3$ provides Boron and acts as a p-type doping in electrode in semiconductor. In this study, we investigate thermaldecomposition of alkali-boron complexes and suggest a simple way to produce $BF_3$ from $NaBF_4$ and $KBF_4$.

• The Transactions of the Korean Institute of Electrical Engineers C
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• v.48 no.10
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• pp.710-715
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• 1999

The purpose of this work is to develop a high-efficiency air cleaning system for air pollutants such as particulate and gaseous state in indoor environments. In order to enhance a removal efficiency of gaseous state pollutants, we suggested that pulsed discharge plasma be combined with $TiO_2$ photocatalyst (photocatalytic plasma air cleaning unit). We investigated experimentally the basic characteristics of photocatalytic plasma air cleaning unit and measured air pollutants removal efficiency. The wavelength of light radiated from pulsed discharge plasma under the atmospheric condition was 310~380nm. Its energy is enough to excite the $TiO_2$ photocatalyst and it makes a photochemical reaction in the surface of $TiO_2$ photocatalyst. The removal quantity of trimethylamine$((CH_3)_3N)\; was\; 130mg/m^34 which is twice quantity of pulsed discharge plasma without $TiO_2$ phtocatalyst unit. From the result of gas analysis using FT-IR, nitric oxide was not detected and trimethylamine was decomposed to $H_2O\; and \;CO_2$. And trimethylamine removal efficiency was 95%. These experimental results indicate that photocatalytic plasma air cleaning unit is a potential method in removing the pollutants.

• Journal of Environmental Health Sciences
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• v.30 no.5 s.81
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• pp.481-486
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• 2004

Vehicle occupant exposure to air pollutants has been a subject of concern in recent years because of higher levels of air pollutants inside gasoline or diesel-using vehicle, comparing to the surrounding atmosphere. Contrary to previous studies, fuel of vehicles operated in this study was liquefied petroleum gas (LPG). This study examined the potential exposure and removal efficiency of selected volatile organic compounds (VOCs), nitrogen dioxide ($NO_2$) and respirable suspended particle (RSP) by commercial air cleaning device inside vehicle under different ventilation conditions. Vehicle concentrations inside of benzene, toluene, m,p-xylene, $NO_2$ and RSP were lower under the low ventilation condition. This was indicated that outdoor air pollutants could affect the vehicle air quality inside in case metropolitan cities such as Daegu. The urban vehicle concentrations inside of benzene, toluene, m,p-xylene, $NO_2$ and RSP with air cleaning device were higher than those without air cleaning device. This means that the use of air cleaning device equipped with activated carbon filter, which was used in this study, in the interior of vehicles could be expected to reduce the vehicle occupants exposure to air pollutants effectively. In batch type reactor of laboratory scale, removal efficiencies of air cleaning device used were $97.0\%,\;95.7\%,\;94.6\%\;and\;85.5\%$ respectively in benzene, toluene, m,p-xylene and $NO_2$.

• 한국연소학회:학술대회논문집
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• 2003.05a
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• pp.295-300
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• 2003

In Korea, the emission standards for air pollutants will be more tighten from Jan. 2005. Especially, the new emission standards is focused on the nitrogen oxide. From this trend of standards, nitrogen oxide emission is hot issue in energy fields. Also, we have a new environmental problem, the carbon dioxide emission, which are related to the global warming. To solve the environmental problems, we must define the situation of clean-up technologies level in Korea and decide the direction of R&D for flue gas cleaning technologies. Now, this paper discus briefly on the De-NOx R&D activities and the large scale testing facility for flue gas clean-up technologies in Korea Institute of Energy Research. These discussions are contribute to the increasing of the R&D activities for flue gas clean-up technologies in Korea.

• Journal of the Korean Society for Precision Engineering
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• v.1 no.2
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• pp.47-57
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• 1984

The porous matterials are used both to control the flow of the compressed gas and to serve as the bearing surface. This porous design offers several advantages over the conventional externally pressurized gas bearings. It can simplify the construction, lower the gas consumption, and make the cleaning of the gas supply less critical. Test apparatus was cinstructed to experi- mentally investigate maximum load capacity of thrust bearing was measured 200 Kg (15Kg/$\mu$m), and radial bearing was 36 Kg/$\mu$m. And a rotation accuracy of face waving was 0.0127$\mu$m, and center waving was measured 0.5 $\mu$m. Finally, the use of this method of design and manufacturing will contribute to many practical application in the field required for precision and high stability.

• Journal of the Korean Solar Energy Society
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• v.30 no.1
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• pp.13-18
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• 2010

This research investigated the exhaust gas purification system of gaseous ozone for pigpens. This system is applied to exhaust the gas outside after purification with ozone. This is very effective for purification and simple. And because this is not set in the pigpens, this system is not influence of pollution gas. This is effected to extend the life time of this system and this system is applied for non-window pigpens which does not need the ventilation.

• Journal of the Korean Applied Science and Technology
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• v.19 no.2
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• pp.108-116
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• 2002

Experimental Study was carried out for benzene desorption by purge gas or evacuation in an activated carbon bed. As purge gas flow rate increased, desorption rate increased due to the higher interstitial linear gas velocity. For various purge gas flow rates, desoption curves almost got together if they were plotted against dimensionless time. At a higher flow rate, mass transfer zone became narrower. Temperature drop in the bed was more fast and severe at higher flow rates and higher outer temperature. It was found out that desorption was almost completed when the temperature in the drop of the bed returned to the initial temperature before temperature drop. Desorption by vacuum purge was completed in shorter time than desorption by purge gas. Countercurrent purge was more effective than cocurrent purge.