• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.13 no.10
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• pp.812-816
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• 2000

It is very important to understand the correlation of between inter dielectric(ILD) CMP process and various facility factors supplied to equipment to equipment system. In this paper, the correlation between the various facility factors supplied to CMP equipment system and ILD-CMP process was studied. To prevent the partial over-polishing(edge hot-spot) generated in the wafer edge area during polishing, we analyze various facilities supplied at supply system. With facility shortage of D.I water(DIW) pressure, we introduced an adding purified $N_2$(P$N_2$)gas in polishing head cleaning station for increasing a cleaning effect. DIW pressure and P$N_2$gas factors were not related with removal rate, but edge hot-spot of patterned wafer had a serious relation. We estimated two factors (DIW pressure and P$N_2$gas) for the improvement of CMP process. Especially, we obtained a uniform planarity in patterned wafer and prohibited more than 90% wafer edge over-polishing. In this study, we acknowledged that facility factors supplied to equipment system played an important role in ILD-CMP process.

• Journal of the Korean Crystal Growth and Crystal Technology
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• v.9 no.5
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• pp.504-509
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• 1999

In-situ cleaning and subsequent silicon epitaxial film growth were performed in a load-locked reactor equipped with Hg-grid UV lamp and PBN heater to obtain the smooth and contaminant-free underlying surface and develop low-temperature epitaxial film growth process. The removals of organic and native oxide were investigated using UV-excited $O_2$ and $NF_{3}/H_{2}$, and the effect of the surface condition was examined on the quality of silicon epitaxial film grown at temperature as low as $750^{\circ}C$. UV-excited gas phase cleaning was found to be effective in removing the organic and native oxide successfully providing a smooth surface with RMS roughness of 0.5$\AA$ at optimal condition. Crystalline quality of epitaxial film was determined by smoothness of cleaned surface and the presence of native oxide and impurity. Crystalline defects such as dislocation loops or voids due to the surface roughness were observed by XTEM.

• Proceedings of KOSOMES biannual meeting
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• 2018.06a
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• pp.164-164
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• 2018

• Proceedings of the KIEE Conference
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• 2003.10a
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• pp.204-206
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• 2003

Electron beam generator of cold cathode type has been developed for industrial application, for example, waste water cleaning, flue gas cleaning, and pasteurization etc. The operational principle is based on the emission of secondary electrons from cold cathode when ions in the plasma hit the cathode, which are accelerated toward exit window by the gradient of an electric potential. The characteristics of secondary electron emission are studied by comparing total cathode current with ion current.

• Proceedings of the IEEK Conference
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• 2003.07b
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• pp.1089-1092
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• 2003

This paper has been studied on wafer cleaning and photoresist striping in semiconductor fabrication processes using ozone solved deionized water. In this work, we have developed high concentration ozone generating system and high contact ratio ozone solving system to get high efficiency DIO$_3$. Through this study, we obtained 11% ozone gas concentration, 99.5% of ozone efficiency and 51% of solubility in deionized water.

• Journal of the Architectural Institute of Korea Structure & Construction
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• v.36 no.5
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• pp.187-194
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• 2020

This study presents the energy-saving sequential control algorithm to handle indoor CO₂ and PM2.5 for the improvement of the air quality of school classrooms. To solve indoor air quality (IAQ) problems, air cleaning and ventilation systems are mainly used for school classrooms. Although air cleaning is able to collect PM2.5, it is difficult to remove harmful gas substances. The ventilation system is suitable to tackle CO and CO₂, the volume ventilation, however, is relatively small. In this paper, to remove CO₂ and PM2.5, the pollutant balance equation for improving indoor air quality is reviewed. The sequential control algorithm of the ventilation and air cleaning system with four levels of criteria is introduced for the effective removal of pollutants. The proposed sequential control algorithm confirms that indoor CO₂ and PM2.5 can be properly controlled below the standard value. In addition, the sequential operation of air cleaning and ventilation systems has shown significant improvement in IAQ compared to the independent ventilation system operation. Particularly, such systems are efficient when outdoor PM2.5 is high.

• Proceedings of the Korea Concrete Institute Conference
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• 2001.11a
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• pp.265-270
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• 2001

Nowadays, like any other areas we have asked that the concrete would get more and more properties to increase there performance. So, in this research we are intended to develop the Photocatalytic Concrete which is one of the High Performance Concrete with waste gas reduction and self-cleaning. The fundamental phenomena of the Photocatalytic Concrete were observed by the residue water-weight, SEM, flow and surface hardness(Pencil tester). As a result of this study, the Photocatalytic Concrete used Photocatalytic powder, OPC admixture and other materials can obtain its properties, also photocatalytic efficiency. Last of all, we are convinced of the Photocatalytic Concrete possibility and make an effort to develop its properties added a various study.

• 한국연소학회:학술대회논문집
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• 2012.04a
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• pp.223-226
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• 2012

Biomass to Liquid (BTL) is an attractive option for using biomass as an renewable energy. A syngas supplying system has been designed for BTL system, based on the Fischer-Tropsche (FT) process, and long-term operation test was conducted. The syngas supplying system is composed of a fluidized bed gasifier, gas cleaning and compression system, and methanol absorption system. Stable operation of more than hundred hours was achieved with several champaigns. In addition, a pilot scale biomass gasifier has been developed for 1 bbl/day BTL system and its performance was evaluated. Some preliminary results and current status of the development of BTL system will be presented.

• Proceedings of the Korea Air Pollution Research Association Conference
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• 2003.05b
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• pp.277-278
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• 2003

Cyclone separators are widely used for cleaning gas streams or for catalyst recovery. For many years, the complexity of the gas flow pattern in cyclones has been a matter of many experimental and theoretical work. At present, precise flow measurements have been performed by means of LDA and hot-wire anemometry (Patterson and Munz, 1996; Hoekstra et al., 1999; Peng et al., 2002). In the theoretical work, Computational fluid dynamics (CFD) codes are frequently employed for simulating cyclone gas-particle flows(Hoekstra et al., 1999). (omitted)

• Proceedings of the Korean Institute of IIIuminating and Electrical Installation Engineers Conference
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• 1998.11a
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• pp.134-137
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• 1998