Etching Characteristics of GST Thin Films using Inductively Coupled Plasma of Cl2-Ar Gas Mixtures (Cl2-Ar 혼합가스를 이용한 GST 박막의 유도결합 플라즈마 식각)
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- Journal of the Korean Institute of Electrical and Electronic Material Engineers
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- v.20 no.10
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- pp.846-851
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- 2007