• Journal of the Korean Society for Precision Engineering
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• v.18 no.4
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• pp.64-71
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• 2001

In general, precise linear actuators using piezoelectric element are driven by friction force. Exact understanding of friction plays an important role in analysis and control of a motor. In this research, we designed a precise linear actuator using piezoelectric elements and observed its dynamic characteristics. By varying phase angle difference and amplitudes of the sinusoidal waves that are driving inputs, we can know that it is possible to control moving direction and distance of the slider. As preload is increased, its moving distance is decreased. And also, we have modeled a precise linear actuator using stick slip friction models such as classical, Karnopp. and reset integrator. Finally, by comparing the results of simulation and experiment, it was verified that the model is well designed.

• Journal of Aerospace System Engineering
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• v.9 no.4
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• pp.23-30
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• 2015

The focal plane image stabilization for a camera is one of the most effective method that can increases the digital camera's image quality by compensating the vibration disturbance. The optical image stabilization can be implemented by making the focal plane to trace the path of incident light. To control the position of focal plane motion compensating stage precisely, a nonlinear control algorithm has been applied by considering coulomb friction which is nonlinear behavior of the compensator system. In our study, we have analyzed the hand shaking vibration using the gyro sensor, and made a mathematical model of compensating stage containing optical sensor and piezo-actuator. Then the nonlinear control algorithm has been designed and its performance has been verified by experiment. In this study, a friction driven peizo-electric actuator with $1{\mu}m$ resolution and 10mm/s speed has been used for stage movement.

• Journal of KSNVE
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• v.2 no.1
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• pp.49-59
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• 1992

The motion analysis of a translation device driven by a piezoelectric actuator is performed to identify the mechanics of impact drive mechanism and to find the maximum speed waveform. The translation device is modeled as a semidefinite two-degree-of-freedom system. The motion analysis includes effects of friction force between moving mass and contact surface, dynamics of voltage amplifier and piezoelectric elements, and hysteresis of piezoelectric actuator. Base on the model, simulation studies are carried out and then compared with experimental results. It is found that the error between moving distances obtained by analysis and experiment is less than 15% and that the actual motion of moving mass is well predicted by the analytical work, finally, precision positioning experiments are carried out by using a proximity sensor as a feedback sensor. Position control of moving mass is initiated by the maximum speed waveform and finely tuned by the scaled down waveform so that accurate positioning is accomplished within the resolution of the sensor.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 1994.05a
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• pp.21-24
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• 1994

A piezoelectric actuator. which is composed of a piezoelectrically driven stator and a rotor, Is made and the characteristics are investigated experimentally is a new ultrasonic actuator which transforms rotary motion to linear one is proposed and proved to work successfully. If an ultrasonic wave is excited to propagate in the stator, particles on the internal surface move elliptically. Since the internal surface is machined as an internal thread and an external thread(rotor) is put into the stator. the external thread is rotated through the friction force and moved in the axial direction. The traveling wave is excited by a piezoelectric element bonded to the stator. This idea is firstly proposed by S. Ueha, et al. in 1987. However, efficiency of their actuator is less than 3%. In this study, in order to improve characteristics of this type actuator, we used various pitches and number of the screw thread, and materials of rotor, and we obtained good charcteristics.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2007.11a
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• pp.285-285
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• 2007

Friction material in a piezoelectric system is a important part to affect to moving performance. In this paper, alumina ceramics $(AlO_2)$, silicon carbide (SiC), high speed steel and super-hard alloy (WC, Tungsten Carbide) having a hardness knoop of 1000 to 2000 $kg/mm^2$ were tested as a friction material of AF module. Even though $AlO_2$, SiC and high speed steel were a high-hardness material, $AlO_2$ and SiC were worn by a rough surface, and SiC is rusted in humidity condition. AF module using super-hard alloy has showed a stable moving performance in life time test.

• International Journal of Precision Engineering and Manufacturing
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• v.8 no.2
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• pp.32-37
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• 2007

This paper proposes a dual-mode ultra precision positioning system for machine tools and measuring machines. The objective was to position a machine table with a picometer order of resolution, i.e., pico-positioning. A twist-roller friction drive (TFD) was used in coarse-mode positioning. The TFD, which was driven by an AC servomotor, is a kind of lead screw in mechanical terms, and several centimeters of machine table movement was controlled with a nanometer order of positioning resolution. To eliminate lateral vibration caused by the TFD, an active aerostatic coupling driven by piezoelectric actuators was inserted between the TFD and the machine table. This active aerostatic coupling was also applied as a feed drive device for fine-mode positioning; in the fine mode, the positioning resolution was 50 pm. Factors influencing pico-positioning, such as how noise from displacement sensors and vibrations in the aerostatic guideway affect positioning resolution, are discussed.

• The Transactions of the Korean Institute of Electrical Engineers C
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• v.55 no.3
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• pp.149-155
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• 2006

This paper presents a torsional micromirror detached from PZT actuators (TMD), whose rotational motion is achieved by push bars in the PZT actuators detached from the micromirror. The push bar mechanism is intended to reduce the bending, tensile and torsional constraints generated by the conventional bending bar mechanism, where the torsional micromirror is attached to the PZT actuators (TMA). We have designed, fabricated and tested prototypes of TMDs for single-axis and dual-axis rotation, respectively. The single-axis TMD generates the static rotational angle of $6.1^{\circ}$ at 16 VDC, which is 6 times larger than that of single-axis TMA, $0.9^{\circ}$. However, the rotational response curve of TMD shows hysteresis due to the static friction between the cover and the push bar in the PZT actuator. We have shown that 63.2% of the hysteresis is due to the static friction caused by the initial contact force of the PZT actuaor. Without the initial contact force, the rotational response curve of TMD shows linear voltage-angle characteristics. The dual-axis TMD generates the static rotational angles of $5.5^{\circ}$ and $4.7^{\circ}$ in x-axis and y-axis, respectively at 16 VDC. The measured resonant frequencies of dual-axis TMD are $2.1\pm0.1$ kHz in x-axis and $1.7\pm0.1$ kHz in y-axis. The dual-axis TMD shows stable operation without severe wear for 21.6 million cycles driven by 16 Vp-p sinusoidal wave signal at room temperature.