• Clean Technology
• /
• v.25 no.4
• /
• pp.324-330
• /
• 2019

The selective catalytic reduction system is a highly effective technique for the denitrification of the flue gases emitted from the industrial facilities. The distribution of mixing ratio between ammonia and nitrogen oxide at the inlet of the catalyst layers is important to the efficiency of the de-NOx process. In this study, computational analysis tools have been applied to improve the uniformity of NH₃/NO molar ratio by controlling the flow rate of the ammonia injection nozzles according to the distribution pattern of the nitrogen oxide in the inlet flue gas. The root mean square of NH₃/NO molar ratio was chosen as the optimization parameter while the design of experiment was used as the base of the optimization algorithm. As the inlet conditions, four (4) types of flow pattern were simulated; i.e. uniform, parabolic, upper-skewed, and random. The flow rate of the eight nozzles installed in the ammonia injection grid was adjusted to the inlet conditions. In order to solve the two-dimensional, steady, incompressible, and viscous flow fields, the commercial software ANSYS-FLUENT was used with the k-𝜖 turbulence model. The results showed that the improvement of the uniformity ranged between 9.58% and 80.0% according to the inlet flow pattern of the flue gas.

• Fire Science and Engineering
• /
• v.30 no.3
• /
• pp.86-93
• /
• 2016

The effects of the shape of a drencher head on the flow characteristics and radiation attenuation of a water curtain, in order to prevent a fire spread, were experimentally studied. The distance (h) between the orifice exit and deflector and the diameter of deflector (D) were varied as the shape factors of the head, with the same orifice diameter (d). It was found that an increase in h leads to an increase in the water flow rate and spray angle. However, the change in the spray angle decreases with increasing D. Increasing D brings about a subtle increase in the water flow rate and a significant decrease in the spray angle. A larger value of D makes it possible to produce a flatter pattern of the water curtain, but reduces the uniformity of the droplets inside the spray angle. The mean droplet diameter decreases significantly as the operating pressure increases. However, the variation in the shape of the drencher head does not significantly affect the change in the mean diameter at the same operating pressure. Finally, it was found that the radiation attenuation afforded by the water curtain at the same operating pressure was affected by water flow rate and droplet uniformity, which were determined by h and D, respectively.

• Journal of the Semiconductor & Display Technology
• /
• v.20 no.2
• /
• pp.92-97
• /
• 2021

The importance of processes in cryogenic environments is increasing in a way to address problems such as critical dimension (CD) narrow and bottlenecks in micro-processing. Accordingly, in this paper, we proceed with the design and analysis of Electrostatic Chuck(ESC) and Coolant in cryogenic environments, and present optimal model conditions to provide the temperature distribution analysis of ESC in these environments and the appropriate optimal design. The wafer temperature uniformity was selected as the reference model that the operating conditions of the refrigerant of the liquid nitrogen in the doubled aluminum path were excellent. Design of simulation (DOS) was carried out based on the wheel settings within the selected reference model and the classification of three mass flow and diameter case, respectively. The comparison between factors with p-value less than 0.05 indicates that the optimal design point is when five turns of coolant have a flow rate of 0.3 kg/s and a diameter of 12 mm. ANOVA determines the interactions between the above factor, indicating that mass flow is the most significant among the parameters of interests. In variable selection procedure, Case 2 was also determined to be superior through the two-Sample T-Test of the mean and variance values by dividing five coolant wheels into two (Case 1 : 2+3, Case 2: 3+2). Finally, heat transfer analysis processes such as final difference method (FDM) and heat transfer were also performed to demonstrate the feasibility and adequacy of the analysis process.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
• /
• 2004.11a
• /
• pp.125-128
• /
• 2004

Chemical Mechanical Polishing(CMP) in semiconductor production is characterized its output property by Removal Rate(RR) and Non-Uniformity(NU). Some Previous works shows that RR is determined by production of pressure and velocity and NC is also largely affected by velocity of flow-field during CMP. This study is about the direct measurement of velocity of slurry during CMP and reconstruction whole flow-field by Particle Image Velocimetry(PIV) Techniques. Typical PIV system is tuned adequately for inspecting CMP and Slurry Flow-field is measured by changing both Pad RPM and Carrier RPM. The results show that velocity is majorly determined not by Carrier RPM, but by Pad RPM.

• Proceedings of the Korean Society of Propulsion Engineers Conference
• /
• 2010.05a
• /
• pp.95-98
• /
• 2010

A multi-injector rocket engine using high concentrated hydrogen peroxide and kerosene as the oxidizer and fuel was designed and fabricated. Six coaxial swirl injectors were mounted on the mixing head and flow analysis in the manifold was performed to minimize stagnation and recirculation zones. Finally, uniformity of mass flow rate and spray pattern was evaluated by cold flow tests and the mixing head design process was successfully verified the results.

• Journal of Sensor Science and Technology
• /
• v.24 no.1
• /
• pp.10-14
• /
• 2015

This paper reports the results of a study on the optimization of the etching profile, which is an important factor in deep-reactive-ion etching (DRIE), i.e., dry etching. Dry etching is the key processing step necessary for the development of the Internet of Things (IoT) and various microelectromechanical sensors (MEMS). Large-area etching (open area > 20%) under a high-frequency (HF) condition with nonoptimized processing parameters results in damage to the etched sidewall. Therefore, in this study, optimization was performed under a low-frequency (LF) condition. The HF method, which is typically used for through-silicon via (TSV) technology, applies a high etch rate and cannot be easily adapted to processes sensitive to sidewall damage. The optimal etching profile was determined by controlling various parameters for the DRIE of a large Si wafer area (open area > 20%). The optimal processing condition was derived after establishing the correlations of etch rate, uniformity, and sidewall damage on a 6-in Si wafer to the parameters of coil power, run pressure, platen power for passivation etching, and $SF_6$ gas flow rate. The processing-parameter-dependent results of the experiments performed for optimization of the etching profile in terms of etch rate, uniformity, and sidewall damage in the case of large Si area etching can be summarized as follows. When LF is applied, the platen power, coil power, and $SF_6$ should be low, whereas the run pressure has little effect on the etching performance. Under the optimal LF condition of 380 Hz, the platen power, coil power, and $SF_6$ were set at 115W, 3500W, and 700 sccm, respectively. In addition, the aforementioned standard recipe was applied as follows: run pressure of 4 Pa, $C_4F_8$ content of 400 sccm, and a gas exchange interval of $SF_6/C_4F_8=2s/3s$.

• Proceedings of the KSME Conference
• /
• 2002.08a
• /
• pp.159-160
• /
• 2002

New S-shaped aeroelastic mesoflaps are utilized to control normal shock/boundary-layer interactions. New generation of the mesoflaps is designed f3r a better rigidness and a good flow uniformity across the ulteractions. ,Major advantages of the mesoflap system can be a better total pressure recovery downstream of the interactions due to the lambda shock structure over the flap system, and a rehabilitation of the thickened boundary layer due to bleeding through a cavity underneath the flap system. Skin friction has been measured downstream of the interactions, using the laser interferometer skin friction (LISF) meter, which optically detects the rate of thinning of an oil film applied to the test surface. Various flap-thicknesses of the S-shaped mesoflap arrays are tested, and the results are compared to the solid-wall reference case. Overall, not much difference in the level of skin friction is noticed for the S-shaped flap arrays of various thicknesses, and its level is lower than the skin friction downstream of the solid-wall interaction

• KSCE Journal of Civil and Environmental Engineering Research
• /
• v.26 no.5B
• /
• pp.459-467
• /
• 2006

In this study, hydraulic and numerical model experiments were performed to analyze and improve the effects of flow-rate increase in the intake canal of Boryeong Thermal Power Plants on the flow condition in the circulation water pump (CWP) chambers. Based on the numerical simulation results, when the flow-rate increased in the circulation water intake canal, the velocity in the canal and vertical vorticities in the circulation water pump chambers increased and hence the vortex occurrence potential would be greatly increased. It was found by performing hydraulic model experiments that the velocity distribution near the bottom in the inlet of the circulation water pump chambers was highly non-uniform while the velocity distribution near the water surface was nearly uniform. To reduce the non-uniformity in the velocity distribution, triangular flow deflectors were devised. The installation of the flow deflectors in the inlet of circulation water pump chambers was successfully to reduce velocity non-uniformities and to remove flow reversal problems.

• Proceedings of the KSME Conference
• /
• 2001.11b
• /
• pp.405-409
• /
• 2001

An experimental analysis of the flow inside the refrigeration compartment of a home refrigerator was conducted in order to achieve better performances in terms of uniform temperature distribution and cooling speed. 2D PIV and stereoscopic PIV were used for the experiments on an actual-size refrigerator at operating conditions. Two CCD cameras were employed for a wider field of view in the measurement of the shelf, and stereoscopic PIV was used to measure the three velocity components at the various cooling duct outlets and the mean velocity fields were area-integrated to calculate the flow-rates. 50 to 100 instantaneous velocity fields were time averaged for the mean velocity fields. With the result of this analysis, a new cooling duct system was developed, with the refrigerator's cooling performance increasing 11% in terms of cooling speed, and 25% in temperature uniformity.

• Fire Science and Engineering
• /
• v.17 no.4
• /
• pp.111-116
• /
• 2003

LPG explosion characteristics in non-uniform concentration was investigated with a 270 liter explosion vessel of which the scale is 100 cm${\times}$60 cm${\times}$45 cm. Vented explosion and closed explosion system were used. Experimental parameter were position of ignition source, nozzle diameter and flow rate of gas. Non uniform concentration was controlled by the nozzle diameter and flow rate. Explosion pressure were measured with strain type pressure sensor and the flame behavior was pictured with the video camera. Based on this experimental result, it was found that the flow rate of gas and the duration of gas injection are important factor for mixing the gas in the vessel. And as the increase the non-uniformity of gas concentration, explosion pressure and pressure rise rate Is decrease but the flame resident time in the vessel is increase. Therefore gas explosion to fire transition possibility will increase in non-uniform concentration gas explosion.