• 한국가시화정보학회:학술대회논문집
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• 2004.11a
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• pp.48-51
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• 2004

Chemical Mechanical Polishing(CMP) is popularly used in production of semiconductor because of large area polishing ability probability of improvement for more integrated circuit. However, present CMP processing causes some non-uniformity errors which can be critical for highly integrated circuit. Previous studies predict that flow-field of slurry during CMP can create non-uniformity, but no quantitative measurement has conducted. In this study, using PIV, slurry velocity flow-field during CMP is measured by changing the ratio of RPM of pad and carrier with tuned PIV system adequate for small room in CMP machine and Cabot's non-groove pad Epad-A100. The result show that velocity of slurry is majorly determined by pad-rpm and the ratio of between carrier and pad rpm make some changes in streamlines.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2004.11a
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• pp.125-128
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• 2004

Chemical Mechanical Polishing(CMP) in semiconductor production is characterized its output property by Removal Rate(RR) and Non-Uniformity(NU). Some Previous works shows that RR is determined by production of pressure and velocity and NC is also largely affected by velocity of flow-field during CMP. This study is about the direct measurement of velocity of slurry during CMP and reconstruction whole flow-field by Particle Image Velocimetry(PIV) Techniques. Typical PIV system is tuned adequately for inspecting CMP and Slurry Flow-field is measured by changing both Pad RPM and Carrier RPM. The results show that velocity is majorly determined not by Carrier RPM, but by Pad RPM.

• Korean Journal of Air-Conditioning and Refrigeration Engineering
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• v.21 no.9
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• pp.496-504
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• 2009

In order to investigate the feasibility of a direct ice slurry transporting system for the purpose of district cooling, a case study of field application is performed. The research aims include the field measurement of ice packing factor, the performance of coldness delivery, and the branching characteristics of ice slurry. Two representative types of pipe branch are dealt with in this work. For the slurry flow with ice volume fraction of 0.16 or less, the pipe blocking due to aggregation is not observed. Based on the time-wise variation of temperature in the storage tank, a calculating method of ice packing factor is newly developed, which seems to be useful when the brine concentration is unknown. It is confirmed that the mass flow rate of ice slurry per unit cooling load is markedly reduced with increasing the ice content. The pumping power also decreases, but remains unchanged for high ice fractions. The distribution of ice particle before and after branching shows a good uniformity within the range of 5% difference, but yields a unique trend depending on the flow rate.

• Analytical Science and Technology
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• v.32 no.5
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• pp.173-184
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• 2019

As the size of semiconductors becomes smaller, it is necessary to perform high precision polishing of nanoscale. Ceria, which is generally used as an abrasive, is widely used because of its uniform quality, but its stability is not high because it has a high molecular weight and causes agglomeration and rapid precipitation. Such agglomeration and precipitation causes scratches in the polishing process. Therefore, it is important to accurately analyze the size distribution of ceria particles. In this study, a study was conducted to select dispersants useful for preventing coagulation and sedimentation of ceria. First, a dispersant was synthesized and a ceria slurry was prepared. The defoamer selection experiment was performed in order to remove the air bubbles which may occur in the production of ceria slurry. Dynamic light scattering (DLS) and asymmetrical flow field-flow fractionation (AsFlFFF) were used to determine the size distribution of ceria particles in the slurry. AsFlFFF is a technique for separating nanoparticles based on sequential elution of samples as in chromatography, and is a useful technique for determining the particle size distribution of nanoparticle samples. AsFlFFF was able to confirm the presence of a little quantities of large particles in the vicinity of 300 nm, which DLS can not detect, besides the main distribution in the range of 60-80 nm. AsFlFFF showed better accuracy and precision than DLS for particle size analysis of a little quantities of large particles such as ceria slurry treated in this study.

• 연구논문집
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• s.31
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• pp.53-63
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• 2001

Numerical investigation based on the control-volume using finite-difference method has been made by the development of computer program in order to figure out the pattern of the flow field inside screw decanter. The typical flow pattern inside screw decanter is characterized by the two strong recirculation zones separated by the main stream from slurry discharge hole to exit. These recirculation regions and flow pattern are strongly influenced by the centrifugal force and the change of the value of slurry viscosities, that is,500, 1,000 and 3,000cp respectively. The wear of screw decanter appeared experimentally in two spots; one is near the circumferential area of the slurry discharge hole and the other is on the decanter blades at a certain height from the bottom to a different degree after the continuous long-term operation. These wears are partly explained by the flow pattern and the strong turbulence intensity near the recirculation attachment region.

• Proceedings of the SAREK Conference
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• 2009.06a
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• pp.1002-1007
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• 2009

The research are performed to check the characteristics of the ice slurry transport system for the district cooling. The system are installed at the 1st floored building which is as large as the $1204\;m^2$ ($86\;m{\times}14\;m$). Three kinds of heat exchanger are selected, such as, plate, spiral and shell & tube type, to apply to the ice slurry systems. Experiment was done in the two cases. The first case, circulation water flow fixed at the design conditions for the state to change the flow of the supply of ice slurry. The second case, Ice slurry flow fixed at the design conditions for the state to change the flow of circulation water. Both side of Energy balance was calculated. The performance of plate heat exchanger is higher than others and it's enthalpy effectiveness is higher too.

• Geomechanics and Engineering
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• v.29 no.4
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• pp.391-405
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• 2022

A newly proposed grouting simulation method, the sequential diffusion solidification method was introduced into the numerical simulation of combined bi-borehole grouting. The traditional, critical and difficult numerical problem for the temporal and spatial variation simulation of the slurry is solved. Thus, numerical simulation of grouting and blocking of flowing water in karst conduits is realized and the mechanism understanding of the combined bi-borehole technology is promoted. The sensitivity analysis of the influence factors of combined bi-borehole grouting was investigated. Through orthogonal experiment, the influences of proximal and distal slurry properties, the initial flow velocity of the conduit and the proximal and distal slurry injection rate on the blocking efficiency are compared. The velocity variation, pressure variation and slurry deposition phenomenon were monitored, and the flow field characteristics and slurry outflow behavior were analyzed. The interaction mechanism between the proximal and distal slurries in the combined bi-borehole grouting is revealed. The results show that, under the orthogonal experiment conditions, the slurry injection rate has the greatest impact on blocking. With a constant slurry injection rate, the blocking efficiency can be increased by more than 30% when using slurry with weak time-dependent viscosity behavior in the distal borehole and slurry with strong time-dependent viscosity behavior in the proximal borehole respectively. According to the results of numerical simulation, the grouting scheme of "intercept the flow from the proximal borehole by quick-setting slurry, and grout cement slurry from the distal borehole" is put forward and successfully applied to the water inflow treatment project of China Resources Cement (Pingnan) Limestone Mine.

• Journal of computational fluids engineering
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• v.19 no.3
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• pp.44-51
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• 2014

Considering the importance of the detailed resolution of the reacting flow field inside a gasifier, the objective of this study lies on to investigate the effect of important variables to influence on the reacting flow and thereby to clarify the physical feature occurring inside the gasifier using a comprehensive gasifier computer program. Thus, in this study the gasification process of a 1.0 ton/day gasifier are numerically modeled using the Fluent code. And parametric investigation has been made in terms of swirl intensity and aspect ratio of the gasifier. Doing this, special attention is given on the detailed change of the reacting flow field inside a gasifier especially with the change of this kind of design and operation parameters. Based on this study, a number of useful conclusions can be drawn in the view of flow pattern inside gasifier together with the consequence of the gasification process caused by the change of the flow pattern. Especially, swirl effect gives rise to a feature of a central delayed recirculation zone, which is different from the typical strong central recirculation appeared near the inlet nozzle. The delayed feature of central recirculation appearance could be explained by the increased axial momentum due to the substantial amount of the presence of the coal slurry occupying over the entire gasifier in gasification process. Further, the changes of flow pattern are explained in detail with the gasifier aspect ratio. In general, the results obtained are physically acceptable in parametric study.

• Proceedings of the Korea Society for Energy Engineering kosee Conference
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• 2001.11a
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• pp.69-76
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• 2001

The coal gasification process of a slurry feed type, entrained-flow coal gasifier was numerically predicted in this paper. By divding the complicated coal gasification process into several simplified stages suh as slurry evaporation, coal devolitilisation and two-phase reactions coupled with turbulent flow and two-phase heat transfer, a comprehensive numerical model was constructed to simulate the coal gasification process. The k-$\varepsilon$turbulence model was used for the gas phase flow while the Random-trajectory model was applied to describe the behavior of the coal slurry particles. The unreacted-core shrinking model and modified Eddy Break-Up(EBU) model were used to simulate the heterogeneous and homogeneous reactions, respectively. The simulation results obtained the detailed informations about the flow field, temperature inside the gasifier. Meanwhile, the simulation results were compared with the experimental data as function of $O_2$/coal ratio. It illustrated that the calculated carbon conversions agreed with the measured ones and that the measurd quality of the atngas was better than the calculated one when the $O_2$/coal ratio increases. The result was related with the total heat loss through the gasifier and uncertain kinetics for the heterogeneous reactions.

• Progress in Superconductivity and Cryogenics
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• v.21 no.2
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• pp.26-30
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• 2019

Coal is the most abundant fossil fuel on Earth and is used in a wide range of applications. The direct combustion of high-sulfur coal produces a large amount of sulfur dioxide, which is a toxic and corrosive gas. A new superconducting high gradient magnetic separation (HGMS) technology was studied to remove sulfur from high sulfur coal. The magnetic separation concentrate was obtained under the optimum parameters, such as a particle size of -200 mesh, a magnetic field strength of 2.0 T, a slurry concentration of 15 g/L, and a slurry flow rate of 600 ml/min. The removal rate of sulfur is up to 59.9%. The method uses a magnetic field to remove sulfur-containing magnetic material from a pulverized coal solution. It is simple process with, high efficiency, and is a new way.