• Journal of Mechanical Science and Technology
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• 제20권10호
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• pp.1702-1715
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• 2006

The increasing use of nano-positioners in a wide variety of laboratory and industrial applications has created a need for nano-mechatronics education in all engineering disciplines. The subject of nano-mechatronics is broad and interdisciplinary. This article focuses on the way nano-mechatronics is taught in department of mechanical engineering at Korea Advanced Institute of Science and Technology (KAIST). As one model of nano-positioning systems, design and experimental methodology is presented in this article. For design phase, the stiffness and resonant frequencies are found analytically and verified by using a commercial finite element analysis program. Next, for experimental phase, various tests are performed to access the performances of the designed nano-positioner, for example, sine-tracking, multi-step response and travel-range check etc. Finally, the definition of 'separation frequency' is described and some comments are discussed.

• 한국정밀공학회지
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• 제14권2호
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• pp.13-22
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• 1997

Strapdown inertial navigation system(SDINS) is a navigational instruments necessary to guide and con- trol a free vehicle. In this study, an error analysis of mechanical parts is carried out for manufacturing a dynamically tuned gyroscope. The errors usually come from the tolerance in machining and assembly. In the error analysis, a criterion to be considered during designing and manufacturing is proposed by quanti- tatively analyzing the effect of DTG performance by tolerances. The theory of dynamic balancing is deduced and unbalance is reduced through experiment.

• 천문학회지
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• 제56권2호
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• pp.169-185
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• 2023

The GMT-Consortium Large Earth Finder (G-CLEF) is the first instrument for the Giant Magellan Telescope (GMT). G-CLEF is a fiber feed, optical band echelle spectrograph that is capable of extremely precise radial velocity measurement. G-CLEF Flexure Control Camera (FCC) is included as a part in G-CLEF Front End Assembly (GCFEA), which monitors the field images focused on a fiber mirror to control the flexure and the focus errors within GCFEA. FCC consists of an optical bench on which five optical components are installed. The order of the optical train is: a collimator, neutral density filters, a focus analyzer, a reimager and a detector (Andor iKon-L 936 CCD camera). The collimator consists of a triplet lens and receives the beam reflected by a fiber mirror. The neutral density filters make it possible a broad range star brightness as a target or a guide. The focus analyzer is used to measure a focus offset. The reimager focuses the beam from the collimator onto the CCD detector focal plane. The detector module includes a linear translator and a field de-rotator. We performed thermoelastic stress analysis for lenses and their mounts to confirm the physical safety of the lens materials. We also conducted the global structure analysis for various gravitational orientations to verify the image stability requirement during the operation of the telescope and the instrument. In this article, we present the opto-mechanical detailed design of G-CLEF FCC and describe the consequence of the numerical finite element analyses for the design.

• 한국정밀공학회지
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• 제21권12호
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• pp.174-181
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• 2004

Ultra precision positioning mechanism has widely been used on semiconductor manufacturing equipments, optical spectrum analyzer and cell manipulations. Ultra precision positioning mechanism is consisted of several actuators, sensors, guides and control systems. Its efficiency depends on each performance of components. The object of this study is to design, analysis and manufacture all of the inchworm linear motor system, which is one of the equipments embodied in ultra precision positioning mechanism. Inchworm linear motor system is consisted of a controller system and an inchworm linear motor, and its driving form is similar to a motion of spanworm. A design and manufacture of inchworm linear motor, which is consisted of three PZT actuators, a rod, two columns and a guide plate, are performed. Minimizing the von-Mises stress of the hinge using Taguchi method and simulation by FEM software optimizes the structural design in a column of flexure hinge. The designed columns and guide plates are manufactured by a W-EDM and NC-milling. A controller system, which is an apparatus to drive inchworm linear motor, can easily adjust driving conditions by varying resonance frequency and input-output voltage of actuators and amplifiers. The performance of manufactured inchworm linear motor system is verified and valuated. In the future, inchworm linear motor system will be used to make a more precision positioning by reinforcing a sensor and feedback system.

• 대한기계학회논문집A
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• 제28권10호
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• pp.1541-1548
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• 2004

A nano-stage simulation tool is developed for an advanced E-beam lithography system. Even if piezo-actuators are believed to be compatible fer the E-beam lithograpy system it is difficult to predict their characteristics due to their nonlinearities such as hysteresis and creep. In this paper, the nonlinear properties are modeled for a piezo-actuator by considering the voltage range and speed variations. The hysteresis is described as the first order differential equation with 24 sets of parameters and the creep is modeled as a time-dependent logarithmic function with 2 sets of a parameter. A two-axis nano stage with piezo-actuators are investigated for realizing nano scale motions. The characteristics of flexure guide mechanisms are analyzed based on the finite element method using the ANSYS software. The simulation tool for the nano stage is constructed by using the RecurDyn software. The dynamic response of the nano stage is obtained in simulations and compared with the experimental data.

• 한국안전학회지
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• 제25권6호
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• pp.128-136
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• 2010

In according with concrete structural design standard, it is common designing flexure reinforcement concrete to induce tension failure. So reinforcing ratio is limited to inducing tension failure. And maximum reinforcing ratio is regulated to protecting concrete compression strength caused by over reinforced building. Minimum reinforcing ratio is also limited in designing standard to protecting brittle failure as extremely using less reinforcing bar. But in minimum reinforcing ratio it is extremely conservative or it is sometimes impossible to induce stable tension-failure because they are depending on yield failure and experienced method and concrete designing standard strength. Therefore the purpose of the present paper is to evaluate the flexural behavior of minimum steel ratio of reinforced concrete of beams and to propose the guide-line of equation of minimum steel ratio by performing static flexural test of 16 beams according to size effect, number of steel, yielding stress of steel, and concrete compressive strength which are presumed effective variables. From experimental results, the equation of minimum steel ratio was newly proposed considered size effect.

• 한국공작기계학회논문집
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• 제18권1호
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• pp.36-41
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• 2009

This paper presents the development of a micro punching system with modified cymbal mechanism. To realize the micro punching, we introduced the hybrid system with a macro moving part and micro punching part. The macro moving part consists of a ball screw, a linear guide and the micro step motor and micro punching part includes the PZT actuators and displacement amplification device with modified cymbal mechanism. The PZT actuator is capable of producing very large force, but they provide only limited displacements which are several micro meters. Thus the displacement amplification device is necessary to make those actuators more efficient and useful. For this purpose, a cymbal mechanism in series is proposed. The finite element method was used to design the cymbal mechanism and to analyze the mode shape of the one. The displacement and mode shape error between the FEM results and experiments are within 10%. A considerable design effort has been focused on optimizing the flexure hinge to increase the output displacement and punching force.

• 한국생산제조학회지
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• 제19권3호
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• pp.419-425
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• 2010

To machine the micro hole, laser machining system is widely used, however, the system cannot fabricate the micro hole with high aspect ratio and good surface finish. To break the obstacles, the high frequency vibration mechanism with PZT (Piezoelectric Transducers) is proposed in this paper. The mechanism will vibrate the laser beam in vertical direction so that the aspect ratio and surface finish may be higher than the conventional. The mechanism vibrates the eyepiece of laser optics. In addition to the benefits, the mechanism enables us to have high precision and flexibility. It decreases burr and debris during machining. And it is able to machine various materials of workpiece. This research include high frequency and large travel range of the proposed mechanism. The PZT motion of mechanism and analysis on the sensitivity of design parameters are extracted from a finite element method (FEM) simulation. In the analysis, the target vibration mode without parasitic motion is designated to have the target frequency and high amplitude.

• 대한기계학회논문집A
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• 제30권12호
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• pp.1611-1617
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• 2006

A compact and two-dimensional atomic force microscope (AFM) using an orthogonal sample scanner, a calibrated homodyne laser interferometer and a commercial AFM head was developed for use in the nano-metrology field. The x and y position of the sample with respect to the tip are acquired by using the laser interferometer in the open-loop state, when each z data point of the AFM head is taken. The sample scanner which has a motion amplifying mechanism was designed to move a sample up to $100{\times}100{\mu}m^2$ in orthogonal way, which means less crosstalk between axes. Moreover, the rotational errors between axes are measured to ensure the accuracy of the calibrated AFM within the full scanning range. The conventional homodyne laser interferometer was used to measure the x and y displacements of the sample and compensated via an X-ray interferometer to reduce the nonlinearity of the optical interferometer. The repeatability of the calibrated AFM was measured to sub-nm within a few hundred nm scanning range.

• 한국정밀공학회지
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• 제22권4호
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• pp.84-91
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• 2005

We measured the pitch of one-dimensional (ID) grating specimens using a metrological atomic force microscope (M-AFM). The ID grating specimens a.e often used as a magnification standard in nano-metrology, such as scanning probe microscopy (SPM) and scanning electron microscopy (SEM). Thus, we need to certify the pitch of grating specimens fur the meter-traceability in nano-metrology. To this end, an M-AFM was setup at KRISS. The M-AFM consists of a commercial AFM head module, a two-axis flexure hinge type nanoscanner with built-in capacitive sensors, and a two-axis heterodyne interferometer to establish the meter-traceability directly. Two kinds of ID grating specimens, each with the nominal pitch of 288 nm and 700 nm, were measured. The uncertainty in pitch measurement was evaluated according to Guide to the Expression of Uncertainty in Measurement. The pitch was calculated from 9 line scan profiles obtained at different positions with 100 ㎛ scan range. The expanded uncertainties (k = 2) in pitch measurement were 0.10 nm and 0.30 nm for the specimens with the nominal pitch of 288 nm and 700 nm. The measured pitch values were compared with those obtained using an optical diffractometer, and agreed within the range of the expanded uncertainty of pitch measurement. We also discussed the effect of averaging in the measurement of mean pitch using M-AFM and main components of uncertainty.