• 한국인터넷방송통신학회논문지
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• 제19권6호
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• pp.169-174
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• 2019

최근 원격통신용 미러의 정밀 제어를 위한 초정밀 구동 메커니즘 설계에 많은 연구가 진행되고 있다. 본 연구에서는 초정밀 구동 메카니즘의 구성 조건을 만족하기 위하여 마이크로미터(um)의 분해능을 가진 탄성힌지(flexure hinge)를 이용한 6자유도 스테이지 메카니즘을 제안한다. 탄성힌지를 조인트로 이용하여 공간상의 6자유도 스테이지를 설계하고, 탄성힌지의 탄성변형을 이용하여 반복적인 운동을 제공한다. 공간상의 6 자유도 스테이지를 개발하기 위하여 탄성힌지를 이용한 평면상의 2 자유도 스테이지를 설계하고 이를 조합하여 6 자유도 스테이지를 제작하였다. 유한요소 해석을 통하여 단위입력에 대한 최대 출력변위를 생성하는 탄성힌지의 크기와 형상을 결정하였고, 전체 스테이지를 구동 할 때, 개별 탄성힌지가 탄성 영역 안에서 구동됨을 유한요소 해석을 통하여 증명하였다. 또한 전체 스테이지 구동의 변위보정과 강성검증을 실험적으로 증명하기 위하여 CCD 레이저 변위센서를 이용한 스테이지 변위 해석을 진행하였다.

• 제어로봇시스템학회:학술대회논문집
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• 제어로봇시스템학회 2000년도 제15차 학술회의논문집
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• pp.429-429
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• 2000

Micro positioning mechanism is the key technology in many fields, such as scanning electron microscopy (SEM), x-ray lithography, mask alignment and micro-machining. In the paper, a 3DOF parallel-type micro-positioning mechanism is proposed. This mechanism uses piezo-actuators and Flexure hinge to control x, y and $\theta$ motion. It is shown both analytically and numerically that 2 DOF flexure hinge model was better precision than 1 DOF flexure hinge design.

• 한국정밀공학회지
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• 제22권9호
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• pp.130-136
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• 2005

This paper presents an optimal design and the performance evaluation of two-axis nano positioning stage with round notched flexure hinges. A flexure hinge mechanism with round notched flexure hinges is to guide the linear motions of a moving plate in the nano positioning stage. A Min-Max algorithm is applied to the design of the flexure hinge mechanism for nano positioning stage. In the design process, the structure of the flexure hinge mechanism is fixed, then the radius of a round hole and the width of two round holes are chosen as design variables, and finally the do sign variables are calculated by the Min-Max algorithm. The machined flexure hinge mechanism, stack type PZTs for actuation and capacitance type displacement sensors for position measurement are assembled into the nano positioning stage. The experimental results of the manufactured nano positioning stage show the first modal resonance frequency of 197 Hz, the operating range of 40 um, and the resolution of 3 nm.

• 한국정밀공학회지
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• 제22권3호
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• pp.61-67
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• 2005

A dynamic model for flexure hinge-based compliant mechanisms is derived. The dynamic model of the previous works do not well describe the behaviors of rigid bodies in the compliant mechanism when the length of the flexure hinge is long. In this study, the effect on the length of the flexure hinge is pointed out and then the dynamic model is derived to overcome the length effect. For verification, modal analyses are carried out using the proposed dynamic model and FEM (Finite Element Method). Finally they are compared by the terms of modal frequency. As the result, the proposed dynamic model can be used in design and analysis of the compliant mechanism.

• 제어로봇시스템학회논문지
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• 제15권9호
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• pp.881-886
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• 2009

This paper presents a manipulation system consisting of a coarse/fine XY positioning system and an out-of-plane manipulator. The object of the system is to conduct tine positioning and manipulation of micro parts. The fine stage and the out-of-plane manipulator have compliant mechanisms with flexure hinges, which are driven by stack-type piezoelectric elements. In the fine stage, the compliant mechanism plays the roles of motion guide and displacement amplification. The out-of-plane manipulator contains three piezo-driven compliant mechanisms for large working range and fine resolution. For large displacement, the compliant mechanism is implemented by a two-step displacement amplification mechanism. The compliant mechanisms are manufactured by wire electro-discharge machining for flexure hinges. Experiments demonstrate that the developed system is applicable to a fine positioning and fine manipulation of micro parts.

• International Journal of Precision Engineering and Manufacturing
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• 제8권2호
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• pp.49-53
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• 2007

In this study, we investigated experimentally the potential of a planer positioning mechanism with three degrees of freedom using a flexure guide and an electromagnetic linear motor. The goal was to produce a multi-axis positioning system with nanometric resolution over a 1-mm stroke. An $X-Y-\theta$ stage was designed based on previous results from a single-axis prototype and was constructed with a flexure guide mechanism and voice coil motor type linear actuators. We examined the necessity of a driving method and control system to ensure high resolution for multi-axis positioning. Experiments were conducted to evaluate the performance, and the results confirmed the mechanism's potential; fine point-to-point (PTP) positioning was achieved over a 1-mm stroke, with a resolution of 2 nm for translation in X-Y and 0.01 asec for yaw in $\theta$.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2011년도 춘계학술대회 논문집
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• pp.409-410
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• 2011

• 한국정밀공학회지
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• 제24권12호
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• pp.88-94
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• 2007

A flexure hinge-based compliant stage driven by stack-type piezoelectric elements has high precision motion but small operational range due to the characteristics of the piezoelectric element. Since the common flexure hinges can be broken by excessive deflection when the displacement is amplified by a high amplification ratio, a flexure hinge mechanism for large deflection is required. A cartwheel-type flexure hinge has an advantage of larger deflection compared with the common flexure hinges. This study presents a rotation stage with cartwheel-type flexure hinges driven by a stack-type piezoelectric element. The characteristics and the performance of the rotation stage are described by the terms of principal resonance frequency, amplification ratio of rotational displacement, maximum rotational displacement and block moment, in which the terms are analyzed by geometric parameters of the rotation stage. The analyzed results will be used as the guideline of the design of the rotation stage.

• 한국기계가공학회지
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• 제5권1호
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• pp.39-44
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• 2006

Ultra precision positioning mechanism has been widely used on semiconductor manufacturing equipments, optical spectrum analyzers and cell manipulations. Ultra precision positioning mechanism consists of several actuators, sensors, guides and control systems. Its efficiency depends on each performance of components. The object of this study is to design and analyze the micro stage that is one of the equipments embodied in ultra precision positioning mechanism. The micro stage consists of PZT actuators and flexure hinges. The structural design of flexure hinge is optimized by using RSM and FEM. The control factors concerned with the design of flexure hinges of stage and arms are optimized by minimizing the equivalent stress on the hinge and maximizing 1st natural frequency based on RSM and FEM simulation under various kinds of design conditions.

• 한국정밀공학회지
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• 제20권2호
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• pp.168-175
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• 2003

In this research, a bridge-type flexure hinge mechanism is developed and optimized to amplify the displacement of a multilayer piezostack. Developed hinge mechanism has three-dimensional structure to reduce link size, so it have high amplification ratio with respect to small size. A flexure hinge is assumed to be 6 degree-of-freedom spring elements and matrix methods are used to model a hinge mechanism. To verify derived matrix model, a displacement and frequency experiments are performed. The analysis result shows that the displacemental error between matrix model and experiments is below 10 percents and the deformation of hinge in parasitic direction should be considered In hinge modeling. Using developed matrix model, an optimal design is performed to maximize the performance of hinge mechanism.