Abstract
In this research, a bridge-type flexure hinge mechanism is developed and optimized to amplify the displacement of a multilayer piezostack. Developed hinge mechanism has three-dimensional structure to reduce link size, so it have high amplification ratio with respect to small size. A flexure hinge is assumed to be 6 degree-of-freedom spring elements and matrix methods are used to model a hinge mechanism. To verify derived matrix model, a displacement and frequency experiments are performed. The analysis result shows that the displacemental error between matrix model and experiments is below 10 percents and the deformation of hinge in parasitic direction should be considered In hinge modeling. Using developed matrix model, an optimal design is performed to maximize the performance of hinge mechanism.