• Title/Summary/Keyword: Film formation

Search Result 1,835, Processing Time 0.033 seconds

Neural Network Models of Oxide Film Etch Process for Via Contact Formation (Via Contact 형성을 위한 산화막 식각공정의 신경망 모델)

  • 박종문;권성구;박건식;유성욱;배윤구;김병환;권광호
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
    • /
    • v.15 no.1
    • /
    • pp.7-14
    • /
    • 2002
  • In this paper, neutral networks are used to build models of oxide film etched In CHF$_3$/CF$_4$ with a magnetically enhanced reactive ion etcher(MERIE). A statistical 2$\^$4-1/ experimental design plus one center point was used to characterize relationships between process factors and etch responses. The factors that were varied include radio frequence(rf) power, pressure, CHF$_3$ and CF$_4$ flow rates. Resultant 9 experiments were used to train neural networks and trained networks were subsequently tested on its appropriateness using additionally conducted 8 experiments. A total of 17 experiments were thus conducted for this modeling. The etch responses modeled are dc bias voltage, etch rate and etch uniformity A qualitative, good agreement was obtained between predicted and observed behaviors.

The Effects of Sliding Speed and Load on Tribological Behavior of Ceramics in Line-contact Sliding (선접촉시 세라믹의 마찰 및 마멸 특성에 미치는 속도와 하중의 영향)

  • 김영호;이영제
    • Tribology and Lubricants
    • /
    • v.11 no.4
    • /
    • pp.35-44
    • /
    • 1995
  • Within the practical ranges of speed and load, the formation of transfer films and the consequent effects on the friction and wear behavior of ceramic materials during repeated pass sliding contact were studied. These tests were done using $Al_{2}O_{3}$, SiC and $Si_{3}N_{4}$ with the cylinder-on-flat test configuration. The three pairings behaved differently, even if some wear mechanisms were common to the three systems. The $Al_{2}O_{3}$ pair showed the least wear in overall conditions, followed by the $Si_{3}N_{4}$ pair in harder sliding conditions. The wear of SiC was very high at severe loading. In case of $AL_{2}O_{3}$ and $Si_{3}N_{4}$, the transfer film, whenever formed, is strongly attached, enough to resist being wiped off by the slider. As a consequence, the formation of this f'fim leads to a decrease in the wear rate because of the protecting role of the film. The presence of the film at the contact interface also results in high friction. Also, the wear rate of each ceramics is related to the frictional power provided by load, speed and friction.

High-temperature Oxidation of the TiAlCrSiN Film Deposited on the Cemented Hard Carbide

  • Lee, Dong Bok
    • Journal of the Korean institute of surface engineering
    • /
    • v.47 no.5
    • /
    • pp.252-256
    • /
    • 2014
  • The TiAlCrSiN film was deposited on the WC-20%TiC-10%Co carbide, and its oxidation behavior was examined at $700-1000^{\circ}C$. It displayed relatively good oxidation resistance owing to the formation of $TiO_2$, $Al_2O_3$, $Cr_2O_3$, and $SiO_2$ up to $900^{\circ}C$. However, at $1000^{\circ}C$, the fast oxidation rate and partial oxidation of WC in the substrate led to the formation of the thick, fragile oxide scale.

Studies on the Food Preservation by Antimicrobial Action of Medicinal Herbs -Part I. Repression of Growth of Film Yeasts in Soy Sauce by Some Medicinal Herbs- (생약재(生藥材)에 의(依)한 식품보존(食品保存)에 관(關)한 연구(硏究) -(제 1 보) 몇 가지 생약재(生藥材)의 간장 방부효과(防腐效果)-)

  • Park, Soo-Woong;Kim, Chan-Jo
    • Applied Biological Chemistry
    • /
    • v.22 no.2
    • /
    • pp.91-96
    • /
    • 1979
  • Several herbs were tested for their antimicrobial activities during preservation of soy sauces. The herbs which resulted in retarded growth of film yeasts were extracted and added to various media such as koji-extract agar, buion-peptone agar to elucidate effects on the growth of film yeasts, Aspergillus oryzae and Bacillus subtilis. The results obtained were as follows: 1) Addition of phellodendron powder resulted in retarded formation of film in fermented soy sauces. Film was produced after 2 days without addition of the phellodendron powder. However, formation of film was observed after 8 days when 0.5 per cent of the phellodendron powder was added, and after 12 days when 1.0 per cent of the powder was added to fermented soy sauce. 2) For the amino acid soy sauce, formation of film was retarded for 6 days by 0.5 per cent of the pow der and for 8 days by 1.0 per cent of the powder. 3) Repression of film yeasts by addition of helenii and camphora powder was recognized respectively, but other herbs were appeared to have no detectable effects. 4) Growth of film yeast and Asp. oryzae way, retarded for 5 days on koji-extract agar plates which contain 0.5 per cent of phellodendron extract. Bac. subtilis also showed retarded growth for 5 days on buion-peptone agar plates containing the same amount of the extract. 5) Retarded growth of film yeast for 5 days was obtained when grown on koji-extract agar plates containing 15 per cent of sodium chloride and 0.3 per cent of phellodendron powder, however, no growth of Asp. oryzae was obtained on this concentration of sodium chloride. Growth of Bac. subtilis was repressed for 5 days on buion-peptone agar plates which contain 15 per cent of sodium chloride and 0.1 per cent of phellodendron powder.

  • PDF

Effect of Na3PO4 Concentration on The Formation Behavior of PEO films on AZ31 Mg Alloy (AZ31 Mg합금의 PEO피막 형성거동에 미치는 인산나트륨 농도의 영향)

  • Moon, Sungmo;Kim, Juseok
    • Journal of the Korean institute of surface engineering
    • /
    • v.52 no.5
    • /
    • pp.265-274
    • /
    • 2019
  • Formation behavior of PEO (Plasma Electrolytic Oxidation) films on AZ31 Mg alloy was investigated under application of 310 Hz AC as a function of $Na_3PO_4$ concentration from 0.02 M to 0.2 M. Film formation voltage and in-situ observation of arcs generated on the specimen surface were recorded with time, and surface morphologies of the PEO films were investigated using optical microscopy, confocal scanning laser microscopy and scanning electron microscopy. PEO film formation voltage decreased linearly with increasing $Na_3PO_4$ concentration which is attributed to the increase of solution pH. PEO films were grown uniformly over the entire surface in $Na_3PO_4$ solutions between 0.05 M and 0.1 M. However, non-uniform PEO films with white spots were formed in $Na_3PO_4$ solutions containing more than 0.1 M. Thickness and roughness of PEO films on AZ31 Mg alloy increased linearly with increasing $Na_3PO_4$ concentration and their increasing rates appeared to be much higher under 1 M than above 1 M. The experimental results suggest that phosphate ions can contribute to the formation of PEO films but higher $Na_3PO_4$ concentration more than 1 M results in local damages of PEO films due to repeated generation of white arcs at the same surface site of AZ31 Mg alloy.

Effect of Acid Fog on Rust Formation and Fatigue Strength of Weathering Steel (산성안개가 내후성강재의 녹형성 및 피로강도에 미치는 영향)

  • Kim, Min-Gun;Ku, Eun-hoi
    • Journal of Industrial Technology
    • /
    • v.22 no.B
    • /
    • pp.13-20
    • /
    • 2002
  • The purpose of this study is to investigate the effect of acid fog on the rust formation behavior of weathering steel (SMA50) which is used in uncoated bridges. Weathering steel didn't form the passive film under the environment of acid fog(pH5,6), whereas the environment of distilled water formed the protective oxide film. Therefore, the construction of weathering steel under the environment extremely exposed to SOx and NOx which are the main compositions of acid fog is not adequate. Fatigue limits of weathering steel under acid fog environment are remarkably decreased as compared with environment of distilled water. The corrosive constituents in acid fog has piled up the corrosion products on specimen surface and generated the corrosion pits. Because of the high stress concentration arising at this corrosion pit, relatively low fatigue limits were obtained for acid fog specimens.

  • PDF

Effect of Ultrasound During Pretreatment on the Electrochemical Etching of Aluminum and Its Capacitance (초음파를 이용한 전처리가 알루미늄의 전기화학적 에칭 및 정전용량에 미치는 효과)

  • Jung, Insoo;Tak, Yongsug;Park, Kangyong;Kim, Hyungi;Kim, Sungsoo
    • Corrosion Science and Technology
    • /
    • v.10 no.1
    • /
    • pp.37-42
    • /
    • 2011
  • Aluminum was electrochemically etched in acid solution and the surface area was magnified by the formation of etch pits. Etched aluminum was covered with a compact and dense dielectric oxide film by anodization and applied to the aluminum electrolytic capacitor electrode. Capacitance of aluminum electrolytic capacitor is closely related with surface area, which depends on size and number of etch pits. Size of etch pits need to be controlled because inside of the pits can be buried by the formation of dielectric oxide film. In this work, the effect of ultrasound pretreatment on the aluminum etch pit formation and capacitance were investigated. Additionally, the relationship between the second etching effect on pit size and capacitance was studied.

A Study on the Properties and Formation of Mo-Silicides on Si-Substrate (Si 기판위에 Mo-silicides의 형성과 그 특성에 관한 연구)

  • 조한수;조현춘;최진성;백수현
    • Journal of the Korean Institute of Telematics and Electronics A
    • /
    • v.28A no.1
    • /
    • pp.85-90
    • /
    • 1991
  • MoSi$_2$ was formed by RTA (Rapid Thermal Annealing at 600-1200$^{\circ}C$) under Ar ambient from the Mo-Si mixture film which was deposited on single and poly-Si substrates. The MoSi$_2$ film was investigated by SEM, X-ray diffractometer, four-points probe and AES profile. It was found that the resistivity, the surface roughness, and the formation temperature of MoSi$_2$ were independent on the type of Si substrates. The formation of MoSi$_2$ started from 800$^{\circ}C$ and the phse transformation was completed at 1000$^{\circ}C$. The stable MoSi$_2$ with the resistivity of 74${\mu}{\Omega}$-cm was formed at 1200$^{\circ}C$.

  • PDF

Effect of Acid Fog on Rust Formation and Fatigue Behavior of Weathering Steel Used in Un-Coated Bridge (무도장 교량에 사용되는 내후성강재의 부식 및 피로거동에 미치는 산성안개의 영향)

  • Kim, Min-Gun
    • Transactions of the Korean Society of Mechanical Engineers A
    • /
    • v.32 no.1
    • /
    • pp.13-20
    • /
    • 2008
  • The purpose of this study is to investigate the effect of acid fog on the rust formation behavior of weathering steel (SMA50) which is used in un-coated bridges. Weathering steel didn't form the passive film under the environment of acid fog(pH5,6), whereas the environment of distilled water formed the protective oxide film. Therefore, the construction of weathering steel under the environment extremely exposed to SOx and NOx which are the main compositions of acid fog is not adequate. Fatigue limits of weathering steel under acid fog environment are remarkably decreased as compared with environment of distilled water. The corrosive constituents in acid fog has piled up the corrosion products on specimen surface and generated the corrosion pits. Because of the high stress concentration arising at this corrosion pit, relatively low fatigue limits were obtained for acid fog specimens.

OPTICAL EMISSION SPECTROSCOPY OF Ch$_4$/Ar/H$_2$ GAS DISCHARGES IN RF PLASMA CVD OF HYDROGENATED AMORPHOUS CARBON FILMS

  • Lee, Sung-Soo;Osamu Takai
    • Journal of the Korean institute of surface engineering
    • /
    • v.29 no.6
    • /
    • pp.648-653
    • /
    • 1996
  • Hydrogenated amorphous carbon(a-C:H) films are prepared by rf plasma CVD in a $CH_4$ source gas system diluted with Ar of $H_2$. The spectra of emissive and reactive species in the plasma are detected using in stiu optical emission spectroscopy. Inaddition, the relationship between the film properties which can be varied by the deposition parameters and the Raman spectra is studied. In the $CH_4/H_2$ gas system, the emission intensities of CH and $H \tau$ decrease and those of $H \alpha$, $H \beta$, $C_2$ and Ar increase with increasing $H_2$ concentration, The formation of $C_2$ and CH in the $CH_4/Ar/H_2$ gas system is greatly suppressed by hydrogen addition and the excess of hydrogen addition is found to form graphite structure. The $C_2$ formation in the gas phase enhances a-C:H film formation.

  • PDF