• Proceedings of the Korean Vacuum Society Conference
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• 2013.08a
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• pp.179.1-179.1
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• 2013

Cylindrical Rotating Magnetron Sputtering Cathode (이하 Rotary Cathode)는 기존에 사용 되던 rectangular type 보다 Target 사용 효율이 높다는 큰 이점을 가지고 있다. 높은 Target 사용 효율은 비용 절감 효과와 직접적으로 관련 된다. 이번 연구는 3D Plasma simulation(PIC-MCC)을 통한 Target 사용 효율 80% 이상의 Rotary Cathode 개발을 목적으로 한다. Plasma simulation에 External Magnetic fields를 접목하여 Electron의 이동 궤적을 제어하였고, 생성된 Ion (Ar+)의 밀도 및 속도로 Plasma의 안정성과 Erosion 계산 구간을 선정 하였다. Target Erosion Profile은 Sputtering yield Data와 Target에 충돌한 Ion 정보를 사용하여 산출 하였으며, Sputtered Particles의 Deposition Profile은 계산된 Target Erosion Profile과 The cosine law of emission을 이용하여 계산 하였다. 실험 조건은 Plasma simulation의 초기조건 바탕으로 하여 2G size의 ITO Target을 대상으로 실험 하였다. 비 Erosion 영역 최소화하기 위해 Magnet Length를 변경하여 제작 적용 하였다. Simulation 계산 시간의 제약으로 인하여 simulation에서 생성된 최대 이온 밀도는 일반적으로 알려진 값 보다 적게 계산 되었지만, Simulation으로 예측한 Erosion Profile 및 Deposition Profile은 실험 값과 유사한 형태를 나타났으며, 실험 결과는 Target 사용 효율 80%이상의 결과를 보였다.

• Proceedings of the Korea Water Resources Association Conference
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• 2005.09a
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• pp.290-291
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• 2005

• Korean Journal of Optics and Photonics
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• v.9 no.3
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• pp.168-174
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• 1998

We have measured nonlinear refractive index and nonlinear absorption coefficient of optical materials by using a far-field phase modulation technique. The phase variation of the probe beam in the nonlinear material is transformed into the spatial phase modulation in the far-field so that the spatial distribution of the optical intensity in conjunction with the computer simulation analysis can give the nonlinear optical constants. We have obtained the nonlinear refractive indices and nonlinear absorption coefficient of $CS_2$ and $BaF_2$ by fitting the experimental values and numerical simulation analysis of far-field measurements. The nonlinear refractive indices of $CS_2$ and $BaF_2$were obtained as $1.2{\times}10^{-11}$ esu and $1.0{\times}10^{-13}$ esu, respectively at 616 nm, and the nonlinear absorption coefficient of BaF$_2$as $5.0{\times}10^{-11}$cm/W at 308nm. These measured values were in good agreement with previous reports.

• The Bulletin of The Korean Astronomical Society
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• v.41 no.1
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• pp.45.1-45.1
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• 2016

Spatially rotating magnetic fields have been observed in the solar wind and in the Earth's magnetopause as well as in reversed field pinch (RFP) devices. Such field configurations have a similarity with extended current layers having a spatially varying plasma pressure instead of the spatially varying guide field. It is thus expected that magnetic reconnection may take place in a rotating magnetic field no less than in an extended current layer. We have investigated the spontaneous evolution of a collisionless plasma system embedding a rotating magnetic field with a two-and-a-half-dimensional electromagnetic particle-in-cell (PIC) simulation. In magnetohydrodynamics, magnetic flux can be decreased by diffusion in O-lines. In kinetic physics, however, an asymmetry of the velocity distribution function can generate new magnetic flux near O- and X-lines, hence a dynamo effect. We have found that a magnetic-flux-reducing diffusion phase and a magnetic-flux-increasing dynamo phase are alternating with a certain period. The temperature of the system also varies with the same period, showing a similarity to sawtooth oscillations in tokamaks. We have shown that a modified theory of sawtooth oscillations can explain the periodic behavior observed in the simulation. A strong guide field distorts the current layer as was observed in laboratory experiments. This distortion is smoothed out as magnetic islands fade away by the O-line diffusion, but is soon strengthened by the growth of magnetic islands. These processes are all repeating with a fixed period. Our results suggest that a rotating magnetic field configuration continuously undergoes deformation and relaxation in a short time-scale although it might look rather steady in a long-term view.

• Proceedings of the Korean Fiber Society Conference
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• 2001.04b
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• pp.131-134
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• 2001

• The Transactions of the Korean Institute of Electrical Engineers C
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• v.49 no.1
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• pp.59-63
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• 2000

For the Mo-tip field emitter array, the method by which the geometrical structure of the gate insulator wall could be modified in order to improve field emission properties(turn-on voltage and gate leakage current). The device having a gate insulator of complex shape, which means the combined geometrical structure with round shape made by wet etching and vertical shape made by dry etching processes, was fabricated and the field emission properties of the three kinds of devices were compared. As a result, the electric field applied to tip apex could be increased and gate leakage current could be decreased by employing the gate insulator having geometrical wall structure of mixed shape. Finally, the obtained empirical results were analyzed by simulation of electric field distribution at/near the tip apex and gate insulator using SNU-FEAT simulator.

• The Transactions of the Korean Institute of Electrical Engineers C
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• v.51 no.3
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• pp.115-120
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• 2002

This Paper describes an algorithm for the design of axi-symmetrical spacer under specified field conditions. The electric field alas been calculated by combination method of Integral Equation Method(IEM) and Charge Simulation Method(CSM). The contour of spacer is represented with NURB(Non-Uniform Rational B-spline) curve of which effectiveness has been proved. This algorithm introduces a design process in the aspect of electrical field, when a spacer in airtight cylinder is designed. Also various field conditions for obtaining optical shapes have been proposed. Due to the algorithm, the entire process shows a stable convergence. Both tangential and total electrical field are taken into consideration as specified field criteria.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.25 no.4
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• pp.266-269
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• 2012

The most recently IGBT (insulated gate bipolar mode transistor) devices are in the most current conduction capable devices and designed to the big switching power device. Use this number of the devices are need to high voltage and low on-state voltage drop. And then in this paper design of field stop IGBT is insert N buffer layer structure in NPT planar IGBT and optimization design of field stop IGBT and trench field stop IGBT, both devices have a comparative analysis and reflection of the electrical characteristics. As a simulation result, trench field stop IGBT is electrical characteristics better than field stop IGBT.

• Proceedings of the Korean Vacuum Society Conference
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• 2012.02a
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• pp.501-501
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• 2012

A 2.45 GHz electron cyclotron resonance (ECR) plasma source with a belt magnet assembly configuration (BMC) was developed for hyperthermal neutral beam (HNB) generation. A plasma source for high flux HNB generation should be satisfied with the requirements: low pressure operation, high density, and thin plasma. The ECR plasma source with BMC achieved high density at low operation pressure due to electron confinement enhancement caused by high mirror ratio and drifts in toroidal direction. The 2.45 GHz microwave launcher had a circularly bended WR340 waveguide with slits. The microwave E-field profile induced by the microwave launcher was studied in this paper. The E-field profile was a cups field perpendicular to B-filed at ECR zone. The optimized E-field profile and B-field were found for effective ECR heating.

• Journal of the Korean Vacuum Society
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• v.8 no.2
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• pp.172-179
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• 1999

The axial distributions of plasma density in a helical resonator plasma with the external magnetic field have been measured using Langmuir probes. Net RF power is set to 200W and chamber pressure is varied from 0.4 mTorr to 100mTorr there are three kinds of eternal magnetic field structure applied on the helical resonator plasma. One is a uniform magnetic field, the second is a positive gradient magnetic field and the third is a negative gradient magnetic field. In the three magnetic field structures, the negative gradient magnetic field is found to show the highest increase in plasma density on the substrate compared with other magnetic structures. Plasma density profile in helical resonator is well consistent with electromagnetic field pattern obtained by computer simulation. It is also found that axial magnetic fields do not affect plasma density distribution in the plasma reactor region, but induce the increase of plasma density in the process chamber region. In order to avoid the nonuniformity of radial density profile, weak magnetic fields under 100G are applied.