• Title/Summary/Keyword: Field emission scanning electron microscope (FESEM)

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Fabrication of the micro-mold and nanofiber using cellulose solution (셀룰로오스를 이용한 마이크로 몰드 및 나노섬유 제작)

  • Cho, Ki-Youn;Lim, Hyun-Kyu;Kang, Kwang-Sun;Kim, Jae-Hwan
    • Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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    • 2007.11a
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    • pp.69-72
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    • 2007
  • Cellulose is a beneficial material that has low cost, lightweight, high compatibility and biodegradability. Recently electroactive paper (EAPap) on cellulose base was discovered as a smart material and actuator through ion migration and piezoelectric effect. Furthermore cellulose has a potentiality to apply the display material, because of its high reflectivity, flexibility and high transmittance. The various shapes and height patterns of the Cellulose acetate (CA) solution, such as circle and honeycomb patterns, were fabricated and observed by field emission scanning electron microscope (FESEM, S4300 Hitachi). The resulting pattern showed uniform size in the large area without defect. After stretching the CA film with saponification process in the sodium methoxide in methanol solution, Most of the compositions become one directional ordered nanofibers below 50nm.

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Optical and Electrical Properties of Indium Doped PEDOT:PSS

  • Kim, Byoung-Ju;Kang, Kwang-Sun
    • Current Photovoltaic Research
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    • v.5 no.4
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    • pp.109-112
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    • 2017
  • Various wt. ratios of indium were doped to the poly(3,4-ethylenedioxythiophene)-poly(styreneswulfonate) (PEDOT:PSS) to enhance the conductivity and transmittance. The transmittance of the films increased with increasing the amount of indium. The field emission scanning electron microscope (FESEM) image of 2.54 wt. % of indium doped PEDOT:PSS film shows large number of aggregated indium particles. However, more than 2.54 wt. % of indium doped PEDOT:PSS films showed reduced aggregated indium particles. Moreover, 4.47 wt. % of indium doped PEDOT:PSS film showed no aggregated particles. The resistivity of pure PEDOT:PSS film showed $880k{\Omega}{\cdot}cm$. The resistivity of 1.03 wt. % indium doped film reduced approximately 26 times compared with pure PEDOT:PSS film. The resistivity of indium doped film further reduced with increasing the amount of indium, which showed approximately $0.55k{\Omega}{\cdot}cm$ for the PEDOT:PSS film doped 4.47 wt. % of indium.

Properties of ITO thin film's aging change prepared on the various substrate (다양한 기판에 제작한 ITO 박막의 실온 특성 변화)

  • Kim, Sang-Mo;Rim, You-Seung;Son, In-Hwan;Kim, Kyung-Hwan
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2008.06a
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    • pp.403-404
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    • 2008
  • In this study, we prepared ITO thin film on glass, polycarbonate (PC) and polyethersulfone (PES) substrate in Facing Targets sputtering (FTS) system. Properties of as-deposited thin films's aging change were investigated as a function of time placed in the air. The electrical and optical properties of as-deposited thin films were employed by a four point probe and an UV/VIS spectrometer, an X-ray diffractometer (XRD), a Field Emission Scanning Electron Microscope(FESEM) and a Hall Effect measurement. As a result, as time went by, transmittance of all films did not change but resistivity of films was decreasing.

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A Study on Oxygen Precipitation in Heavily Boron Doped Silicon Wafer (고농도 붕소의 도핑된 실리콘 웨이퍼에서의 산소석출에 관한 연구)

  • 윤상현;곽계달
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.11 no.9
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    • pp.705-710
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    • 1998
  • Intrinsic gettering is usually to improve wafer quality, which is an important factor for reliable ULSI devices. In order to generate oxygen precipitation in lightly and heavily boron doped silicon wafers with or without high $^75 As^+$ ion implantation, the 2-step annealing method was adopted. After annealing, the were cleaved and etched with th Wright etchant. The morphology of cross section on samples was inspected by FESEM(field emission scanning electron microscopy). The morphology of unimplanted samples was rater rough than that of the implanted. Oxygen precipitation density observed by an optical microscope in lightly boron doped samples was about 3$\times10^6/cm^3$. However, in heavily boron doped samples, the density of oxygen precipitation was largest at $600^{\circ}C$ in 1st annealing, and decreased abruptly until $800^{\circ}C$, But it increased slightly at $1000^{\circ}C$ and was independent with the implantation.

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대향타겟식 스퍼터법으로 증착한 GAZO 박막의 투입전력에 따른 특성

  • Kim, Gyeong-Hwan
    • Proceedings of the Korean Vacuum Society Conference
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    • 2010.02a
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    • pp.217-217
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    • 2010
  • 새로운 물질의 투명전극 제작을 위해 대향타겟식 스퍼터링 (Facing Targets Sputtering, FTS)법을 이용하여 유리 기판위에 AZO와 GZO 이종타겟을 사용하여 유리 기판 위에 GAZO 박막을 제작하였다. FTS는 두 타겟이 서로 마주보는 구조로 인해 서로 다른 종류의 타겟을 장착하여 새로운 물질의 박막을 제작하는데 있어 용이하고, 타겟 뒷면에 위치한 영구자석으로 인해 타겟으로부터 방출되는 2차 전자 등을 구속하여 고밀도 플라즈마를 형성함으로서 고품위 박막의 제작이 가능하다. 본 연구에서는 투입 전력에 따라 제작된 GAZO 박막의 전기적, 광학적 및 구조적 특성 변화를 살펴보았다. 특성 평가는 UV/VIS spectrometer, Hall measurement, X-ray diffractometer (XRD), Atomic Force Microscope (AFM), Field Emission Scanning Electron Microscopy (FESEM) 을 이용하여 분석하였다. 그 결과 제작된 GAZO 박막은 비저항 $4.3\;{\times}\;10^{-4}\l;{\Omega}-cm$, 가시광 영역에서 투과율 80% 이상을 나타내는 것으로 분석되었다.

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Fabrication of Nanopatterns by Using Diblock Copolymer

  • KANG GIL BUM;KIM SEONa-IL;KIM YONG TAE;KIM YOUNG HHAN;PARK MIN CHUL;KIM SANG JIN;LEE CHANG WOO
    • Proceedings of the Korean Society Of Semiconductor Equipment Technology
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    • 2005.09a
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    • pp.183-187
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    • 2005
  • Thin films of diblock copolymers may be suitable for semiconductor device applications since they enable patterning of ordered domains with dimensions below photolithographic resolution over wafer-scale area. We obtained nanometer-scale cylindrical structure of dibock copolymer of polystyrene-block-poly(methylmethacrylate), PS-b-PMMA, also demonstrate pattern transfer of the nanoporous polymer using both reactive ion etching. The size of fabricated naonoholes were about 10 nm. Fabricated nanopattern surface was observed by field emission scanning electron microscope (FESEM).

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Improved Thermal, Structural and Electrical Properties of Elastic-Epoxy Blends System

  • Lee, Kyoung-Yong;Lee, Kwan-Woo;Choi, Yong-Sung;Park, Dae-Hee
    • KIEE International Transactions on Electrophysics and Applications
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    • v.4C no.5
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    • pp.230-235
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    • 2004
  • In this paper, epoxy elasticity factors were investigated by TMA (Thermomechanical Analysis), DMTA (Dynamic Mechanical Thermal Analysis) and FESEM (Field Emission Scanning Electron Microscope) to improve toughness and reduce brittleness of existing epoxy resin. Dumbbell shaped specimens were made and tested at rates of 0, 20 and 35phr (part per hundred resins). TMA temperatures ranged from -2$0^{\circ}C$ to 20$0^{\circ}C$. Tg (glass transition temperature) of elastic epoxy was measured by thermal analysis. Also investigated were thermal expansion coefficient ($\alpha$), modulus and Tan$\delta$ (loss factor). And we analyzed structure through FESEM, could find elastic-factors of elastic epoxy that is not existing-epoxy. In addition, we measured permittivity and Tan$\delta$ for investigation of the electrical properties of elastic epoxy. Permittivity and Tan$\delta$ depend on elastomer composition. Namely, permittivity and Tan$\delta$ increase according to the elastomer contents. For experimental analysis results, 20phr was considered an excellent specimen.

Surface Modification of Silica Spheres for Copper Removal

  • Kim, Byoung-Ju;Park, Eun-Hye;Kang, Kwang-Sun
    • Journal of the Korean Chemical Society
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    • v.60 no.5
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    • pp.317-320
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    • 2016
  • Efficient copper removal from water was achieved by using surface modified silica spheres with 3-mercaptopropyltrimethoxysilane (MPTMS) using base catalyst. The surface modification of silica spheres was performed by hydrolysis and condensation reactions of the MPTMS. The characteristic infrared absorption peaks at 2929, 1454, and 1343 cm−1 represent the −CH2 stretching vibration, asymmetric deformation, and deformation, respectively. The absorption peaks at 2580 and 693 cm−1 corresponding the −SH stretching vibration and the C-S stretching vibration indicate the incorporation of MPTMS to the surface of silica spheres. Field emission scanning electron microscope (FESEM) image of the surface modified silica sphere (SMSS) shows nano-particles of MPTMS on the surface of silica spheres. High concentration of copper solution (1000 ppm) was used to test the copper removal efficiency and uptake capacity. The FESEM image of SMSS treated with the copper solution shows large number of copper lumps on the surface of SMSS. The copper concentration drastically decreased with increasing the amount of SMSS. The residual copper concentrations were analyzed using inductively coupled plasma mass spectrometer. The copper removal efficiency and uptake capacity with 1000 ppm of copper solution were 99.99 % and 125 mg/g, respectively.

Iron(III) removal from aqueous solution using MCM-41 ceramic composite membrane

  • Basumatary, Ashim Kumar;Kumar, R. Vinoth;Pakshirajan, Kannan;Pugazhenthi, G.
    • Membrane and Water Treatment
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    • v.7 no.6
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    • pp.495-505
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    • 2016
  • Mesoporous MCM-41 was deposited on an inexpensive disk shaped ceramic support through hydrothermal technique for ultrafiltration of $Fe^{3+}$ from aqueous solution. The ceramic support was fabricated using uni-axial compaction technique followed by sintering at $950^{\circ}C$. The characteristics of MCM-41 powder as well as the composite membrane were examined by X-ray diffraction (XRD), thermogravimetric analysis (TGA), field emission scanning electron microscope (FESEM), porosity and pure water permeation test. The XRD result revealed the good crystallinity and well-resolved hexagonally arranged pore geometry of MCM-41. TGA profile of synthesized MCM-41 zeolite displayed the three different stepwise mechanisms for the removal of organic template. The formation of MCM-41 on the porous support was verified by FESEM analysis. The characterization results clearly indicated that the accumulation of MCM-41 by repeated coating on the ceramic disk directs to reduce the porosity and pore size from 47% to 23% and 1.0 to $0.173{\mu}m$, respectively. Moreover, the potential of the fabricated MCM-41 membrane was investigated by ultrafiltration of $Fe^{3+}$ from aqueous stream at various influencing parameters such as applied pressure, initial feed concentration and pH of solution. The maximum rejection 85% was obtained at applied pressure of 276 kPa and the initial feed concentration of 250 ppm at pH 2.

Thermal and Structural Properties of Elastic Epoxy According to Content Changes of Elastomer (엘라스토머 함량 변화에 아른 탄성에폭시의 열적, 구조적 특성)

  • Min, J.Y.;Lee, K.Y.;Lee, K.W.;Choi, Y.S.;Park, D.H.
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2004.07a
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    • pp.461-464
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    • 2004
  • In this paper, the elastic epoxy added elastomer having viscoelasticity to existing epoxy was measured thermal, structural properties through TGA(Thermogravimetric Analysis) and FESEM(Field Emission Scanning Electron Microscope). Specimens were made of dumbbell forms by the ratio of 5[phr], 10[phr], 15[phr], and 20[phr] by regulation with elastomer contents. The measurement temperature dimensions of TGA were $0[^{\circ}C]\;to\;800[^{\circ}C]$, and rising temperature was $5[^{\circ}C/min]$. And we observed structure through FESEM at the magnification of 1000times with the voltage of 15[kV] after breaking by quenching specimens. As thermal analysis results, we could know that thermal and structural properties was improved quantity according to decrease of elastomer contents. In general, thermal, structural properties of 15[phr] was excellent among the specimens.

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