• Title/Summary/Keyword: Feature Profile

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A study on platinum dry etching using a cryogenic magnetized inductively coupled plasma (극저온 자화 유도 결합 플라즈마를 이용한 Platinum 식각에 관한 연구)

  • 김진성;김정훈;김윤택;황기웅;주정훈;김진웅
    • Journal of the Korean Vacuum Society
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    • v.8 no.4A
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    • pp.476-481
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    • 1999
  • Characteristics of platinum dry etching were investigated in a cryogenic magnetized inductively coupled plasma (MICP). The problem with platinum etching is the redeposition of sputtered platinum on the sidewall. Because of the redeposits on the sidewall, the etching of patterned platinum structure produces feature sizes that exceed the original dimension of the PR size and the etch profile has needle-like shape [1]. The main object of this study was to investigate a new process technology for fence-free Pt etching As bias voltage increased, the height of fence was reduced. In cryogenic etching, the height of fence was reduced to 20% at-$190^{\circ}C$ compared with that of room temperature, however the etch profile was not still fence-free. In Ar/$SF_6$ Plasma, fence-free Pt etching was possible. As the ratio of $SF_6$ gas flow is more than 14% of total gas flow, the etch profile had no fence. Chemical reaction seemed to take place in the etch process.

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A Study on Optimum Tooth Profile of Pin-Pinion Gear for Linear Motion (직선이송용 Pin-Pinion Gear의 최적 치형에 대한 연구)

  • Ham, S.H.;Nam, W.K.;Oh, S.H.
    • Journal of Power System Engineering
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    • v.14 no.3
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    • pp.64-70
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    • 2010
  • In this study, designing of precise linear transferring device which can be applied to industrial machine and robot industry has been introduced. The direction of power flow and output feature are similar to current Rack-Pinion type. However, unlimited length extensity via rack modulizing, and securing high velocity transportation have been realized by applying Pin-Pinion Gear type at the operation part. The analysis has been calculated to obtain the Pin-Pinion Gear's optimized tooth profile. As a result of research, it is impossible to control precisely even overlap at the teeth of involute and sprocket. Because they have peculiar gearing structure. Therefore, modified cycloid tooth has been proposed to perform high velocity, precise control without backlash.

A Study for Filter and Signature on IDS (Feature Construction with Data Mining) (IDS에서 Filter 와 Signature 의 역할에 대한 연구 (Date Mining을 이용한 Feature Construction))

  • Lee, Jung-Hyun;Weon, Ill-Young;Lee, Chang-Hun
    • Proceedings of the Korea Information Processing Society Conference
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    • 2001.04b
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    • pp.1089-1092
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    • 2001
  • IDS 에서 가장 중요한 것은 침입을 논리적으로 모델링하고, 이것을 센싱 할 수 있는 Filter 의 개발이며 Filter 에서 발생한 이벤트들에서 특정 공격 행위를 인식할 수 있는 신호인 Signature 의 정의를 통해 이벤트 스트림에서 Signature 를 자동으로 인식할 수 있는 방법에 대한 연구가 가장 핵심적이라고 할 수 있다. 본 논문은 이러한 filter 와 Signature 에서 사용할 수 있도록 특징들이 정의 되어있는 양식으로 원시 데이터로부터 profile 을 생성 filter 와 signature 에서 탐지할 수 있는 모듈을 적용할 수 있도록 네트웍과 host input stream 등의 raw audit data 에서 특징을 추출 Feature Construction 작성에 대한 연구이다.

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The effects of Oriental medicine treatment and the characteristics of MMPI profile on Vertigo Patients (어지럼증 환자(患者)의 MMPI 프로파일 특성과 한의학적(韓醫學的) 치료효과(治療效果))

  • Kim, Jin-Woo;Lee, Soon-E;Kim, Ja-Young;Kim, Tae-Heon;Lyu, Yeong-Su;Kang, Hyung-Won
    • Journal of Oriental Neuropsychiatry
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    • v.17 no.3
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    • pp.67-75
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    • 2006
  • This Study is attempted to analyze Minnesota Multiphasic Personality Inventory responses to Vertigo patients and remedial value of Oriental medicine treatment. Methods: 24 Vertigo patients and 28 control group were tested by MMPI and QSCCII. It is analyzed by cluster analysis, one-way ANOVA, chi-square test, t-test, Duncan method is used as ex-post test. Results and Conclusions: 1. The MMPI scores of Vertigo patients were elevated in Hs, Hy clinical scales, 1-3 profile type, it is profile of conversional neurosis. In this case body condition where the psychological problem will get conversion is a notable feature. 2. All of the profiles can be classified three types of profile. Group 1(33.3%) showed 1-3-2 profile type and elevated Pt. scale, suggesting mainly depressive neurosis in the department of neuropsychiatry. Group 2 (37.5%) showed a normal profile. Group 3(29.2%) showed 1-3 profile type it is profile of conversional neurosis. With this result it is indicated that 62.5% Vertigo patients are related to emotional difficulties. 3. There was to a remedial value for the Vertigo patients, before treating from VAS score 10.00 after treating at VAS score 4.13. From this study, we know the possibility the Oriental medicine register remedial value for the Vertigo patients.

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Performance Improvement of TRN Batch Processing Using the Slope Profile (기울기 프로파일을 이용한 일괄처리 방식 지형참조항법의 성능 개선)

  • Lee, Sun-Min;Yoo, Young-Min;Lee, Won-Hee;Lee, Dal-Ho;Park, Chan-Gook
    • Journal of Institute of Control, Robotics and Systems
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    • v.18 no.4
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    • pp.384-390
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    • 2012
  • In this paper, we analyzed the navigation error of TERCOM (TErrain COntour Matching), which is TRN (Terrain Referenced Navigation) batch processing, caused by scale factor error of radar altimeter and proved the possibility of false position fix when we use the TERCOM's feature matching algorithm. Based on these, we proposed the new TRN batch processing algorithm using the slope measurements of terrain. The proposed technique measures on periodic changes in the slope of the terrain elevation profile, and these measurements are used in the feature matching algorithm. By using the slope of terrain data, the impact of scale factor errors can be compensated. By simulation, we verified improved outcome using this approach compared to the result using the conventional method.

Scanning System Method for Calculating Ion Flux in Plasma Etching Simulation (플라즈마 식각 시뮬레이션을 위한 스캔 방식의 이온 플럭스 계산 방법)

  • Shin, Sung-Sik;Yu, Dong-Hun;Gwun, Ou-Bong
    • Journal of the Institute of Electronics and Information Engineers
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    • v.50 no.10
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    • pp.124-131
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    • 2013
  • The most important thing in Plasma simulation is the etching process in which etch rate is calculated based on feature profile. Although there are various components to consider in calculating etch rate such as Ion Flux, Neutral, gas, and temperature, Addressing of this paper is limited to Ion Flux. This paper propose a scan method to compute Ion Flux faster for Plasma simulation. Also, this paper experiments and compares generally used Monte Carlo method and the proposed method based on gaussian and cosine distribution. Lastly, this paper proves that the proposed method can calculate accurate Ion Flux more efficiently than Monte Carlo method.

Video Data Classification based on a Video Feature Profile (특성정보 프로파일에 기반한 동영상 데이터 분류)

  • Son Jeong-Sik;Chang Joong-Hyuk;Lee Won-Suk
    • The KIPS Transactions:PartD
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    • v.12D no.1 s.97
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    • pp.31-42
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    • 2005
  • Generally, conventional video searching or classification methods are based on its meta-data. However, it is almost Impossible to represent the precise information of a video data by its meta-data. Therefore, a processing method of video data that is based on its meta-data has a limitation to be efficiently applied in application fields. In this paper, for efficient classification of video data, a classification method of video data that is based on its low-level data is proposed. The proposed method extracts the characteristics of video data from the given video data by clustering process, and makes the profile of the video data. Subsequently. the similarity between the profile and video data to be classified is computed by a comparing process of the profile and the video data. Based on the similarity. the video data is classified properly. Furthermore, in order to improve the performance of the comparing process, generating and comparing techniques of integrated profile are presented. A comparing technique based on a differentiated weight to improve a result of a comparing Process Is also Presented. Finally, the performance of the proposed method is verified through a series of experiments using various video data.

The Study for Investigation of the sufficient vertical profile with reducing loading effect for silicon deep trench etching (Vertical Profile Silicon Deep Trench Etch와 Loading effect의 최소화에 대한 연구)

  • Kim, Sang-Yong;Jeong, Woo-Yang;Yi, Keun-Man;Kim, Chang-Il
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2009.06a
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    • pp.118-119
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    • 2009
  • This paper presents the feature profile evolution silicon deep trench etching, which is very crucial for the commercial wafer process application. The silicon deep trenches were etched with the SF6 gas & Hbr gas based process recipe. The optimized silicon deep trench process resulted in vertical profiles (87o~90o) with loading effect of < 1%. The process recipes were developed for the silicon deep trench etching applications. This scheme provides vertically profiles without notching of top corner was observed. In this study, the production of SF6 gas based silicon deep trench etch process much more strongly than expected on the basis of Hbr gas trench process that have been investigated by scanning electron microscope (SEM). Based on the test results, it is concluded that the silicon deep trench etching shows the sufficient profile for practical MOS FET silicon deep trench technology process.

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Face Recognition Based on Weighted Hausdorff Distance for Profile Image (가중치 하우스도르프 거리를 이용한 프로파일 얼굴인식)

  • 이영학
    • Journal of Korea Multimedia Society
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    • v.7 no.4
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    • pp.474-483
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    • 2004
  • In this paper, we present a new Practical implementation of a person verification system using the profile of 3-dimensional(3D) face images based on weighted Hausdorff distance(WHD) used depth information. The approach works on finding the nose tip have protrusion shape on the face using iterative selection method to use a fiducial feint and extract the profile image from vertical 3D data for the nose tip. Hausdorff distance(HD) is one of usually used measures for object matching. This works analyze the conventional HD and WHD, which the weighted factor is depth information. The Ll measure for comparing two feature vectors were used, because it is simple and robust. In the experimental results, the WHD method achieves recognition rate of 94.3% when the ranked threshold is 5.

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Discovery of Preference through Learning Profile for Content-based Filtering (내용 기반 필터링을 위한 프로파일 학습에 의한 선호도 발견)

  • Chung, Kyung-Yong;Jo, Sun-Moon
    • The Journal of the Korea Contents Association
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    • v.8 no.2
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    • pp.1-8
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    • 2008
  • The information system in which users can utilize to control and to get the filtered information efficiently has appeared. Content-based filtering can reflect content information, and it provides recommendation by comparing the feature information about item and the profile of preference. This has the shortcoming of the varying accuracy of prediction depending on teaming method. This paper suggests the discovery of preference through learning the profile for the content-based filtering. This study improves the accuracy of recommendation through learning the profile according to granting the preference of 6 levels to estimated value in order to solve the problem. Finally, to evaluate the performance of the proposed method, this study applies to MovieLens dataset, and it is compared with the performance of previous studies.