• Proceedings of the Korean Institute of Information and Commucation Sciences Conference
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• v.9 no.2
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• pp.389-392
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• 2005

차세대 반도체 공정을 위한 많은 노력 중 Reactive Ion Etching(RIE)에 대한 연구의 중요성은 계속되고 있으며, 현재 제조공정 라인에서는 공정상의 오류를 줄이는 노력에 주목 하고 있다. 본 논문에서는 이러한 점을 고려하여 반도체 제조 장비에서 발생하는 실시간 데이터에 대해 신경망을 이용하여 각 장비파라미터의 허용범위를 검출하고, 제안된 방법의 성능평가를 위하여, 생산라인에서 수립된 데이터를 활용하였다. 기존의 통계적 공정제어(SPC) 제서 지시되는 방법이 아닌 신경망 모델을 통하여 random variability를 고려한 control limit을 제시한다.

• Journal of KIISE:Computing Practices and Letters
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• v.15 no.11
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• pp.806-818
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• 2009

Since the invention of the integrated circuit (IC) in 1950s, semiconductor technology has undergone dramatic development up to these days. A complete semiconductor is manufactured through a diversity of processes. For better semiconductor productivity, fault detection and classification (FDC) has been rigorously studied for finding faults even before the processes are completed. For FDC, various kinds of sensors are attached in many semiconductor manufacturing devices, and sensor values are collected in a periodic manner. The collection of sensor values consists of sequences of real numbers, and hence is regarded as a kind of time-series data. In this paper, we propose an algorithm for detecting and clustering faults in semiconductor processes. The proposed algorithm is a modification of the existing anomaly detection algorithm dealing with symbolically-represented time-series. The contributions of this paper are: (1) showing that a modification of the existing anomaly detection algorithm dealing with general time-series could be used for semiconductor process data and (2) presenting experimental results for improving correctness of fault detection and clustering. As a result of our experiment, the proposed algorithm caused neither false positive nor false negative.

• JSTS:Journal of Semiconductor Technology and Science
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• v.13 no.4
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• pp.395-401
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• 2013

In-situ optical emission spectroscopy (OES) is employed for leak detection in plasma etching system. A misprocessing is reported for significantly reduced silicon etch rate with chlorine gas, and OES is used as a supplementary sensor to analyze the gas phase species that reside in the process chamber. Potential cause of misprocessing reaches to chamber O-ring wear out, MFC leaks, and/or leak at gas delivery line, and experiments are performed to funnel down the potential of the cause. While monitoring the plasma chemistry of the process chamber using OES, the emission trace for nitrogen species is observed at the chlorine gas supply. No trace of nitrogen species is found in other than chlorine gas supply, and we found that the amount of chlorine gas is slightly fluctuating. We successfully found the root cause of the reported misprocessing which may jeopardize the quality of thin film processing. Based on a quantitative analysis of the amount of nitrogen observed in the chamber, we conclude that the source of the leak is the fitting of the chlorine mass flow controller with the amount of around 2-5 sccm.

• Journal of the Korea Society of Computer and Information
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• v.16 no.12
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• pp.187-196
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• 2011

Induction motors play a vital role in aeronautical and automotive industries so that many researchers have studied on developing a fault detection and classification system of an induction motor to minimize economical damage caused by its fault. With this reason, this paper extracts robust feature vectors from the normal/abnormal vibration signals of the induction motor in noise circumstance: partial autocorrelation (PARCOR) coefficient, log spectrum powers (LSP), cepstrum coefficients mean (CCM), and mel-frequency cepstrum coefficient (MFCC). Then, we classified different types of faults of the induction motor by using the extracted feature vectors as inputs of a neural network. To find optimal feature vectors, this paper evaluated classification performance with 2 to 20 different feature vectors. Experimental results showed that five to six features were good enough to give almost 100% classification accuracy except features by CCM. Furthermore, we considered that vibration signals could include noise components caused by surroundings. Thus, we added white Gaussian noise to original vibration signals, and then evaluated classification performance. The evaluation results yielded that LSP was the most robust in noise circumstance, then PARCOR and MFCC followed by LSP, respectively.

• The Transactions of the Korean Institute of Electrical Engineers A
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• v.54 no.11
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• pp.525-532
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• 2005

This paper presents a new two-terminal numerical algorithm for fault location estimation and for faults recognition using the synchronized phaser in time-domain. The proposed algorithm is also based on the synchronized voltage and current phasor measured from the assumed PMUs(Phasor Measurement Units) installed at both ends of the transmission lines. Also the arc voltage wave shape is modeled numerically on the basis of a great number of arc voltage records obtained by transient recorder. From the calculated arc voltage amplitude it can make a decision whether the fault is permanent or transient. In this paper the algorithm is given and estimated using DFT(discrete Fourier Transform) and the LES(Least Error Squares Method). The algorithm uses a very short data window and enables fast fault detection and classification for real-time transmission line protection. To test the validity of the proposed algorithm, the Electro-Magnetic Transient Program(EMTP/ATP) is used.

• Journal of Electrical Engineering and Technology
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• v.13 no.4
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• pp.1614-1622
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• 2018

The research related to fault diagnosis in permanent magnet synchronous motors (PMSMs) has attracted considerable attention in recent years because various faults such as permanent magnet demagnetization and short-circuited turns can occur and result in unexpected failure of motor related system. Several conventional current and back electromotive force (BEMF) analysis techniques were proposed to detect certain faults in PMSMs; however, they generally deal with a single fault only. On the contrary, cases of multiple faults are common in PMSMs. We propose a fault diagnosis method for PMSMs with single and multiple combined faults. Our method uses three phase BEMF voltages based on the fast Fourier transform (FFT), support vector machine(SVM), and visualization tools for identifying fault types and severities in PMSMs. Principal component analysis (PCA) and t-distributed stochastic neighbor embedding (t-SNE) are used to visualize the high-dimensional data into two-dimensional space. Experimental results show good visualization performance and high classification accuracy to identify fault types and severities for single and multiple faults in PMSMs.

• Smart Structures and Systems
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• v.29 no.6
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• pp.785-790
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• 2022

Condition monitoring of permanent magnet synchronous motors (PMSMs) and detecting faults such as eccentricity and demagnetization are essential for ensuring system reliability. Motor current signal analysis is the most commonly used precursor for detecting faults in the PMSM drive system. However, the current signature responds sensitively to the load and temperature of the motor, thereby making it difficult to monitor faults in real- applications. Therefore, in this study, a condition monitoring methodology that detects motor faults, including their classification with standstill conditions, is proposed. The objective is to detect and classify faults of PMSMs by using programmable inverter without additional sensors and systems for detection. Both DC and AC were applied through the d-axis of a three-phase motor, and the change in incremental inductance was investigated to detect and classify faults. Simulation with finite element analysis and experiments were performed on PMSMs in healthy conditions as well as with eccentricity and demagnetization faults. Based on the results obtained from experiments, the proposed method was confirmed to detect and classify types of faults, including their severity.

• Journal of the Korea Academia-Industrial cooperation Society
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• v.20 no.8
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• pp.216-223
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• 2019

Fault detection during production processes is one of the required operational tasks to run production processes both safely and consistently. Unexpected operational events or undetected process faults can have a serious impact on the production systems and subsequently on the final products' quality. In addition, such situations may lead to malfunctions or breakdowns of production processes. To reliably detect such abnormalities, a new one-class classification-based detection scheme has recently been developed The proposed method consists of four steps:1) noise filtering, 2) feature selection, 3) nonlinear representation and 4) outlier detection. The performance of the proposed scheme was demonstrated using the multivariate data obtained from a simulation process. The results have shown that the proposed method produced reliable monitoring results and outperforms any existing methods with an average improvement of 25.4%. The use of proper feature selection in the proposed framework yielded better detection performance.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2011.04a
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• pp.224-229
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• 2011

In this paper, in order to improve safety of hybrid electric vehicle a fault detection algorithm is introduced. The proposed algorithm uses SVDD techniques. Two methods for learning a lot of data are used in this technique. One method is to learn the data incrementally. Another method is to remove the data that does not affect the next learning. Using lines connecting support vectors selection of removing data is made. Using this method, lot of computation time and storage can be saved while learning many data. A battery data of commercial hybrid electrical vehicle is used in this study. In the study fault boundary via SVDD is described and relevant algorithm for virtual fault data is verified. It takes some time to generate fault boundary, nevertheless once the boundary is given, fault diagnosis can be conducted in real time basis.

• Journal of the Korea Society of Computer and Information
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• v.19 no.11
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• pp.17-24
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• 2014

This paper proposes a fault detection method for low-speed rolling element bearings of an induction motor using acoustic emission signals and histogram modeling. The proposed method performs envelop modeling of the histogram of normalized fault signals. It then extracts and selects significant features of each fault using partial autocorrelation coefficients and distance evaluation technique, respectively. Finally, using the extracted features as inputs, the support vector regression (SVR) classifies bearing's inner, outer, and roller faults. To obtain optimal classification performance, we evaluate the proposed method with varying an adjustable parameter of the Gaussian radial basis function of SVR from 0.01 to 1.0 and the number of features from 2 to 150. Experimental results show that the proposed fault identification method using 0.64-0.65 of the adjustable parameter and 75 features achieves 91% in classification performance and outperforms conventional fault diagnosis methods as well.