• JSTS:Journal of Semiconductor Technology and Science
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• v.2 no.4
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• pp.280-287
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• 2002

We present technical issues involved in the development of actuators and sensors for applications to high-precision Micro Electro Mechanical System (MEMS). The technical issues include fabrication uncertainty and noise disturbance, causing major difficulties for MEMS to achieve high-precision actuation and detection functions. For nano-precision actuators, we solve the fabrication instability and electrical noise problems using digital actuators coupled with nonlinear mechanical modulators. For the high-precision capacitive sensors, we present a branched finger electrodes using high-amplitude anti-phase sensing signals. We also demonstrate the potential applications of the nanoactuators and nanodetectors to high-precision positioning MEMS.

• Current Optics and Photonics
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• v.4 no.6
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• pp.509-515
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• 2020

A practical single photon source for fiber-based quantum information processing is still lacking. As a possible 1.55-㎛ quantum-dot single photon source, an InGaAsP/InP-air-aperture micropillar cavity is investigated in terms of fabrication tolerance. By properly modeling the processing uncertainty in layer thickness, layer diameter, surface roughness and the cavity shape distortion, the fabrication imperfection effects on the cavity quality are simulated using a finite-difference time-domain method. It turns out that, the cavity quality is not significantly changing with the processing precision, indicating the robustness against the imperfection of the fabrication processing. Under thickness error of ±2 nm, diameter uncertainty of ±2%, surface roughness of ±2.5 nm, and sidewall inclination of 0.5°, which are all readily available in current material and device fabrication techniques, the cavity quality remains good enough to form highly efficient and coherent 1.55-㎛ single photon sources. It is thus implied that a quantum dot contained InGaAsP/InP-air-aperture micropillar cavity is prospectively a practical candidate for single photon sources applied in a fiber-based quantum information network.

• International conference on construction engineering and project management
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• 2009.05a
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• pp.1081-1087
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• 2009

An automatic construction system in Korea is now at the stage of the full automation like in Japan, and an actual pilot project is going to be built in 2009. However, in developing a new construction system that has never been implemented before, there is a need to assess the performance and to consider the uncertainty of the system. The program evaluation and review technique (PERT) allows dealing with this uncertainty. Thus, this paper implements an analysis of the process of steel fabrication and makes suggestions for time-related problems arising from the analysis. The time required for steel erection by the automatic system was compared with that in the traditional method. In the result, finding out another construction process and improving robot performance were proposed to resolve the problems. The results will contribute to promoting the development of an efficient system for the new automatic construction system.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.25 no.3
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• pp.520-528
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• 2001

This paper investigates a resonant microaccelerometer that measures acceleration using a built-in micromechanical resonator, whose resonant frequency is changed by the acceleration-induced axial force. A set of design equations for the resonant microaccelerometer has been developed, including analytic formulae for resonant frequency, sensitivity, nonlinearity and maximum stress. On this basis, the sizes of the accelerometer are designed for the sensitivity of 10$^3$Hz/g in the detection range of 5g, while satisfying the conditions for the maximum nonlinearity of 5%, the minimum shock endurance of 100g and the size constraints placed by microfabrication process. A set of the resonant accelerometers has been fabricated by the combined use of bulk-micromachining and surface-micromachining techniques. From a static test of the cantilever beam resonant accelerometer, a frequency shift of 860Hz has been measured for the proof-mass deflection of 4.3${\pm}$0.5$\mu\textrm{m}$; thereby resulting in the detection sensitivity of 1.10${\times}$10$^3$Hz/g. Uncertainty analysis of the resonant frequency output has been performed to identify important issues involved in the design, fabrication and testing of the resonant accelerometer.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.25 no.3
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• pp.529-536
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• 2001

We investigate a surface-micromachined capacitive accelerometer with the grid-type electrodes surrounded by a perforated proof-mass frame. An electromechanical analysis of the microaccelerometer has been performed to obtain analytical formulae for natural frequency and output sensitivity response estimation. A set of prototype devices has been designed and fabricated based on a 4-mask surface-micromachining process. The resonant frequency of 5.8$\pm$0.17kHz and the detection sensitivity of 0.28$\pm$0.03mV/g have been measured from the fabricated devices. The parasitic capacitance of the detection circuit with a charge amplifier has been measured as 3.34$\pm$1.16pF. From the uncertainty analysis, we find that the major uncertainty in the natural frequency of the accelerometer comes from the micromachining error in the beam width patterning process. The major source of the sensitivity uncertainty includes uncertainty of the parasitic capacitance, the inter-electrode gap and the resonant frequency, contributing to the overall sensitivity uncertainty in the portions of 75%, 14% and 11%, respectively.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.26 no.9
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• pp.1931-1942
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• 2002

In this paper a formulation of robust optimization is presented and illustrated by a design example of vibratory micro gyroscopes in order to reduce the effect of variations due to uncertainties in MEMS fabrication processes. For the vibratory micro gyroscope considered it is important to match the resonance frequencies of the vertical (sensing) and lateral (driving) modes as close as possible to attain a high sensing sensitivity. A deterministic optimization in which the difference of both the sensing and driving natural frequencies is minimized as an objective function results in highly enhanced performance but apt to be very sensitive to fabrication errors. The formulation proposed is to attain robustness of the performance by including the sensitivity of the response with respect to uncertain variables as a term of objective function to be minimized. This formulation is simple and practically applicable since no detail statistical information on fabrication errors is required. The geometric variables, beam width, length and thickness of vibratory micro gyroscopes are adopted as design variables and at the same time considered as uncertain variables because here occur the fabrication errors. A robustness test in terms of a percentage yield by using the Monte Carlo simulation has shown that the robust optimum produces twice more acceptable designs than the deterministic optimum. Improvement of robustness becomes bigger as the amount of fabrication errors is assumed larger. Considering that the magnitude of fabrication errors and uncertainties in a MEMS structure are comparatively large, the present method is illustrated to be a viable approach for a robust MEMS design.

• Transactions of the Korean Society of Mechanical Engineers B
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• v.27 no.10
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• pp.1385-1392
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• 2003

An electromagnetic flowmeter(EMF) was developed and its characteristics were compared with a commercial EMF. The developed EMF was designed as the 100 mm nominal diameter. A signal processing circuit was also developed for generating the magnetic field and converting the flow signal to flowrate and flow quantity. In order to obtain a more stable and reliable flow signal, the double magnetizing frequency was adopted for magnetizing the coil of the EMF. For the characterization of the developed EMF, the uncertainty of calibrator was estimated within $\pm$0.5 %. The evaluation procedure of the uncertainty followed the ISO Guide to the Expression of Uncertainty in Measurement. It was found that the flow signals between the electrodes were about $\pm$60-$\pm$300$\mu$V, which were sufficient for the discrimination of flowmeter and the protection of noise. The test results against the calibrator showed the good linearity in the range of 3 ㎥/h and 70 ㎥/h. A commercialized design of the EMF based on the current study will be technically more competitive in domestic and foreign market.

• The Journal of Korean Institute of Electromagnetic Engineering and Science
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• v.17 no.4 s.107
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• pp.387-392
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• 2006

In this paper, measurement scheme and uncertainty estimation of the K-band attenuation standard fitted with 3.5 mm coaxial connectors are described. The standard comprises a build-up chain of four steps of power ratio mea-surement and operates in the frequency range of 18 GHz to 26.5 GHz. The nominal attenuation of each step is around 20 dB and total dynamic range is 80 dB. The expanded uncertainty of the overall system is 0.01 dB at the confidence level of approximately 95%.

• International Journal of Precision Engineering and Manufacturing
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• v.6 no.4
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• pp.14-20
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• 2005

In this paper, a new field of metrology called 'precision nanometrology' is presented. The 'precision nanometrology' is the result of evolutions of the traditional 'precision metrology' and the new 'nanometrology'. 'Precision nanometrology' is defined here as the science of dimensional measurement and motion measurement with 100 nm to 0.1 nm resolution/uncertainty within a range of micrometer to meter. The definition is based on the fact that nanometrology in nanoengineering and the precision industries, such as semiconductor industry, precision machine tool industry, precision instrument industry, is not only concerned with the measurement resolution and/or uncertainty but also the range of measurement. It should also be pointed out that most of the measurement objects in nanoengineering have dimensions larger than 1 micrometer. After explaining the definition of precision nanometrology, the paper provides several examples showing the critical roles of precision nanometrology in precision nanosystems, including nanometrology system, nanofabrication system, and nanomechatronics system.

• The Transactions of the Korean Institute of Electrical Engineers B
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• v.53 no.5
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• pp.305-308
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• 2004

The 7-dial inductive voltage divider(IVD) for application at low frequency range which can precisely divide the in put voltage up to resolution of $10^{-7}$ was fabricated by using the toroidal cores made by super-mumetal strips of 0.025 mm thick and special decade switches. The cores have the initial permeability of 200.000 and magnetic flux density of 0.5 T. The inphase and quadrature ratio errors for a fabricated 7-dial IVD are found to be less than $\pm$4${\times}$$10^{-7}$ and $\pm$5${\times}$$10^{-6}$ rad(k=2), respectively. by calibration using the IVD calibration system of KRISS. The fabrication techniques used and uncertainty evaluation are discussed in this paper.