Browse > Article

Precision Nanometrology and its Applications to Precision Nanosystems  

Gao Wei (Department of Nanomechanics. Tohoku University)
Publication Information
International Journal of Precision Engineering and Manufacturing / v.6, no.4, 2005 , pp. 14-20 More about this Journal
Abstract
In this paper, a new field of metrology called 'precision nanometrology' is presented. The 'precision nanometrology' is the result of evolutions of the traditional 'precision metrology' and the new 'nanometrology'. 'Precision nanometrology' is defined here as the science of dimensional measurement and motion measurement with 100 nm to 0.1 nm resolution/uncertainty within a range of micrometer to meter. The definition is based on the fact that nanometrology in nanoengineering and the precision industries, such as semiconductor industry, precision machine tool industry, precision instrument industry, is not only concerned with the measurement resolution and/or uncertainty but also the range of measurement. It should also be pointed out that most of the measurement objects in nanoengineering have dimensions larger than 1 micrometer. After explaining the definition of precision nanometrology, the paper provides several examples showing the critical roles of precision nanometrology in precision nanosystems, including nanometrology system, nanofabrication system, and nanomechatronics system.
Keywords
Nanometrology; Precision metrology; Nanosystem; Accuracy; Fabrication; Mechatronics;
Citations & Related Records
연도 인용수 순위
  • Reference
1 Ennos, A.E. and Virdee, M.S., 'High accuracy profile measurement of quasi-conical mirror surfaces by laser autocollimation,' Precision Engineering, Vol. 4, No. 1, pp. 5-8, 1982   DOI   ScienceOn
2 Gao, W., Kiyono, S. and Satoh, E., 'Precision measurement of multi-degree-of-freedom spindle errors using two-dimensional slope sensors,' Annals of CIRP, Vol. 51, No. 1, pp. 447-450, 2002   DOI   ScienceOn
3 Gao, W., Yokoyama, J., Kojima, H. and Kiyono, S., 'Precision measurement of cylinder straightness using a scanning multi-probe system,' Precision Engineering, Vol. 26, No. 3 ,pp. 279-288, 2002
4 Gao, W., Hocken, R. J., Patten, J. A., Lovingood, J. and Lucca, D. A, 'Construction and testing of a nanomachining instruments,' Precision Engineering, Vol. 24, No. 4 , pp. 320-328, 2000   DOI   ScienceOn
5 Gao, W., Hocken, R. J., Patten, J. A. and Lovingood, J., 'Experiments using a nano-machining instruments for nanocutting brittle materials,' Annals of CIRP, Vol. 49, No. 1, pp. 439-442, 2000   DOI   ScienceOn
6 Gao, W., Nakada, T. and Kiyono, S., 'Precision positioning of a surface motor-driven multi-axis stage using a surface encoder,' Journal JSPE, Vol. 67, No. 12, pp. 1981-1985, 2001. (in Japanese)
7 Zhang, G. X. and Wang, R. K., 'Four-point method of roundness and spindle error measurements,' Annals of the CIRP, Vol. 42, No. 1, pp. 593-596, 1993   DOI   ScienceOn
8 Gao, W., Huang, P. S., Yamada, T. and Kiyono, S., 'A compact and sensitive two-dimensional angle probe for flatness measurement of large silicon wafers,' Precision Engineering, Vol. 26, No. 4, pp. 396-404, 2002   DOI   ScienceOn
9 Teague, E. C., 'Nanometrology,' Proceedings of AIP Conference, (1992), pp. 371-407
10 Gao, W., Kiyono, S. and Sugawara, T., 'High accuracy roundness measurement by a new error separation method,' Precision Engineering, Vol. 21, No. 2/3, pp. 123-133, 1997 (in Japanese)   DOI   ScienceOn
11 Gao, W., Hocken, R. J., Patten, J. A. and Lovingood, J.,'Force measurement in a nanomachining instruments,' Review of Scientific Instruments, Vol. 71, No. 11, pp. 4325-4329, 2000   DOI   ScienceOn
12 Evans, Chris J., Hocken, R. J. and Estler, W. Tyler, 'Selfcalibration: Reversal, Redundancy, Error Separation and 'Absolute Testing,' Annals of CIRP, Vol. 45, No. 2, pp. 617-634, 1996   DOI   ScienceOn
13 Gao, W., Araki, T. and Kiyono, S., 'Precision nanometrology of a large area microstructured metrology surface,' Optics and Precision Engineering, Vol. 11, No. 3, pp. 223-226, 2003
14 Evans, C., 'Precision Engineering: an Evolutionary View,' Cranfield Press, 1989
15 Gao, W., Kiyono, S. and Nomura, T., 'A new multi-probe method of roundness measurements,' Precision Engineering, Vol. 19, No. 1 , pp. 37-45, 1996   DOI   ScienceOn
16 Patten, J. A. and Gao, W., 'Extreme negative rake angle technique for single point diamond nano-cutting of silicon,' Precision Engineering, Vol. 25, No. 2, pp. 165-167, 2001   DOI   ScienceOn
17 Conclusions of the WGDM 3 Discussion Group on Nanometrology, 25 June, 1998
18 Gao, W., Yamada, T., Furukawa, M., Nakamura, T., Shimizu, H. and Kiyono, S., 'Precision nanometrology of large silicon wafer flatness,' Journal of Nanotechnology and Precision Engineering, Vol. 1, No. 1, pp. 71-78, 2003
19 Okazaki, Y., 'Fast tool servo system and its application to three dimensional fine figures,' Proc. of 13th ASPE, pp. 100-103, 1998
20 Verdee, M. S., 'Nanometrology of optical flats by laser autocollimation,' Surface Topography, Vol. 1, pp. 415-425,1988
21 Kiyono, S., Cai, P. and Gao, W., 'An angle-based position detection method for precision machines,' JSME International Journal, Vol. 42, No. 1, pp. 44-48, 1999
22 Gao, W., Dejima, S., Yanai, H., Katakura, K., Kiyono, S., Y. Tomita, 'A surface motor-driven planar motion stage integrated with an XY$\theta_z$ surface encoder for precision positioning,' Precision Engineering, 28-3, pp. 329-337, 2004
23 Smith, S. T. and Chetwynd, D. G., 'Foundations of ultraprecision mechanism design,' Gordon and Breach Science Publishers, 1992
24 Whitehouse, D. J., 'Some theoretical aspects of error separation techniques in surface metrology,' J. of Phys. E: Sci. Instrum., Vol. 9, pp. 531-536, 1976   DOI   ScienceOn
25 Gao, W., Dejima, S., Shimizu, Y. and Kiyono, S., 'Precision measurement of two-axis positions and tilt motions using a surface encoder,' Annals of CIRP, Vol. 52, No. 2, pp. 435-438, 2003   DOI   ScienceOn
26 Dow, T. A, Miller, M. H. and Falter, P. J., 'Application of a fast tool servo for diamond turning of nonrotationally symmetric surfaces,' Precision Engineering, Vol. 13, No. 4, pp. 233-250, 1991
27 Gao, W, 'Nanometrology of spindle errors using error separation methods,' J. JSPE, Vol. 67, No. 7, pp. 1067-1071, 2001
28 Gao, W., 'Nano-metrology of large surface profiles using angle sensors,' J. JSPE, Vol. 68, No. 3, pp. 367-371, 2002 (in Japanese)
29 Sawabe, M., 'Benefit derived from the histroy of length measuring technology,' Bulletin of the Society of Historical Metrology, Japan, Vol. 22, No. 1, pp. 9-16, 2000 (in Japanese)
30 Patterson, S. R. and Magrab, E. B., 'Design and testing of a fast tool servo for diamond turning,' Prec. Eng., Vol. 7, No. 3, pp. 123-128, 1985   DOI   ScienceOn
31 Homepage of The Center For Precision Metrology, The University of North Carolina at Charlotte, http://www.cpm.uncc.edu/
32 Gao, W. and Kiyono, S., 'Development of an optical probe for profile measurement of mirror surfaces,' Optical Engineering, Vol. 36, No. 12, pp. 3360-3366, 1997   DOI   ScienceOn
33 Gao, W., Araki, T., Kiyono, S., Okazaki, Y. and Yamanaka, M., 'Precision Nano-fabrication and evaluation of a large area sinusoidal grid surface for a surface encoder,' Precision Engineering, Vol. 27, No. 3, pp. 289-298, 2003   DOI   ScienceOn