• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2008년도 춘계학술대회 논문집
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• pp.603-604
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• 2008

• 대한기계학회논문집A
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• 제32권10호
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• pp.823-830
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• 2008

We present a high-accuracy digital-to-analog (DA) actuator using a load spring, specially designed to compensate the output displacement errors caused by fabrication errors. The compensated linear DA actuator is capable to change the slope of input-output modulation line in order to compensate fabrication errors. We design, fabricate, and characterize three different prototypes: one uncompensated design and two compensated designs respectively for a specific value and for a given range of fabrication error. The compensated linear DA actuators show the output displacement errors of $-0.20{\pm}0.23{\mu}m\;and\;-0.13{\pm}0.18{\mu}m$, respectively, reduced by 64.3% and 76.8% of the output displacement error, $0.56{\pm}0.20{\mu}m$, produced by the conventional uncompensated linear DA actuator. We experimentally verify the fabrication error compensation capability of the present compensated linear DA actuators, thus demonstrating high-accuracy actuation performance immune to fabrication errors.

• 한국정밀공학회지
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• 제26권6호
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• pp.50-58
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• 2009

Micro laser fabrication techniques can potentially be used for the manufacture of microstructures on the thin flat surfaces with large diameter that are frequently used in semiconductor industries. However, the large size of wafers can cause the degraded machining accuracy of the surface because it can be tilted or distorted by geometric errors of machines or the holding fixtures, etc. To overcome these errors the off-line focusing error compensation method is proposed. By using confocal autofocus system, the focusing error profile of machined surface is measured along the pre-determined path and can be compensated at the next machining process by making the corrected motion trajectories. The experimental results for silicon wafers and invar flat surfaces show that the proposed method can compensate the focusing error within the level of below $6.9{\mu}m$ that is the depth of focus required for the laser micromachining process.

• 한국기계가공학회지
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• 제12권5호
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• pp.122-128
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• 2013

This paper describes the on-machine surface form evaluation of an ultra-precision cylinder for the fabrication by the compensation process. In this study, the surface form error of an ultra-precision cylinder, which was fabricated by the ultra-precision diamond turning machine with a single diamond cutting tool, was evaluated by using two capacitance-type displacement probes. Based on the measurement results, the compensation process was conducted. Since the measurement was carried out on the machine without re-mounting of the workpiece, additional fabrication for compensation process can be conducted precisely.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2000년도 추계학술대회 논문집
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• pp.943-946
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• 2000

Selective laser sintering(SLS) is a solid freeform fabrication process whereby a part is built layerwise by scanning a powder bed. The properties of metal powder are dependent on the heat, it is not easy to do the exact error compensation with analysis and estimation by modeling. This paper suggests that the error is compensated by experimental method and then the accuracy of shape is enhanced by revising of STL file. Also bonding force is measured by an experiment with change of process path.

• Current Optics and Photonics
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• 제4권6호
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• pp.558-565
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• 2020

A wavelength-independent optical sensor based on an asymmetric Mach-Zehnder interferometer (AMZI) is proposed. The optical sensor based on an AMZI is very sensitive to wavelength, and wavelength drift will lead to measurement error. The optical sensor is compensated to reduce its dependence on wavelength. The insensitivity of the optical sensor to wavelength mainly depends on the compensation structure, which is composed of an AMZI cascaded with another AMZI and can compensate the wavelength drift. The influence of wavelength drift on the optical sensor can be counteracted by carefully designing the size parameters of the compensation structure. When the wavelength changes from 1549.9 nm to 1550.1 nm, the error after compensation can be lower than 0.066%. Furthermore, the effect of fabrication tolerance on compensation results is analyzed. The proposed compensation method can also be used to compensate the drift of other parameters such as temperature, and can be applied to the compensation of other interference-based optical devices.

• 한국공작기계학회논문집
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• 제17권2호
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• pp.121-127
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• 2008

Micro end-milling has been becoming an important machining process to manufacture a number of small products such as micro-devices, bio-chips, micro-patterns and so on. Despite the importance of micro end-milling, many related researches have given grand efforts to micro end-milling phenomenon, for example, micro end-milling mechanism, cutting force modeling and machinability. This paper strongly concerned actual problem, micro tool deflection, which causes excessive machining errors on the workpiece. To solve this problem, machining error prediction method was proposed through a series of test micro cutting and analysis of their SEM images. An iterative algorithm was applied in order to obtain corrected tool path which allows reducing machining errors in spite of tool deflection. Experiments are carried out to validate the proposed approaches. In result, remarkable error reduction could be obtained.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2012년도 추계학술대회 논문집
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• pp.323-324
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• 2012

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2005년도 춘계학술대회 논문집
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• pp.1186-1189
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• 2005

Focused Ion Beam machining is an attractive approach to produce nano-scale 3D structures. However, like other beam-based manufacturing processes, the redeposition of the sputtered material during the machining deteriorates the geometric accuracy of ion beam machining. In this research a new approach to reduce the geometric error in FIB machining is introduced. The observed redeposition phenomena have been compared with existing theoretical model. Although the redeposition effect has good repeatability the prediction of exact amount of geometric error in ion beam machining is difficult. Therefore, proposed method utilizes process control approach. Developed algorithm measures the redeposition amount after every production cycle and modifies next process plan. The method has been implemented to a real FIB machine and the experimental results demonstrated considerable improvement of five micrometer-sized pocket machining.

• 한국정보디스플레이학회:학술대회논문집
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• 한국정보디스플레이학회 2006년도 6th International Meeting on Information Display
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• pp.1660-1665
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• 2006

Drop placement accuracy and precision are the critical performance values of industrial ink jet deposition systems. Imperfect components and environments have severe impacts on drop placement. Litrex has identified over 120 error sources and developed engineering solutions to address the errors. In this paper, improved results using thermal compensation and stage mapping techniques are demonstrated. A recent progress in inkjet fabrication of multi-color electrophoretic display on flexible substrate with large distortion is also demonstrated.