• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.11 no.3
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• pp.195-202
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• 1998

The LPCVD system of batch type for the massproduction of semiconductor fabrication has a problem of phosphorous concentration uniformity in the boat. In this paper we study an improvement of the uniformity for phosphorous concentration and sheet resistance. These property was improved by using the nitrogen process and modified long nozzle for gas injection tube in the doped polysilicon deposition system. The phosphorous concentration and its uniformity for polysilicon film are measured by XRF(X-ray Fluorescence) for the conventional process condition and nitrogen process. In conventional process condition, the phosphorous concentration, it uniformity and sheet resistance for polysilicon film are in the range of 3.8~5.4$\times$10\ulcorner atoms/㎤, 17.3% and 59~$\Omega$/ , respectively. For the case of nitrogen process the corresponding measurements exhibited between 4.3~5.3$\times$10\ulcorner atoms/㎤, 10.6% and 58~81$\Omega$/ . We find that in the nitrogen process the uniformity of phosphorous concentration improved compared with conventional process condition, however, the sheet resistance in the up zone of the boat increased about 12 $\Omega$/ . In modified long nozzle, the phosphorous concentration, its uniformity and sheet resistance for polysilicon films are in the range of 4.5~5.1$\times$10\ulcorner atoms/㎤, 5.3% and 60~65$\Omega$/ respectively. Annealing after $N_2$process gives the increment of grain size and the decrement of roughness. Modification of nozzle gives the increment of injection amount of PH$_3$. Both of these suggestion result in the stable phosphorous concentration and sheet resistance. The results obtained in this study are also applicable to process control of batch type system for memory device fabrication.

• Proceedings of the Korea Committee for Ocean Resources and Engineering Conference
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• 2006.11a
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• pp.162-165
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• 2006

In this study, Liquid Phase Sintered SiC (LPS-SiC) was fabricated by hot pressing method with $\beta$-SiC powder whose a particle size is 30nm and less on the average in argon condition at 1780 and $1800^{\circ}C$ under 20MPa. Alumina ($Al_2O_3$), yttria ($Y_2O_3$) and silica ($SiO_2$) were used for sintering additives. To investigate effects of particle-size and temperature on $SiO_2$, LPS-SiC was fixed $Al_2O_3$, $Y_2O_3$ and then particle-size of $SiO_2$ were changed as two kinds. The system of particle-size and temperature on sintering additives which affects a property of sintering os well os the influence depending on particle-size and temperature of sintering additives were investigated by measurement of sintering properties. Such as measurement of sintering density, vikers hardness and observing of microstructure were investigated to make sure of the optimum condition which is about matrix of $SiC_f/SiC$ composites. Base on the composition of sintering additives, microstructure and sintering property correlation, the effect of particle-size of sintering additives are discussed. An experimental method to investigate the dynamic characteristics of bums in extreme environmental condition is established.

• Korean Journal of Materials Research
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• v.13 no.12
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• pp.812-818
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• 2003

The aim of this study is to investigate the fabrication processes on the microstructual changes and mechanical properties of large 7175 aluminum die forgings. The billets range from 370 to 720 mm in diameter were homogenized and hot forged after direct chill casting. The strength and elongation of the homogenized cast billets were revealed nearly same level independent of the billet diameter. However, these properties of ø370 mm cast billet were superior to those of $\Pie720$ mm billet under$ T_{6}$ / condition. The tensile strength of die forged specimens under $T_{6}$ condition increased up to 20% than that of solution treatment, however, the elongation was reduced to 50%. The fracture toughness of die forged specimens under $T_{6}$ condition was 35.6∼39.0 MPa$.$$m^{1}$2 irrespective of the billet size and free forging processes, but this property increased up to 10% by$V_{74}$ treatment. The fracture toughness of die forged specimen manufactured with ø370 mm cast billet showed nearly same level of ø720 mm billet which was processed using MF or Cog free forging followed by die forging.

• Journal of Ceramic Processing Research
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• v.19 no.5
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• pp.361-368
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• 2018

We investigated the interfacial properties of fluorocarbon self-assembled monolayers (FC-SAMs) with different alkyl chain lengths. It was found that the substrate characteristics were changed rapidly with the fabrication time and temperature of the SAM. FC-3SAM, which has the shortest alkyl chain in this study, showed a contact angle of $54.1^{\circ}$ when it was fabricated in an electric oven at $60^{\circ}C$ for the first minute. The FC-3SAM showed a contact angle of up to $76.9^{\circ}$ when it was fabricated in an electric oven at the same temperature condition for 180 minutes. FC-10SAM, which has the longest alkyl chain in this study, showed a contact angle of $64.7^{\circ}$ when it was fabricated at a temperature condition of $60^{\circ}C$ for 1 minute, and a contact angle of $98.7^{\circ}C$ at a temperature condition of $60^{\circ}C$ for 180 minutes. It was found that the FC-10SAM shows an increased contact angle and hydrophobic properties due to a well-aligned molecular structure resulting from a strong van der Waals force. In contrast, the FC-3SAM shows a small contact angle due to the intermolecular disorder resulting from a weak van der Waals force. The average roughness of FC-SAMs was investigated using AFM. The surface roughness of FC-SAMs, which verifies the results of contact angle, was confirmed. At a fabrication time of 120 minutes, the FC-10SAM showed an improvement in average roughness by 62% compared to that of FC-3SAM due to its good alignment.

• Tribology and Lubricants
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• v.37 no.6
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• pp.203-207
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• 2021

This study presents the development of dielectric constant sensors to measure lubricant properties. The lubricant oil sensor is used to measure oil properties and machine conditions. Various condition monitoring methods are applied to diagnose machine conditions. Machine condition monitoring using oil sensors has advantage over other machine condition monitoring methods. The fault conditions can be noticed at the early stages by the detection of wear particles using oil sensors. Therefore, it provides an early warning in the failure procedure. A variety of oil sensors are applied to check the machine condition. Among all oil sensors, only one sensor can measure the tendency of several properties such as acidity and water content. A dielectric constant sensor is also used to measure various oil properties; therefore, it is very useful. The dielectric constant is the ratio of the capacitance of a capacitor using that material as a dielectric to that of a similar capacitor using vacuum as its dielectric. The dielectric constant has an effect on water content, contaminants, base oil, additive, and so forth. In this study, the dielectric constant sensor is fabricated using MEMS process. In the fabrication process, the shape, gap of the electrode array, and thickness of the insulation material are considered to improve the sensitivity of the sensor.

• Composites Research
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• v.15 no.1
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• pp.32-40
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• 2002

This study developed fabrication process of $SiC_p/Al$ metal matrix composites as electronic packaging materials by squeeze casting method. The $SiC_p$ preform were fabricated in newly designed preform mold using about 0.8 % of inorganic binder(SiO$_2$) and 5 vol.% of $Al_2O_3$fiber. To infiltrate the molten metal into the preform, fabrication condition such as the temperature and the pressure were selected. Applying the fabrication conditions, heat transfer analysis were preformed using finite element method and thus analyzed the temperature distribution and cooling characteristic during the squeeze casting. For the fabricated composites, impact toughness and thermal expansion coefficient were measured. The metal matrix composites developed in this study have 0.2~0.3 J impact toughness, $8~10 ppm/^{\circ}C$ thermal expansion coefficient and $2.9~3.0g/cm^3$density which is appropriate properties for electronic packaging application.

• Applied Chemistry for Engineering
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• v.16 no.4
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• pp.461-473
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• 2005

Nanotechnology has attracted great attention as one of essential fields in modern science. In particular, the fabrication of nanostructures with nanometer dimension in size is the starting point and essential part of nanotechnology research. Anodic aluminum oxide (AAO) nanotemplate technique has many merits including ease of fabrication, low cost process, and nanotemplate fabrication in large area. Moreover, AAO nanotemplate technique can realize self-ordered hexagonal pore structure with extremely high aspect ratio which is difficult to achieve with conventional lithographic techniques. Simple control of pore dimensions such as diameter, length, and density by varying anodizing condition would be advantageous, too. AAO nanotemplate has been the topic of intensive investigations for the past decade due to above strong points, and the application to various fields of nanotechnology is expected. In this review paper, the fabrication and application of AAO nanotemplate are introduced.

• Composites Research
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• v.35 no.5
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• pp.328-333
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• 2022

In this study, the fabrication conditions of CFRP rebar were controlled to derive the correlation between flexural strength and pore characteristics. The fabrication conditions of CFRP rebar were adjusted for presence or absence of rib, resin temperature, and curing furnace temperature. Flexural strength and pore characteristics of fabricated CFRP rebar were analyzed. The flexural strength of CFRP rebar was changed depending on the fabrication condition, such as the presence or absence of rib, the resin temperature, and the curing furnace temperature. It was confirmed that the flexural strength of CFRP rebar was significantly lowered when the rib was not wound. As a result of Nano X-ray CT analysis, the max. pore diameter was shown in CFRP rebar prepared at a resin temperature of 60℃. According to optical microscopic analysis, the maximum porosity was 6.89% in No. 1, and the minimum porosity was 2.88% in No. 7. The correlation coefficient between porosity used optical microscopy and flexural strength was -0.64, which was higher than the correlation coefficient between porosity or pore size used Nano X-ray CT and flexural strength.

• Journal of the Korean Ceramic Society
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• v.39 no.9
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• pp.822-828
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• 2002

Fabrication and electrical characterization of R. F. High-power unit capacitors were investigated to study on condition of fabrication processing for R. F. High-power unit capacitor and electrical characteristics according to addition of $ZrO_2$. The unit capacitors were fabricated using tape casting. The optimum mixture ratio of dielectrics and mixing binder for the slurry fabrication was 57.5∼60.0: 42.5∼40.0 wt%. The slurry viscosity was 4000∼5000 cps and casting state of green tape fabricated using these slurry was excellent. Optimum stacking was made by 200 kg/$cm^2$ pressure with 80$^{\circ}C$ heating. $ZrO_2$ was added to improve the electrical characteristics of unit capacitor, especially breakdown characteristics. The dielectric constant and loss factor of the unit condenser having different $ZrO_2$ amounts was not changed in the addition range of 1 to 5 wt%. Also, dielectric constant was not changed in the frequency range of 10 to 500 kHz. It was found that characteristics of resistance voltage was improved through the formation of $CaZrO_3$ and the reduction of particle size as about 3wt% $ZrO_2$ was added.

• Journal of the Korean institute of surface engineering
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• v.48 no.2
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• pp.62-67
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• 2015

Nickel is a commercially important and versatile element in electroplating. The applications of nickel electroplating fall into three main categories: decorative, functional and electroforming. In decorative applications, electroplated nickel is most often applied in combination with electrodeposited chromium. Nickel is deposited on surfaces to improve corrosion and wear resistance or modify magnetic and other properties. Electroforming is electroplating applied to the fabrication of products of various kinds. Nickel is deposited onto a substrate and then removed from it to create a part made entirely of nickel. In this study, mechanical property of Ni electrodeposits in various manufacturing condition such as temperature, current density, pH and electrolyte content, was investigated to understand effect of electrolysis condition on mechanical property. Vickers hardness increased as the temperature and pH increased and current density and electrolyte content decreased and pH increased. The results were explained by cathode overvoltage and hydrogen evolution.