• Title/Summary/Keyword: FT-IR 분석

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Fourier Transform Infrared Spectroscopic Analysis of the Silylated Resist on Silicon Wafers in Semiconductor Lithographic Process (반도체 사진공정에서 실리콘 웨이퍼 위의 Silylated Resist의 Fourier 변환 적외선 분광분석)

  • Kang, Sung Chul;Kim, Su Jong;Son, Min Young;Park, Chun Geun
    • Analytical Science and Technology
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    • v.5 no.4
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    • pp.455-464
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    • 1992
  • Using FT-IR, we determined the depth of silylated layers produced from various gas-phase-silylation conditions was proposed by using Fourier Transform Infrared (FT-IR) spectroscopic analysis. The depth of silylated layer was determined from absorbance measurments of the significant peaks (Si-O-ph, Si-C, Si-H) of FT-IR spectra with background spectrum subtraction method. And the results were compared with thickness measurments of SEM. The results were well agree with SEM. It found to be well suited for determining silylation process window.

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Results of a Round-Robin Test for the Draft International Standard on FT-IR Gas Analysis of Fire Effluents from a Cone Calorimeter (콘칼로리미터 연소가스 FT-IR 분석을 위한 국제표준 초안의 비교시험 결과분석)

  • Choi, Jung-Min;Park, Kye-Won;Jeong, Jae-Gun
    • Fire Science and Engineering
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    • v.33 no.3
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    • pp.1-8
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    • 2019
  • The international standard for FT-IR gas analysis of fire effluents in ISO 5660-1 cone calorimeter has been being developed in ISO TC 92. A comparison of the round-robin test of WD 21397 was conducted with six participating laboratories in 2018. The test specimens were PMMA, rigid PU foam board, and PVC flooring. The measurement quantities were the time-to-ignition, peak heat release rate, total heat release, and effective heat of combustion for a cone calorimeter test and peak gas concentration, gas generation, and gas yield for FT-IR gas analysis. No outliers were identified. For the cone calorimeter quantities, the repeatability and reproducibility were 1.5% and 9.8%, respectively. For FT-IR gas analysis, the repeatability and reproducibility was 12.9% and 27.9%, respectively.

A Round Robin Study of Solid Content Test and Applicability Estimation of FT-IR Analysis for Chemical Admixtures (다자비교시험을 통한 화학혼화제 고형분량 시험법의 신뢰성 및 FT-IR 분석에 대한 효용성 평가)

  • Kim, Jin-Cheol;Yoo, Hyeok-Jin;Kim, Hong-Sam;Park, Ko-Eun
    • Journal of the Korea Concrete Institute
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    • v.27 no.6
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    • pp.695-703
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    • 2015
  • Acceptance criteria for chemical admixtures of cement concrete were investigated in domestic and international specifications. The reliability was verified for solid content test method of chemical admixture examined statistical analysis by round robin test. The applicability of FT-IR spectroscopy for qualitative measurement of multi-compound chemical admixtures verified. From solid content experimental results, outlier analysed using Cochran, Grubbs and Dickson's Q test. Repeatability and reproducibility standard deviation for solid content results showed 0.25 and 0.098% respectively according to KS A ISO 5725-2 procedure, it can be confirmed reliability of test methods. FT-IR spectrum of liquefied or oven-dried chemical admixtures condition showed big differences. It is needed that the FT-IR analysis is performed on dry material. However there's no difference with the applicability of FT-IR spectroscopy for multi-compound chemical admixtures. So the utility of method analysis could not identify.

The study of quantitative analysis for noxious gases of plastic materials by remote sensing open path FT-IR spectrometer (원격 측정용 개방 경로형 FT-IR spectrometer를 사용하여 플라스틱 재료의 유해 가스 정량 분석에 관한 연구)

  • Cho, Nam-Wook;Cho, Won-Bo;Kim, Hyo-Jin
    • Analytical Science and Technology
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    • v.25 no.4
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    • pp.230-235
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    • 2012
  • It is to use many plastic materials as living essential goods. But when the fire is happened, owing to noxious gases, many men should be injured. Therefore as the noxious gases are measured by open path FT-IR spectrometer as remote monitoring, the demage of men could be minimized. Such this system consists of a Fourier transform spectrometer and infrared lamp fitted to long length. The study was to do the quantitative analysis on CO, $NO_2$, HCl, HF gas by remote monitoring open path FT-IR spectrometer. And the method of it should use MLR (multiple linearity regression) method. As result, It was confirmed to be more than 0.95 as $R^2$ of MLR. And then Urethane and PVC of plastic materials selected was burned, the concentration of polluted gases were measured by remote monitoring method.

Establishment of discrimination system using multivariate analysis of FT-IR spectroscopy data from different species of artichoke (Cynara cardunculus var. scolymus L.) (FT-IR 스펙트럼 데이터 기반 다변량통계분석기법을 이용한 아티초크의 대사체 수준 품종 분류)

  • Kim, Chun Hwan;Seong, Ki-Cheol;Jung, Young Bin;Lim, Chan Kyu;Moon, Doo Gyung;Song, Seung Yeob
    • Horticultural Science & Technology
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    • v.34 no.2
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    • pp.324-330
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    • 2016
  • To determine whether FT-IR spectral analysis based on multivariate analysis for whole cell extracts can be used to discriminate between artichoke (Cynara cardunculus var. scolymus L.) plants at the metabolic level, leaves of ten artichoke plants were subjected to Fourier transform infrared(FT-IR) spectroscopy. FT-IR spectral data from leaves were analyzed by principal component analysis (PCA), partial least square discriminant analysis (PLS-DA) and hierarchical clustering analysis (HCA). FT-IR spectra confirmed typical spectral differences between the frequency regions of 1,700-1,500, 1,500-1,300 and $1,100-950cm^{-1}$, respectively. These spectral regions reflect the quantitative and qualitative variations of amide I, II from amino acids and proteins ($1,700-1,500cm^{-1}$), phosphodiester groups from nucleic acid and phospholipid ($1,500-1,300cm^{-1}$) and carbohydrate compounds ($1,100-950cm^{-1}$). PCA revealed separate clusters that corresponded to their species relationship. Thus, PCA could be used to distinguish between artichoke species with different metabolite contents. PLS-DA showed similar species classification of artichoke. Furthermore these metabolic discrimination systems could be used for the rapid selection and classification of useful artichoke cultivars.

A Research for Assessment Fire Toxic Gas of Construction Material Using FT-IR and FED (FT-IR과 FED를 이용한 건축 재료의 연소독성평가에 관한 연구)

  • Kim, Sung-Soo;Cho, Nam-Wook;Rie, Dong-Ho
    • Fire Science and Engineering
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    • v.25 no.6
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    • pp.27-31
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    • 2011
  • In this study, combustion toxicity evaluation for building interior materials and study for toxicity as using FT-IR analysis. this experiment for the calculation of toxicity index, it using a cone calorimeter model in KS F ISO/TR 9122-4 as a fire model. It is following ISO 19702 procedure for assessing fire toxic gas using FT-IR. This experiment used calculation method for toxicity index (FED) among the international standards. $LC_{50}$ is a concentration that it can cause death to 50 % of experimental animal in 30 minutes - exposure gas test. comparison with the three kinds of toxicity fire gas of construction materials using toxicity index.

Analysis of Multi-layered Thin Film Using ATR FT-IR and pyro-GC/MS (ATR FT-IR과 pyro-GC/MS를 이용한 다층박막필름의 분석)

  • Park, Sung Il;Lee, Jung-Hyun;Lee, Myung Cheon
    • Journal of Adhesion and Interface
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    • v.20 no.3
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    • pp.102-109
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    • 2019
  • The material constitution of multi-layered thin film coated on the PET base film was analyzed using ATR FT-IR and pyro GC/MS combination. The cross section of the film was acquired by cracking the film after dipping in liquid nitrogen and was observed using optical microscope. Total thickness of the coated film was $70{\mu}m$ and three layers were observed. Since each layers were too thin to analyze directly except the surface layer, analyzable area of each layers were exposed by using a proper solvent and were investigated using ATR FT-IR and pyro GC/MS. Results shows that three layers were commonly consisted of urethane-acrylate copolymers. Also, inorganic and/or metal inclusions detected by XPS and SEM-EDAX were exhibited by nano size $SiO_2$ particles in layer(1) and aluminum flakes in layer(2).

Rapid metabolic discrimination between Zoysia japonica and Zoysia sinica based on multivariate analysis of FT-IR spectroscopy (FT-IR스펙트럼 데이터의 다변량통계분석 기반 들잔디와 갯잔디의 대사체 수준 신속 식별 체계)

  • Yang, Dae-Hwa;Ahn, Myung Suk;Jeong, Ok-Cheol;Song, In-Ja;Ko, Suk-Min;Jeon, Ye-In;Kang, Hong-Gyu;Sun, Hyeon-Jin;Kwon, Yong-Ik;Kim, Suk Weon;Lee, Hyo-Yeon
    • Journal of Plant Biotechnology
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    • v.43 no.2
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    • pp.213-222
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    • 2016
  • This study aims to establish a system for the rapid discrimination of Zoysia species using metabolite fingerprinting of FT-IR spectroscopy combined with multivariate analysis. Whole cell extracts from leaves of 19 identified Zoysia japonica, 6 identified Zoysia sinica, and 38 different unidentified Zoysia species were subjected to Fourier transform infrared spectroscopy (FT-IR). PCA (principle component analysis) and PLS-DA (partial least square discriminant analysis) from FT-IR spectral data successfully divided the 25 identified turf grasses into two groups, representing good agreement with species identification using molecular markers. PC (principal component) loading values show that the $1,100{\sim}950cm^{-1}$ region of the FT-IR spectra are important for the discrimination of Zoysia species. A dendrogram based on hierarchical clustering analysis (HCA) from the PCA and PLS-DA data of turf grasses showed that turf grass samples were divided into Zoysia japonica and Zoysia sinica in a species-dependent manner. PCA and PLS-DA from FT-IR spectral data of Zoysia species identified and unidentified by molecular markers successfully divided the 49 turf grasses into Z. japonica and Z. sinica. In particular, PLS-DA and the HCA dendrogram could mostly discriminate the 47 Z. japonica grasses into two groups depending on their origins (mountainous areas and island area). Considering these results, we suggest that FT-IR fingerprinting combined with multivariate analysis could be applied to discriminate between Zoysia species as well as their geographical origins of various Zoysia species.

The quantitative analysis of combustive gases on fire by remote passive open path FT-IR spectrometer (Passive open-path FT-IR spectrometer를 사용한 원거리 화재 연소 가스 정량 분석)

  • Cho, Nam Wook;Cho, Won Bo;Kim, Hyo Jin
    • Analytical Science and Technology
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    • v.26 no.2
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    • pp.120-124
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    • 2013
  • It was studied to analyze the $CO_2$, CO, $SO_2$ standard gases of combustion gases by the open path FT-IR spectrometer with passive mode for remote analysis of air pollutant and volcano gases without IR lamp. As result, it was confirmed to have good linearity with more than 0.9 as correlation coefficients on the calibration curve of $CO_2$, CO concentration by MLR method. But in the case of $SO_2$, because the correlation coefficients were 0.88, the linearity could be lower. Finally, the concentration of three gases was predicted on in-site fire experiment under the condition of quantitative analysis. It could measure high $CO_2$ concentration as predicted result, but didn't measure the CO and $SO_2$. According to the result, it was possible to measure the combustion gases to long distance by only open path FT-IR spectrometer without infrared lamp.

A quantitative determination of surfactant mixtures by FT-IR (FT-IR을 이용한 계면활성제 혼합물의 정량)

  • 최종근;노경원
    • Journal of the Society of Cosmetic Scientists of Korea
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    • v.21 no.2
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    • pp.129-139
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    • 1995
  • To confirm the usefulness of partial least-squares(PLS) and multiple scattering correction(MSC) method for quantitation of surfactants in [quantitative methods using FT-lR, reconsitituted mixtures of LAS, MES and ELA-9 were tested. Each mixture was dissolved in 50% EtOH, dried, and applied to the KBr cell. From the IR spectra of these mixture, the variance spectrum was obtained. After repeated calibrations for the various regios of this spectrum, we found that 1245-1130cm-1 and 1070-1010cm-1 showed the strong correlation with each component of the sample mixture: all the correlation coefficients were 1.000 and quantitative errors did not exceed 0.32%. From this result, we concluded that PLS method and MSC method are very useful and can be successfully applied to Quality control.

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