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Development of an Improved Numerical Methodology for Design and Modification of Large Area Plasma Processing Chamber

  • Kim, Ho-Jun;Lee, Seung-Mu;Won, Je-Hyeong
    • Proceedings of the Korean Vacuum Society Conference
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    • 2014.02a
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    • pp.221-221
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    • 2014
  • The present work proposes an improved numerical simulator for design and modification of large area capacitively coupled plasma (CCP) processing chamber. CCP, as notoriously well-known, demands the tremendously huge computational cost for carrying out transient analyses in realistic multi-dimensional models, because electron dissociations take place in a much smaller time scale (${\Delta}t{\approx}10-8{\sim}10-10$) than time scale of those happened between neutrals (${\Delta}t{\approx}10-1{\sim}10-3$), due to the rf drive frequencies of external electric field. And also, for spatial discretization of electron flux (Je), exponential scheme such as Scharfetter-Gummel method needs to be used in order to alleviate the numerical stiffness and resolve exponential change of spatial distribution of electron temperature (Te) and electron number density (Ne) in the vicinity of electrodes. Due to such computational intractability, it is prohibited to simulate CCP deposition in a three-dimension within acceptable calculation runtimes (<24 h). Under the situation where process conditions require thickness non-uniformity below 5%, however, detailed flow features of reactive gases induced from three-dimensional geometric effects such as gas distribution through the perforated plates (showerhead) should be considered. Without considering plasma chemistry, we therefore simulated flow, temperature and species fields in three-dimensional geometry first, and then, based on that data, boundary conditions of two-dimensional plasma discharge model are set. In the particular case of SiH4-NH3-N2-He CCP discharge to produce deposition of SiNxHy thin film, a cylindrical showerhead electrode reactor was studied by numerical modeling of mass, momentum and energy transports for charged particles in an axi-symmetric geometry. By solving transport equations of electron and radicals simultaneously, we observed that the way how source gases are consumed in the non-isothermal flow field and such consequences on active species production were outlined as playing the leading parts in the processes. As an example of application of the model for the prediction of the deposited thickness uniformity in a 300 mm wafer plasma processing chamber, the results were compared with the experimentally measured deposition profiles along the radius of the wafer varying inter-electrode gap. The simulation results were in good agreement with experimental data.

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Effects of Executive Compassion and Forgiving Behavior on Organizational Activities and Performance (중소기업에서 경영자의 배려와 용서가 학습조직 활동과 조직성과에 미치는 영향)

  • Park, Soo-Yong;Hawang, Moon-Young;Chol, Eun-Soo
    • Journal of Distribution Science
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    • v.13 no.6
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    • pp.105-118
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    • 2015
  • Purpose - Currently, strengthening small and medium-sized enterprises (SME) in terms of competitiveness is a key economic issue. However, the problem is that many SMEs lack the internal competence required to cope with a rapidly changing market structure. Such problems can act as an obstacle to economic development, yet most SMEs in Korea are dealing with this problem today. A company's source of competitive advantage is changing from quantity to quality, facility to knowledge, and hardwork to creativity. Under such circumstances, a company should place learning and sharing of knowledge and continuously creating new knowledge as its priority. This study aims to identify the effect of a chief executive officer's (CEO) compassion and forgiveness - positive factors in organizational emotion - on learning organization activities and organizational performance, through a theoretical comparison. Research design, data, and methodology - For this study, SMEs based in Daejeon and Chungcheong area were selected. To secure credibility of the data, the subjects were selected among those who have been working at the business for six months or longer. The survey was conducted for 30 days from March 5, 2015 to April 5, 2015. Both offline and online surveys were conducted. Fifty companies were chosen and 700 questionnaires were distributed, with 506 used for analysis. Fifty subject companies (25 from Daejeon, 10 from Chungnam, 10 from Chungbuk, and five from Sejong) were selected and the objective, target, and survey content were explained to a manager at each company either face-to-face or on the phone. Of the total of 700 questionnaires distributed via mail or e-mail, 78.6% or 550 copies were returned. Excluding 44 insufficient questionnaires, the remainder, 506 questionnaires, were used for analysis. Results - This study analyzed how the CEO's compassion and forgiveness affects learning organization activities and organizational performance. First, compassion of the CEO at the SMEs directly affected the learning organization activities and indirectly affected the organizational performance. Second, forgiveness of the CEO at the SMEs did not affect the learning organization activities and organizational performance directly or indirectly. Conclusions - The study conclusions are as follows. First, CEO compassionate behavior at the SMEs was a significant variable that directly and indirectly affected learning organization activities and organizational performance. Therefore, the CEO of an SME can create a positive organizational atmosphere through compassionate behaviors in the organization. Second, the forgiving behavior of the CEO did not have direct or indirect effects on learning organization activities and organizational performance. However, the reason for a CEO to continue his or her forgiving behavior is because it strengthens employee resilience, commitment, and self-efficacy to protect the organization from negative influences such as layoffs, risks, and wrongdoings. The action of forgiveness does not have direct or indirect effects. However, the CEO shall continue such behavior to strengthen members' physiological resilience, commitment, and self - effectiveness, and to protect the organization from risks including layoff and external negative factors.

Characterization of Water-Filled Ag/AgCl Reference Electrode

  • Bahn Chi Bum;Oh Sihyoung;Hwang Il Soon;Chung Hahn Sup;Jegarl Sung
    • Journal of the Korean Electrochemical Society
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    • v.4 no.3
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    • pp.87-93
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    • 2001
  • Pressure-balanced external Ag/AgCl electrode has been extensively used for both Pressurized Water Reactor (PWR) and Boiling Water Reactor (PWR) environments. The use of KCI-based buffer solution often becomes the source of electrode potential drift due to slow leakage through its porous plug, typically made of zirconia. It is reported that results of our effort to improve the stability of electrode potential by using high purity water as the filling solution in which $Cl^-$ ion activity can be established and maintained at the solubility of AgCl even with the sustained leakage for a long period. Stability tests have been made in boron and lithium mixture solution at $288^{\circ}C$. The electrode potential remained stable within 10 mV over one week period. And after a thermal cycle between 288 to $240^{\circ}C$ the potential shift of Ag/AgCl electrodes did not exceed 15 mV By using the limiting equivalent ionic conductances and Agar's hydrodynamic theory, the thermal liquid junction potential (TLJP) of the electrode has been predicted. The calculated values for the water-fiued Ag/AgCl electrode potential, in which the chlorine concentration in the filling solution was derived from the measured data at ambient temperature, had a good agreement with the experimental values.

Enhancement of Denitrification Capacity of Pseudomonas sp. KY1 through the Optimization of C/N ratio of Liquid Molasses and Nitrate (액상 당밀과 질산성 질소의 C/N 비율에 따른 Pseudomonas sp. KY1의 탈질 능력 및 그 최적비율에 관한 연구)

  • Lee, Kyuyeon;Lee, Byung Sun;Shin, Doyun;Choi, Yongju;Nam, Kyoungphile
    • Journal of Korean Society of Environmental Engineers
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    • v.35 no.9
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    • pp.654-659
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    • 2013
  • This study was conducted to identify an optimal ratio of carbon to nitrogen (C/N ratio) for denitrification of nitrate using molasses as an external carbon source. A series of batch and column tests was conducted using an indigenous bacterium Pseudomonas sp. KY1 isolated from a nitrate-contaminated soil. For the initial nitrate-nitrogen concentration of 100 mg-N/L, batch test results indicated that C/N ratio of 3/1 was the optimal ratio with a relatively high pseudo-first-order reaction constant of $0.0263hr^{-1}$. At C/N ratio of 3/1, more than 80% of nitrate-nitrogen concentration of 100 mg-N/L was removed in 100 hrs. Results of column tests with a flow velocity of 0.3 mL/min also indicated that the C/N ratio of 3/1 was optimal for denitrification with minimizing remaining molasses concentrations. After 172 hrs of column operation (35 pore volumes) with an influent nitrate-nitrogen concentration of 100 mg-N/L, the effluent met the drinking water standard (i.e., 10 mg $NO_3$-N/L).

Humidification of Air Using Water Injector and Cyclonic Separator (관 내 삽입 인젝터와 사이클론을 이용한 공기 가습)

  • Kim, Beom-Jun;Kim, Sung-Il;Byun, Su-Young;Kim, Min-Soo;Kim, Hyun-Yoo;Kwon, Hyuck-Ryul
    • Transactions of the Korean Society of Mechanical Engineers B
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    • v.34 no.5
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    • pp.491-498
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    • 2010
  • Humidification of PEM fuel cells is necessary for enhancing their performance and lifetime. In this study, a humidification system was designed and tested; the system includes an air-supply tube (inner diameter: 75 mm) through which a nozzle can be directly inserted and a cyclonic separator for the removal of water droplets. Three types of nozzles were employed to study the influence of injection pressure, air flow rate, and spray direction on the humidification performance. To evaluate the humidification performance, the concept of humidification efficiency was defined. In the absence of an external heat source, latent heat for evaporation will be supplied by the own enthalpies of water and air. Thus, the amount of water sprayed from the nozzle is the most critical factor affecting the humidification efficiency. Water droplets were efficiently removed by a cyclonic separator, but re-entrainment occurred at high air flow rates. The absolute humidity and humidification efficiency were $21.29\;kJ/kg_{da}$ and 86.57%, respectively, under the following conditions: nozzle type PJ24; spray direction angle $90^{\circ}$; injection pressure 1200 kPa; air flow rate 6000 Nlpm.

Biocompatibility Evaluation of Bent-Type Left Ventricular Assist Device During Long-Term Animal Experiment and Emergent Situation (장기 동물 실험 및 응급상황에서의 곡관형 좌심실보조장치의 생체적합성 평가)

  • Kang, Seong Min;Her, Keun;Choi, Seong Wok
    • Transactions of the Korean Society of Mechanical Engineers B
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    • v.38 no.9
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    • pp.739-745
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    • 2014
  • Although medication is given to heart disease patients, conventional medication alone is not sufficient to treat heart disease. However, it has been reported that left ventricular assist device (LVAD) transplantation is an effective bridge to heart transplantation by assisting cardiac function. This study used long-term animal testing and emergency situations with a bovine model (Holstein) and canine model (Labrador-retriever) to evaluate the biocompatibility of LibraHeart-I (LH-1), which is a bent-tube type of LVAD that was developed in a previous study. In the long-term animal testing with the bovine model, the subjects survived for 49 days with no irregularities observed in their complete blood cell counts or the vital sign tests that were carried out during the test period. In short-term animal testing with the canine model, it was observed that blood did not remain inside the LH-I even without power support from an external drive source. In this study, the biocompatibility of the LH-I that was developed in a previous study was verified by the ejection performance during long-term animal testing and emergency situations.

Preparation and Characterizatino of Nano-sized Liposome Containing Proteins Derived from Coptidis rhizoma (황련유래 단백질이 함유된 나노리포좀의 제조 및 특성)

  • Oh, Seng Ryong;Lee, Sang Bong;Cho, Kye Min;Choi, Moon Jae;Jin, Byung Suk;Han, Yong Moon;Lee, Young Moo;Shim, Jin Kie
    • Applied Chemistry for Engineering
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    • v.17 no.1
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    • pp.52-57
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    • 2006
  • Coptidis Rhizoma, an antimicrobial agent from natural source, is known to have the antiviral effect on the Candida albicans that causes the infectious dermatitis. The valuable protein was extracted from the Coptidis Rhizoma, To prevent denaturalization from external stimulus and improve adsorption onto the skin, the nano-sized liposomes were prepared as a carrier. The CPR-containing liposomes showed an average diameter of 187 nm, surface charge of 3.337 mV and 33% encapsulation efficiency. The release behavior of CRP from the liposome was investigated with various temperature and releasing time. The PVA solution was coated on the surface of liposome to improve the stability. The coated liposome showed slow release behavior in comparison with the non-coated liposome. The CRP in the liposome maintained the effect on the Candida albicans after treating it at 50 and with ultraviolet for 24 h.

A Study on the Pyo-bon(標本) concept based on the verse "The Principal and secondary aspects must first be decided(標本須明後先)." in the Sanghan(傷寒) Chapter of "Yixuerumen(醫學入門)" ("의학입문.상한편(醫學入門.傷寒篇)"의 "표본수명후선(標本須明後先)" 조문(條文)에서 나타난 삼음삼양병(三陰三陽病)의 표본(標本) 개념에 대한 고찰)

  • Shin, Sang-Won;Jeong, Chang-Hyun;Baik, You-Sang;Jang, Woo-Chang
    • Journal of Korean Medical classics
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    • v.25 no.1
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    • pp.1-16
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    • 2012
  • "Yixuerumen" is a comprehensive medical text published in the Ming-dynasty by Li Chan(李梴). In this text, Sanghan(傷寒, cold damage) is categorized among external contraction(外感) with much emphasis. The subject of this study is the verse "The Principal and secondary aspects must first be decided." and its annotations in the in the Sanghan chapter of "Yixuerumen". The complex theoretical structure of this verse was firstly analyzed, together with the historical background of how and why Li Chan adopted this concept. The Pyo-Bon concept is the contrast between phenomena(標) and its underlying source of motivation(本). The methodology for this study was to compare and analyze this main verse with contents on Sanghan and Un-gi(運氣) within the text, while reviewing historical theories explaining the physiology and pathology of the human body in terms of the Pyo-bon(標本) concept. As a result, we discovered that the Pyo-bon(標本) concept used in the aforementioned verse of "Yixuerumen" matches the Three Eum Three Yang(三陰三陽)-標本中氣(pyo-bon-jung gi)-gi transformation(氣化) theory of Un-gi(運氣). Li Chan created the connecting link in understanding the Three Eum Three Yang diagnosis system through the viscera/bowels theory(臟腑論) by adopting the Three Eum Three Yang(三陰三陽)-標本中氣(pyo-bon-jung gi)-gi transformation(氣化) theory from Un-gi. Li's work lead to several changes in the field of Sanghan. First, Li understood the disease pattern of Sanghan by using the accumulated knowledge of the viscera/bowel theory during the Jin-Yuan dynasty, and developed a medical perspective that observes the disease pattern based on the body's essence gi(精氣). Second, he set the category of the Sanghan-Three Eum Three Yang disease pattern, establishing a separate guideline. Third, by adding knowledge of herbs to the accumulated knowledge of the viscera/bowel theory, the process of diagnosis and herbal application were made explicable. On the other hand, in the process of interpreting the 三陰三陽 diagnosis system with viscera/bowels theory, theoretical inconsistencies appeared, of which Li tried to mend by several means. The results of the research on "Yixuerumen(醫學入門) the Sanghan chapter(傷寒篇)" calls for further studies, as it has effected both "Dongeuibogam(東醫寶鑑) the Sanghan part(寒門)" and "Dongeuisoosebowon(東醫壽世保元)" as well.

Study of the Method to Examine the Cause of Damage to a Flat-Type Vinyl Cord (VFF) According to the Type of Energy Source (에너지원의 종류에 따른 비닐평형코드(VFF)의 소손원인 판정기법에 관한 연구)

  • Choi, Chung-Seog
    • Fire Science and Engineering
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    • v.25 no.6
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    • pp.83-88
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    • 2011
  • This study presented the structure and characteristics of vinyl cords used for wiring electric equipment and appliances and analyzed the photographs of damaged flat-type vinyl cords (VFF, $1.25mm^2$) and the metallic cross-sectional structure of melted conductors. Normal VFFs were made by twisting several strands together and the surface of the conductor was red brown. In addition, from the analysis of the metallic structure of the conductor, it was found that its grains had been elongated. The surface of a VFF damaged by normal flame showed no sheen with carbonized insulation material fused on the conductor surface. In addition, from the analysis of the cross-sectional structure of the melted area, it was found that voids of a certain shape were formed on it but that the cord's own elongation structure could not be checked. The cross-sectional analysis of the melted conductor damaged by the external flame applied to a VFF to which electric current was being applied showed no elongation structure for each cord, and revealed that irregular voids and a columnar structure had grown. The surface of the VFF damaged by overcurrent was uniformly carbonized and the cross-sectional structure analysis of the melted conductor revealed that the dendritic structure had grown. The analysis of the characteristics of the VFF melted by short-circuit showed that even though some part of the surface was contaminated, it showed little sheen and that the area rebounded by melting was round in shape. In addition, the cross-sectional structure analysis using a metallurgical microscope showed the boundary surface and columnar structure and revealed an amorphous structure like normal copper at areas other than the melted conductor.

Practical Usage of Low-Temperature Metal Catalyst for the Destruction of Volatile Organic Compounds (VOCs) (휘발성 유기화합물(VOCs) 제거를 위한 저온금속촉매 실용화에 관한 연구)

  • Jung, Sung-Chul;Lee, Seung-Hwan
    • Journal of Korean Society of Environmental Engineers
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    • v.34 no.6
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    • pp.397-405
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    • 2012
  • In this study, performance evaluation of newly developed technology for the economical and safe removal of volatile organic compounds (VOCs) coming out from electronic devices washing operation and offensive odor induction materials was made. Metal oxidization catalyst has shown 50% of removal efficiency at the temperature of $220^{\circ}C$. Composite metal oxidization catalyst applied in this study has shown that the actual catalysis has started at the temperature of $100^{\circ}C$. Comprehensive analysis on the catalyst property using Mn-Cu metal oxidization catalyst in the pilot-scale unit was made and the removal efficiency was variable with temperature and space velocity. Full-scale unit developed based on the pilot-scale unit operation has shown 95% of removal efficiency at the temperature of $160^{\circ}C$. Optimum elimination effective rates for the space velocity was found to be $6,000hr^{-1}$. The most appropriate processing treatment range for the inflow concentration of VOCs was between 200 ppm to 4,000 ppm. Catalyst control temperature showed high destruction efficiency at $150{\sim}200^{\circ}C$ degrees Celsius in 90~99%. External heat source was not necessary due to the self-heat reaction incase of VOCs inflow concentration is more than 1,000 ppm. Equipment and fuel costs compared to the conventional RTO/RCO method can be reduced by 50% and 75% respectively. And it was checked when there was poisoning for sulfide and acid gas.