• Journal of the Korean Society for Precision Engineering
• /
• v.16 no.3 s.96
• /
• pp.62-71
• /
• 1999

Integrating micro-machined sensors and actuators on the conventional devices with the copper power lines was incompatible to fabricate the mass produced micro electromechanical system (MEMS) devices. To achieve the compatibility of the wiring method between MEMS parts and devices, we developed the three-dimensional sputter-evaporation system that coats micropatterned thin copper films on the surface of the MEMS element. The system consists of a process chamber, two branch chambers, the substrate holder, and a linear-rotary motion feedthrough. Thin copper film was sputtered and evaporated on the biocompatible polymer, Pellethane$^{circed{R}}$ and silicone, catheter that is 2 mm in diameter and 700 mm in length. The metal film coating technique with three-dimensional thin film sputter-evaporation system was developed to apply the power and signal lines on the micro active endoscope. In this paper, we developed the three-dimensional metal film sputter-evaporation system operated on the low temperature for the biopolymeric substrates used in the medical MEMS devices.

• Journal of the Korea Academia-Industrial cooperation Society
• /
• v.18 no.1
• /
• pp.216-221
• /
• 2017

Reducing optical reflection in the visible light range, in order to increase the share of transmitted light and avoid the formation of ghost images in imaging, is important for polymer lens applications. In this study, polymer lenses with refractive indices of n=1.56, 1.60, and 1.67 were fabricated by the injection-molding method with a polymer lens monomer, dibutyltin dichloride as the catalyst and an alkyl phosphoric ester as the release agent. To investigate their anti-reflection (AR) effects, various AR coating structures, viz. a multi-layer AR coating structure, tri-layer AR coating structure with a discrete approximation Gaussian gradient-index profile, and tri-layer AR coating structure with a quarter-wavelength approximation, were designed and coated on the polymer lens by an E-beam evaporation system. The optical properties of the polymer lenses were characterized by UV-visible spectrometry. The material properties of the thin films, refractive index and surface roughness, were analyzed by ellipsometry and AFM, respectively. The most effective AR coating structure of the polymer lens with low refractive index, n=1.56, was the both side coating of multi-layer AR coating structure. However, both side coating of the tri-layered discrete approximation Gaussian gradient-index profile AR coating structure gave comparable results to the both side coating of the multi-layer AR coating structure for the polymer lens with a high refractive index of n=1.67.

• Proceedings of the Korean Institute of Surface Engineering Conference
• /
• 2011.05a
• /
• pp.205-206
• /
• 2011

Cu thin films for electromagnetic wave shielding were prepared on PET film and Ni-coated PET film by using Dry and Wet coating method, such as evaporation method, DC sputtering method and copper sulfate($CuSO_4$). After that, Zn thin film and Ni thin film were prepared onto the Cu thin films by using evaporation dry process and Ni electro plating wet process as a finishing treatment, respectively. The result of conductivity test and corrosion resistance test revealed Cu thin films which were formed with bigger grain size and high Cu composition rate have superior properties. Zn thin film by dry evaporation process and Ni thin film by wet electro plating process on Cu thin films were largely contributed to corrosion resistance. However, Ni thin film by wet process made conductivity of all specimen worse, the other hand, Zn thin film by dry process made it better to improve condictivity of specimens just prepared by dry process.

• YAKHAK HOEJI
• /
• v.41 no.3
• /
• pp.305-311
• /
• 1997

Sustained release-microspheres and immediate release-pellets were prepared to develop a controlled release multiparticulate system containing both water soluble and insoluble dr ug. Pseudoephedrin.HCl (EPD) and terfenadine (TRF) were used as model drugs, respectively. Sustained release-EPD microspheres were prepared by solvent evaporation method using Eudragit RL or RS as a matrix combined with pH-insensitive film coating. Smaller EPD microspheres were obtained when smaller amount of Eudragit as a matrix material or larger amount of magnesium stearate as a dispersing agent was used. However the obtained microspheres did not show syfficient sustained release characteristics. About 97% of EPD was released after 1 hr irrespective of matrix material used. Subsequent coating of the microspheres with pH-insensitive polymer such as Eudragit RS or ethylcelulose (EC) resulted good sustained in 37.5, 73.3 and 92.0% release of encapsulated EPD in distilled water after 1, 3 abd 7 hr, respectively. It corresponds to mean dissolution time (MDT) of 2.3 hr, which is much larger than that of un-coated EPD microspheres (0.0048 hr). Immediate release TRF pellets were prepared by spherically agglomerated crystallization using Eudragit E as an inert matrix and methylene chloride as a liquid binder. Using Eudragit E alone as a matrix resulted in satisfactory physical properties of the pellets such as sphericity, surface texture and flowability, but led to slower release of TRF from pellets than un-modified TRF powder (MDT of 1.70 vs 1.43 hr in pH 1.2 dissolution medium). Introducing propylene glycol or sodium lauryl sulfate as an emulsifier brought about faster release of TRF from pellets (MDT of 1.14 and 0.95 hr, respectively). In conclusion, microencapsulation by solvent evaporation combined with film coating and spherically agglomerated crystallization were successfully utilized to prepare controlled release multiparticulate system composed of sustained release EPD-microspheres and immediate release TRF pellets.

• Proceedings of the Korean Institute of Surface Engineering Conference
• /
• 2013.05a
• /
• pp.150-150
• /
• 2013

Al-Mg films were prepared onto steel sheet according to deposition condition by eco-friendly electron beam vacuum evaporation method. The influence of Al-Mg films on corrosion resistance was evaluated by salt spray test and electrochemical method etc.. From the experimented results, it was found that the Al-Mg films which showed good corrosion resistance tend to have fine structure with homogenious composition distribution. In addition, it was shown that the property of coating films can be improve by controlling thickness ratio and uniform distribution of intermetallic compounds in Al-Mg films.

• Journal of the Korean Graphic Arts Communication Society
• /
• v.18 no.1
• /
• pp.47-58
• /
• 2000

Transmittances of SiO2 and ZrO2 thin films, made by the electron beam evaporation method, were measured with a spectrophotometer to be used in determining their optical constants and thicknesses in the envelop method. New color glass lenses with high transmittance, which now can be manufactured in the industry, was successfully designed by using these constants. Also the vacuum evaporator could be mechanically corrected with these constants as correction factors.

• Journal of Industrial Convergence
• /
• v.21 no.3
• /
• pp.189-194
• /
• 2023

Recently, various studies on flexible electronic devices have been performed. In this study, the potential of Ag nanowires was evaluated as a material to replace the ITO transparent conductive film. Ag nanomaterials were formed on the glass by a novel brush coating method and an argon plasma evaporation method based on atmospheric pressure plasma. First, the Ag solution is coated on the glass with a brush, and the remaining solvent is removed with atmospheric plasma. During this process of solvent evaporation, a sound is generated by the reaction between the atmospheric plasma and the solvent. Therefore, the remaining amount of the solvent can be confirmed. In order to observe optical properties and electrical results such as reflectance, transmittance, and absorbance according to the number of coatings of the film, the results were analyzed by coating up to 5 times. For the purpose of investigating the interaction of light with Ag nanowires, reflectance and transmittance were measured while changing the wavelength of light from 200 nm to 800 nm. In the case of absorbance, the trend of increasing light absorption of the Ag nanowires according to the coating was clearly confirmed. The electrical properties showed a great change from the time of coating more than 4 times, and in particular, the resistance value was lower than kΩ/cm2 when the coating was applied 5 times. Based on these optical and electrical results, we plan to verify the possibility of a transparent conductive film by applying it to electronic devices in the future.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
• /
• 1998.11a
• /
• pp.101-104
• /
• 1998

A new planar-type micro gas sensor was designed and fabricated on silicon substrate and the operating characteristics of the sensor were investigated. The thin sensitive film of the sensor was fabricated by spin-coating of the SnO$_2$ sol solution which was synthesized by hydrothermal method. The spin-coating method for preparation of sensing layer was adopted to improve the long-term stability of the fabricated sensing film instead of physical methods such as rf sputtering and thermal evaporation. The fabricated microsensor showed a fairly good sensing performance for CO gas in air at 250$^{\circ}C$ The sensitivity(S=Ra/Rg) was shown to be about 5 to 2000ppm CO with heating power of 50mW.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
• /
• 2002.07b
• /
• pp.984-987
• /
• 2002

In this study, It is to synthesize PPV-copolymer and to make polymer electroluminesence device in single layer of ITO/PPV -copolymer/metal. and then it has been realized basic characteristics for display device through analysis and recognized application possibility by luminous material. PPV-copolymer is used spin coating method and electrode is evaporated of vacuum deposition method by changing materials. The result of experiment, The PPV-copolymer used this study emitted blue color, could be discovered a change of emttion characteristic by electrode material.

• Membrane Journal
• /
• v.10 no.3
• /
• pp.130-138
• /
• 2000

Polyethersulfone (PES) asymmetric membranes for gas separation were prepared by dry/wet phase inversion method and their separation properties for CO$_2$ and N$_2$ gases were investigated. The effects of important variables such as composition of casting solution and evaporation time in preparation of asymmetric gas membrane on membrane morphology and the separation properties were analyzed and the optimum condition of membrane preparation was established. To compensate the defects like pinholes existed on skin layer of the membrane prepared, the membranes were coated with silicone resin. By comparing separation properties after coating with those before coating, we found that the coating of silicone resin was effective to enhance the separation properties. The casting solution mainly used in this study consisted of PES, N-methyl-2-pyrrolidone, acetone, ethanol and distilled water was used as coagulation agent. It was shown that the selectivity for CO$_2$/N$_2$ was getting higher but the permeability decreases, as the contents of PES and volatile organic solvent and evaporation time increased. The selectivity for CO$_2$/N$_2$ and permeability of CO$_2$ of the membrane prepared under the optimum condition were found to be 61 and 21 GPU, respectively.