• Title/Summary/Keyword: Epitaxial Layer

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A Fabrication and Characteristics of GaInAs/InP PIN Phtodiode Grown by LPE (LPE에 의한 GaInAs/InP PIN Photodiode의 제작 및 특성)

  • 박찬용;남은수;박경현;김상배;박문수;이용탁;홍창희
    • Journal of the Korean Institute of Telematics and Electronics
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    • v.27 no.5
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    • pp.737-746
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    • 1990
  • Ga0.47In0.53As PIN photodiodes(PD) having various areas have been fabricated by liquid phase epitaxial techniques. Ternary melt has been baked out at 675\ulcorner in H2 atmosphere for 20 hours before growth, which resulted in reduction of background carrier concentration of grown epi-layer. Also, lattice mismatch has been controlled within 0.01%. The room temperature performance of 10**-4cm\ulcornerarea PIN PD at a bias voltage of -5V were` quantum efficiency(with no antireflection coating)=60% for 1.3\ulcorner light source, dark current\ulcorner5nA, and capacitance\ulcornerpE. Frequency response measurement of packaged PIN PD has shown that cut-off frequency (f-3dB) was 961MHz. This PD has shown a good eye pattern when it was incorporated in a 565Mbps optical receiver.

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Interfacial Properties in Cu-phthalocyanine-based Hybrid Inorganic/Organic Multilayers

  • Lee, Nyun Jong;Ito, Eisuke;Bae, Yu Jeong;Kim, Tae Hee
    • Journal of Magnetics
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    • v.17 no.4
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    • pp.261-264
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    • 2012
  • Interfacial properties of 5 nm MgO(001)/7 nm Fe(001)/1.8 nm MgO(001)/t nm Cu-phthalocyanine (CuPc) hybrid multilayers with t = 0, 1, 7, and 10 were investigated by using x-ray photoemission spectroscopy (XPS). Rather sharp interfacial properties were observed in the CuPc films grown on an epitaxial MgO/Fe/MgO(001) trilayer than a MgO/Fe(001) bilayer. This work suggests a new way to improve device performance of organic spintronic devices by utilizing an artificially grown MgO(001) thin layer.

Epitaxial Growth of GaAs Thin Films Using MOCVD (MOCVD를 이용한 GaAs 박막의 에피성장)

  • So, Myoung-Gi
    • Journal of Industrial Technology
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    • v.24 no.B
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    • pp.59-64
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    • 2004
  • GaAs thin films were grown epitaxially by MOCVD method on (001) GaAs substrate. And as a surfactant, Bi(bismuth) thin films were deposited on GaAs buffer layer by using TMBi(trimethylbismuth) source. In-situ reflectance difference spectroscopy(RDS) was used to monitor the surface reconstruction of GaAs and Bi thin films. As the results, under the exposure of TBAs(tertiarybuthylarsine) and hydrogen atmosphere, the surface reconstruction of GaAs was changed from As-rich c($4{\times}4$) to As-rich ($2{\times}4$), which was due to the adsoption and desorption of As dimers. The first bismuth surface related RDS signal was reported. At the deposition temperature of $450^{\circ}C$, Bi-terminated GaAs surface showed the RDS spectrum similar to that of Sb-terminated GaAs surface, possibly a ($2{\times}4$) surface. And Bi surface layers were rapidly evaporated with increasing the deposition temperature($550^{\circ}C$), finally becoming As-terminated ($2{\times}4$) surface.

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Electrical Characteristics of GaN Epi Layer on Sapphire Substrates for AIGaN/GaN Heterostructures (AIGaN/GaN 이종접합 디바이스를 위한 GaN 에피층의 전기적 특성)

  • 문도성
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.15 no.7
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    • pp.591-596
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    • 2002
  • In this work, epitaxial GaN is grown on sapphire substrate in AlGaN/GaN heterostructures. Deliberate oxygen doping of GaN grown by MOVPE has been studied. The electron concentration increased as a function of the square root of the oxygen partial Pressure. Oxygen is a shallow donor with a thermal ionization energy of $27\pm2 meV$ measured by temperature dependent Hall effects. A compensation ratio of $\theta$=0.3~0.4 was determined from Hall effect measurements. The formation energy of $O_N$ of $E^F$ =1.3eV determined from the experimental data, is lower than the theoretically predicted vague.

Growth of Large Scale CdTe(400) Thin Films by MOCVD (MOCVD를 이용한 대면적 CdTe 단결정 박막성장)

  • Kim, Kwang-Chon;Jung, Kyoo-Ho;You, Hyun-Woo;Yim, Ju-Hyuk;Kim, Hyun-Jae;Kim, Jin-Sang
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.23 no.4
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    • pp.343-346
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    • 2010
  • We have investigated growth of CdTe thin films by using (As, GaAs) buffer layers for application of large scale IR focal plane arrays(IFPAs). Buffer layers were grown by molecular beam epitaxy(MBE), which reduced the lattice mismatch of CdTe/Si and prevented native oxide on Si substrates. CdTe thin films were grown by metal organic chemical deposition system(MOCVD). As a result, polycrystalline CdTe films were grown on Si(100) and arsenic coated-Si(100) substrate. In other case, single crystalline CdTe(400) thin film was grown on GaAs coated-Si(100) substrate. Moreover, we observed hillock structure and mirror like surface on the (400) orientated epitaxial CdTe thin film.

Simulation for the analysis of distortion and electrical characteristics of a two-dimensional BJT (2차원 BJT의 전기적 특성 및 왜곡 해석 시뮬레이션)

  • 이종화;신윤권
    • Journal of the Korean Institute of Telematics and Electronics D
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    • v.35D no.4
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    • pp.84-92
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    • 1998
  • A program was developed to analyze the electrical characteristics and harmonic distrotion in a two-dimensional silicon BJT. The finite difference equations of the small signal and its second and thired harmonics for basic semiconductor equations are formulated treating the nonlinearity and time dependence with Volterra series and Taylor series. The soluations for three sets of simultaneous equations were obtained sequantially by a decoupled iteration method and each set was solved by a modified Stone's algorithm. Distortion magins and ac parameters such as input impedance and current gains are calculated with frequency and load resistance as parameters. The distortion margin vs. load resistancecurves show cancellation minima when the pahse of output voltage shifts. It is shown that the distortionof small signal characteristics can be reduced by reducing the base width, increasing the emitter stripe length and reducing the collector epitaxial layer doping concentration in the silicon BJT structure. The simulation program called TRADAP can be used for the design and optimization of transistors and circuits as well as for the calculation of small signal and distortion solutions.

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An Analytic Model for Punchthrough Limited Breakdown Voltage of Cylindrical Junctions (Punchthrough 원통형 접합이 항복전압에 대한 해석적 모델)

  • 배동건;정상구
    • Journal of the Korean Institute of Telematics and Electronics D
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    • v.36D no.4
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    • pp.70-76
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    • 1999
  • Analytic model for punchthrough limited breakdown voltage of cylindrical junction is presented as a function of the epitaxial layer thickness and the critical depletion width of the cylindrical junction in nonpunchthrough cases. All the expressions for the distances, electric fields and potentials are normalized, allowing quick determination of the corresponding breakdown voltages. The calculated results are in good agreement with the simulations obtained from two dimensional device simulation program MEDICI.

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Excimer Laser-Assisted In Situ Phosphorus Doped $Si_{(1-x)}Ge_x$ Epilayer Activation

  • Bae, Ji-Cheul;Lee, Young-Jae
    • ETRI Journal
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    • v.25 no.4
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    • pp.247-252
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    • 2003
  • This paper presents results from experiments on laser-annealed SiGe-selective epitaxial growth (LA-SiGe-SEG). The SiGe-SEG technology is attractive for devices that require a low band gap and high mobility. However, it is difficult to make such devices because the SiGe and the highly doped region in the SiGe layer limit the thermal budget. This results in leakage and transient enhanced diffusion. To solve these problems, we grew in situ doped SiGe SEG film and annealed it on an XMR5121 high power XeCl excimer laser system. We successfully demonstrated this LA-SiGe-SEG technique with highly doped Ge and an ultra shallow junction on p-type Si (100). Analyzing the doping profiles of phosphorus, Ge compositions, surface morphology, and electric characteristics, we confirmed that the LA-SiGe-SEG technology is suitable for fabricating high-speed, low-power devices.

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Development of $Blue{\sim}Green$ LEDs by Controlling Te Cluster (Te Cluster 제어에 의한 청${\sim}$녹색 발광다이오드의 개발)

  • Lee, Hong-Chan;Lee, Sang-Tae;Kim, Yoon-Sik
    • Proceedings of the Korean Society of Marine Engineers Conference
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    • 2005.11a
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    • pp.51-52
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    • 2005
  • Optical characteristics of excitonic blue and green emission of Te-doped ZnSSe:Te epitaxial layers, grown by molecular beam epitaxy, were investigated by photoluminescence (PL) measurements. The Te-doped ternary specimen shows strong blue or green emission (at 300K) which is assigned to $Te_1$ or $Te_n$ $(n{\geq}2)$ cluster cluster bound exciton, respectively. Bright green and blue light emitting diodes (LEDs) have been developed using ZnSSe:Te system as an active layer. The green LEDs exhibit a fairly long device lifetime (>2000 h) when operated at 3 $A/cm^2$ under CW condition at room temperature.

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Study of High-efficiency and Long-lived Blue - Green Light Emitting Diodes Using ZnSSe:Te System Grown by MBE (ZnSSe:Te계 청 -녹색 발광다이오드의 고효율화 및 장수명화에 관한 연구)

  • 이홍찬;이상태;이성근;김윤식
    • Proceedings of the Korean Society of Marine Engineers Conference
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    • 2002.05a
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    • pp.167-171
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    • 2002
  • We have investigated the optical properties of Te-doped ZnSSe:Te epitaxial layers grown on (100) GaAs substrates by molecular beam epitaxy. The Te-doped ternary specimen shows strong blue or green emission (at 300k) which is assigned to Te$_{1}$ or Te$_{n}$( n$\geq$2) cluster bound exciton. Bright green and blue light-emitting diodes (LEDs) have been developed using ZnSSe:Te system as an active layer. The green LEDs exhibit a fairly long device lifetime (>2000 h) when operated at 3 A/cm$^{2}$ under CW condition at room temperature. It is confirmed that the Te-doping induced "crystal-hardening effect" plays a significant role in both efficient and strong suppression of the optical device degradation.gradation.

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