• Title/Summary/Keyword: Epitaxial

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Computer Simulation of Pt-GaAs Schottky Barrier Diode (Pt-GaAs Schottky Barrier Diode의 Computer Simulation)

  • Yoon, Hyun-Ro;Hong, Bong-Sik
    • Journal of the Korean Institute of Telematics and Electronics
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    • v.27 no.3
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    • pp.101-107
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    • 1990
  • In this work, one-dimensional simulation is carried out for PT-GaAs Schottky barrier diodes with finite difference method. Shockley's semiconductor governing equations: Poisson equation and current continuity equation are discertized, and linearized by Newton-Raphson method. The linear system of equation is solved by Gaussian elimination method until convergence is achieved. The boundary condition for this equation is taken from thermionic emission-diffusion theory. Simulation is done for PT-GaAs epitaxial-layer Schottky barrier diodes. The claculated results of electron and potential distribution are shown. Simulation results show exellent agreement with experiments.

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Simulation Study on the Breakdown Characteristics of InGaAs/InP Composite Channel MHEMTs with an InP-Etchstop Layer (InP 식각정지층을 갖는 MHEMT 소자의 InGaAs/InP 복합 채널 항복 특성 시뮬레이션)

  • Son, Myung Sik
    • Journal of the Semiconductor & Display Technology
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    • v.12 no.4
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    • pp.21-25
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    • 2013
  • This paper is for enhancing the breakdown voltage of MHEMTs with an InP-etchstop layer. The fully removed recess structure in the drain side of MHEMT shows that the breakdown voltage enhances from 2 V to 4 V in the previous work. This is because the surface effect at the drain side decreases the channel current and the impact ionization in the channel at high drain voltage. In order to increase the breakdown voltage at the same asymmetric gate-recess structure, the InGaAs channel structure is replaced with the InGaAs/InP composite channel in the simulation. The simulation results with InGaAs/InP channel show that the breakdown voltage increases to 6V in the MHEMT as the current decreases. In this paper, the simulation results for the InGaAs/InP channel are shown and analyzed for the InGaAs/InP composite channel in the MHEMT.

Fabrication of dual wavelength photodetector using quantum well intermixing (다중양자우물의 상호 섞임 현상을 이용한 다중 파장 검출기의 제작)

  • 여덕호;윤경훈;김항로;김성준
    • Proceedings of the Optical Society of Korea Conference
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    • 2000.02a
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    • pp.10-11
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    • 2000
  • 광통신을 이용한 근거리 전송과 장거리 전송에서 1.3 및 1.55 $mu extrm{m}$ 파장 영역의 빛이 사용되고 있다. 향후, 각 가정마다 광선로를 연결하는 Fiber-to-the-home (FTTH)의 개념과 광CATV가 발전함에 따라 1.3 및 1.55 $\mu\textrm{m}$ 빛을 검출하는 소자와 송신하는 소자가 필요하게 된다. 본 논문에서는 이러한 다중파장을 검출할 수 있는 집적소자를 제작 및 측정하였다. 본 논문에서 사용된 epitaxial layer의 구조는 N-InP 기판 위에 1 $\mu\textrm{m}$의 n-InP buffer층, 5층의InGaAs/InGaAsP 다중양자우물과 0.2 $\mu\textrm{m}$ InGaAsP separate confinement heterostructure (SCH) 층, 0.5$\mu\textrm{m}$ InP clad층과 0.1 $\mu\textrm{m}$ InGaAs cap 층으로 구성되어있다. 모든 epi 층은 InP 기판에 격자 정합이 되어있다. 다중양자우물구조는 84 $\AA$의 InGaAs 우물층과 100 $\AA$의 InGaAsP 장벽층으로 구성되며, 상온에서 0.787 eV (1.575 $\mu\textrm{m}$)의 bandgap energy를 갖도록 설계하였다. (중략)

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Spectrum Characteristics of 1.55 ${\mu}m$ PBH-DFB-LD (광통신용 1.55 ${\mu}m$ PBH-DFB-LD 스펙트럼 특성)

  • 장동훈;이중기;이승원;박경현;김정수;김홍만;황인덕;박형무
    • Korean Journal of Optics and Photonics
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    • v.5 no.1
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    • pp.120-124
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    • 1994
  • PBH-DFB-LD emitting at $1.55\mu\textrm{m}$ wavelength has been fabricated for 2.5 Gbps optical fiber communications. For fabrication of PBH-DFB-LD. inteference expose for grating formation and 3-step LPE epitaxial growth was used. Fabricated PBH-DFB-LD operates in single longitudinal mode with more than 35dB SMSR and its threshold current is less than 15 mA. The operating wavelength is 1530-1550 nm with the temperature dependence of $0.9\AA/^{\circ}C$. Coupling coefficient(K) was estimated as $$97 cm^{-1} by means of stop-band measurement. PBH-DFB-LD fabricated in this experiment can be applicable as light source for 2.5 Gbps optical fiber communication system. ystem.

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Deposition of Epitaxial YBCO Films on $LaAlO_3$(100) Substrate by Spray Pyrolysis Method (분사 열분해 CVD법에서 분사방식에 따른 YBCO 박막의 결정구조와 미세조직 연구)

  • Kim Ho-Jin;Joo Jinho;Hong Suk-Kwan;Lee Sun-Wang;Lim Sun-Weon;Lee Hee-Gyoun;Hong Gye-Won
    • Progress in Superconductivity
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    • v.7 no.1
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    • pp.52-57
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    • 2005
  • [ $YBa_{2}Cu_{3}O_y$ ] superconducting films were prepared on $LaAlO_3$(100) single crystal substrate by spray pyrolysis method. The precursor solution was prepared by dissolving nitrate powders in de-ionized water. Both of ultrasonic and concentric nebulizers were used in order to generate fine droplets of precursor solution. C-axis oriented films were obtained at deposition temperature of $750\~850^{\circ}C$ and working pressure of 100 Torr and 500 Torr. In case of ultrasonic nebulizer, films showed rough and porous surface morphology due to formation of enormous droplets, while smooth and dense films were obtained for concentric nebulizer. A transport $J_c$ value of $0.43\;MA/cm^2$ at 77 K and self field was achieved on $LaAlO_3$(100) single crystal substrate.

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Antireflection layer Coating on the Epitaxial Base Si Solar Cell (에피텍셜 베이스 Si 태양전지의 광반사 방지막 처리)

  • 장지근;임용규;황용운
    • Proceedings of the International Microelectronics And Packaging Society Conference
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    • 2003.11a
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    • pp.141-144
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    • 2003
  • Si 태양전지의 기전력 형성에 이용되는 빛의 파장범위$(0.4{\mu}m\leq\lambda\leq0.97{\mu}m)$에서 AM1 스펙트럼과 Si 굴절율을 수학적으로 모델링하고 광반사 방지막$(SiO_2)$의 두께에 따른 Si 태양전지의 유효 광 흡수전력을 전산 모사하였다. 전산 모사로부터 얻어진 Si 태양전지의 유효 광흡수전력은 $SiO_2$막의 두께가 $500\AA$$1000\AA$일 때 각각 $520\;W/m^2$$450\;W/m^2$로 나타났으며, $d(SiO_2)=1000\AA$에서 최대광흡수 특성을 보였다. 광반사 방지막의 처리에 따른 유효 광흡수전력의 차이를 알아보기 위해 $SiO_2$막의 두께를 $500\AA$$1000\AA$으로 형성한 2종류의 에피텍셜 베이스 Si 태양전지$[EBS(500\AA),\;EBS(1000\AA)]$를 제작하고 효율특성을 분석한 결과, AM1 $100\;mW/cm^2$ 입사광 아래 $EBS(1000\AA)$ 전지는 $EBS(500\AA)$전지에 비해 효율이 약 $15\%$ 높게 나타났다.

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Densification and Crystallization Characteristics of LAS Gels Prepared by the Hydrolysis-Condensation Reaction and the Mixed Colloidal Processing Route (가수분해-축합반응 및 콜로이드 혼합법으로 유도된 LAS gel의 치밀화와 결정화 특성)

  • 김광수;장현명;정창주
    • Journal of the Korean Ceramic Society
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    • v.28 no.11
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    • pp.865-872
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    • 1991
  • LAS (lithium aluminosilicate) sol was synthesized using the hydrolysis-condensation reaction of TEOS, chelated Al(OBus)3 and LiNO3 with H2O in alcohol (ethanol+2-propanol) medium. Lowering Li content by a factor of 1/2 significantly enhanced densification and retarded the crystallization of LAS gel by ~30$0^{\circ}C$. Dense LAS specimen with essentially pore-free microstructure was obtained by sintering the sol-gel derived gel at 80$0^{\circ}C$ for 4 h and annealing at 120$0^{\circ}C$ for 2 h. Similary, a mixed colloidal processing was attempted as a convenient, alternative route for the fabrication of dense LAS sintered body. The $\beta$-spodumene seeding (~0.8 ${\mu}{\textrm}{m}$) in the sol-gel derived LAS modified the sequence of phase transformations and lowered the temperature of crystallization by ~12$0^{\circ}C$. Combining the epitaxial seeding with the sol-gel process, we could lower the crystallization temperature to the sintering temperature range (~80$0^{\circ}C$) and, demonstrate a possibility of making the viscous sintering/crystallization as a continuous as a continuous unit process.

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DC Characteristics of P-Channel Metal-Oxide-Semiconductor Field Effect Transistors with $Si_{0.88}Ge_{0.12}(C)$ Heterostructure Channel

  • Choi, Sang-Sik;Yang, Hyun-Duk;Han, Tae-Hyun;Cho, Deok-Ho;Kim, Jea-Yeon;Shim, Kyu-Hwan
    • JSTS:Journal of Semiconductor Technology and Science
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    • v.6 no.2
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    • pp.106-113
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    • 2006
  • Electrical properties of $Si_{0.88}Ge_{0.12}(C)$ p-MOSFETs have been exploited in an effort to investigate $Si_{0.88}Ge_{0.12}(C)$ channel structures designed especially to suppress diffusion of dopants during epitaxial growth and subsequent fabrication processes. The incorporation of 0.1 percent of carbon in $Si_{0.88}Ge_{0.12}$ channel layer could accomodate stress due to lattice mismatch and adjust bandgap energy slightly, but resulted in deteriorated current-voltage properties in a broad range of operation conditions with depressed gain, high subthreshold current level and many weak breakdown electric field in gateoxide. $Si_{0.88}Ge_{0.12}(C)$ channel structures with boron delta-doping represented increased conductance and feasible use of modulation doped device of $Si_{0.88}Ge_{0.12}(C)$ heterostructures.

Analysis on the Scaling of Nano Structure MOSFET (나노 구조 MOSFET의 스켈링에 대한 특성 분석)

  • 장광균;정학기;이종인
    • Proceedings of the Korean Institute of Information and Commucation Sciences Conference
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    • 2001.05a
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    • pp.311-316
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    • 2001
  • The technology for characteristic analysis of device for high integration is changing rapidly. Therefore to understand characteristics of high-integrated device by computer simulation and fabricate the device having such characteristics became one of very important subjects. At devices become smaller from submicron to nanometer, we have investigated MOSFET built on an epitaxial layer(EPI) of a heavily-doped ground plane, and also newEPI MOSFET for improved structure to weak point of LDD structure by TCAD(Technology Computer Aided Design) to develop optimum device structure. We analyzed and compared the EPI device characteristics such as impart ionization, electric field and I-V curve with those of lightly-doped drain(LDD) MOSFET. Also, we presented that TCAD simulator is suitable for device simulation and the scaling theory is suitable at nano structure device.

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Vertically Standing Graphene on Glass Substrate by PECVD

  • Ma, Yifei;Hwang, Wontae;Jang, Haegyu;Chae, Heeyeop
    • Proceedings of the Korean Vacuum Society Conference
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    • 2014.02a
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    • pp.232.2-232.2
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    • 2014
  • Since its discovery in 2004, graphene, a sp2-hybridized 2-Dimension carbon material, has drawn enormous attention. A variety of approaches have been attempted, such as epitaxial growth from silicon carbide, chemical reduction of graphene oxide and CVD. Among these approaches, the CVD process takes great attention due to its guarantee of high quality and large scale with high yield on various transition metals. After synthesis of graphene on metal substrate, the subsequent transfer process is needed to transfer graphene onto various target substrates, such as bubbling transfer, renewable epoxy transfer and wet etching transfer. However, those transfer processes are hard to control and inevitably induce defects to graphene film. Especially for wet etching transfer, the metal substrate is totally etched away, which is horrendous resources wasting, time consuming, and unsuitable for industry production. Thus, our group develops one-step process to directly grow graphene on glass substrate in plasma enhanced chemical vapor deposition (PECVD). Copper foil is used as catalyst to enhance the growth of graphene, as well as a temperature shield to provide relatively low temperature to glass substrate. The effect of growth time is reported that longer growth time will provide lower sheet resistance and higher VSG flakes. The VSG with conductivity of $800{\Omega}/sq$ and thickness of 270 nm grown on glass substrate can be obtained under 12 min growing time. The morphology is clearly showed by SEM image and Raman spectra that VSG film is composed of base layer of amorphous carbon and vertically arranged graphene flakes.

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