• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2007.06a
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• pp.79-80
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• 2007

Copper has been used as an interconnect material in the fabrication of semiconductor devices, because of its higher electrical conductivity and superior electro-migration resistance. Chemical mechanical polishing (CMP) technique is required to planarize the overburden Cu film in an interconnect process. Various problems such as dishing, erosion, and delamination are caused by the high pressure and chemical effects in the Cu CMP process. But these problems have to be solved for the fabrication of the next generation semiconductor devices. Therefore, new process which is electro-chemical mechanical planarization/polishing (ECMP) or electro-chemical mechanical planarization was introduced to solve the. technical difficulties and problems in CMP process. In the ECMP process, Cu ions are dissolved electrochemically by the applying an anodic potential energy on the Cu surface in an electrolyte. And then, Cu complex layer are mechanically removed by the mechanical effects between pad and abrasive. This paper focuses on the manufacturing of ECMP system and its process. ECMP equipment which has better performance and stability was manufactured for the planarization process.

• Transactions on Control, Automation and Systems Engineering
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• v.2 no.3
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• pp.196-200
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• 2000

A neural controller for process control is proposed that combines a conventional multi-loop PID controller with a neural network. The concept of target signal based on feedback error is used fur on-line learning of the neural network. This controller is applied to distillation column control to illustrate its effectiveness. The result shows that the proposed neural controller can cope well with disturbance, strong interactions, time delays without any prior knowledge of the process.

• 한국생물공학회:학술대회논문집
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• 2005.10a
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• pp.757-758
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• 2005

• Transactions on Control, Automation and Systems Engineering
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• v.2 no.2
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• pp.136-139
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• 2000

A neural controller for process control is proposed that combines a conventional multi-loop PID controller with a neural network. The concept of target signal based on feedback error is used for on-line learning of the neural network. This controller is applied to distillation column control to illustrate its effectiveness. The result shows that the proposed neural controller can cope well with disturbance, strong interactions, time delays without any prior knowledge of the process.

• Structural Engineering and Mechanics
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• v.4 no.6
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• pp.717-729
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• 1996

This paper presents the concepts of Process Innovation and Concurrent Engineering in view of their use within Integrated CAD Systems. It follows by proposing process models that support an effective implementation. The work is practically founded on the authors' experience in performing the initial steps of implementation of some of such integrated systems for the construction industry.

• Proceedings of the Materials Research Society of Korea Conference
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• 2006.05a
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• pp.17.2-17.2
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• 2006

• Journal of the Korean institute of surface engineering
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• v.54 no.3
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• pp.158-163
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• 2021

Some studies on electrochemical additive manufacturing of metals were summarized in this technical report, and development status of selective electrochemical 3D printing technology was introduced. In order to apply it to the PCB mass production process, essential considerations how to overcome the fundamental problems, such as the sizing, process sequence and PCB process design have been described.

• Journal of the Korean Society for Precision Engineering
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• v.24 no.9
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• pp.86-94
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• 2007

The design process must be planned carefully and executed systematically in order to support designers who are faced with many engineering design problems. In particular, conceptual design stage is very important than other stages such as detailed design or manufacturing stage on designing engineering systems. When designers are faced contradictory situation in task, conceptual design usually requires inventive thinking which depends on their creativity. And in order to develop good concepts, it is necessary to resolve contradictory situations during conceptual design. This paper presents a structure of systematic conceptual design process for designing engineering systems. And we developed the automatic feeding screw device using the proposed design process structure.

• Journal of the Korean Society for Precision Engineering
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• v.19 no.8
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• pp.172-179
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• 2002

In this paper, an efficient reverse engineering method for free-formed surfaces is proposed based on the integration of a repetitive digitizing method and vision system. In recent reverse engineering process, the equi-interval digitization method is being used since the surface information is not known. If more accurate results are required, the number of measuring point should be increased appropriately. Thus, such measuring process tends to result in too dense data including useless information, and cause excessive measuring time. This problem can be improved by applying repetitive digitizing method and image process technique, which is proposed in this paper. The proposed methods are validated through appropriate simulation and experiments.

• Journal of the Korean Society of Systems Engineering
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• v.7 no.1
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• pp.53-56
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• 2011

Configuration management plays a key role in systems engineering process for any project from earlier stage of development. It consists of five major activities, ie., configuration management planing, configuration identification, configuration control, configuration status accounting and configuration verification and audit, and is essential to control system design, development and operation throughout entire life cycle of the system development. And it is directly associated with other part of systems engineering management process, ie., technical data management which provides traceability of important decisions and changes during development. In this paper, we describe how to apply CASE(Computer-aided Systems Engineering) tool-Cradle for the configuration management to achieve effectiveness of Technical Management process.