한국재료학회:학술대회논문집 (Proceedings of the Materials Research Society of Korea Conference)
- 한국재료학회 2006년도 춘계학술발표대회 및 제10회 신소재 심포지엄 논문개요집
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- Pages.17.2-17.2
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- 2006
Influence of Bead Size during Ceria Abrasive Milling Process on High Selectivity and Light Point Defect (LPD) Formation alter STI-CMP
- Moon, Seung-Hyun (Division of Electrical and Computer Engineering, Hanyang University) ;
- Lee, Keun-Hoo (Division of Electrical and Computer Engineering, Hanyang University) ;
- Kim, Jun-Seok (Nano SOI Process Laboratory, Hanyang University) ;
- Kang, Hyun-Goo (Nano SOI Process Laboratory, Hanyang University) ;
- Paik, Un-Gyu (Department of Ceramic Engineering, Hanyang University) ;
- Park, Jea-Gun (Nano SOI Process Laboratory, Hanyang University)
- 발행 : 2006.05.19