• Title/Summary/Keyword: Emission Rate

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The surface kinetic properties of $ZrO_2$ Thin Films in dry etching by Inductively Coupled Plasma

  • Yang-Xue, Yang-Xue;Kim, Hwan-Jun;Kim, Dong-Pyo;Um, Doo-Seung;Woo, Jong-Chang;Kim, Chang-Il
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2009.06a
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    • pp.105-105
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    • 2009
  • $ZrO_2$ is one of the most attractive high dielectric constant (high-k) materials. As integrated circuit device dimensions continue to be scaled down, high-k materials have been studied more to resolve the problems for replacing the EY31conventional $SiO_2$. $ZrO_2$ has many favorable properties as a high dielectric constant (k= 20~25), wide band gap (5~7 eV) as well as a close thermal expansion coefficient with Si that results in good thermal stability of the $ZrO_2/Si$ structure. In order to get fine-line patterns, plasma etching has been studied more in the fabrication of ultra large-scale integrated circuits. The relation between the etch characteristics of high-k dielectric materials and plasma properties is required to be studied more to match standard processing procedure with low damaged removal process. Due to the easy control of ion energy and flux, low ownership and simple structure of the inductively coupled plasma (ICP), we chose it for high-density plasma in our study. And the $BCl_3$ included in the gas due to the effective extraction of oxygen in the form of $BCl_xO_y$ compound In this study, the surface kinetic properties of $ZrO_2$ thin film was investigated in function of Ch addition to $BCl_3/Ar$ gas mixture ratio, RF power and DC-bias power based on substrate temperature. The figure 1 showed the etch rate of $ZrO_2$ thin film as function of gas mixing ratio of $Cl_2/BCl_3/Ar$ dependent on temperature. The chemical state of film was investigated using x-ray photoelectron spectroscopy (XPS). The characteristics of the plasma were estimated using optical emission spectroscopy (OES). Auger electron spectroscopy (AES) was used for elemental analysis of etched surface.

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Coupled Model Development between Groundwater Recharge Quantity and Climate Change Using GIS (GIS를 이용한 기후변화 연동 지하수 함양량 산정 모델 개발 및 검증)

  • Lee, Moung-Jin;Lee, Joung-Ho
    • Journal of the Korean Association of Geographic Information Studies
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    • v.14 no.3
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    • pp.36-51
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    • 2011
  • Global climate change is disturbing the water circulation balance by changing rates of precipitation, recharge and discharge, and evapotranspiration. Groundwater, which occupies a considerable portion of the world's water resources, is related to climate change via surface water such as rivers, lakes, and marshes. In this study, the authors selected a relevant climate change scenario, A1B from the Special Report on Emission Scenario (SRES) which is distributed at Korea Meteorological Administration. By using data on temperature, rainfall, soil, and land use, the groundwater recharge rate for the research area was estimated by periodically and embodied as geographic information system (GIS). In order to calculate the groundwater recharge quantity, Visual HELP3 was used as main model, and the physical properties of weather, temperature, and soil layers were used as main input data. General changes to water circulation due to climate change have already been predicted. In order to systematically solve problems of ground circulation system, it may be urgent to recalculate the groundwater recharge quantity and consequent change under future climate change. The space-time calculation of changes of the groundwater recharge quantity in the study area may serve as a foundation to present additional measures to improve domestic groundwater resource management.

Influences of Termite Activities on Ecosystem Carbon Cycle: Focusing on Coarse Woody Debris Decomposition (흰개미가 생태계 탄소 순환에 미치는 영향: 고사목 분해를 중심으로)

  • Kim, Seongjun;Lee, Jongyeol;Han, Seung Hyun;Chang, Hanna;Lee, Sohye;Yun, Hyeon Min;Son, Yowhan
    • Journal of Korean Society of Forest Science
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    • v.105 no.1
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    • pp.1-11
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    • 2016
  • Globally, there are more than 2600 species of termites which adapted plenty of terrestrial ecosystems by various strategies such as making termite nest and society. Various studies were recently carried out on termites because they play significant roles in the context of carbon (C) cycle of terrestrial ecosystems. According to the results of previous studies, termite activities influenced the amount of soil organic C, methane emission, and organic matter decomposition. Termite nests, where termite biomass was concentrated, exhibited 1.8 times higher soil organic C concentration than reference soils, and emitted $0.0-6.0kg\;ha^{-1}year^{-1}$ of methane in tropical forests and savannas. Feeding activity of termites, in addition, accelerated coarse woody debris (CWD) decomposition by increasing the surface area to volume ratio of CWD. Especially, CWD decomposition induced by the Rhinotermitidae family appeared to be significant for the C cycle in temperate forests. However, more studies should be conducted on termite-induced CWD decomposition in temperate forests because few studies have dealt with it. The termite-induced CWD decomposition could be measured by preparing disc-shaped CWD samples, excluding access of termites to the CWD samples, and comparing the decomposition rate of the CWD samples with and without the termite exclusion treatment. Studies on the termite-induced CWD decomposition would contribute to further elucidation of the C cycle in temperate forests.

Depth profiles and the behavior of heavy metal atoms contained in the soil around a Il-Kwang disused mine in Kyung Nam (경남 일광 폐광 부근 토양에 함유된 중금속의 깊이별 분포와 거동)

  • Jeong, Jong Hak;Song, Hyun Jung;Jeong, Gi Ho
    • Analytical Science and Technology
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    • v.10 no.2
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    • pp.105-113
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    • 1997
  • We investigated the content of heavy metals contained in the soil at an Il-Kwang disused mine in Kyung Nam. Three sampling points were selected, each point was digged to 210 or 240cm, sampled each 30cm depth. After air drying, each sample was digested in aqua regia and then analyzed with an Inductively Coupled Plasma Atomic Emission Spectrometer. We determined the content of Zn, Pb, Cr, Cd, Cu, Mn, and Fe, maximum content of Pb, Cd, and Zn was observed to $(4.6{\pm}0.1){\times}10^3$, 9.4(${\pm}3.6$), and $(2.7{\pm}0.1){\times}10^2{\mu}g/g$ respectively. Mean pH values of soil sampled at No.1, 2, and 3 regions were 3.2, 2.6, and 2.8, respectively. These values are remarkably lower than pH of the conventional standard soil which usually shows pH level around 4.9. At each sampling point, maximum content of heavy metals was observed from 30cm to 60cm depth. The depth profiles of Zn, Cd, Pb, and Cr showed very similar tendencies to each other, but those of Fe, Cu. and Mn showed different tendencies to former ones.

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Assessment factors for the Selection of Priority Soil Contaminants based on the Comparative Analysis of Chemical Ranking and Scoring Systems (국내.외 Chemical Ranking and Scoring 체계 비교분석을 통한 우선순위 토양오염물질 선정을 위한 평가인자 도출)

  • An, Youn-Joo;Jeong, Seung-Woo;Kim, Tae-Seung;Lee, Woo-Mi;Nam, Sun-Hwa;Baek, Yong-Wook
    • Journal of Soil and Groundwater Environment
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    • v.13 no.6
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    • pp.62-71
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    • 2008
  • Soil quality standards (SQS) are necessary to protect the human health and soil biota from the exposure to soil pollutants. The current SQS in Korea contain only sixteen substances, and it is scheduled to expand the number of substances. Chemical ranking and scoring (CRS) system is very effective to screen the priority chemicals for the future SQS in terms of their toxicity and exposure potential. In this study, several CRS systems were extensively compared to propose the assessment factors that required for the screening of soil pollutants The CRS systems considered in this study include the CHEMS-1 (Chemical Hazard Evaluation for Management Strategies), SCRAM (Scoring and Ranking Assessment Model), EURAM (European Union Risk Ranking Method), ARET (Accelerated Reduction/Elimination of Toxics), CRSKorea, and other systems. The additional assessment factors of CRS suitable for soil pollutants were suggested. We suggest soil adsorption factor as an appropriate factor of CRS system to consider chemical transport from soil to groundwater. Other factors such as soil emission rate and cases of accident of soil pollutants were included. These results were reflected to screen the priority chemicals in Korea, as a part of the project entitled ‘Setting the Priority of Soil Contaminants'.

Case Study of Cost Effect Analysis for Toxic Compounds to Developing Effluent Limitation Standards : Focus on 1,4-Dichlorobenzene (수질유해물질 배출허용기준 설정에 따른 배출시설 비용영향 분석사례 연구: 1,4-Dichlorobenzene을 중심으로)

  • Kim, Kyeongjin;Kim, Wongi;Heo, Jin;Kim, Kwangin;Kim, Jaehoon;Kim, Sanghun;Yeom, Icktae
    • Journal of Korean Society on Water Environment
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    • v.26 no.4
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    • pp.557-565
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    • 2010
  • Recently, regulations on toxic compounds in aquatic environment have been strengthened in korea due to the increasing public awareness of the water quality. Typically, these regulations include introduction of emerging toxic compounds and stricter effluent limitations for the already regulated compounds. However, too strict regulations may cause excessive burden on the industry. Therefore it is also important to assess the economic impacts when the new effluent limitation guidelines are introduced. The estimation of the additional cost for the wastewater dischargers to meet the new guidelines are based on the selected treatment technology to handle the hazardous substances and the regulatory levels for effluent limitations. To explore the procedures for cost estimation in enforcing new effluent limitations, a case study was performed specially for 1,4-dichlorobenzene. The pollutants of concern are surveyed for different industrial categories and various treatment technologies. For a given pollutant, the general performances of the treatment technologies are surveyed and a representative technology is selected. For a given technology, the capital cost and annual Operation and Maintenance (O&M) cost was calculated. The calculation of baseline costs to operate ordinary treatment technologies is also important. The ratio between the cost for introducing new treatment process and the baseline cost required for conventional technology was used to evaluate the economic impact on the industry. For 1,4-dichlorobenzene, steam stripping and activated carbon processes were selected as the specific treatment technologies. The cost effects to the regulation of the compound were found to be 6.4% and 14.5% increase in capital cost and O&M cost, respectively, at the flow rate over $2,000m^3/d$ for the categories of synthetic resin and other plastics manufacturing industry. For the case of petrochemical basic compounds manufacturing industry, the cost increases were 5.8% and 12.4%, respectively. It was suggested that cost effect analysis to evaluate the economic impacts of new effluent limitations on the industry is crucial to establish more balanced and reasonable effluent limitations to manage the industrial wastewater containing emerging toxic compounds in the wastewater.

Key Bit-dependent Attack on Side-Channel Analysis-Resistant Hardware Binary Scalar Multiplication Algorithm using a Single-Trace (부채널 분석에 안전한 하드웨어 이진 스칼라 곱셈 알고리즘에 대한 단일 파형 비밀 키 비트 종속 공격)

  • Sim, Bo-Yeon;Kang, Junki;Han, Dong-Guk
    • Journal of the Korea Institute of Information Security & Cryptology
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    • v.28 no.5
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    • pp.1079-1087
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    • 2018
  • Binary scalar multiplication which is the main operation of elliptic curve cryptography is vulnerable to the side-channel analysis. Especially, it is vulnerable to the side-channel analysis which uses power consumption and electromagnetic emission patterns. Thus, various countermeasures have been studied. However, they have focused on eliminating patterns of data dependent branches, statistical characteristic according to intermediate values, or the interrelationships between data. No countermeasure have been taken into account for the secure design of the key bit check phase, although the secret scalar bits are directly loaded during that phase. Therefore, in this paper, we demonstrate that we can extract secret scalar bits with 100% success rate using a single power or a single electromagnetic trace by performing key bit-dependent attack on hardware implementation of binary scalar multiplication algorithm. Experiments are focused on the $Montgomery-L{\acute{o}}pez-Dahab$ ladder algorithm protected by scalar randomization. Our attack does not require sophisticated pre-processing and can defeat existing countermeasures using a single-trace. As a result, we propose a countermeasure and suggest that it should be applied.

Development and Application of Mode II Fracture Toughness Test Method Using Rock Core Specimen (시추코어를 이용한 암석의 mode II 파괴인성 시험법 개발과 적용)

  • Jung, Yong-Bok;Park, Eui-Seob;Kim, Hyunwoo
    • Tunnel and Underground Space
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    • v.26 no.5
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    • pp.396-408
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    • 2016
  • Rock fracture mechanics has been widely applied to various fields of rock and civil engineering. But most researches covered mode I behavior, though mode II behavior is dominant in rock engineering. Until now, there is only one ISRM suggested method for mode II toughness of rock. A new SCC (Short Core in Compression) mode II toughness test method was developed considering 1) application of confining pressure, 2) easiness of notch creation, 3) utilization of existing equipment, 4) simple test procedure. The stress intensity factors were determined by 3D finite element method considering line and distributed loading conditions. The tests with granite specimens were carried out using MTS 815 rock test system with a loading rate of 0.002 mm/s. The mean value of mode II fracture toughness of granite showed $2.33MPa{\sqrt{m}}$. Mode I toughness of the same granite was $1.12MPa{\sqrt{m}}$, determined by Brazilian disk test and $K_{IIC}/K_{IC}=2.08$. The smooth fracture surface with rock powder formation also supported mode II behavior of SCC method. The SCC method can be used for the determination of mode II fracture toughness of rocks based on the current results.

Evaluation of Primary Thermal Degradation Feature of M. sacchariflorus After Removing Inorganic Compounds Using Distilled Water (증류수를 이용한 거대억새 내 무기성분 제거 효과 및 열분해 특성 변화 관찰)

  • Kim, Jae-Young;Oh, Shinyoung;Hwang, Hyewon;Moon, Yoonho;Choi, Joon Weon
    • Journal of the Korean Wood Science and Technology
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    • v.41 no.4
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    • pp.276-286
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    • 2013
  • The goal of this study was to investigate change of thermal decomposition feature of miscanthus (Miscanthus sacchariflorus) after removal of inorganic constituents using distilled water (D.I-w; 30, 60 and $90^{\circ}C$). The carbon content was increased whereas the oxygen content was decreased with the temperature of D.I-w treatment. Moreover, ash content was slightly decreased from 4.6% of control to 3.2% of $90^{\circ}C$ D.I-w treated sample. Results of total monomeric sugar contents and X-ray diffraction (XRD) analysis showed that structural changes of cellulose/hemicellulose regions did not occurr during D.I-w treatment. Results of inductively coupled plasma emission spectrometer (ICP-ES) showed that miscanthus has the largest amount of inorganic constituents such as potassium (5,644 ppm), phosphorus (3,995 ppm), magnesium (1,403 ppm) and calcium (711 ppm). Thermogravimetric analysis (TGA) confirmed that the yield of char slightly decreased whereas the yield of volatiles increased with increasing D.I-w treatment temperature. In addition, differential thermogravimetric analysis (DTGA) indicated that the maximum decomposition rate ($V_M$) and temperature ($T_M$) corresponding to VM were varied from $0.82%/^{\circ}C$, $360.60^{\circ}C$ of control to $1.17%/^{\circ}C$, $362.62^{\circ}C$ of $90^{\circ}C$-D.I-w treated sample.

Determination of Terazocin in Human Plasma by Liquid Chromatography and Bioequivalence Study of Teratonin® Tablets (액체크로마토그래프법에 의한 사람 혈장 중 테라조신의 정량 및 테라토닌® 정의 생물학적 동등성)

  • Cho, Eun-Sook;Kang, Sung-Ha;Chun, In-Koo
    • Journal of Pharmaceutical Investigation
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    • v.32 no.2
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    • pp.119-125
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    • 2002
  • A rapid, selective and reproducible high-performance liquid chromatographic method has been developed for the determination of terazocin in human plasma. Terazocin plus the internal standard, prazocin hydrochloride, were extracted from alkalified plasma with tert-butylmethyl ether, back-extracted into 0.05% phosphoric acid. Fifty ${\mu}l-portions$ of extract were injected onto a octadecylsilane column and eluted with a mixture of acetonitrile, water and triethylamine (30 : 70 : 0.1 v/v, adjusted to pH 5.0 with dilute phosphoric acid) at a flow rate of 1.0 ml/min. The fluorescence intensity of column eluents was monitored at excitation wavelength of 250 nm and emission wavelength of 370 nm. No interference peaks were observed. The practical limit of quantitation was 5 ng/ml for terazocin. The average intraday and interday coefficients of variation were 4.15 and 3.54%, respectively. Also intraday and interday precisions over the range $5{\sim}60\;ng/ml$ were $0.49{\sim}2.92\;and\;0.38{\sim}5.12%$, respectively. The bioequivalence of two terazosin tablets, the $Hytrine^{\circledR}$ (Il Yang Pharmaceutical Co., Ltd.) and the $Teratonin^{\circledR}$ (Sam-A Pharmaceutical Co., Ltd.), was evaluated according to the guideline of Korea Food and Drug Administration (KFDA). Sixteen healthy male volunteers $(24.6{\pm}2.0\;years\;old)$ were divided into two groups and a randomized $2{\times}2$ cross-over study was employed. After one tablet containing 2 mg of terazosin was orally administered, blood was taken at predetermined time intervals and the concentration of terazosin in plasma was determined with a HPLC method using spectrofluorometric detector. AUC was calculated by the linear trapezoidal method. $C_{max}\;and\;T_{max}$ were compiled from the plasma drug concentration-time data. Analysis of variance (ANOVA) was utilized for the statistical analysis of the parameters. The results showed that the differences in $AUC_t,\;C_{max}\;and\;T_{max}$ between the two preparations were 0.21 %, 5.53% and 8.82%, respectively. The powers $(1-{\beta})\;for\;AUC_t,\;C_{max}\;and\;T_{max}$ were >99%, 97.49%, and 33.26%, respectively. Minimum detectable differences $({\Delta},\;%)\;at\;{\alpha}=0.1\;and\;1-{\beta}=0.8$ and the 90% confidence intervals were all less than ${\pm}20%$ except for $T_{max}.\;AUC_t\;and\;C_{max}$ met the criteria of KDFA for bioequivalence, indicating that $Teratonin^{circledR}$ tablets are bioequivalent to $Hytrine^{circledR}$ tablets.