• Korean Journal of Optics and Photonics
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• v.20 no.3
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• pp.182-188
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• 2009

The surface plasmon resonance ellipsometer (SPRE), using a multiple air injection system with an extraction of air system, has been proposed and developed to minimize measurement error of signals due to diffusion of reagent into running buffer. Since the diffusion of reagent into running buffer affects the refractive index of the running buffer by changing the concentration, characteristics of binding between various bio-molecules don't appear clearly in measurement results. The diffusion between running buffer and reagent can be blocked by using an air bubble injection system. An extraction of air system is used to remove the noise signal due to unnecessary air bubbles flowing in a channel. Reliability of measurement results has been improved by using the valve system.

• Journal of the Korean Crystal Growth and Crystal Technology
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• v.6 no.2
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• pp.185-193
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• 1996

$2.5^{\circ}\;and\;5^{\circ}$ tilted (100) Si wafer were oxidized in dry oxygen, and the differences in thermal oxidation behavior and oxidation induced stacking faults (OSF) between specimens were investigated. Ellipsometer measurements of the oxide thickness produced by oxidation in dry oxygen from 900 to $1200^{\circ}C$ showed that the oxidation rates of the tilted (100) Si were more rapid than those of the (100) Si and the differences between them decreased as the oxidation temperature increased. The activation energies based on the parabolic rate constant, B for (100) Si, $2.5^{\circ}$ off (100) Si and $5^{\circ}$ off (100) Si were 27.3, 25.9, 27.6 kcal/mol and those on the linear rate constant, B/A were 58.6, 56.6, 57.6 kcal/mol, respectively. Also, considerable decrease in the density of oxidation induced stacking faults for the $5^{\circ}$ off (100) Si was observed through optical microscopy after preferentially etching off the oxide layer, and the angle of stacking faults were changed with tilted angles.

• Journal of the Korean Vacuum Society
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• v.12 no.2
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• pp.112-117
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• 2003

MgO films is widely used in plasma display panel (PDP) technology. In this work, structural and optical properties of the MgO films deposited by e-beam evaporation, reactive magnetron sputtering, which are commercially used, and arc deposition were compared. MgO thin films were deposited on glass substrates by vacuum arc deposition equipment using a magnesium metal target at various oxygen gas flows. In order to investigate the packing density by ellipsometer, to measure reasonable erosion-rates of the MgO protective layers, we introduced an acceleration test method, namely, Ar+ ion beam induced erosion test. Also, XPS and UV test were adopted to examine the effect of the moisture on the optical transmittance of the MgO protective layers, which showed that these of MgO films by arc deposition method sustained more 90% and were insensitive to effect of the moisture. XRD and AFM have been also used to study behaviors of the structure and surface morphology.

• Korean Journal of Optics and Photonics
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• v.24 no.2
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• pp.77-85
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• 2013

The precision of retardation measurement has been improved upto $3{\sigma}$ <0.005 nm after improvements are made to the conventional transmission ellipsometer. Improvements are made such that, i) the polarizer module instead of the sample stage is rotated, ii) the light source is replaced, iii) the starting points of two rotating modules are accurately synchronized, and iv) the fine background retardation is compensated. Together with the newly introduced RVD (Retardation Vector Difference) method, the improved instrument is successfully applied to characterize the ultra small optical birefringence of the rubbed polyimide alignment layer, after the residual retardation due to glass substrate whose magnitude is about 1.0 nm is properly subtracted. It is verified that the net retardation of the alignment layer ranges from 0.05 nm to 0.15 nm.

• Korean Journal of Optics and Photonics
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• v.30 no.2
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• pp.59-66
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• 2019

We report highly sensitive detection of myocardial infarction biomarkers, such as myoglobin and cTnI, within several hundred seconds using a rotating-analyzer ellipsometer and a biosensor with biochips fabricated on a $SiO_2$-coated tilted silicon substrate. We choose the running buffer to be pure phosphate-buffered saline (PBS) or 10% mixed human serum. When we choose the running buffer to be pure PBS, we obtain diagnostic densities of pure myocardial infarction biomarkers of up to 1 ng/ml and 5 pg/ml respectively. Meanwhile, when we use PBS with 10% human serum, the measured densities of myoglobin and cTnI were up to 1 ng/mL and 1 pg/mL respectively. The measured diagnostic densities are less than 1/15 and 1/80 (in cases of myoglobin and cTnI respectively) of those referenced by the World Health Organization.

• 한국신재생에너지학회:학술대회논문집
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• 2010.11a
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• pp.58.2-58.2
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• 2010

본 연구에서는 n-type wafer에 비정질 실리콘을 증착한 이종접합 태양전지를 열처리 방법을 이용하여 열처리의 효과를 분석함으로써 이종접합 태양전지에 효율적인 열처리 효과에 대하여 연구하였다. P, N-layer는 PECVD(Plasma-enhanced chemical vapor deposition) I-layer는 HWCVD(Hot wire chemical vapor deposition), ITO는 RF 마그네트론 스퍼터링법으로 동일한 조건에서 제작하였고 rapid thermal process를 이용하여 진공 중에서 $150^{\circ}C$, $200^{\circ}C$, $220^{\circ}C$, $250^{\circ}C$까지 열처리를 하였다. 열처리 전과 후 QSSPC로 minority carrier life time, 자외 가시선 분광분석 장치로 투과 반사도를, Ellipsometer로 흡수 계수 등의 변화를 조사하였다. 열처리 후 Minority carrier life time, Voc 및 광변환 효율이 증가하였다.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2009.11a
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• pp.207-207
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• 2009

In this work, we report the physical properties of amorphous $Al_2O_3$ thin films by plasma-enhanced chemical vapour deposition (PECVD) using trimethyl-aluminium (TMA) as the Al precursor at low temperatures. The thin films were deposited on Si substrates. The composition and the bonding structure of the amorphous $Al_2O_3$ films were studied using Fourier transform infrared spectroscopy (FT-IR), Ellipsometer and UV-visible Spectrophotometer and MOCON.

• Proceedings of the Korean Vacuum Society Conference
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• 2015.08a
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• pp.124.2-124.2
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• 2015

최근 에너지 효율을 향상시키고 감성과 기능성을 동시에 만족시킬 수 있는 스마트 윈도우 (Smart Window) 기술이 큰 주목을 받고 있다. 신개념의 하이브리드형 열선차단 코팅기술로 고투명, 고단열 등 복합기능을 가지고 있음. 4계절 변화가 뚜렷한 대한민국 실정에 가장 적합하여 건축물의 냉 난방 에너지를 최소화하는데 크게 기여할 것으로 기대된다. 단열필름 제조 방식에는 보급형 필름으로 염료 방식, 금속 방식 등이 있고 고성능 필름에는 나노 세라믹 방식과 스퍼터 방식+세라믹 방식을 융합한 필름(스퍼터 IR 필름)이 있다. 본 연구에서는 DC pulse sputter를 이용하여 고굴절율 물질인 TiO2와 저굴절률 물질인 SiO2를 적층으로 성장시켜 단열 스마트필름을 제작해 보았다. 높은 가시광 투과율과 IR 차페 성능을 확인하였고, 제작한 스마트필름을 또다른 윈도우 기술에 적용하는 연구를 진행하였다.

• Tribology and Lubricants
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• v.11 no.2
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• pp.34-43
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• 1995

The boundary films formed in sliding on steel surfaces were characterized using various lubricants. The mechanism of boundary film formation and loss was investigated over a range of temperature. The thickness of the boundary films was monitored in-situ by an ellipsometer, and the composition of the films was analyzed by XPS. The performance of the lubricants is closely associated with boundary film forming ability. In order to achieve high load carrying capacity, a boundary film must be formed on the surface. Sliding is necessary to form the films and some time is also required. As temperature increases, chemical reactivity increases the film formation rate, while the film removal rate increases due to thg decrease of durability of the boundary film material. There is a balance between these two competing mechanisms and this balance is reflected in the boundary film thickness.

• Journal of the Korean Vacuum Society
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• v.7 no.s1
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• pp.190-196
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• 1998

Amorphous ternary $Si_xC_yN-z$ thin films were obtained by plasma enhanced chemical vapor deposition(PECVD) using $N_2, SiH_4 \;and \;C_2H_4$ as the reaction sources. The chemical state were characterized by x-ray photoelectron spectroscopy (XPS) and Fourier transform infrared spectroscopy(FTIR). The optical properties of the thin films were investigated by UV-visible spectrophotometer and ellipsometer, and the optical band gaps of thin films were determined from corresponding transmittance spectra following Tauc equation.