• Proceedings of the Korean Vacuum Society Conference
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• 2007.02a
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• pp.140-140
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• 2007

• Proceedings of the Optical Society of Korea Conference
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• 2002.11a
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• pp.196-197
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• 2002

• Korean Journal of Optics and Photonics
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• v.23 no.6
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• pp.274-280
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• 2012

A normal incidence ellipsometer is fabricated to measure the optical anisotropy of a small spot whose diameter is less than $8.0{\mu}m$, by adding a beam splitter and a prism to the conventional rotating analyzer type ellipsometer. The polarizing actions of the added optical components are calibrated to improve the accuracy of the anisotropy measurement. The standard deviation of the optical anisotropy factor decreased to 0.00083, and the variation of the optical anisotropy factor of rutile versus sample azimuth angle variation also decreased to 0.015, after adoption of a non-polarizing beam splitter and a quarter wavelength phase retarder, followed by removal of the optical fiber and a careful choice of measurement wavelength.

• Korean Journal of Optics and Photonics
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• v.33 no.5
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• pp.201-209
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• 2022

The previously developed microspot spectroscopic ellipsometer (SE) is upgraded to a microspot SE compatible with the atomic force microscope (AFM). The focusing optical system of the previous microspot SE is optimized to incorporate an AFM head. In addition, the rotating compensator ellipsometer in polarizer-sample-compensator-analyzer configuration is adopted in order to minimize the negative effects caused by beam wobble. This research leads to the derivation of the expressions needed to get spectro-ellipsometric constants despite the fact that the employed rotating compensator is far from the ideal achromatic quarter-wave plate. The spot size of the developed microspot SE is less than 20 ㎛ while the AFM head is mounted. It operates in the wavelength range of 190-850 nm and has a measurement accuracy of δΔ ≤ 0.05° and δΨ ≤ 0.02°, respectively. Fast measurement of ≤3 s/sp is realized by precisely synchronizing the azimuthal angle of a rotating compensator with the spectrograph. The microspot SE integrated with an AFM is expected to be useful in characterizing the structure and optical properties of finely patterned samples.

• 한국정보디스플레이학회:학술대회논문집
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• 2008.10a
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• pp.1168-1170
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• 2008

For OLED to be a key role in the television market, a manufacturing evaporation system with robustness and high throughput is indispensable. ANS is currently developing manufacturing equipments for OLED TVs. ANS's latest progress of a vertical high throughput in-line evaporation system for large substrate will be presented.

• Proceedings of the Optical Society of Korea Conference
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• 2004.07a
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• pp.132-133
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• 2004

• Proceedings of the Optical Society of Korea Conference
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• 2007.02a
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• pp.175-176
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• 2007

• Proceedings of the Optical Society of Korea Conference
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• 2001.02a
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• pp.256-259
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• 2001

Rotating-compensator type ellipsometer was developed for spectroscopic measurements. For accurate data reduction, the azimuths of transmission axises of polarizer and analyzer, and the angular position of the fast axis of compensator should be determined through calibration process. In this paper, we present various calibration methods.

• Proceedings of the Optical Society of Korea Conference
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• 2004.02a
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• pp.220-221
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• 2004

• Proceedings of the Optical Society of Korea Conference
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• 2004.02a
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• pp.218-219
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• 2004