Study on Polarization Characteristics of Optical Device and Improvement of Measurement Precision of Normal Incidence Ellipsometer for Measuring Optical Anisotropy of a Micro Spot |
Lyum, Kyoung Hun
(Department of Molecular Science and Technology, Ajou University)
Park, Sang Uk (EllipsoTechnology Co. Ltd.) Seo, Young Jin (EllipsoTechnology Co. Ltd.) Lee, Min Ho (EllipsoTechnology Co. Ltd.) Kim, Woong Ki (Korea Atomic Energy Research Institute) Kim, Sang Youl (Department of Molecular Science and Technology, Ajou University) |
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