• 제목/요약/키워드: Electrostatic forces

검색결과 113건 처리시간 0.029초

정전효과가 있는 가열 수평웨이퍼로의 입자침착에 관한 해석 (Analysis on particle deposition onto a heated, horizontal free-standing wafer with electrostatic effect)

  • 유경훈;오명도;명현국
    • 대한기계학회논문집B
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    • 제21권10호
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    • pp.1284-1293
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    • 1997
  • The electrostatic effect on particle deposition onto a heated, Horizontal free-standing wafer surface was investigated numerically. The deposition mechanisms considered were convection, Brownian and turbulent diffusion, sedimentation, thermophoresis and electrostatic force. The electric charge on particle needed to calculate the electrostatic migration velocity induced by the local electric field was assumed to be the Boltzmann equilibrium charge. The electrostatic forces acted upon the particle included the Coulombic, image, dielectrophoretic and dipole-dipole forces based on the assumption that the particle and wafer surface are conducting. The electric potential distribution needed to calculate the local electric field around the wafer was calculated from the Laplace equation. The averaged and local deposition velocities were obtained for a temperature difference of 0-10 K and an applied voltage of 0-1000 v.The numerical results were then compared with those of the present suggested approximate model and the available experimental data. The comparison showed relatively good agreement between them.

Induction motors with electrostatic suspension

  • Jeon, Jong-Up;Woo, Shao-Ju;Higuchi, Toshiro
    • 제어로봇시스템학회:학술대회논문집
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    • 제어로봇시스템학회 1996년도 Proceedings of the Korea Automatic Control Conference, 11th (KACC); Pohang, Korea; 24-26 Oct. 1996
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    • pp.393-396
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    • 1996
  • This paper studies electrostatically suspended induction motors (ESIM). The ESIM possesses the rotating ability of an ordinary electrostatic induction motor, in addition to providing contactless support by electrostatic suspension. To accomplish these two functions, a feedback control strategy and the operating principle of an ordinary electrostatic induction motor are used. The stator possesses electrodes which exert the electrostatic forces to the rotor and are divided into a part responsible for suspension and one for rotation. Two rotor types are utilized: a polished glass disk without any surface treatment, and a polished glass disk covered with a thin layer of conductive material (ITO layer) on only one side. In this paper, the principle of the ESIM is described, followed by stator electrode design, experimental apparatus, control strategy for stable suspension. Experimental results show that the glass disk has been rotated with a speed of approximately 70 rpm while being suspended stably at a gap length of 0.3 mm.

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Electrostatic Properties of N-Acetyl-Cysteine-Coated Gold Surfaces Interacting with ZrO2 Surfaces

  • Park, Jin-Won
    • Bulletin of the Korean Chemical Society
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    • 제33권9호
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    • pp.2855-2860
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    • 2012
  • The coating N-acetyl cysteine (NAC) on gold surfaces may be used to design the distribution of either gold particle adsorbed to the $ZrO_2$ surface or vice versa by adjusting the electrostatic interactions. In this study, it was performed to find out electrostatic properties of the NAC-coated-gold surface and the $ZrO_2$ surface. The surface forces between the surfaces were measured as a function of the salt concentration and pH value using the AFM. By applying the Derjaguin-Landau-Verwey-Overbeek (DLVO) theory to the surface forces, the surface potential and charge density of the surfaces were quantitatively acquired for each salt concentration and each pH value. The dependence of the potential and charge density on the concentration was explained with the law of mass action, and the pH dependence was with the ionizable groups on the surface.

정전기력을 받는 마이크로 외팔보의 동적 해석 (Dynamic Analysis of Micro Cantilever Beams Undertaking Electrostatic Forces)

  • 정강식;문승재;유홍희
    • 한국소음진동공학회논문집
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    • 제14권9호
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    • pp.846-851
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    • 2004
  • Static and dynamic responses of micro cantilever beam structures undertaking electrostatic forces are obtained employing Galerkin's method based on Euler beam theory. Variations of static and dynamic responses as well as resonant frequencies are estimated for several sets of beam properties and applied voltages. It is shown that the applied voltage influences the deflection and the modal characteristics significantly. Such information can be usefully employed for the design of MEMS structures.

Electrostatic Properties of N-Acetyl-Cysteine-Coated Gold Surfaces Interacting with TiO2 Surfaces

  • Park, Jin-Won
    • Bulletin of the Korean Chemical Society
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    • 제30권4호
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    • pp.902-906
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    • 2009
  • It is found that that the coating N-acetyl cysteine (NAC) on gold surfaces may be used to design the distribution of either gold particle adsorbed to the $TiO_2$ surface or vice versa by adjusting the electrostatic interactions. In this study, we investigated electrostatic properties of the NAC-coated-gold surface and the $TiO_2$ surface. The surface forces between the surfaces were measured as a function of the salt concentration and pH value using the AFM. By applying the Derjaguin-Landau-Verwey-Overbeek (DLVO) theory to the surface forces, the surface potential and charge density of the surfaces were quantitatively acquired for each salt concentration and each pH value. The surface potential and charge density dependence on the salt concentration was explained with the law of mass action, and the pH dependence was with the ionizable groups on the surface.

Trypsin 반응에 대한 용매의 유전상수 및 압력의 영향 (Effect of Pressure and Solvent Dielectric Constant on the Kinetic Constants of Trypsin-Catalyzed Reaction.)

  • 박현;지영민
    • 한국미생물·생명공학회지
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    • 제28권1호
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    • pp.26-32
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    • 2000
  • Electrostatic forces contribute to the high degree of enzyme transition state complementarity in enzyme catalyzed reaction and such forces are modified by the solvent through its dielectric constant and polar properties. The contributions of electrostatic interaction to the formation of ES complex and the stabilization of transition state of the trypsin catalyzed reaction were probed by kinetic studied with high pressure and solvent dielectric constant. A good correlation has been observed between the increase of catalytic efficiency of trypsin and the decrease of solvent dielectric constant. Activation volume linearly decreased as the dielectric constant of solvent decreased, which means the increase in the reaction rae. Moreover, the decrease of activation volume by lowering the solvent dielectric constant implies a solvent penetration of the active with and a reduction of electrostatic energy for the formation of dipole of the active site oxyanion hole. When the 야electric constant of the solvents was lowered to 4.7 unit, the loss of activation energy and that of free energy of activation were 2.262 KJ/mol and 3.169 KJ/mol, respectively. The results of this study indicate that the high pressure kinetics combined with solvent effects can provide unique information on enzyme reaction mechanisms, and the controlling the solvent dielectric constant can stabilize the transition state of the trypsin-catalyzed reaction.

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반도체 제조용 사일렌 플라즈마 반응기 내에서의 입자 오염에 관한 이론적 연구 (Theoretical study on the particle contamination in silane plasma reactor for semiconductor processing)

  • 김동주;김교선
    • 한국진공학회지
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    • 제9권2호
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    • pp.172-178
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    • 2000
  • 반도체 제조공정 중 플라즈마 반응기 내에서 입자오염을 유발하는 입자들의 거동과 성장을 모델식을 사용하여 이론적으로 고찰하였다. 플라즈마 반응기 내에서 입자 거동에 영향을 미치는 힘들로 유체 대류, 입자 확산 및 외부힘 (ion drag force, electrostatic force, 중력) 등을 고려하였다. 플라즈마 벌크 영역에서 전하를 가진 입자들간의 충돌에 의한 입자 성장을 고려하기 위해 모델식에 입자 전하 분포를 고려하였다. 대부분의 입자들은 ion drag force와 electrostatic force가 균형을 이루고 있는 두 sheath 경계 영역에 존재하였으며 두 sheath 영역과 벌크 플라즈마에서의 입자 농도는 0에 접근하였다. 시간이 지남에 따라 입자 충돌로 인한 입자들의 크기는 증가하였으며 입자가 성장함에 따라 입자 표면적의 증가와 더불어 입자가 가지는 평균 전하량도 증가하였다.

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Electrostatic Spray Deposition Technique for Thin Film Fabrication

  • 최경현
    • 한국재료학회:학술대회논문집
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    • 한국재료학회 2011년도 춘계학술발표대회
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    • pp.2.1-2.1
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    • 2011
  • Electrospray deposition (ESD) technique is fast finding its applicability in the field of thin film device manufacturing processes and the ease and cost efficiency attached to ESD process with possible integration with batch manufacturing technologies is the potential future of thin film device manufacturing. As the name suggests, the deposition phenomenon should solely be a spray achieved through electrostatic forces. In fact it is an imbalance between the surface forces arising because of the surface tension of the liquid to be sprayed and Maxwell stresses which are induced because of the electric field, that pull the liquid downwards from the capillary into a stable jet which further disintegrates into smaller droplets because of coulomb forces and hence a cloud of charged, mono-dispersed and extremely diminutive (sometimes up to femtolitres) droplets is achieved. The present talk is going to be exclusively about the electrospray process concepts, generation and possible applications.

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2단 평행판 전기집진기의 방전부 특성 실험 (Experimental Study on the Discharge Electrode of A Two-Stage Electrostatic Air Cleaner)

  • 김익생;이재옥;김용진;최헌오
    • 설비공학논문집
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    • 제5권1호
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    • pp.27-34
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    • 1993
  • The two-stage electrostatic air cleaner is a particle control device that uses electrical forces to move particles in the flowing gas stream onto collector plates. Despite a general understanding of electrostatic air cleaner operation and their successful use in industry, many questions regarding flow, electric fields and particle collection have remained unanswered. In this paper, an experimental investigation for designing the discharge electrode, including ionizer wire diameter, plate length and wire-to-plate spacing, is carried out. The electrical conditions, namely the electric field intensity, the space current and the particle charge intensity, in wire-plate electrostatic air cleaner are reported and examined.

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전기집진에서의 난류 입자 이산 (Turbulent Particle Dispersion Effects on Electrostatic Precipitation)

  • 최범석
    • 연구논문집
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    • 통권28호
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    • pp.39-47
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    • 1998
  • Industrial electrostatic precipitation is a very complex process, which involves multiple-way interaction between the electric field, the fluid flow, and the particulate motion. This paper describes a strongly coupled calculation procedure for the rigorous computation of particle dynamics during electrostatic precipitation. The turbulent gas flow and the particle motion under electrostatic forces are calculated by using the commercial computational fluid dynamics (CFD) package FLUENT linked to a finite-volume solver for the electric field and ion charge. Particle charge is determined from both local electrical conditions and the cell residence time which the particle has experienced through its path. Particle charge density and the particle velocity are averaged in a control volume to use Lagrangian information of the particle motion in calculating the gas and electric fields. The turbulent particulate transport and the effects of particulate space charge on the electrical current flow are investigated. The calculated results for poly-dispersed particles are compared with those for mono-dispersed particles, and significant differences are demonstrated.

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