• The Transactions of The Korean Institute of Electrical Engineers
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• v.58 no.10
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• pp.1936-1941
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• 2009

This paper deals with a new methodology for topology optimization in which the topology of the design domain may change during the shape optimization process. To achieve this, the concept of the topological gradient is introduced to compute the sensitivity of an objective function when a small hole is drilled in the domain. Based on shape and topological sensitivity values, the shape and topology of the design domain may be simultaneously changed during design iterations if necessary. To verify the advantages and also to facilitate understanding of the method itself, two electrostatic design problems have been tested by using 2D finite element analysis: the first is the inverse problem of a simple dielectric model and the second is the rotor design of a MEMS actuator.

• The Transactions of the Korean Institute of Electrical Engineers C
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• v.49 no.9
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• pp.546-551
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• 2000

A micromechanical switch that can be used as a logic gate is described in this paper. This switch consists of fixed input electrodes an output electrode Vcc/GND electrodes and movable plates suspended by crab-leg flexures. for mechanical switching of an electrical signal a parallel plate actuator which comes in contact with output electrode was used. Provided that movable plates are connected to Vcc and a low input voltage(ground signal) is applied to the fixed input electrodes the movable plates are pulled by an electrostatic force between the fixed input electrodes and the movable plates. the proposed micromechanical switch was fabricated by surface micromachining technology with$2\mum$ -thick poly-Si and the measured threshold voltage for ON/OFF switching was 23.5V.

• The Transactions of the Korean Institute of Electrical Engineers C
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• v.50 no.12
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• pp.639-647
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• 2001

We present an integrated optical microswitch, composed of silicon waveguides, gold-coaled silicon micromirrors, and electrostatic contact actuators, for applications to the optical signal transceivers. For a low switching voltage, we modify the conventional curled electrode microactuator into a electrostatic microactuator with touch-down beams. We fabricate the silicon waveguides and the electrostatically actuated micromirrors using the ICP etching process of SOI wafers. We observe the single mode wave propagation through the silicon waveguide with the measured micromirror loss of $4.18\pm0.25dB$. We analyze major source of the micromirror loss, thereby presenting guidelines for low-loss micromirror designs. From the fabricated microswitch, we measure the switching voltage of 31.74V at the resonant frequency of 6.89kHz. Compared to the conventional microactuator, the present contact microactuator achieves 77.4% reduction of the switching voltage. We also discuss a feasible method to reduce the switching voltage to 10V level by using the electrode insulation layers having the residual stress less than 30MPa.

• Journal of the Korean Society for Precision Engineering
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• v.22 no.10 s.175
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• pp.174-185
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• 2005

This paper presents the design, fabrication, and testing results of a dual stage actuator system for a fine positioning of magnetic heads in magnetic disk drives. A novel rotary microactuator which is electrostatically driven and utilized as a secondary actuator was designed. The stator and rotor electrodes in the microactuator was revised to have the optimal shapes and hence produces much higher rotational torque compared with the conventional comb-shape electrodes. The microactuators were successfully fabricated using SoG(silicon on glass) processing technology, which is known as being cost-effective. The fabricated microactuator has the structural thickness of $45{\mu}m$ with the gap width of approximately $3{\mu}m$. The dynamic characteristic of microactuator/slider assembly was investigated, and its natural frequency and DC gain were measured to be 3.4kHz and 32nm/V, respectively. The microactuator/slider assembly was integrated into a HDD model V10 of Samsung Electronics Co. and a dual servo algorithm was tested to explore the tracking performance of dual stage actuator system where the LDV signals instead of magnetic head signals were used. Experimental results indicate that this system achieves the tracking accuracy of 30nm. This value corresponds to a track density of 85,000 track per inch(TPI), which is about 3 times greater than that of current hard disk drives.

• Journal of Sensor Science and Technology
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• v.8 no.5
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• pp.368-376
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• 1999

This paper predicts the changes in the spring constant, the resonant frequency, the electrostatic force, and the displacement of a resonant structure due to non-ideal anisotropic RIE etching process. First, a $6\;{\mu}m$ thick polysilicon was etched by RIE and the anisotropy of the etched structure was measured as a function of a RF power, a $Cl_2$ flow rate and a chamber pressure. In the experimental results, an anisotropy was decreased as the RF power, the $Cl_2$ flow rate, or the chamber pressure was increased. A comb actuator's operation characteristic was predicted depending on the anisotropy variations in RIE etching. Comb actuators with three different support beam structures were investigated : fixed-fixed, crab-leg, and double crab-leg. As the RIE etch anisotropy becomes non-ideal, i.e. the cross section becomes rather a trapezoidal than a rectangular shape, it decreases spring constant, resonant frequency and electrostatic force of a comb actuator but it increases the displacement of the mass. Among the three structures, the comb actuator with double crab-leg support beams is more influenced by anisotropy variation in RIE etch than other two.

• Journal of the Institute of Electronics Engineers of Korea SD
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• v.37 no.8
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• pp.1-8
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• 2000

We have achieved a high aspect ratio track-following microactuator (TFMA) which is capable of driving 0.3 ${\mu}m$ magnetic head for hard disk drive (HDD). it was fabricated on silicon on insulator (SOI) wafer with 20 ${\mu}m$ trick active silicon and 2 ${\mu}m$ thick thermally grown oxide and piggyback electrostatic principle was used for driving TFMA. The first vibration mode frequency of TFMA was 18.5 kHz which is enough for a recording density of higher than 10 Gb/in$^2$. Its displacement was 1.4 ${\mu}m$ when 15 V dc bias plus 15 V ac sinusoidal driving input was applied and its electrostatic force was 50 N. The fabricated actuator shows 7.51 dB of gain margin and 50.98$^{\circ}$ of phase margin for 2.21 kHz servo-bandwidth.

• Proceedings of the KIEE Conference
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• 2004.07c
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• pp.1718-1720
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• 2004

This paper is focused on the improvement of reflection angle of an optical scanner by changing a shape of a torsion bar attached with an optical scanner reflector(mirror). In order to improve the light efficiency of the optical scanner by virtue of the magnetic effect, which tiny magnets are attached under both ends of the optical scanner reflector. and hence the optical scanner reflector was operated in relatively lower driving voltage. By changing the torsion bar's shape I type into S type, we've got the lower resonant frequency(32.5Hz) of an optical scanner than that of conventional one(50Hz). According to these results. The reflection angle of an optical scanner with magnets was much larger in the range of about 14.8$^{circ}$ without a magnet. By making use of a magnetic actuator instead of a conventional electrostatic actuator, the optical scanner was less influenced from outdoor dust or moisture.

• Proceedings of the KIEE Conference
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• 2001.11a
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• pp.65-68
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• 2001

본 연구에서는 코움 드라이브에 비해 구동력은 크고 평행 판 구동 방식에 비해서는 선형 특성이 우수하며 안정된 구동거리가 증가하는 특성을 갖는 새로운 정전력(electrostatic force) 구동 방식을 제안한다. 운동 전극과 고정 전극을 기울어지게 배치하여 전극 면에 평행한 정전력 $F_x$와 전극 면에 수직인 정전력 $F_y$의 합력 $F_e$ 방향으로 전극을 운동시킴으로써 정전력의 방향과 전극의 운동 방향을 일치시킨다. 제안된 구동방식의 정전력 모델을 이용한 해석 결과 코움 드라이브에 비해서는 구동력이 50 % 이상 크며 평행 판 구동에 비해서는 안정된 구동 거리가 10 - 30 % 이상 증가하는 구동 특성을 얻을 수 있었다. 제안된 구동방식을 이용하여 HDD의 트랙 방향 저장 밀도를 증가시키기 위한 듀얼스테이지 서보(dual-stage servo)에 사용 될 마이크로 액츄에이터 (microactuator)를 설계하고 SoG(Silicon on Glass) 공정을 이용하여 제작하였다.

• Journal of the Korean Society for Precision Engineering
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• v.22 no.2
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• pp.180-187
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• 2005

This paper is focused on the development of the flexible electrode for disc-type polymer actuators using Segmented Polyurethane(SPU). This paper consists of two parts. The one is about the mechanical property such as elastic modulus. these parameters mainly affect behaviors of polymer actuators and the other is about the electro-chemical property such as the surface resistance of the composite electrode affects the strength of electrostatic force, results in the deformation of polymer actuators. The Young's modulus was measured by UTM. As result, by increasing the modulus of a body of polymer actuators, the maximum displacement of polymer actuators are decreased. The surface resistance of the electrode was measured by 4 point probe system. Compared with the conductive silver grease, the displacement of polymer actuators using carbon black(CB) composite electrodes is comparably small but CB composite electrode should be the practical approach for the improvement of the performance of all-solid actuators, compared with another types of electrode materials.

• The Transactions of the Korean Institute of Electrical Engineers B
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• v.54 no.4
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• pp.163-173
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• 2005

The conventional optimization study for electromagnetic systems has been mostly on the shape or size optimization. The goal for these optimization methods is to improve performance of electromagnetic systems by optimizing the interface shape of two different materials while their given layout or initial topology are held. The feasible topology can be diverse and an appropriate topology will give much better design results. In this paper we propose a theory and an algorithm for topology optimization of electromagnetic systems, which are based on the finite element method. The topology optimization technique employes a direct searching method of sensitivity analysis in which the information of material sensitivity is used. Two numerical examples of a switched reluctance motor and an electrostatic actuator of MEMS are tested and their design results show that the optimization method is valid and useful for the topology and basic layout design of electromagnetic systems.