Dual Stage Actuator System for High Density Magnetic Disk Drives Using a Rotary-type Electrostatic Microatuator |
Jung Sunghwan
(삼성종합기술원)
Choi Jae-Joon (삼성종합기술원) Park Jihwang (삼성종합기술원) Lee Chang-Ho (삼성종합기술원) Kim Cheol-Soon (삼성종합기술원) Min Dong-Ki (삼성종합기술원) Kim Young-Hoon (삼성종합기술원) Lee Seung-Hi (삼성종합기술원) Jeon Jong Up (울산대학교 기계자동차공학부) |
1 | Franklin, G. F. and Powell, J. D., Digital Control of Dynamic Systems, Addison Wesley, second edition, 1990 |
2 | Imamura, T., Katayama, M., Ikegawa, Y., Ohwe, T., Koishi, R. and Koshikawa, T., 'MEMS-Based Integrated Head/Actuator/Slider for Hard Disk Drives,' IEEE/ASME Transactions on Mechatronics, Vol. 3, No. 3, pp. 166-174, 1998 DOI ScienceOn |
3 | Jung, S. and Jeon, J. U., 'Optimal Shape Design of a Rotary Microactuator,' Journal of Microelectro- mechanical Systems, Vol. 10, No. 3, pp. 460-468, 2001 DOI ScienceOn |
4 | Putty, M. W., Chang, S. C., Howe, R. T., Robinson, A. L. and Wise, K. D., 'One-Port Active Polysilicon Resonant Micro-structures,' Proc. IEEE MEMS Conference, pp. 60-65, 1989 DOI |
5 | Fujita, H., Suzuki, K., Ataka, M. and Nakamura, S., 'A Microactuator for Head Positioning System of Hard Disk Drives,' IEEE Transactions on Magnetics, Vol. 35, No. 2, pp. 1006-1010, 1999 DOI ScienceOn |
6 | Hirano, T., Fan, L.-S., Lee, W. Y., Hong, J., Imaino, W., Pattanaik, S., Chan, S., Webb, P., Horowitz, R., Aggarwal, S. and Horsley, D. A., 'High-Bandwidth High-Accuracy Rotary Microactuators for Magnetic Hard Disk Drive Tracking Servos,' IEEE/ASME Transcations on Mechatronics, Vol. 3, No. 3, pp. 156-165, 1998 DOI ScienceOn |
7 | Horsely, D. A., Cohn, M. B., Singh, A., Horowitz, R. and Pisano, A. P., 'Design and Fabrication of an Angular Microactuator for Magnetic Disk Drives,' Journal of Microelectroemchanical Systems, Vol. 7, No. 2, pp. 141-148, 1998 DOI ScienceOn |
8 | Miu, D. K. and Tai, Y.-C., 'Silicon Micromachined SCALED Technology,' IEEE Transactions on Industrial Electronics, Vol. 42, No. 3, pp. 234-239, 1995 DOI ScienceOn |
9 | Soeno, Y., Ichikawa, S., Tsuna, T., Sato, Y. and Sato, I., 'Piezoelectric Piggy-Back Microactuator for Hard Disk Drive,' IEEE Transactions on Magnetics, Vol. 35, No. 2, pp. 983-987, 1999 DOI ScienceOn |
10 | Evans, R. B., Griesbach, J. S. and Messner, W. C., 'Piezoelectric Microactuator for Dual Stage Control,' IEEE Transactions on Magnetics, Vol. 35, No. 2, pp. 977-982, 1999 DOI ScienceOn |
11 | Koganezawa, S., Uematsu, Y. and Yamada, T., 'Dual-Stage Actuator System for Magnetic Disk Drives Using a Shear Mode Piezoelectric Microactuator,' IEEE Transactions on Magnetics, Vol. 35, No.2, pp. 988-992, 1999 DOI ScienceOn |