• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.18 no.1
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• pp.24-29
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• 2005

Chemical mechanical polishing (CMP) has been widely accepted for the global planarization of multi-layer structures in semiconductor manufacturing. Copper has been the candidate metallization material for ultra-large scale integrated circuits (ULSIs), owing to its excellent electro-migration resistance and low electrical resistance. However, it still has various problems in copper CMP process. Thus, it is important to understand the effect of the process variables such as turntable speed, head speed, down force and back pressure are very important parameters that must be carefully formulated in order to achieve desired the removal rates and non-uniformity. Using a design of experiment (DOE) approach, this study was performed investigating the main effect of the variables and the interaction between the various parameters during CMP. A better understanding of the interaction behavior between the various parameters and the effect on removal rate, non-uniformity and ETC (edge to center) is achieved by using the statistical analysis techniques. In the experimental tests, the optimum parameters which were derived from the statistical analysis could be found for higher removal rate and lower non-uniformity through the above DOE results.

• Journal of Electrical Engineering and Technology
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• v.12 no.2
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• pp.586-593
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• 2017

Modeling busbar distribution system as a transmission line is an important subject of power line communication in the smart grid concept. This requires extraction of busbar RLGC parameters, accurately. In this study, a comparison is made between conventional and modified method for the aspect of optimum RLGC parameters extraction in the 1 MHz to 50 MHz frequency band. The usefulness of these methods is shown both in time and frequency-domain analysis. The frequency-domain analyzes show that the inherent power of modified method can eliminate the errors especially due to the discontinuities arise in conventional method. This makes the modeling approach of modified method more advantageous for the busbars due to its robustness against disturbances in the S-parameters measurements which cannot be eliminated with the calibration procedure. On the other hand, time-domain simulations show that the transmission line representation of the modified method is closer to physical reality by handling causality issues.

• Proceedings of the KSRS Conference
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• 2005.10a
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• pp.116-119
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• 2005

As to the synthetical estimation of land covering parameters or the compounded land covering classification for multi-resolution satellite data, former researches mainly adopted linear or nonlinear regression models to describe the regression relationship of land covering parameters caused by the degradation of spatial resolution, in order to improve the retrieval accuracy of global land covering parameters based on 1;he lower resolution satellite data. However, these methods can't authentically represent the complementary characteristics of spatial resolutions among different satellite data at arithmetic level. To resolve the problem above, a new compounded land covering classification method at arithmetic level for multi-resolution satellite data is proposed in this .paper. Firstly, on the basis of unsupervised clustering analysis of the higher resolution satellite data, the likelihood distribution scatterplot of each cover type is obtained according to multiple-to-single spatial correspondence between the higher and lower resolution satellite data in some local test regions, then Parzen window approach is adopted to derive the real likelihood functions from the scatterplots, and finally the likelihood functions are extended from the local test regions to the full covering area of the lower resolution satellite data and the global covering area of the lower resolution satellite is classified under the maximum likelihood rule. Some experimental results indicate that this proposed compounded method can improve the classification accuracy of large-scale lower resolution satellite data with the support of some local-area higher resolution satellite data.

• International Journal of Aeronautical and Space Sciences
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• v.17 no.4
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• pp.455-466
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• 2016

Chemical-kinetic parameters of the equilibrium constants to evaluate the reverse rate coefficients in the shock layer of a blunt body and the expanding flows are derived for the temperature range from 300 K to 20,000 K. The expanded equilibrium constants for the chemical reactions of the dissociation, ionization, associative ionization, and neutral and charge exchange reactions of the atmospheric species and carbon materials are proposed in the present work. In evaluating the equilibrium constants, the inter-nuclear potential energies of the molecular species are calculated by the analytical potential function of the Hulburt-Hirschfelder model, and the parameters of the analytical model are determined from the semi-classically calculated RKR potentials. The electronic states and energies of the atoms are calculated by the electronic energy grouping model, and the rovibrational states and energies of each electronic states of the molecules are evaluated by the WKB method. The expanded equilibrium constants for 31 types of the reactions are provided for the best curve-fit functions, and the recombination reaction rate coefficients evaluated from the present equilibrium constants are compared with existing measured values.

• Journal of the Korean Society for Precision Engineering
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• v.29 no.10
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• pp.1128-1136
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• 2012

In this paper, the states and parameters in a dynamic system are estimated by applying an Unscented Kalman Filter (UKF). The UKF is widely used in various fields such as sensor fusion, trajectory estimation, and learning of Neural Network weights. These estimations are necessary and important in determining the stability of a mobile system, monitoring, and predictions. However, conventional approaches are difficult to estimate based on the experimental data, due to properties of non-linearity and measurement noises. Therefore, in this paper, UKF is applied in estimating the states and parameters needed. An experimental dynamic system has been set up for obtaining data and the experimental data is collected for parameter estimation. The measurement noises are primarily reduced by applying the Low Pass Filter (LPF). Given the simulation results, the estimated error rate is 39 percent more efficient than the results obtained using the Least Square Method (LSM). Secondly, the estimated parameters have an average convergence period of four seconds.

• Proceedings of the KIEE Conference
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• 2000.11d
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• pp.700-702
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• 2000

The new design methodology of a hybrid fuzzy controller by means of the genetic algorithms is presented. In fuzzy controller which has been widely applied and used. in order to construct the best fuzzy rules that include adjustment of fuzzy sets, a highly skilled techniques using trial and error are required. To deal with such a problem, first, a hybrid fuzzy controller(HFC) related to the optimal estimation of control parameters is proposed. The HFC combined a PID controller with a fuzzy controller concurrently produces the better output performance than any other controller from each control output in steady state and transient state. Second, a auto-tuning algorithms is presented to automatically improve the performance of hybrid fuzzy controller, utilizing the simplified reasoning method and genetic algorithms. In addition, to obtain scaling factors and PID Parameters of HFC using GA, three kinds of estimation modes such as basic, contraction, and expansion mode are effectively utilized. The HFCs are applied to the first-order second-order process with time-delay and DC motor Computer simulations are conducted at step input and the performances of systems are evaluated and also discussed from performance indices.

• Journal of the Korean Society for Precision Engineering
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• v.27 no.3
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• pp.9-17
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• 2010

The FPCB is used for electronic products such as LCD display. The process of manufacturing FPCB includes a cutting process, in which each single FPCB is cut and separated from the panel where a series of FPCBs are arrayed. The most-widely used cutting method is the mechanical punching, which has the problem of creating burrs and cracks. In this paper, the cutting characteristics of the FPCB have been experimented using Nd:YAG DPSS UV laser as a way of solving this problem. To maximize the industrial application of this laser cutting process, test samples of the multilayered FPCB have been chosen as it is actually needed in industry. The cutting area of the FPCB has four different types of layer structure. First, to cut the test sample, the threshold laser cut-off fluence has been found. Various combinations of laser and process parameters have been made to supply the acquired laser cut-off fluence. The cutting characteristics in terms of the variation of the parameters are analyzed. The laser and process parameters are optimized, in order to maximize the cutting speed and to reach the best quality of the cutting area. The laser system for the process automation has been also developed.

• Journal of the Semiconductor & Display Technology
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• v.11 no.4
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• pp.13-18
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• 2012

The semiconductor equipments generate a lot of data traffic via communication channels for the effective manufacturing processes of semiconductors and for the automation of semiconductor equipments. These data should be sent to a host computer in order to keep in a safe. The IEEE 802.11e specification gives differentiated and distributed access to a wireless communication medium with four access categories. These four access categories use different priority parameters which lead to quality of service in data traffic. In this paper, it is shown that the throughput of data depends upon the priority parameters provided by IEEE802.11e. We implement the usage of priority parameters in the SECS protocol for semiconductor equipments. It is necessary that the data from semiconductor equipments should be classified with certain priority for the effective use of our proposed method. Therefore, our scheme will contribute to improving the performance of the manufacturing processes of semiconductors.

• Journal of electromagnetic engineering and science
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• v.10 no.4
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• pp.212-218
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• 2010

The radar backscatter from various earth surfaces is sensitive to the frequency of the incident wave. This study examined the radar sensitivities for surface parameters such as soil moisture content and surface roughness of both bare and vegetated surfaces at X-band. Because L-band frequencies are often used for sensing the surface parameters, the sensitivities of X-band are also compared with those of the L-band. The sensitivities of the X-band radar backscatter were examined with respect to soil moisture content and surface roughness of rough bare soil surfaces. These sensitivities were also examined using the same parameters for vegetated surfaces for various vegetation densities and incidence angles. Use of the X-band radar for soil moisture detection was as effective as L-band radar for bare soil surfaces. For vegetated surfaces, the soil moisture could be detected using an X-band radar at lower incidence angles, where the upper limit of the incidence angles was dependent on vegetation density.

• Journal of the Optical Society of Korea
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• v.20 no.5
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• pp.586-592
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• 2016

This paper proposes a luminance compensation method using optical sensors to achieve high luminance uniformity of active matrix organic light-emitting diode (AMOLED) displays. The proposed method compensates for the non-uniformity of luminance by capturing the luminance of entire pixels and extracting the characteristic parameters. Data modulation using the extracted characteristic parameters is performed to improve luminance uniformity. In addition, memory size is optimized by selecting an optimal bit depth of the extracted characteristic parameters according to the trade-off between the required memory size and luminance uniformity. To verify the proposed compensation method with the optimized memory size, a 40-inch 1920×1080 AMOLED display with a target maximum luminance of 350 cd/m² is used. The proposed compensation method considering a 4σ range of luminance reduces luminance error from ± 38.64%, ± 36.32%, and ± 43.12% to ± 2.68%, ± 2.64%, and ± 2.76% for red, green, and blue colors, respectively. The optimal bit depth of each characteristic parameter is 6-bit and the total required memory size to achieve high luminance uniformity is 74.6 Mbits.