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The Implementation of Communication Protocol for Semiconductor Equipments with Priority of Data Traffic  

Kim, Doo Yong (Dept. of Electronic Eng., Soonchunhyang Univ.)
Kim, Kiwan (Dept. of Electronic Eng., Soonchunhyang Univ.)
Cho, Hyun Chan (Dept. of Electronic Eng., Korea Univ. of Technology and Education)
Publication Information
Journal of the Semiconductor & Display Technology / v.11, no.4, 2012 , pp. 13-18 More about this Journal
The semiconductor equipments generate a lot of data traffic via communication channels for the effective manufacturing processes of semiconductors and for the automation of semiconductor equipments. These data should be sent to a host computer in order to keep in a safe. The IEEE 802.11e specification gives differentiated and distributed access to a wireless communication medium with four access categories. These four access categories use different priority parameters which lead to quality of service in data traffic. In this paper, it is shown that the throughput of data depends upon the priority parameters provided by IEEE802.11e. We implement the usage of priority parameters in the SECS protocol for semiconductor equipments. It is necessary that the data from semiconductor equipments should be classified with certain priority for the effective use of our proposed method. Therefore, our scheme will contribute to improving the performance of the manufacturing processes of semiconductors.
IEEE802.11e; Quality of Service(QoS); Priority; SECS Protocol;
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