• 한국재료학회지
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• 제25권11호
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• pp.607-611
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• 2015

The microstructural evolution of Grade 91 tempered martensite ferritic steels heat treated at $760{\sim}1000^{\circ}C$ for two hours was investigated using scanning electron microscopy(SEM), energy disperse spectroscopy(EDS), electron backscattered diffraction (EBSD), and transmission electron microscopy(TEM); a microhardness tester was also employed, with a focus on the grain and precipitate evolution process as well as on the main hardening element. It was found that an evolution of tempered martensite to ferrite($760{\sim}850^{\circ}C$), and to fresh martensite($900{\sim}1000^{\circ}C$), occurred with the increase of temperature. Simultaneously, the parabolic evolution characteristics of the low angle grain boundary(LAGB) increased with the increase of the heating temperature(highest fraction of LAGB at $925^{\circ}C$), indicating grain recovery upon intercritical heating. The main precipitate, $M_{23}C_6$, was found to be coarsened slightly at $760{\sim}850^{\circ}C$; it then dissolved at $850{\sim}1000^{\circ}C$. Besides this, $M_3C$ cementite was formed at $900{\sim}1000^{\circ}C$. Finally, the experimental results show that the hardness of the steel depended largely on the matrix structure, rather than on the precipitates, with the fresh martensite showing the highest hardness value.

• 한국재료학회지
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• 제22권1호
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• pp.16-23
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• 2012

Research into the development of high strength (1 GPa) and superior formability, such as total elongation (10%), and stretch-flangeability (50%) in hot-rolled steel was conducted with a thermomechanically controlled hot-rolling process. To improve the overall mechanical properties simultaneously, low-carbon steel using precipitation hardening of Ti-Nb-V multimicroalloying elements was employed. And, ideal microstructural characteristics for the realization of balanced mechanical properties were determined using SEM, EBSD, and TEM analyses. The developed steel, 0.06C-2.0Mn-0.5Cr-0.2(Ti + Nb + V), consisted of ferrite as the matrix phase and second phase of granular bainite with fine carbides (20-50 nm) in both phases. The significant factor of the microstructural characteristics that affect stretch-flangeability was found to be the microstructural homogeneity. The microstructural homogeneity, manifest in such characteristics as low localization of plastic strain and internally stored energy, was identified by grain average misorientation method, analyzed by electron backscattered diffraction (EBSD) and hardness deviation between the phases. In summar, a hot-rolled steel having a composition 0.06C-2.0Mn-0.5Cr-0.2(Ti + Nb + V) demonstrated a tensile strength of 998 MPa, a total elongation of 19%, and a hole expansion ratio of 65%. The most important factors to satisfy the mechanical property were the presence of fine carbides and the microstructural homogeneity, which provided low hardness deviation between the phases.

• 한국분말재료학회지
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• 제21권4호
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• pp.271-276
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• 2014

15Cr-1Mo base oxide dispersion strengthened (ODS) steel which is considered to be as a promising candidate for high- temperature components in nuclear fusion and fission systems because of its excellent high temperature strength, corrosion and radiation resistance was fabricated by using mechanical alloying, hot isostatic pressing and hot rolling. Torsion tests were performed at room temperature, leading to two different shear strain routes in the forward and reverse directions. In this study, microstructure evolution of the ODS steel during simple shearing was investigated. Fine grained microstructure and a cell structure of dislocation with low angle boundaries were characterized with shear strain in the shear deformed region by electron backscattered diffraction (EBSD). Grain refinement with shear strain resulted in an increase in hardness. After the forward-reverse torsion, the hardness value was measured to be higher than that of the forward torsion only with an identical shear strain amount, suggesting that new dislocation cell structures inside the grain were generated, thus resulting in a larger strengthening of the steel.

• 대한금속재료학회지
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• 제47권5호
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• pp.274-282
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• 2009

To investigate the evolution of deformation texture in dual phase (DP) steels during deep-drawing deformation, deep-drawing experiments were performed. Microtexture measurements were conducted using electron backscattered diffraction (EBSD) to analyze texture evolution. A rate-sensitive polycrystal model was used to predict texture evolution during deep-drawing deformation. In order to evaluate the strain path during deep-drawing deformation, a steady state was assumed in the flange part of a deep-drawn cup. A ratesensitive polycrystal model successfully predicted the texture evolution in DP steels during deep-drawing deformation. The final stable orientations were found to be strongly dependent on the initial location in the blank. Texture analysis revealed that the deep drawability of DP steels decreases as the true strain in the radial direction of the deep-drawn cup increases during deep-drawing deformation.

• 한국표면공학회:학술대회논문집
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• 한국표면공학회 2016년도 추계학술대회 논문집
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• pp.139-139
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• 2016

반도체 다마신배선용 도금용 구리도금첨가제는 대표적으로 accelerator, suppressor 및 leveler 첨가제를 사용하여 다마신 패턴을 채우고 평탄화를 시킬 수 있다. Si 반도체 공정기술에 기반한 정확한 구조분석을 통해 각각의 첨가제의 기능이 비교적 체계적으로 연구되었으며, 최근에는 유속영향을 많이 받는 것으로 알려진 leveler 첨가제에 대한 연구가 활발히 진행되고 있다. 본 연구는 대표적 leveler 첨가제의 하나인 Janus Green B(JGB, $C_{30}H_{31}ClN_6$)를 0 ~ 1 mM을 첨가하여 Si 기판위에 증착된 Cu 씨드층 상의 도금후 표면상태 및 불순물의 농도를 분석하고, 이 박막층들의 결정립 성장 경향성을 electron backscattered diffraction(EBSD) 분석을 통해 진행하였다. C, H, N 등의 불순물이 JGB 농도와 선형적 관계를 가지고 증가하는 것을 알 수 있었으며, S와 O의 불순물도 JGB 농도 증가에 따라 증가하는 것을 알 수 있었다. 또한 0.1 mM 첨가한 경우에 60% 정도 결정립 성장이 진행된 것을 알 수 있었으며, 0.2 mM을 넣은 경우에는 결정립 성장이 일어나지 않은 것을 알 수 있었다. 흥미로운 점은 4 point probe를 통한 면저항 측정을 통해 EBSD를 통한 결정립성장이 관찰되지 않은 0.2 mM JGB를 첨가한 경우에 대해서도 면저항의 감소가 관찰되며, 오히려 JGB 농도가 높을수록 이러한 면저항의 감소가 빠르게 시작되는 것을 관찰할 수 있었다. 이는 JGB 농도 증가에 따라 박막층의 불순물의 농도가 증가하고 막내에 존재하는 불순물의 농도가 증가하면 내부응력장이 커짐으로 인해 더욱 빠른 속도로 불순물의 재배치가 일어난 것으로 보인다. 이러한 불순물이 결정립계면에 편석되는 경우에 pinning을 통해 결정립계면의 이동을 저하시킬 수 있으므로 결정립의 성장 억제가 가능해진 것으로 판단된다.

• Nuclear Engineering and Technology
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• 제53권8호
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• pp.2629-2639
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• 2021

Within the frame of the EMPIrE test, four monolithic mini-plates were irradiated in the ATR reactor. In two of them, the monolithic U(Mo) foil had been PVD-coated with Zr before the plate manufacturing. Extensive microstructural characterizations were performed on a fresh archive mini-plate, using Optical Microscopy (OM), Scanning Electron Microscopy (SEM) combined with Energy Dispersive Spectroscopy (EDS), Electron Backscattered Diffraction (EBSD) and Focused Ion Beam (FIB)/Transmission Electron Microscopy (TEM) with nano EDS. A particular attention was paid to the examination of the U(Mo) foil, the PVD coating, the cladding/Zr and Zr/U(Mo) interfaces. The Zr coating has a thickness around 15 ㎛. It has a columnar microstructure and appears dense. The cohesion of the cladding/Zr and Zr/U(Mo) interfaces seems to be satisfactory. An almost continuous layer with a thickness of the order of 100-300 nm is present at the cladding/Zr interface and corresponds to an oxidized part of the Zr coating. At the Zr/U(Mo) interface, a thin discontinuous layer is observed. It could correspond to locally oxidized U(Mo). This work provides a basis for interpreting the results of characterizations on EMPIrE irradiated plates.

• 마이크로전자및패키징학회지
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• 제25권3호
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• pp.61-66
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• 2018

본 연구에서는 DRAM 제조 집적공정의 금속배선으로 사용하는 구리의 자기 열처리(self-annealing) 후 박막 특성 변화에 대한 연구를 진행하였다. 구리를 증착하고 상온에서 시간이 경과하면 구리가 성장하여 결정체 크기 변화가 생기는데 이를 자기 열처리라고 부른다. 구리 금속의 증착은 전기 도금법(electroplating)을 사용하였다. 구리 도금액으로 유기 첨가물이 다른 두 가지 시료인 기준 도금액과 평가 도금액 두 용액에 대해 평가 하였다. 자기 열처리 시간이 경과함에 따라 시간에 대해 면 저항 값의 변화가 없는 영역과 이후 급격하게 떨어지는 구간으로 나누어지고 최종적으로 포화면 저항 값을 보인다. 최종적인 면 저항 값은 초기 값 대비 20% 개선 효과를 보인다. 평가 전해액의 자기 열처리 효과가 기준 용액 대비 더 빠른 시간 안에 이루어졌는데 이는 유기 첨가물의 차이 때문이다. 개선의 효과 분석으로 TEM 장비를 이용하여 결정체 변화를 관찰하였고 자기 열처리 공정에 의해 효과적인 결정체 성장이 이루어졌음을 발견했다. 또한 단면 TEM 측정 결과 자기 열처리 된 시료는 전류 방향으로의 결정체 경계면 숫자가 줄어드는 bamboo 구조를 보인다. 열적 열하 특성(thermal excursion characteristics) 측정 결과 고온 열처리 대비 자기 열처리 시료가 hillock 특성이 보이지 않고 이는 박막의 신뢰성 특성을 향상 시킨다. Electron backscattered diffraction (EBSD) 측정 결과 결정체가 $2{\mu}m$까지 성장한 결정체를 관찰하였고 스트레스에 의한 void를 억제하는데 유리한 (100) 면 비중이 증가하는 방향으로 결정체 성장이 이루어짐을 알 수 있다.