• 한국전기전자재료학회논문지
• /
• 제13권9호
• /
• pp.729-734
• /
• 2000

Recently, Very Large Scale Integrated (VLSI) circuit & deep-submicron bulk Complementary Metal Oxide Semiconductor(CMOS) devices require gate electrode materials such as metal-silicide, Titanium-silicide for gate oxides. Many previous authors have researched the improvement sub-micron gate oxide quality. However, few have reported on the electrical quality and reliability on the ultra thin gate oxide. In this paper, at first, I recommand a novel shallow trench isolation structure to suppress the corner metal-oxide semiconductor field-effect transistor(MOSFET) inherent to shallow trench isolation for sub 0.1${\mu}{\textrm}{m}$ gate oxide. Different from using normal LOCOS technology deep-submicron CMOS devices using novel Shallow Trench Isolation(STI) technology have a unique"inverse narrow-channel effects"-when the channel width of the devices is scaled down, their threshold voltage is shrunk instead of increased as for the contribution of the channel edge current to the total channel current as the channel width is reduced. Secondly, Titanium silicide process clarified that fluorine contamination caused by the gate sidewall etching inhibits the silicidation reaction and accelerates agglomeration. To overcome these problems, a novel Two-step Deposited silicide(TDS) process has been developed. The key point of this process is the deposition and subsequent removal of titanium before silicidation. Based on the research, It is found that novel STI structure by the SEM, in addition to thermally stable silicide process was achieved. We also obtained the decrease threshold voltage value of the channel edge. resulting in the better improvement of the narrow channel effect. low sheet resistance and stress, and high threshold voltage. Besides, sheet resistance and stress value, rms(root mean square) by AFM were observed. On the electrical characteristics, low leakage current and trap density at the Si/SiO$_2$were confirmed by the high threshold voltage sub 0.1${\mu}{\textrm}{m}$ gate oxide.

• 한국표면공학회지
• /
• 제38권4호
• /
• pp.163-166
• /
• 2005

Carbon nanotube-copper composite structures were fabricated using composite plating method and their field emission characteristics were investigated. Multi-walled carbon nanotubes (MWNTs) synthesized by chemical vapor deposition were used in the present study. It was revealed that turn-on field was about $3.0\;V/{\mu}m$ with the current density of $0.1\;{\mu}A/cm^2.$ We observed relatively uniform emission characteristics as well as stable emission current Carbon nanotube-copper composite plating method is efficient and it has no intrinsic limit on the deposition area. Moreover, it gives strong adhesion between emitters and an electrode. Therefore, we recommend that carbon nanotube-copper composite plating method can be applied to fabricate electron field emitters for large area FEDs and large area vacuum lighting sources.

• 한국표면공학회:학술대회논문집
• /
• 한국표면공학회 2017년도 춘계학술대회 논문집
• /
• pp.149-149
• /
• 2017

Aluminum alloys have poor corrosion resistance compared to the pure aluminum due to the additive elements. Thus, anodizing technology artificially generating thick oxide films are widely applied nowadays in order to improve corrosion resistance. Anodizing is one of the surface modification techniques, which is commercially applicable to a large surface at a low price. However, most studies up to now have focused on its commercialization with hardly any research on the assessment and improvement of the physical characteristics of the anodized films. Therefore, this study aims to select the optimum temperature of sulfuric electrolyte to perform excellent corrosion resistance in the harsh marine environment through electrochemical experiment in the seawater upon generating porous films by variating the temperatures of sulfuric electrolyte. To fabricate uniform porous film of 5083 aluminum alloy, we conducted electro-polishing under the 25 V at $5^{\circ}C$ condition for three minutes using mixed solution of ethanol (95 %) and perchloric (70 %) acid with volume ratio of 4:1. Afterward, the first step surface modification was performed using sulfuric acid as an electrolyte where the electrolyte concentration was maintained at 10 vol.% by using a jacketed beaker. For anode, 5083 aluminum alloy with thickness of 5 mm and size of $2cm{\times}2cm$ was used, while platinum electrode was used for cathode. The distance between the two was maintained at 3 cm. Anodic polarization test was performed at scan rate of 2 mV/s up to +3.0 V vs open circuit potential in natural seawater. Surface morphology was compared using 3D analysis microscope to observe the damage behavior. As a result, the case of surface modification showed a significantly lower corrosion current density than that without modification, indicating excellent corrosion resistance.

• Journal of Electrochemical Science and Technology
• /
• 제6권2호
• /
• pp.59-64
• /
• 2015

Spherical Li₄Ti₅O₁₂ and Li₄Ti₅O₁₂ carbon nanotube (CNT) composites were synthesized using a colloid system. The electrochemical properties of the composites were thoroughly examined to determine their applicability as hybrid capacitor anodes. The electrical conductivity of the spherical Li₄Ti₅O₁₂-CNT composite was improved over that of the spherical Li₄Ti₅O₁₂ composite. The synthesized composites were utilized as the anode of a hybrid capacitor, which was assembled with an activated carbon (AC) positive electrode. The CNTs attached on the spherical Li₄Ti₅O₁₂ particles contributed to a 51% reduction of the equivalent series of resistance of the Li₄Ti₅O₁₂-CNTs/AC hybrid capacitor compared to the Li₄Ti₅O₁₂/AC hybrid capacitor. Moreover, the Li₄Ti₅O₁₂-CNTs/AC hybrid capacitor showed a larger capacitance than the Li₄Ti₅O₁₂/AC hybrid capacitor; specifically, the Li₄Ti₅O₁₂-CNT/AC hybrid capacitor showed 1.6 times greater capacitance at 40 cycles with a 10 mA cm⁻² loading current density.

• Journal of Microbiology and Biotechnology
• /
• 제23권12호
• /
• pp.1765-1773
• /
• 2013

The cathode reaction is one of the most seriously limiting factors in a microbial fuel cell (MFC). The critical dissolved oxygen (DO) concentration of a platinum-loaded graphite electrode was reported as 2.2 mg/l, about 10-fold higher than an aerobic bacterium. A series of MFCs were run with the cathode compartment inoculated with activated sludge (biotic) or not (abiotic) on platinum-loaded or bare graphite electrodes. At the beginning of the operation, the current values from MFCs with a biocathode and abiotic cathode were $2.3{\pm}0.1$ and $2.6{\pm}0.2mA$, respectively, at the air-saturated water supply in the cathode. The current from MFCs with an abiotic cathode did not change, but that of MFCs with a biotic cathode increased to 3.0 mA after 8 weeks. The coulomb efficiency was 59.6% in the MFCs with a biotic cathode, much higher than the value of 15.6% of the abiotic cathode. When the DO supply was reduced, the current from MFCs with an abiotic cathode decreased more sharply than in those with a biotic cathode. When the respiratory inhibitor azide was added to the catholyte, the current decreased in MFCs with a biotic cathode but did not change in MFCs with an abiotic cathode. The power density was higher in MFCs with a biotic cathode ($430W/m^3$ cathode compartment) than the abiotic cathode MFC ($257W/m^3$ cathode compartment). Electron microscopic observation revealed nanowire structures in biofilms that developed on both the anode and on the biocathode. These results show that an electron-consuming bacterial consortium can be used as a cathode catalyst to improve the cathode reaction.

• 한국진공학회지
• /
• 제11권3호
• /
• pp.135-140
• /
• 2002

본 논문에서는 p-type (100)Si, (100)MgO 그리고 MgO/si 기판 위에 RF Magnetron sputtering 법으로 $Ba_{0.5}Sr_{0.5}TiO_3$(BST)박막을 증착하였다. BST 박막 증착 후 RTA(Rapid Thermal Annealing)를 이용하여 $600^{\circ}C$에서 산소분위기로 1분간 고온 급속 열처리를 하였다. 증착된 BST박막의 결정화를 조사하기 위해 XRD(X-Ray Diffraction)측정을 한 결과 모든 기판에서 (110) $Ba_{0.5}Sr_{0.5}TiO_3$(의 주피크가 관찰되어졌고, 열처리 후 재결정화에 기인하여 피크 세기가 증가함을 관찰할 수 있었다. Al 전극을 이용한 커패시터 제작 후 측정한 C-V(Capacitance-Voltage) 특성에서 각각의 기판에서 측정된 커패시턴스 값으로 계산된 유전율은 120(bare Si), 305(Mgo/Si) 그리고 310(MgO)이었다. 누설 전류 특성에서는 0.3 MV/cm이내의 인가전계에서 1 $\mu\textrm{A/cm}^2$ 이하의 안정된 값을 보여주었다. 결론적으로 MgO 버퍼층을 이용한 기판이 BST 박막의 증착을 위한 기판으로써 효과적임을 알 수 있었다.

• 상하수도학회지
• /
• 제25권2호
• /
• pp.223-230
• /
• 2011

An electrolytic oxidation process was applied to remove odorous compounds from non-point odor sources including wastewater pipelines and manholes. In this study, a distance between the anode and the cathode of the electrolytic process was varied as a system operating parameters, and its effects on odor removal efficiencies and reaction characteristics were investigated. Odor precursors such as sediment organic matters and reduced sulfur/nitrogen compounds were effectively oxidized in the electrolytic process, and a change in oxidation-reduction potential (ORP) indicated that an stringent anaerobic condition shifted to a mild anoxic condition rapidly. At an electrode distance of 1 cm and an applied voltage of 30 V, a system current was maintained at 1 A, and the current density was 23.1 $mA/cm^{2}$. Under the condition, the removal efficiency of hydrogen sulfide in gas phase was found to be 100%, and 93% of ammonium ion was removed from the liquid phase during the 120 minute operating period. Moreover, the sulfate ion (${SO_4}^{2-}$) concentration increased about three times from its initial value due to the active oxidation. As the specific power consumption (i.e., the energy input normalized by the effective volume) increased, the oxidation progressed rapidly, however, the oxidation rate was varied depending on target compounds. Consequently, a threshold power consumption for each odorous compound needs to be experimentally determined for an effective application of the electrolytic oxidation.

• 공업화학
• /
• 제8권2호
• /
• pp.161-171
• /
• 1997

인쇄회로기판의 식각폐수를 전기화학적 방법을 이용하여 양극에서 이를 재생하고, 음극에서 구리를 석출하기 위한 실험을 행하였다. 양극에서의 Cu(I)의 산화에 따른 Cu(I)/Cu(II) 변화는 Pt와 Ag/AgCl/4M KCl 전극사이의 전위차를 이용하여 측정하였으며, 반응의 진행에 따른 양극에서의 염소기체 발생은 용액내에 Cu(I)의 농도를 일정치 이상으로 유지시키고, 비다공성 흑연전극을 이용하여 억제할 수 있었다. 그리고, 음극에서의 구리석출은 전류밀도 $360mA/cm^2$, 구리이온농도 12g/l 일때 가장 효율적이며 석출된 구리는 dendrite구조임을 알 수 있었다. 또한 석출효율과 회수방법을 고려할 때 음극으로서 Ti전극을 사용할 경우 가장 우수한 효율을 얻을 수 있었다. 전해온도가 증가함에 따라서 전류효율은 낮아졌으며, 전력효율은 $50^{\circ}C$에서 최대값을 나타내었다.

• 한국진공학회지
• /
• 제19권5호
• /
• pp.331-340
• /
• 2010

초고주파 다중 중공 음극 방전을 이용한 플라즈마 화학 기상 증착 장치를 3차원 수치 모델링하였다. 기본적인 방전 특성을 파악하기 위하여 알곤 플라즈마를 40 MHz, 100 V, 133.3 Pa (1 Torr)의 조건에 대해서 계산하였다. 6 mm 직경의 홀을 20 mm 간격으로 배열하였고 전극 간격은 10 mm를 가정하였다. 피크 플라즈마 밀도는 홀의 하부 중앙에서 $5{\times}10^{11}#/cm^3$ 였으며 전자 온도는 접지 상태로 가정한 기판과 챔버 벽면 주위에서 가장 높았다. 준안정 상태에 의한 2단 이온화 속도는 전자 충돌에 의한 직접 이온화보다 10배 가량 높았다. 수소에 대한 계산에서는 이온화 이외의 다양한 에너지 소모 경로가 있어서 방전의 국재화가 잘 이루어지지 않았다.

• 한국분말재료학회지
• /
• 제23권2호
• /
• pp.95-101
• /
• 2016

Carbon nanofiber (CNF) composites coated with spindle-shaped $Fe_2O_3$ nanoparticles (NPs) are fabricated by a combination of an electrospinning method and a hydrothermal method, and their morphological, structural, and chemical properties are measured by field-emission scanning electron microscopy, transmission electron microscopy, X-ray diffraction, and X-ray photoelectron spectroscopy. For comparison, CNFs and spindle-shaped $Fe_2O_3$ NPs are prepared by either an electrospinning method or a hydrothermal method, respectively. Dye-sensitized solar cells (DSSCs) fabricated with the composites exhibit enhanced open circuit voltage (0.70 V), short-circuit current density ($12.82mA/cm^2$), fill factor (61.30%), and power conversion efficiency (5.52%) compared to those of the CNFs (0.66 V, $11.61mA/cm^2$, 51.96%, and 3.97%) and spindle-shaped $Fe_2O_3$ NPs (0.67 V, $11.45mA/cm^2$, 50.17%, and 3.86%). This performance improvement can be attributed to a synergistic effect of a superb catalytic reaction of spindle-shaped $Fe_2O_3$ NPs and efficient charge transfer relative to the one-dimensional nanostructure of the CNFs. Therefore, spindle-shaped $Fe_2O_3$-NP-coated CNF composites may be proposed as a potential alternative material for low-cost counter electrodes in DSSCs.