통합 검색 | Korea Science

박정우;정희섭;김곤호;황기웅
- 대한전기학회:학술대회논문집
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- 대한전기학회 1995년도 추계학술대회 논문집 학회본부
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- pp.459-461
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- 1995
An omegatron mass spectrometer was designed and fabricated. Experiments have been performed to demonstrate the instrument's operation in the ECR plasma device. By using this analyzer, mass spectra have been obtained in hydrogen plasmas, and typical results are presented. In the plasma omegatron, downstreaming plasma generated by ECR are entering the analyzer through a smsll floating aperture. We employ a biasing technique to reduce the ion velocity along the magnetic field and to keep the ions from drifting to the side pintos, and thus achieved improved ion collection and sensitivity. Mass spectra obtained show that main positive ion components are $H_3{^+}$ and $H_2{^+}$ with the density ratio of $H_2{^+}$ to $H_3{^+}$ $\simeq$ 0.2.
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김성봉;이희재;박승일;유석재;조무현;한승훈;임병옥
- 한국표면공학회지
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- 제47권1호
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- pp.53-56
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- 2014
I-V characteristics of a cylindrical target in an ECR plasma were studied for sheath spatial evolutions when the target was pulsed biased to a high negative potential. The magnetic field effects on sheath thickness and sheath boundary speed were investigated by comparison between the experimental results and the theoretical results using the Child-Langmuir sheath model. The results showed that the magnetic field suppressed electron motion away from the target so that sheath thickness and sheath boundary speed decreased.
https://doi.org/10.5695/JKISE.2014.47.1.053 인용 PDF KSCI

김훈
- 대한전기학회:학술대회논문집
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- 대한전기학회 1994년도 하계학술대회 논문집 C
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- pp.1609-1611
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- 1994
In ECR and helicon reactors for plasma processing, a high density plasma is generated in a source region which is connected to a diffusion region where the processing takes place. Large density and potential gradients can develop at the orifice of the source which drive ion currents into the diffusion region. The average ion velocity may become the order of the sound velocity. Measurements of the ion saturation current to a Langmuir probe are used as a standard method of determining the plasma density in laboratory discharges. However, the analysis becomes difficult in a steaming plasma. We have used the HAMLET plasma simulator to simulate the ion flow to a large langmuir probe in an ECR plasma. The collection surface was aligned with the Held upstream, normal to the field, and downstream. ion trajectories through the electric and magnetic fields were calculated including ion-neutral collisions. We examines the ratio of ion current density to plasma density as a function of magnetic field and pressure.
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