• 제목/요약/키워드: ESC

검색결과 236건 처리시간 0.024초

극저온 식각장비용 정전척 쿨링 패스 온도 분포 해석 (Temperature Analysis of Electrostatic Chuck for Cryogenic Etch Equipment)

  • 두현철;홍상진
    • 반도체디스플레이기술학회지
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    • 제20권2호
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    • pp.19-24
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    • 2021
  • As the size of semiconductor devices decreases, the etching pattern becomes very narrow and a deep high aspect ratio process becomes important. The cryogenic etching process enables high aspect ratio etching by suppressing the chemical reaction of reactive ions on the sidewall while maintaining the process temperature of -100℃. ESC is an important part for temperature control in cryogenic etching equipment. Through the cooling path inside the ESC, liquid nitrogen is used as cooling water to create a cryogenic environment. And since the ESC directly contacts the wafer, it affects the temperature uniformity of the wafer. The temperature uniformity of the wafer is closely related to the yield. In this study, the cooling path was designed and analyzed so that the wafer could have a uniform temperature distribution. The optimal cooling path conditions were obtained through the analysis of the shape of the cooling path and the change in the speed of the coolant. Through this study, by designing ESC with optimal temperature uniformity, it can be expected to maximize wafer yield in mass production and further contribute to miniaturization and high performance of semiconductor devices.

Global Proteomic Analysis of Mesenchymal Stem Cells Derived from Human Embryonic Stem Cells via Connective Tissue Growth Factor Treatment under Chemically Defined Feeder-Free Culture Conditions

  • Seo, Ji-Hye;Jeon, Young-Joo
    • Journal of Microbiology and Biotechnology
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    • 제32권1호
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    • pp.126-140
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    • 2022
  • Stem cells can be applied usefully in basic research and clinical field due to their differentiation and self-renewal capacity. The aim of this study was to establish an effective novel therapeutic cellular source and create its molecular expression profile map to elucidate the possible therapeutic mechanism and signaling pathway. We successfully obtained a mesenchymal stem cell population from human embryonic stem cells (hESCs) cultured on chemically defined feeder-free conditions and treated with connective tissue growth factor (CTGF) and performed the expressive proteomic approach to elucidate the molecular basis. We further selected 12 differentially expressed proteins in CTGF-induced hESC-derived mesenchymal stem cells (C-hESC-MSCs), which were found to be involved in the metabolic process, immune response, cell signaling, and cell proliferation, as compared to bone marrow derived-MSCs(BM-MSCs). Moreover, these up-regulated proteins were potentially related to the Wnt/β-catenin pathway. These results suggest that C-hESC-MSCs are a highly proliferative cell population, which can interact with the Wnt/β-catenin signaling pathway; thus, due to the upregulated cell survival ability or downregulated apoptosis effects of C-hESC-MSCs, these can be used as an unlimited cellular source in the cell therapy field for a higher therapeutic potential. Overall, the study provided valuable insights into the molecular functioning of hESC derivatives as a valuable cellular source.

On the Signal Power Normalization Approach to the Escalator Adaptive filter Algorithms

  • Kim Nam-Yong
    • 한국통신학회논문지
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    • 제31권8C호
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    • pp.801-805
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    • 2006
  • A normalization approach to coefficient adaptation in the escalator(ESC) filter structure that conventionally employs least mean square(LMS) algorithm is introduced. Using Taylor's expansion of the local error signal, a normalized form of the ESC-LMS algorithm is derived. Compared with the computational complexity of the conventional ESC-LMS algorithm employs input power estimation for time-varying convergence coefficient using a single-pole low-pass filter, the computational complexity of the proposed method can be reduced by 50% without performance degradation.

A Least Squares Approach to Escalator Algorithms for Adaptive Filtering

  • Kim, Nam-Yong
    • ETRI Journal
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    • 제28권2호
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    • pp.155-161
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    • 2006
  • In this paper, we introduce an escalator (ESC) algorithm based on the least squares (LS) criterion. The proposed algorithm is relatively insensitive to the eigenvalue spread ratio (ESR) of an input signal and has a faster convergence speed than the conventional ESC algorithms. This algorithm exploits the fast adaptation ability of least squares methods and the orthogonalization property of the ESC structure. From the simulation results, the proposed algorithm shows superior convergence performance.

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An Escalator Structure-Based Adaptation Algorithm for Channel Equalization with Eigenvalue Spread-Independency

  • Kim, Nam-Yong
    • Journal of electromagnetic engineering and science
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    • 제4권2호
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    • pp.93-96
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    • 2004
  • In this paper we introduce a new escalator(ESC) structure-based adaptation algorithm. The proposed algorithm is independent of eigenvalues spread ratio(ESR) of channel and has faster convergence speed than that of the conventional ESC algorithms. This algorithm combines the fast adaptation ability of least square methods and the orthogonalization property of the ESC structure. From the simulation results the proposed algorithm shows superior convergence speed and no slowing down of convergence speed when we increase the ESR of the channel.

Genetically Modified Human Embryonic Stem Cells Relieve Symptomatic Motor Behavior in a Rat Model of Parkinson′s Disease

  • 길광수;이영재;김은영;이창현;이훈택;정길생;박세필;임진호
    • 한국동물번식학회:학술대회논문집
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    • 한국동물번식학회 2003년도 학술발표대회 발표논문초록집
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    • pp.74-74
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    • 2003
  • Embryonic stem cells have several characteristics suitable for cell replacement therapy. To investigate a possibility of using human embryonic stem cell (hESC) as a carrier of therapeutic gene(s), hESC (MB03) was co-transfected with cDNAS coding for tyrosine hydroxylase (TH) and GTP cyclohydrolase Ⅰ (GTPCH Ⅰ) and bulk-selected using neomycin and hygromycin-B. Successful transfection was confirmed by western immunoblotting and RT-PCR. The genetically modified hESC (bk-THGC) relieved apomorphine-induced asymmetric motor behavior by approximately 54% when grafted into striatum of 6-OHDA-denervated rat brain. The number of rotation, however, increased up to 176+18% in 6 weeks when sham-grafted compared with number of rotation before graft. Immunohistochemical staining revealed that the grafted hESC survived and expressed TH for at least 6 weeks while the experiment was continued.

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Si-adhesive 층의 불량에 따른 정전척 온도분포 (Effect of the Si-adhesive layer defects on the temperature distribution of electrostatic chuck)

  • 이기석
    • 반도체디스플레이기술학회지
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    • 제11권2호
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    • pp.71-74
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    • 2012
  • Uniformity of the wafer temperature is one of the important factors in etching process. Plasma, chucking force, backside helium pressure and the surface temperature of ESC(electrostatic chuck) affect the wafer temperature. ESC consists of several layers of structure. Each layer has own thermal resistance and the Si-adhesive layer has highest thermal resistance among them. In this work, the temperature distribution of ESC was analyzed by 3-D FEM with various defects and the thickness deviation of the Si-adhesive layer. The result with Si-adhesive layer with the low center thickness deviation shows modified temperature distribution of ESC surface.

Effects of Various Calcium Powders as Replacers for Synthetic Phosphate on the Quality Properties of Ground Pork Meat Products

  • Bae, Su Min;Cho, Min Guk;Jeong, Jong Youn
    • 한국축산식품학회지
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    • 제37권3호
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    • pp.456-463
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    • 2017
  • The aim of this study was to identify the optimal and superior type of natural calcium for replacing phosphate in cooked ground pork products. To achieve this, 0.5% eggshell calcium (ESC), oyster shell calcium (OSC), marine algae calcium (MAC), or milk calcium (MC) was added to ground pork meat products. The effect of this substitution was studied by comparing the substituted products with products containing 0.3% phosphate blend (control). ESC was considered an ideal phosphate replacer for minimizing the cooking loss, which likely resulted from the increase in the pH of the product. Among the other natural calcium types, OSC treatment did not cause a significant increase in pH, but it lowered the cooking loss. CIE $L^*$ values were higher (p<0.05) in products treated with OSC or MC than the control, and lowest (p<0.05) in the products with ESC. However, products with ESC had higher (p<0.05) CIE $a^*$ and CIE $b^*$ values than the control and products treated with other powders. Compared to the control, products treated with ESC and OSC had similar substitution effects on the textural properties of the products. Therefore, the results of this study suggested that the combined use of ESC and OSC could be a potentially effective method for replacing synthetic phosphate in ground pork products.

뇌허혈성 부위의 조직학적 특성을 통한 임상적 영향 (Clinical Effect through Histological Characteristics of Focal Ischemia Region)

  • 이태훈
    • 산업융합연구
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    • 제17권4호
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    • pp.39-43
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    • 2019
  • 마우스 배아 줄기 세포는 신경 세포 분화가 가능한 세포의 대안적인 공급원이 될 수 있으며 잠재적으로 신경계 질환의 치료에 유용하게 사용될 수있다. 우리는 배아 줄기 세포 (ESCs)가 신경 분화를 유도하도록 유도 될 수 있는지를 조사했다. 신경 세포 유도 후, mESC의 표현형이 뉴런의 형태학으로 변하였고, mESCs는 실험쥐 뇌의 측 뇌실로 주입되었다. 이식 된 세포는 뇌의 여러 부위로 이동하였고 중대뇌동맥 결찰에 의한 허혈성 뇌혈관 손상부위에 이식된 줄기세포군이 손상된 피질부위로 집중적으로 이동하여 손상복구 기전을 증가시켰다. mESCs의 뇌내 이식은 MCAO 쥐의 기능적 결손의 감각 및 운동 회복을 유의 적으로 향상시킨다. 이러한 데이터는 이식 된 mESC가 허혈성 미세 환경에서 생존, 이동 및 분화하고 쥐에서 뇌졸중 후 신경 기능 회복을 향상 시킨다는 것을 나타낸다. 따라서 우리는 mESC의 이식이 인간 신경계 손상 및 퇴행성 장애에 대한 강력한 이식 치료법을 제공 할 것으로 기대한다.

체외수정 생쥐 배아에서의 배아 줄기세포 확립 (Establishment of Mouse Embryonic Stem Cell-like Cells from In Vitro Fertilized Embryos)

  • 문신용;박용빈;김희선;오선경;천대우;서창석;최영민;김정구;이진용;김석현
    • Clinical and Experimental Reproductive Medicine
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    • 제29권1호
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    • pp.1-12
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    • 2002
  • Objective: In order to acquire the technique for the establishment of human embryonic stem cells (ESe) derived from the human frozen-thawed embryos produced in IVF-ET program, this study was performed to establish mouse ESC derived from the in vitro fertilized embryos. Materials and Methods: After Fl hybrid (C57BL female $\times$ CBA mael) female mice were superovulated with PMSG and hCG treatment, their oocytes were retrieved and inseminated, and the fertilized embryos were cultured for 96-120 hours until the expected stages of blastocysts were obtained. To isolate the inner cell mass (ICM), either the blastocysts were treated with immunosurgery, or the whole embryos were cultured for 4 days. Isolated ICMs were then cultured onto STO feeder cell layer, and the resultant ICM colonies were subcultured with trypsin-EDTA treatment. During the subculture process, ESC-like cell colonies were observed with phase contrast microscopy. To identify ESC in the subcultured ESC-like cell colonies, alkaline phosphatase activity and Oct-4 (octamer-binding transcription factor-4) expression were examined by immunohistochemistry and RT-PCR, respectively. To examine the spontaneous differentiation, ESC-like cell colonies were cultured without STO feeder cell layer and leukemia inhibitory factor (LIF). Results: Seven ESC-like cell lines were established from ICMs isolated from the in vitro fertilized embryos. According to the developmental stage, the growth of ICMs isolated from the expanded blastocysts was significantly better than that of ICMs isolated from the hatched blastocysts (80.3% vs. 58.7%, p<0.05). ESC-like cell colonies were only obtained from ICMs of expanded blastocysts. However, the ICMs isolated from the embryos treated with immunosurgery were poorly grown and frequently differentiated during the culture process. The established ESC-like cell colonies were positively stained with alkaline phosphatase and expressed Oct-4, and their morphology resembled that observed in the previously reported mouse ESC. In addition, following the extended in vitro culture process, they maintained their expression of cell surface markers characteristic of the pluripotent stem cells such as alkaline phosphatase and Oct-4. When cultured without STO feeder cell layer and LIF, they were spontaneously differentiated into the various types of cells. Conclusion: The findings of this study suggest that the establishment of mouse ESC can be successfully derived from the in vitro fertilized embryos. The established ESC-like cells expressed the cell surface markers characteristic of the pluripotent stem cells and spontaneously differentiated into the various types of cells.