• Transactions of the Korean Society of Mechanical Engineers
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• v.17 no.12
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• pp.2962-2969
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• 1993

Recently, a study on the mirror-like surface grinding of brittle materials is active and as branch of these study, new dressing method for superabrasive wheel, electrolytic inprocess dressing(Elid) was developed. Using Elid, the mirror-like surface of brittle material can be generated without polishing or lapping process. In the future, Elid grinding will take important place in industry. But so far the analysis on Elid grinding was not quantitative but qualitative. In this study, The purpose is the quantitative analysis on Elid grinding by computer simulation, For computer simulation, the mean and the variance of the abrasive distribution were measured by tracing of the grinding wheel with stylus in transverse direction in the case of respective dressing current condition. This measurement result in a density distribution of abrasive by mathematical formulation using statistical method. The prediction of the surface roughness in Elid grinding was based on this density distribution.

• Journal of the Korean Society of Manufacturing Process Engineers
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• v.12 no.4
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• pp.75-80
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• 2013

Single crystal sapphire being used in high technology industry is a brittle material with a high hardness and excellent physical properties. ELID(Electrolytic In-Process Dressing) grinding technology was applied to material removal machining process of single crystal sapphire wafer. Ultrasonic vibration which added to material using ultrasonic table was adopted to efficient ELID grinding of sapphire materials. The evaluation of the ground surface of single crystal sapphire wafer was carried out by means of surface measuring by using AFM(Atomic Force Microscope), surface roughness tester and optical microscope device. As the results of experiment, it was shown that more efficient grinding was conducted when using ultrasonic table. In case of using #170 grinding wheel, surface roughness of ELID ground specimen in using ultrasonic table was superior to ELID ground specimen without ultrasonic table. However, In case of using #2000 grinding wheel, surface roughness of ELID ground specimen in using ultrasonic table was inferior to ELID ground specimen without ultrasonic table.

• Transactions of the Korean Society of Machine Tool Engineers
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• v.11 no.5
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• pp.58-64
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• 2002

Mirror surface finish of Si-wafers has been achieved by rotary in-feed machining with cup-type wheels in ELID grinding. But the diameter of the workpiece is limited with the diameter of the grinding wheel in the in-feed machining method. In this study, some finding experiments by the rotary surface grinding machine with straight type wheels were conducted, by which the possible grinding area of the workpiece is independent of the diameter of the wheels. For the purpose of investigating the grinding characteristics of large scale diametrical silicon wafer, grinding conditions such as rotation speed of grinding wheels and revolution of workpieces are varied, and grinding machine used in this experiment is rotary type surface grinding m/c equipment with an ELID unit. The surface ground using the SD8000 wheels showed that mirror like surface roughness can be attained near 2~6 nm in Ra.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2001.04a
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• pp.946-949
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• 2001

Mirror surface finish of Si-wafers has been achieved by rotary in-feed machining with cup-type wheels in ELID grinding. But the diameter of the workpiece is limited with the diameter of the grinding wheel in the in-feed machining method. In this study, some grinding experiments by the rotary surface grinding machine with straight type wheels were conducted, by which the possible grinding area of the workpiece is independent of the diameter of the wheels. For the purpose of investigating the grinding characteristics of large scale diametral silicon wafer, grinding conditions such as rotation speed of grinding wheels and revolution of workpiece are varied, and grinding machine used in this experiment is rotary type surface grinding m/c equipped with an ELID unit. The surface ground using the SD8000 wheels showed that mirror like surface roughness can be attained near 2~6nm in Ra.

• Journal of the Korean Society for Precision Engineering
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• v.29 no.3
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• pp.247-252
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• 2012

This study has been focused on application of ELID mirror-surface grinding technology for manufacturing single crystal optic sapphire. Single crystal sapphire is a superior material with optic properties of high performance as light transmission, thermal conductivity, hardness and so on. Mirror-surface machining technology is necessary to use sapphire as optic parts. The ELID grinding system has been set up for machining of the sapphire material. According to the ELID experimental results, it shows that the surface of sapphire can be eliminated by metal bonded wheel with micron abrasives and the surface roughness of 60nmRa can be gotten using grinding wheel of 2,000 mesh in 4.5um, depth of cut. In this study, the chemical experiments after ELID grinding also has been conducted to check chemical reaction between workpiece and grinding wheel on ELID grinding process. It shows that the chemical reaction has not happened as the results of the chemical experiments.

• Proceedings of the Korean Society of Machine Tool Engineers Conference
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• 2000.04a
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• pp.459-464
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• 2000

In this paper, it verifies the relationships between wheel velocity and surface roughness with the mirror surface grinding using electrolytic in-process dressing (ELID). In the general, as wheel velocity is high, surface roughness is better on the base of grinding theory. However, the relationships between wheel velocity and surface roughness is undefined due to the effect of electro-chemical dressing and the characteristics of materials. According to above relationships, ELID grinding experiment is carried out by following the change of wheel velocity. As the result of this study, it is found that surface roughness is not better as linearly as the increase of wheel velocity, but the limit of wheel velocity exists according to the characteristics of materials. Also, in contradiction to the present trend of high wheel velocity of manufacturing system for high surface integrity, it is able to expected to the base on the development of new ultra precision grinding method with the practicality of mirror surface grinding using ELID grinding method.

• Journal of the Korean Society for Precision Engineering
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• v.18 no.5
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• pp.157-164
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• 2001

The grinding for hard-to-machine materials, such as ceramics, super alloys etc., has proven to be a very difficult and consuming process utilizing ordinary methods. In order to conduct high efficiency machining of such materials, grinding processes using metallic bond diamond wheels and applying electrolytic in-process dressing(ELID) have been attempted on a surface grinding machine. In this study, the effects of grinding parameters, and grit sizes have been evaluated in view of surface roughness, grinding force as well as step difference in simultaneous grinding of different materials. The study and experimental results are presented in this paper.

• Journal of the Korean Society for Precision Engineering
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• v.17 no.4
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• pp.155-162
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• 2000

전해 인프로세스 드레싱(ELID)의 응용기술로써 간헐적 드레싱(ELID II) 및 무전극 드레싱(ELID III)이 원통내면 마무리 연삭에 이용되고 있다. 주철본드(CIB-D) 및 메탈레진본드 다이아몬드 숫돌(HRB-D)이 이 방식들에 사용되고 있다. 경면 가공에 있어서 이 두방식은 미립의 숫돌이용으로 일반연삭기에 정밀부속 장치의 보완없이 이용될 수 있다. ELID II 연삭에서 CIB-D숫돌은 파이프 형상의 전극에 의하여 간헐적으로 드레싱되고, 반면에 MRB-D 숫돌은 인프로세스 드레싱 되며 전극은 필요로 하지 않는다. 본 연구에서는 ELID II 및 ELID III 방식에 있어서, 연삭조건 및 연삭입자크기에 대한 연삭특성을 비교검토 하였다. 그 결과, ELID II, III방식 공히 대단히 작은 표면거칠기를 갖는 경면이 얻어짐을 확인하였다.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 1995.10a
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• pp.57-60
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• 1995

Recently, ELID (electrolytic in-process dressing) grinding technique is developed. It is possible to make a efficient precision machining of hard materials such as ceramic hard metals, and quenched steels. This paper deals with some typical applications of ELID-grinding for cylindrcal machining. The significant advantages, performance and characteristics on mirror surface grinding for external surface are described.

• Ceramist
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• v.9 no.6
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• pp.37-41
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• 2006

A novel grinding technology, known as ELID (Electrolytic In-Process Dressing), which incorporates 'inprocess dressing' of metal- bonded diamond grinding wheels, provides continuous protruding abrasives effectively applied to ceramic grinding. This article describes the ELID-grinding method and introduces its application examples on ceramics