• 제어로봇시스템학회:학술대회논문집
• /
• 1997.10a
• /
• pp.1485-1488
• /
• 1997

The capacity of memory chip has increased vert quickly and 64MDRAM becomes main product in semiconductor manufacturing lines consists of many sequential processes, including etching process. although it needs direct sensing of wafer state for the accurae detching, it depends on indirect esnsing and sample test because of the complexity of the plasma etching. This equipment receives the inner light of etch chamber through the viewport and convets it to the voltage inetnsity. In this paper, EDP voltage signal has a new role to detect etching failure. First, we gathered data(EPD sigal, etching time and etchrate) and then analyzed the relationships between the signal variatin and the etch rate using two neural network modeling. These methods enable to predict whether ething state is good or not per wafer. For experiments, it is used High Density Inductive coupled Plasma(HDICP) ethcing equipment. Experiments and results proved to be abled to determine the etching state of wafer on-line and analyze the causes by modeling and EPD signal data.

• 제어로봇시스템학회:학술대회논문집
• /
• 1997.10a
• /
• pp.1500-1503
• /
• 1997

In this paper a multiple channel EPD controller is developed which enables us to detect endpoints simultaneously in the plasma etching process operated in multiple etching chambers and its performance characteristic are investigated. for the accurate detectiion of endpoint the developed EDP controller was able to implement endpoint detectiions by integrating the existing EPD controllers with the techiques of artificial intellignet, to enhance its performance. The performance of the developed EPD controller was carried out by repeated experiments of endpoint detection in the acrual production line of semiconductor manufacturing. It's utility for endpoint detectiion was accurately evaluated in various etching process. The control capability of multiple etching chambers enhances its application compared with the existing one, and also increases the user utility os that the efficiency of operation was improved.

• Journal of applied mathematics & informatics
• /
• v.28 no.1_2
• /
• pp.539-551
• /
• 2010

Low scalability and power efficiency of the shared bus in SoCs is a motivation to use on chip networks instead of traditional buses. In this paper we have modified the Orion power model to reach an analytical model to estimate the average message energy in K-Ary n-Cubes with focus on the number of virtual channels. Afterward by using the power model and also the performance model proposed in [11] the effect of number of virtual channels on Energy-Delay product have been analyzed. In addition a cycle accurate power and performance simulator have been implemented in VHDL to verify the results.

• IEMEK Journal of Embedded Systems and Applications
• /
• v.7 no.4
• /
• pp.201-207
• /
• 2012

Currently, NAND Flash memory has been widely used in consumer storage devices due to its non-volatility, stability, economical feasibility, low power usage, durability, and high density. However, a high capacity of NAND flash memory causes the high power consumption and the low performance. In the convention memory research, a hierarchical filter mechanism can archive an effective performance improvement in terms of the power consumption. In order to attain the best filter structure for NAND flash memory, we selected a direct-mapped filter, a victim filter, a fully associative filter and a 4-way set associative filter for comparison in the performance analysis. According to the results of the simulation, the fully associative filter buffer with a 128byte fetching size can obtain the bet performance compared to another filter structures, and it can reduce the energy*delay product(EDP) by about 93% compared to the conventional NAND Flash memory.

• Journal of Environmental Science International
• /
• v.24 no.9
• /
• pp.1139-1144
• /
• 2015

The gross domestic product(GDP) measures the welfare of a nation's economy through the aggregation of products and services produced in a nation. Although GDP is a proficient measure of the magnitude of the economy, many economists, environmentalists, and citizens have recently criticized the gross domestic product. The criticism stems from the fact that this measurement of domestic product does not account for environmental degradation and resource depletion. We need to estimate the environmentally adjusted net domestic product. The gross domestic product was 913 trillion won while environmental protection expenditure was 32.9 trillion won by monetary accounts of Korea, 2010. Loss of natural assets was 76.6 trillion emwon by emergy analysis of Korea, 2010. The Green GDP was accounted for 88.0% of the GDP to 803.5 trillion won.

• Proceedings of the Korean Society Of Semiconductor Equipment Technology
• /
• 2003.05a
• /
• pp.23-28
• /
• 2003

본 논문에서는 MEMS 공정기술을 이용하는 압저항(piezoresistive) 압력센서용 다이아프램의 최적구조 제작을 위한 TMAH(Tetramethyl Ammonium Hydroxide)의 식각특성을 연구하였다. KOH, EDP 등 기존의 공정 수행에 있어서 부딪치게 되는 환경적 요인을 개선하고, 생산성 향상을 위해 독성이 없고 CMOS 집적회로 공정과 호환성이 높은 TMAH를 사용하여, 식각온도와 TMAH 농도 및 식각시간에 따른 에칭률 변화를 측정하였다. 식각온도가 증가 함에 따라, 그리고 TMAH 농도가 감소함에 따라, Si 에칭률은 증가하였으나 hillock 발생률이 증가하여 식각표면의 평탄화 정도가 나빠졌다. 이러한 단점을 AP(Ammonium Persulfate) 첨가제를 이용하여 해결하였다. l5wt% 농도의 TMAH 800ml 용액을 가지고 매 10분당 같은 양의 AP를 1시간당 5g이 되도록 첨가하여, 한변의 길이가 100~400 $\mu\textrm{m}$인 정사각형 모양을 가진 우수한 이방성 다이아프램을 성공적으로 제작하였다.

• Korean Journal of Food Science and Technology
• /
• v.50 no.1
• /
• pp.28-36
• /
• 2018

Studies on suspected endocrine disrupting pesticide (EDP) residues in agricultural products were carried out in 2016 in Busan, Korea. Twelve different EDPs, ranging in concentration between 0.003-2.049 mg/kg, were detected in 19.5% of 462 samples. About 0.2% of agricultural product samples exceeded the maximum residue limits (MRLs). Risk indices of all of the EDPs were less than 10% of the acceptable daily intake (ADI). The outcomes indicated that the risk groups at highest risk of exposure to diazinon (found in Korean cabbages) and carbendazim (found in apples) were females aged 40 to 49 and young males less than 10 years old, respectively. Based on the stochastic assessment at $95^{th}$ percentile (P95), risk index in these risk groups accounted for 8.38 and 2.98% of ADIs. The results showed that the occurrence of EDP residues in agricultural products could not be considered a public health problem.

• Korean Journal of Clinical Pharmacy
• /
• v.7 no.1
• /
• pp.33-39
• /
• 1997

Cardiac and antihypertensive effects of BMS-180448, a cardiac-selective ATP-sensitive potassium channel opener, and its newly synthesized derivatives KR-31281, KR-31282 and KR-31299 were evaluated in isolated perfused rat hearts (25 min global ischemia/30 min reperfusion) and conscious rats. Three new compounds $(10\;{\mu}M)$ induced positive inotropism as evidenced by increased LVDP (left ventricular developed pressure) and RPP (Rate-Pressure Product) in nonischemic rat heart. HR-31299 increased CF (coronary flow) and HR (heart rate) but the other two had no effects. KR-31282, KR-31281 and HR-31299 had a tendency to increase reperfusion LVDP and RPP compared with vehicle, while the latter two significantly reduced reperfusion EDP with a tendency to inclose TTC (time to contracture). All three KR-compounds had very weak effects on MBP and HR in conscious rats. These results indicate that KR-31281 and HR-31299 may have some cardioprotective effects, although weaker than BMS-180448, and their mode of action different from that of BMS-180448, despite the similarity in major structural moeity.

• Earthquakes and Structures
• /
• v.15 no.5
• /
• pp.487-498
• /
• 2018

Buckling-restrained braces are passive control devices with high level of energy dissipation ability. However, they suffer from low post-yield stiffness which makes them vulnerable to severe ground motions, especially near-field earthquakes. Among the several methods proposed to improve resistance of BRB frames, mega-brace configuration can be a solution to increase frame lateral strength and stiffness and improve distribution of forces to prevent large displacement in braces. Due to the limited number of research regarding the performance of such systems, the current paper aims to assess seismic performance of BRB frames with mega-bracing arrangement under near-field earthquakes via a detailed probabilistic framework. For this purpose, a group of multi-story mega-BRB frames were modelled by OpenSEES software platform. In the first part of the paper, simplified procedures including nonlinear pushover and Incremental Dynamic Analysis were conducted for performance evaluation. Two groups of near-fault seismic ground motions (Non-pulse and Pulse-like records) were considered for analyses to take into account the effects of record-to-record uncertainties, as well as forward directivity on the results. In the second part, seismic reliability analyses are conducted in the context of performance based earthquake engineering. Two widely-known EDP-based and IM-based probabilistic frameworks are employed to estimate collapse potential of the structures. Results show that all the structures can successfully tolerate near-field earthquakes with a high level of confidence level. Therefore, mega-bracing configuration can be an effective alternative to conventional BRB bracing to withstand near-field earthquakes.

• The Journal of the Acoustical Society of Korea
• /
• v.16 no.3
• /
• pp.18-25
• /
• 1997

This study describes a modified preemphasis formula, what we call energy-dependent preemphasis(EDP). This uses the normalized short-term energy of speech signal, with the assumption that the source characteristics of the glottal pulses and the radiation characteristics of the lips are approximately proportional to the energy of speech signal. Using this method, speech analyses, such as AR spectrum estimation, formant detection, are performed for nonstationary starting parts of 5 Korean single vowels. The results are compared with the conventional two preemphasis methods. We found that the proposed preemphasis gave enhanced spectral shapes and more accurate formant frequencies and avoided overlapping phenomenon of adjacent two formants.