• Title/Summary/Keyword: E-beam Process

Search Result 269, Processing Time 0.029 seconds

Surface Morphology and Electrical Property of PEMFC (Proton Exchange Membrane Fuel Cell) Bipolar Plates (고분자전해질 연료전지용 바이폴라 플레이트의 표면형상과 전기적 특성)

  • Song, Yon-Ho;Yun, Young-Hoon
    • Journal of the Korean Ceramic Society
    • /
    • v.45 no.3
    • /
    • pp.161-166
    • /
    • 2008
  • The multi-films of a metallic film and a transparent conducting oxide (TCO, indium-tin oxide, ITO) film were formed on the stainless steel 316 and 304 plates by a sputtering method and an E-beam method and then the external metallic region of the stainless steel bipolar plates was converted into the metal nitride films through an annealing process. The multi-film formed on the stainless steel bipolar plates showed the XRD patterns of the typical indium-tin oxide, the metallic phase and the metal substrate and the external nitride film. The XRD pattern of the thin film on the bipolar plates modified showed two metal nitride phases of CrN and $Cr_2N$ compound. Surface microstructural morphology of the multi-film deposited bipolar plates was observed by AFM and FE-SEM. The metal nitride film formed on the stainless steel bipolar plates represented a microstructural morphology of fine columnar grains with 10 nm diameter and 60nm length in FE-SEM images. The electrical resistivity of the stainless steel bipolar plates modified was evaluated.

Development of Independent BPM Control System Using Reflective Memory at PLS (포항가속기의 Reflective Memory를 이용한 독립형 BPM 제어시스템 개발)

  • Yoon, J.C.;Lee, J.W.;Lee, E.H.;Kang, H.S.
    • Proceedings of the KIEE Conference
    • /
    • 2008.07a
    • /
    • pp.1697-1698
    • /
    • 2008
  • PLS(Pohang Light Source) is 2.5 Gev synchrotron radiation source in Pohang, Korea, which is under operation since 1995. The hardware and software of the old BPM(Beam Position Monitor) data acquisition system for the PLS storage ring was completely upgraded to increase its performance and stability. The new BPM data acquisition system is based on VME-based EPICS (Experimental Physics and Instrument Control System) IOC system. We used 16-bit resolution analog-to-digital conversion board to digitize analog BPM signals. We developed a data average software to average raw BPM data using reflective memory board. We also developed device drivers for VME I/O boards used, IOC database for PV's(Process Variables). The new BPM data acquisition system is currently running for routine operation with good performance and stability. In this paper, we present the hardware and software of the new BPM data acquisition system DTL water skid cooling system and Resonant Control Cooling.

  • PDF

A Study on the Glow Discharge Characteristics of MgO thin film prepared by Unbalanced Magnetron Sputtering (불평형 마그네트론 스파터링에 의해 형성된 MgO 박막의 글로우 방전특성에 관한 연구)

  • Kim, Young-Kee;Park, Jung-Tae;Ko, Kwang-Sic;Kim, Gyu-Seup;Park, Chung-Hoo;Cho, Jung-Soo
    • Proceedings of the KIEE Conference
    • /
    • 1999.07e
    • /
    • pp.2236-2238
    • /
    • 1999
  • This paper deals with the surface glow discharge characteristics and some physical properties of MgO thin films prepared by RF unbalanced magnetron sputtering(UBMS) in surface discharge type AC PDP. The minimum discharge voltage is obtained for the sample of substrate holder bias voltage -10V. The main factors that improves the discharge characteristics by applied bias voltage is considered to be due to the morphology changes or crystal structure of the MgO thin film by ion bombardment during deposition process Moreover, the anti-sputtering characteristics of MgO thin film by UBMS is more excellent than that of balanced magnetron sputtering(BMS) and E-beam evaporation method.

  • PDF

Study on Fabrication of Highly Ordered Nano Master by Using Anodic Aluminum Oxidation (AAO를 이용한 나노 마스터 제작에 관한 연구)

  • Kwon, J.T.;Shin, H.G.;Seo, Y.H.;Kim, B.H.
    • Proceedings of the Korean Society for Technology of Plasticity Conference
    • /
    • 2007.10a
    • /
    • pp.162-165
    • /
    • 2007
  • AAO(Anodic Aluminum Oxidation) method has been known that it is practically useful for the fabrication of nano-structures and makes it possible to fabricate the highly ordered nano masters on large surface and even on the 2.5 or 3D surface at low cost comparing to the expensive e-beam lithography or the conventional silicon processing. In this study, by using the multi-step anodizing and etching processes, highly ordered nano patterned master with concave shapes was fabricated. By varying the processing parameters, such as initial matter and chemical conditions; electrical and thermal conditions; time scheduling; and so on, the size and the pitch of the nano pattern can be controlled. Consequently, various alumina/aluminum nano structures can be easily available in any size and shape by optimized anodic oxidation in various aqueous acids. In order to replicate nano patterned master, the resulting good filled uniform nano molded structure through electro-forming process shows the validity of the fabricated nano pattern masters.

  • PDF

Fabrication and Evaluation of the Flexible and Implantable Micro Electrode (생체 삽입형 유연한 마이크로 전극의 제작 및 평가)

  • Baek Ju-Yeoul;Kwon Gu-Han;Lee Sang-Woon;Lee Ky-Am;Lee Sang-Hoon
    • The Transactions of the Korean Institute of Electrical Engineers C
    • /
    • v.55 no.2
    • /
    • pp.93-99
    • /
    • 2006
  • In this paper, we fabricated and evaluated polydimethylsiloxane(PDMS)-based flexible and implantable micro electrodes. The electrode patterning was carried out with the photolithography and chemical etching process after e-beam evaporation of 100 ATi and 1000 A Au. The PDMS substrate was treated by oxygen plasma using reactive ion etching(RIE) system to improve the adhesiveness of PDMS and metal layers. The minimum line width of fabricated micro electrode was 20 $\mu$m. After finished patterning, we did packaging with PDMS and then brought up the electrode's part about 40 $\mu$m with gold electroplating. The Hank's balanced salt solution(HBSS) test was carried out for 6 month for endurance of fabricated micro electrode. We carried out in-vivo test for the evaluation of biocompatibility by implanting electrodes under the ICR mouse skin for 42 days.

Effect of Bias Voltage on the Micro Discharge Characteristic of MgO Thin Film Prepared by Unbalanced Magnetron Sputtering (불평형 마그네트론 스파터링에 의해 형성된 MgO 박막의 micro 방전에 미치는 bias 전압의 영향에 관한 연구)

  • Kim, Young-Kee;Kim, In-Sung;Jeong, Joo-Young;Cho, Jung-Soo;Park, Chung-Hoo
    • Proceedings of the KIEE Conference
    • /
    • 2000.07c
    • /
    • pp.2032-2034
    • /
    • 2000
  • The performance of ac plasma display panels (PDP) is influenced strongly by the surface glow discharge characteristics on the MgO thin films. This paper deals with the surface slew discharge characteristics and some physical properties of MgO thin films prepared by reactive RF planar unbalanced magnetron sputtering in connection with ac PDP. The samples prepared with the do bias voltage of -10V showed lower discharge voltage and lower erosion rate by ion bombardment than those samples prepared by conventional magnetron sputtering or E-beam evaporation. The main factor that improves the discharge characteristics by bias voltage is considered to be due to the morphology changes or crystal structure of the MgO thin film by ion bombardment during deposition process.

  • PDF

A Study on the Perfomance Analysis of Low Energy Cooling Systems in Office building (사무소건물의 에너지절약형 냉방시스템 성능분석에 관한 연구)

  • Park, Chang-Bong;Rhee, Eon-Gu
    • Journal of the Korean Solar Energy Society
    • /
    • v.30 no.6
    • /
    • pp.89-94
    • /
    • 2010
  • A large portion of the energy cost of a building is cooling and heating to maintain a comfortable indoor environment. Air conditioning is now one of the important parts in the building design, as increase in energy consumption and pollutant emission in energy conversion process. In this study, elements that affects the energy consumption of model building are identified and the perfomance analysis of the alternative a Low Energy Cooling Systems considering characteristics of model building and energy saving performance is analyzed. In this study, elements that affect the energy consumption of office building are identified and energy saving performance of the alternative air conditioning system is analyzed. As a result, applied to earn and suggest basic data for energy saving measures. In this study, EnergyPlus simulation program was used to evaluate the energy load when alternative Low Energy Cooling Systems are applied to the model building. The reliability of simulation program is verified by comparing actual energy load from operation data of building management office and predicted energy load using simulation program. For Low Energy Cooling System application which considers the purpose and characteristics of the building, reasonable and energy-saving air conditioning method obtained by analyzing energy consumption elements for each expected air conditioning methods is used to deduct result of this study.

Effective Interdiffusion of Co/Pd multilayers

  • Kim, Jai-Young;Jan E. Evetts
    • Journal of Magnetics
    • /
    • v.2 no.3
    • /
    • pp.86-92
    • /
    • 1997
  • An artificially modulated magnetic Co/Pd multilayer is one of the promising candidates for high density magneto-optic (MO) recording media in the wavelength of a blue laser beam, due to large Kerr rotation angle. However, since the Co/Pd multilayer is a non-equilibrium state in terms of free energy and MO recording is a kind of thermal recording which is conducted around Curie temperature (Tc) of the recording media, the assessment of the thermal stability in the Co/Pd multilayer is crucially important both for basic research and applications. As the parameter of the thermal stability in this research, effective interdiffusion coefficients (Deff) perpendicular to the interface of the Co/Pd multilayers are measured in terms of Ar sputtering pressure and heat treatment temperature. From the results of the research, we find out that the magnetic exchange energy between Co and Pd sublayers strongly affects Deff of the Co/Pd multilayers. This discovery will provide the understanding of the magnetic exchange energy in the effective interdiffusion process of a magnetic multilayer structure and suggest the operating temperature range for MO recording in the Co/Pd multilayer for the basic research and applications, respectively.

  • PDF

Effect of Low-Energy Electron Irradiation on DNA Damage by Cu2+ Ion

  • Noh, Hyung-Ah;Park, Yeunsoo;Cho, Hyuck
    • Journal of Radiation Protection and Research
    • /
    • v.42 no.1
    • /
    • pp.63-68
    • /
    • 2017
  • Background: The combined effect of the low energy electron (LEE) irradiation and $Cu^{2+}$ ion on DNA damage was investigated. Materials and Methods: Lyophilized pBR322 plasmid DNA films with various concentrations (1-15 mM) of $Cu^{2+}$ ion were independently irradiated by monochromatic LEEs with 5 eV. The types of DNA damage, single strand break (SSB) and double strand break (DSB), were separated and quantified by gel electrophoresis. Results and Discussion: Without electron irradiation, DNA damage was slightly increased with increasing Cu ion concentration via Fenton reaction. LEE-induced DNA damage, with no Cu ion, was only 6.6% via dissociative electron attachment (DEA) process. However, DNA damage was significantly increased through the combined effect of LEE-irradiation and Cu ion, except around 9 mM Cu ion. The possible pathways of DNA damage for each of these different cases were suggested. Conclusion: The combined effect of LEE-irradiation and Cu ion is likely to cause increasing dissociation after elevated transient negative ion state, resulting in the enhanced DNA damage. For the decrease of DNA damage at around 9-mM Cu ion, it is assumed to be related to the structural stabilization due to DNA inter- and intra-crosslinks via Cu ion.

The study of the relationships between the MgO crystal orientation and the conditions of deposition on AC-PDP (AC PDP의 MgO 결정방향성과 증착조건간의 상관관계에 관한 연구)

  • Jang, Yong-Min;Heo, Jeong-Eun;Kim, Duk-Won;Shin, Joong-Hong;Park, Chung-Hoo
    • Proceedings of the KIEE Conference
    • /
    • 2006.07c
    • /
    • pp.1523-1524
    • /
    • 2006
  • There arc several important issues in AC PDP researches such as cost reduction, reliability, and good image quality. The properties of MgO layer is thought to be one of the most important (actors that affects the panel reliability through the firing voltage variation. The MgO thin film mainly has (111), (200) and (220) crystal orientation. It is reported that (111)-oriented film helps decreasing the discharge voltage, and (200)-oriented film improves the misfiring on high temperature and the image sticking. In this study, we investigated the relations between the crystal orientation and e-beam evaporation process parameters such asdeposition rate, temperature of substrate, and distance between the target(MgO tablet) and the substrate.

  • PDF