• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2007년도 하계학술대회 논문집 Vol.8
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• pp.453-453
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• 2007

Electrodeless fluorescent lamp exhibit two modes of operation: a low density mode in which the power is capacitively coupled to the plasma and which is known as the E-mode, and a higher density mode which is an inductive discharge known as the H-mode. The transition between these two(E to H) mode exhibits hysteresis. It is observed that transition currents change at different frequencies and hysteresis exists not only between the starting and minimum maintaining currents of the electromagnetic mode (H mode) discharge but also between the starting and minimum maintaining currents of the electrostatic mode (E mode) discharge. Hysteresis effect can be important role in dimming system.

• 대한전기학회:학술대회논문집
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• 대한전기학회 2007년도 제38회 하계학술대회
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• pp.1560-1561
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• 2007

Electrodeless fluorescent lamp exhibit two modes of operation : a low density mode in which the power is capacitively coupled to the plasma and which is known as the E-mode, and a higher density mode which is an inductive discharge known as the H-mode. The transition between these two(E to H) mode exhibits hysteresis. It is observed that transition currents change at different frequencies and hysteresis exists not only between the starting and minimum maintaining currents of the electromagnetic mode (H mode) discharge but also between the starting and minimum maintaining currents of the electrostatic mode (E mode) discharge. Hysteresis effect can be important role in dimming system.

• KIEE International Transactions on Electrophysics and Applications
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• 제5C권3호
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• pp.124-130
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• 2005

In this paper, we designed a cylindrical type light source having an electromagnetic principle of inductively coupled plasma, and measured its electrical-optical properties. Using the transformer principle, an electrically equivalent circuit cylindrical type light source was analyzed. According to the parameters of electromagnetic induction, which were diameter of coil with cpO.3$\~$ 1.2mm, number of turns with 4$\~$ 12 turns, distance with 40$\~$ l20mm and RF power with 10$\~$ 150W, the electrical .md optical properties were measured. When the diameter of the coil was cp0.3mm, number of turns was 8 and distance was 40mm, and the maximum brightness of 29,730 cd/m$^{2}$ was shown with RF power l50W. The relationship between electromagnetic induction and plasma discharges was demonstrated using the mode transition from E-mode to H-mode

• 대한전기학회논문지:전기물성ㆍ응용부문C
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• 제53권1호
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• pp.20-23
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• 2004

In this paper, the emission properties of electrodeless fluorescent lamp were discussed using the inductively coupled plasma. To transmit the electromagnetic energy into the chamber, a RF power of 13.56 [MHz] was applied to the antenna and considering the Ar gas pressure and the RF electric power change, the emission spectrum, Ar I line, luminance were investigated. At this time, the input parameter for ICP RF plasma, Ar gas pressure and RF power were applied in the range of 10∼60 [mTorr], 10∼300 [W], respectively. From emission intensity and lumnance intensity results, the mode transition from E-mode to H-mode was observed. This implies that this method can be used to find an optimal RF power for efficient light illumination in an electrodeless fluorescent lamp.

• 한국전기전자재료학회논문지
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• 제18권8호
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• pp.772-778
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• 2005

In this paper, we designed the cylindrical type light source that had a electromagnetic principle of inductively coupled plasma, and measured its electrical-optical properties. Using the principle of transformer, electrically equivalent circuit of cylindrical type light source was analyzed. According to the parameters of electromagnetic induction which were diameter of coil with $0.3\~1.2\;mm{\Phi}$, number of turns with $4\~12$ turns, distance with $40\~120$ mm and RF power with $10\~150$ W, the electrical and optical properties were measured. When diameter of coil was $0.3\;mm{\Phi}$, number of turns was 8 turns and distance was 40 mm, the highest brightness of 29,730 $cd/m^2$ was shown with RF power 150 W. The relationship between electromagnetic induction and plasma discharges was shown by mode transition from E-mode to H-mode.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2006년도 추계학술대회 논문집 광주전남지부
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• pp.81-86
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• 2006

In this paper, we designed the cylindrical type light source that had a electromagnetic principle of inductively coupled plasma, and measured its electrical-optical properties. Using the principle of transformer, electrically equivalent circuit of cylindrical type light source was analyzed. According to the parameters of electromagnetic induction which were diameter of coil with 0.3~1.2 mm, number of turns with 4~12 turns, distance with 40~120 mm and RF power with 10~150 W, the electrical and optical properties were measured. When diameter of coil was 0.3 mm, number of turns was 8 turns and distance was 40 mm, the highest brightness of 29,730 $cd/m^2$ was shown with RF power 150 W. The relationship between electromagnetic induction and plasma discharges was shown by mode transition from E-mode to H-mode.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2002년도 제23회 학술발표회 초록집
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• pp.198-198
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• 2002

• JSTS:Journal of Semiconductor Technology and Science
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• 제13권4호
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• pp.387-394
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• 2013

As the feature size of integrated circuits continues to decrease, the challenge of achieving an oxidation-free exposed layer after photoresist (PR) stripping is becoming a critical issue for semiconductor device fabrication. In this article, the hydrogen plasma characteristics in direct plasma and the PR stripping rate in remote plasma were studied using a $120{\Phi}$ cylindrical inductively coupled plasma source. E mode, H mode and E-H mode transitions were observed, which were defined by matching the $V_{rms}$ and total impedance. In addition, the dependence of the E-H mode transition on pressure was examined and the corresponding plasma instability regions were identified. The plasma density and electron temperature increased gradually under the same process conditions. In contrast, the PR stripping rate decreased with increasing proportion of $H_2$ gas in mixed $H_2/N_2$ plasma. The decrease in concentration of reactive radicals for the removal of PR with increasing $H_2$ gas flow rate suggests that NH radicals have a dominant effect as the main volatile product.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2009년도 제38회 동계학술대회 초록집
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• pp.438-438
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• 2010

The abnormal behavior of the argon metastable density during the E-H mode transition in argon ICP discharge was investigated. Lots of investigations including global models expected that during and after the mode transition of ICP discharge, the density of metastable increases with applied rf power (i.e. electron density). However, recent direct measurement of metastable density revealed that the metastable density of argon decreases with the applied power during and after the mode transition. This result may not be explained by the previous global model which is based on the assumption of the Maxwellian electron energy distribution function (EEDF). In this paper, to explain this abnormal behavior with simple manners, a simple global model taking account of the effect of the non-Maxwellian EEDFs incorporating into a set of coupled rate equations is proposed. The result showed that the calculated metastable density taking account of non-Maxwellian EEDF and its evolution during the transition has an abnormal behavior with electron density and is in good agreement with the previous measurement results, indicating the close coupling of electron kinetics and the behavior of metastable density. The proposed simple model is expected to provide qualitative kinetic insight to understand the behavior of the metastable density in various plasma discharges which typically exhibit non-Maxwellian distribution.

• 한국전자파학회논문지
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• 제24권5호
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• pp.502-507
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• 2013

본 논문에서는 개구면이 큰 기존 원형 이중 모드 혼의 E/H 평면 방사 패턴 대칭성 향상을 위한 변형된 개구면을 갖는 원형 이중 모드 혼을 제안한다. 제안된 안테나는 급전부, 모드 발생부, 위상정합부로 구성되며, 이 중 위상정합부의 원형 개구면은 E/H 평면의 방사 패턴 대칭성 향상을 위해 타원형 혹은 직사각형으로 변이된 형상을 갖는다. 제안된 안테나와 기존 원형 이중 모드 혼의 성능 비교를 위해 15 GHz에서 동작하는 기존 원형 이중모드 혼과 직사각형 개구면을 갖는 원형 이중 모드 혼을 제작하고 분석하였다. 측정 결과, f/d 비가 1인 반사판 안테나의 최대 개구 효율을 위한 급전 혼의 빔 폭인 -11 dB 빔 폭($53^{\circ}$) 내에서 기존 원형 이중 모드 혼의 경우 3.394 dB의 E/H 평면 방사 패턴 차이를 갖는 반면, 제안된 안테나는 오직 0.539 dB 차이를 가진다.