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Optical E-H Transition Properties of Inductively Coupled Plasma with Ar Gas Pressure and RF Pourer  

허인성 (원광대학교 전기전자 및 정보공학부)
조주웅 (원광대학교 전기전자 및 정보공학부)
이영환 (원광대학교 전기전자 및 정보공학부)
김광수 (원광대학교 전기전자 및 정보공학부)
최용성 (원광대학교 전기전자 및 정보공학부)
박대희 (원광대학교 전기전자 및 정보공학부)
Publication Information
The Transactions of the Korean Institute of Electrical Engineers C / v.53, no.1, 2004 , pp. 20-23 More about this Journal
Abstract
In this paper, the emission properties of electrodeless fluorescent lamp were discussed using the inductively coupled plasma. To transmit the electromagnetic energy into the chamber, a RF power of 13.56 [MHz] was applied to the antenna and considering the Ar gas pressure and the RF electric power change, the emission spectrum, Ar I line, luminance were investigated. At this time, the input parameter for ICP RF plasma, Ar gas pressure and RF power were applied in the range of 10∼60 [mTorr], 10∼300 [W], respectively. From emission intensity and lumnance intensity results, the mode transition from E-mode to H-mode was observed. This implies that this method can be used to find an optimal RF power for efficient light illumination in an electrodeless fluorescent lamp.
Keywords
Electrodeless fluorescent lamp; Inductively coupled plasma; RF power; Emission intensity;
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