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E-H Mode Transition Properties of Cylindrical ICP Hg:Kr  

Yang Jong-Kyung (Dept. of Electrical materials Engineering, Wonkwang University)
Pack Kwang-Hyun (Dept. of Electrical materials Engineering, Wonkwang University)
Lee Jong-Chan (Kumho Electric Inc)
Park Dae-Hee (Dept. of Electrical and Electronic Engineering, Wonkwang University)
Publication Information
KIEE International Transactions on Electrophysics and Applications / v.5C, no.3, 2005 , pp. 124-130 More about this Journal
Abstract
In this paper, we designed a cylindrical type light source having an electromagnetic principle of inductively coupled plasma, and measured its electrical-optical properties. Using the transformer principle, an electrically equivalent circuit cylindrical type light source was analyzed. According to the parameters of electromagnetic induction, which were diameter of coil with cpO.3$\~$ 1.2mm, number of turns with 4$\~$ 12 turns, distance with 40$\~$ l20mm and RF power with 10$\~$ 150W, the electrical .md optical properties were measured. When the diameter of the coil was cp0.3mm, number of turns was 8 and distance was 40mm, and the maximum brightness of 29,730 cd/m$^{2}$ was shown with RF power l50W. The relationship between electromagnetic induction and plasma discharges was demonstrated using the mode transition from E-mode to H-mode
Keywords
E-H mode transition; ICP; Inductively coupled plasma;
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