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Formation of Plasma Damage-Free ITO Thin Flims on the InGaN/GaN based LEDs by Using Advanced Sputtering

  • Park, Min Joo;Son, Kwang Jeong;Kwak, Joon Seop
    • Proceedings of the Korean Vacuum Society Conference
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    • 2013.02a
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    • pp.312-312
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    • 2013
  • GaN based light emitting diodes (LEDs) are important devices that are being used extensively in our daily life. For example, these devices are used in traffic light lamps, outdoor full-color displays and backlight of liquid crystal display panels. To realize high-brightness GaN based LEDs for solid-state lighting applications, the development of p-type ohmic electrodes that have low contact resistivity, high optical transmittance and high refractive index is essential. To this effect, indiumtin oxide (ITO) have been investigated for LEDs. Among the transparent electrodes for LEDs, ITO has been one of the promising electrodes on p-GaN layers owing to its excellent properties in optical, electrical conductivity, substrate adhesion, hardness, and chemical inertness. Sputtering and e-beam evaporation techniques are the most commonly used deposition methods. Commonly, ITO films on p-GaN by sputtering have better transmittance and resistivity than ITO films on p-GaN by e-bam evaporation. However, ITO films on p-GaN by sputtering have higher specific contact resistance, it has been demonstrated that this is due to possible plasma damage on the p-GaN in the sputtering process. In this paper, we have investigated the advanced sputtering using plasma damage-free p-electrode. Prepared the ITO films on the GaN based LEDs by e-beam evaporation, normal sputtering and advanced sputtering. The ITO films on GaN based LEDs by sputtering showed better transmittance and sheets resistance than ITO films on the GaN based LEDs by e-beam evaporation. Finally, fabricated of GaN based LEDs by using advanced sputtering. And compared the electrical properties (measurement by using C-TLM) and structural properties (HR-TEM and FE-SEM) of ITO films on GaN based LEDs produced by e-beam evaporation, normal sputtering and advanced sputtering. As a result, It is expected to form plasma damage free-electrode, and better light output power and break down voltage than LEDs by e-beam evaporation and normal sputter.

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Copolymerization of Ethylene and Cycloolefin with Metallocene Catalyst: I. Effect of Catalyst (메탈로센 촉매를 애용한 에틸렌과 시클로올레핀의 공중합 : I. 촉매의 영향)

  • 이동호;정희경;김우식;민경은;박이순
    • Polymer(Korea)
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    • v.24 no.4
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    • pp.445-452
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    • 2000
  • The copolymerization of ethylene (E) and norbornene (N) was examined by using various metallocene catalysts and modified-MAO(MMAO) cocatalyst. For $C_2$-symmetry catalysts such as rac-Et(Ind)$_2$ZrC $l_2$, M $e_2$Si(Ind)$_2$ZrC $l_2$, M $e_2$Si(Cp)$_2$ZrC $l_2$ and Cs-symmetrical iPr(FluCp)ZrC $l_2$ as well as CGC and di-bridged zirconocene, the effects of catalyst structure and [N]/[E] feed ratio on catalyst activity, thermal property and [N] content of copolymer (COC) was investigated. For rac-Et(Ind)$_2$ZrC $l_2$ catalyst of a constant [N]/[E] feed ratio, the appropriate conditions of [Al]/[Zr] mole ratio, polymerization temperature and cocatalyst structure were found to be 3000, 4$0^{\circ}C$, MMAO cocatalyst, respectively. As [N]/[E] feed ratio increased, the incorporation of norbornene to copolymer increased while, the activity of catalyst decreased except for iPr(FluCp)ZrC $l_2$ With consideration of catalyst activity as well as N content, it was found that rac-Et(Ind)$_2$ZrC $l_2$/MMAO system exhibited relatively high activity and controllable $T_{g}$. Monomer reactivity ratio was determined by Kelen-Tudos method..

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Effect of Various Interlayer Deposition on Room Temperature and High Temperature Properties of CrAlN Coatings (다양한 중간층 증착이 CrAlN 코팅의 상온 및 고온 특성에 미치는 효과에 관한 연구)

  • Kim, Hoe-Geun;Ra, Jeong-Hyeon;Lee, Sang-Yul
    • Proceedings of the Korean Institute of Surface Engineering Conference
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    • 2017.05a
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    • pp.143-143
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    • 2017
  • CrAlN 코팅은 높은 경도, 낮은 표면 조도 등의 상온에서의 우수한 기계적 특성 이외에 고온에서 안정한 합금상의 형성으로 인하여 우수한 내산화성 및 내열성을 보유하여 공구 코팅으로의 적용 가능성이 크다. 그러나 최근 공구사용 환경의 가혹화로 인하여 코팅의 내마모성 및 내열성 등의 물성 향상을 통한 공구의 수명 향상이 필요시 되고 있으며, 다양한 코팅 물질을 활용하여 다층 코팅을 합성함으로써 난삭재용 공구 코팅의 물성을 높이는 연구들이 진행되고 있다. 본 연구에서는 CrAlN 코팅과 WC-Co 6wt.% 모재 사이에 CrZrN, CrN, CrN/CrZrSiN 등의 중간층을 합성하여 CrAlN 코팅의 상온 및 고온 특성을 향상시키는 연구가 진행되었다. 합성된 코팅의 구조 및 물성을 분석하기 위해 field emission scanning electron microscopy(FE-SEM), nano-indentation, atomic force microscopy(AFM) 및 ball-on-disk wear tester를 사용하였다. 코팅의 고온 특성을 확인하기 위해 코팅을 furnace에 넣어 공기중에서 30분 동안 annealing 한 후에 nano-indentation을 사용하여 경도를 측정하였고, $500^{\circ}C$ annealing 코팅의 표면 조도 분석 및 $500^{\circ}C$에서 마찰마모시험을 실시하였다. CrAlN 코팅의 상온 특성을 분석한 결과, 모든 코팅의 경도(35.5-36.2 GPa)와 탄성계수(424.3-429.2 GPa)는 중간층의 종류에 상관없이 비슷한 값을 보인 것으로 확인됐다. 그러나, CrN/CrZrSiN 중간층을 증착한 CrAlN 코팅의 마찰계수는 0.33로 CrZrN 중간층을 증착한 CrAlN 코팅의 마찰계수(0.41)에 비해 향상된 값 보였으며, 코팅의 마모율 및 마모폭도 비슷한 경향을 보인 것으로 보아 코팅의 내마모성이 향상된 것으로 판단된다. 이것은 중간층의 H/E ratio가 코팅의 내마모성에 미치는 영향에 의한 결과로 사료된다. H/E ratio는 파단시의 최대 탄성 변형율로써, 모재/중간층/코팅의 H/E ratio 구배에 따라 코팅 내의 응력의 완화 정도가 변하게 된다. WC 모재 (H/E=0.040)와 CrAlN 코팅(H/E=0.089) 사이에서 CrN, CrZrSiN 중간층의 H/E ratio는 각각 0.076, 0.083 으로 모재/중간층/코팅의 H/E ratio 구배가 점차 증가함을 확인 할 수 있었고, 일정 응력이 지속적으로 가해지면서 진행되는 마모시험중에 CrN과 CrZrSiN 중간층이 WC와 CrAlN 코팅 사이에서 코팅 내부의 응력구배를 완화시키는 역할을 함으로써 CrAlN 코팅의 내마모성이 향상된 것으로 판단된다. 내열성 시험 결과, CrN/CrZrSiN 중간층을 증착한 코팅은 $1,000^{\circ}C$까지 약 28GPa의 높은 경도를 유지한 것으로 확인 되었다. $500^{\circ}C$ annealing 후 진행된 표면 조도와 마모시험 결과, 모든 코팅의 조도 값 및 마찰계수는 상온 값에 비해 증가하였으며 CrN/CrZrSiN 중간층을 증착한 CrAlN 코팅의 변화량이 가장 낮은 값을 보였다. 이는 CrZrSiN 중간층 내에 존재하는 $SiN_x$ 비정질상이 고온 annealing시에 산소 차폐막 역할을 하여, 코팅내의 잔류 산소에 의한 산화작용을 효과적으로 방지함으로써 코팅의 고온 특성이 향상된 것으로 판단된다.

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Measurement and Prediction of Autoignition Temperature of n-Butanol + n-Decane System (n-Butanol과 n-Decane계의 최소자연발화온도 측정 및 예측)

  • Ha, Dong-Myeong;Hong, Soo-Kang
    • Fire Science and Engineering
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    • v.25 no.6
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    • pp.184-189
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    • 2011
  • This study measured the AITs of n-butanol + n-decane system from ignition delay time (time lag) by using ASTM E659 apparatus. The AITs of n-butanol and n-decane which constituted binary system were $340^{\circ}C$ and $212^{\circ}C$, respectively. The experimental AITs of n-butanol + n-decane system were a good agreement with the calculated AITs by the proposed equations with a few A.A.D. (average absolute deviation).

A Case Study on an Introduction and the Use of eCRM of the Dairy Industry N Company (유가공 업체 N사(社)의 eCRM 도입과 활용 사례 연구)

  • Baek, Ju-Hyun;Kim, Tai-Young;Lee, Young-Su
    • Information Systems Review
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    • v.11 no.1
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    • pp.133-144
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    • 2009
  • Today, eCRM has been attention as an enterprise information system that systematically manages and utilizes the eCRM customer information visiting Internet home page. On this paper, the case study of N company Korea's leading manufacturers of the dairy industry is been application research in the practices of using optimization tools for analysis of customer information and marketing activities by the introduction of eCRM and doing weblogs analysis. This research is a case study on an introduction and the use of eCRM solutions in dairy industry company. In addition, of the scope and effectiveness for use introduced eCRM explain.

MOMENT CONVERGENCE RATES OF LIL FOR NEGATIVELY ASSOCIATED SEQUENCES

  • Fu, Ke-Ang;Hu, Li-Hua
    • Journal of the Korean Mathematical Society
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    • v.47 no.2
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    • pp.263-275
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    • 2010
  • Let {$X_n;n\;\geq\;1$} be a strictly stationary sequence of negatively associated random variables with mean zero and finite variance. Set $S_n\;=\;{\sum}^n_{k=1}X_k$, $M_n\;=\;max_{k{\leq}n}|S_k|$, $n\;{\geq}\;1$. Suppose $\sigma^2\;=\;EX^2_1+2{\sum}^\infty_{k=2}EX_1X_k$ (0 < $\sigma$ < $\infty$). We prove that for any b > -1/2, if $E|X|^{2+\delta}$(0<$\delta$$\leq$1), then $$lim\limits_{\varepsilon\searrow0}\varepsilon^{2b+1}\sum^{\infty}_{n=1}\frac{(loglogn)^{b-1/2}}{n^{3/2}logn}E\{M_n-\sigma\varepsilon\sqrt{2nloglogn}\}_+=\frac{2^{-1/2-b}{\sigma}E|N|^{2(b+1)}}{(b+1)(2b+1)}\sum^{\infty}_{k=0}\frac{(-1)^k}{(2k+1)^{2(b+1)}}$$ and for any b > -1/2, $$lim\limits_{\varepsilon\nearrow\infty}\varepsilon^{-2(b+1)}\sum^{\infty}_{n=1}\frac{(loglogn)^b}{n^{3/2}logn}E\{\sigma\varepsilon\sqrt{\frac{\pi^2n}{8loglogn}}-M_n\}_+=\frac{\Gamma(b+1/2)}{\sqrt{2}(b+1)}\sum^{\infty}_{k=0}\frac{(-1)^k}{(2k+1)^{2b+2'}}$$, where $\Gamma(\cdot)$ is the Gamma function and N stands for the standard normal random variable.

Assessment of In Vitro Oocyte Maturation in Two Gobiid Fish Species, Chasmichthys dolichognathus and Tridentiger trigonocephalus after Exposure to Benzo[a]pyrene

  • Hwang, In-Joon;Baek, Hea-Ja
    • Development and Reproduction
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    • v.15 no.3
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    • pp.223-230
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    • 2011
  • Polycyclic aromatic hydrocarbons (PAHs) are ubiquitous environmental contaminants derived from incomplete combustion of carbons and crude oil. In this study, we investigated the effects of benzo[a]pyrene (B[a]P), a representative PAHs on in vitro sex steroid hormone production and germinal vesicle breakdown (GVBD) using isolated oocytes of longchin goby (Chasmichthys dolichognathus) and chameleon goby (Tridentiger trigonocephalus). Oocytes in diameters of 0.8-0.9 (end vitellogenic stage) and 0.9-1.0 mm (germinal vesicle migratory stage) from longchin goby and 0.5 mm (fully vitellogenic stage) from chameleon goby were used. In GVBD assay, B[a]P at 10 nM stimulated GVBD in the oocytes of 0.8-0.9 mm from longchin goby. B[a]P at 1 nM stimulated GVBD in the oocytes with diameter 0.5 mm from chameleon goby. In steroid production from oocytes of longchin goby, B[a]P at 100 nM decreased testosterone (T) production, B[a]P at 1,000 nM increased estraiol-17 (J (E2) production and 10 and 100 nM increased $17,20{\beta}$-dihydroxy-4-pregnen-3-one ($17{\alpha}20{\beta}P$) production in the oocytes with diameter 0.8-0.9 mm. B[a]P at 1,000 nM increased E2 production, 100 and 1,000 nM increased $17{\alpha}20{\beta}P$ production in the oocytes with diameter 0.9-1.0 mm. In steroid production of oocytes from chameleon goby, B[a]P at 1,000 nM increased $E_2$ production. B[a]P at 10 nM increased $17{\alpha}20{\beta}P$ production. In the ratio of $E_2$ to T ($E_2$/T), B[a]P at 100 and 1,000 nM increased $E_2$/T in the oocytes of longchin goby. B[a]P at 100 nM also increased $E_2$/T in the oocytes of chameleon goby. Taken together, these results suggest that B[a]P have not only weak estrogenic effects but progestogenic effects on oocyte maturation.

Evaluation and Application of QUAL2E and QUAL2K Models in Anyang Stream (안양천에서 QUAL2E와 QUAL2K 모델의 적용 및 평가)

  • Jung, Sung-Soo;Kim, Kyung-Sub
    • Journal of Korean Society of Environmental Engineers
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    • v.30 no.5
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    • pp.544-551
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    • 2008
  • QUAL2K enhanced QUAL2E and applied in real fields efficiently incorporates denitrification process, sediment-water interaction process, bottom algae and detritus. Also, the CBOD of QUAL2K is divided into two real parts, one is slow CBOD(sCBOD) and another is fast CBOD(fCBOD). The simulation results of QUAL2E and QUAL2K models in Anyang Stream were compared and analyzed in water quality constituents of DO, BOD, Org-N, NH$_3$-N, NO$_3$-N, Org-P, Dis-P and Chl-a respectively. The similar results were shown in Org-N, NH$_3$-N, Org-P and Chl-a both QUAL2K and QUAL2E models. But the different results were revealed in DO, BOD, Dis-P and NO$_3$-N by the influence of new incorporating processes. DO was shown relatively low values in the effect of bottom algae. BOD which is influenced by particulate organic matter was revealed high values. NO$_3$-N was closed to the real values by the two processes of denitrification and sediment-water interaction. To evaluate the running results of QUAL2K and QUAL2E models, a simple statistical analysis was conducted. According to the statistical analysis, QUAL2K represented less relative error and coefficient of variation than QUAL2E in almost all of constituents. It was found that QUAL2K, which simulates the water quality more realistically, can be applied to control and manage the water problems of river or river-run reservoir effectively.

AN ACTION OF A GALOIS GROUP ON A TENSOR PRODUCT

  • Hwang, Yoon-Sung
    • Communications of the Korean Mathematical Society
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    • v.20 no.4
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    • pp.645-648
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    • 2005
  • Let K be a Galois extension of a field F with G = Gal(K/F). Let L be an extension of F such that $K\;{\otimes}_F\;L\;=\; N_1\;{\oplus}N_2\;{\oplus}{\cdots}{\oplus}N_k$ with corresponding primitive idempotents $e_1,\;e_2,{\cdots},e_k$, where Ni's are fields. Then G acts on $\{e_1,\;e_2,{\cdots},e_k\}$ transitively and $Gal(N_1/K)\;{\cong}\;\{\sigma\;{\in}\;G\;/\;{\sigma}(e_1)\;=\;e_1\}$. And, let R be a commutative F-algebra, and let P be a prime ideal of R. Let T = $K\;{\otimes}_F\;R$, and suppose there are only finitely many prime ideals $Q_1,\;Q_2,{\cdots},Q_k$ of T with $Q_i\;{\cap}\;R\;=\;P$. Then G acts transitively on $\{Q_1,\;Q_2,{\cdots},Q_k\},\;and\;Gal(qf(T/Q_1)/qf(R/P))\;{\cong}\;\{\sigma{\in}\;G/\;{\sigma}-(Q_1)\;=\;Q_1\}$ where qf($T/Q_1$) is the quotient field of $T/Q_1$.